A visual correction device for a chip and a chip testing apparatus

Abstract

The utility model provides a kind of visual correction device and chip testing equipment of chip, it is related to chip testing technical field.The utility model discloses the righting piece of correction mechanism has the righting hole of clamping part and along its axial penetration, clamping part is used to frame the outer periphery of the chip to be measured, visual assembly is installed on support, and coaxially with righting hole setting, for obtaining the position information of the chip to be measured.Correction assembly is installed on support, and it includes no core driving device, no core driving device includes the stator and the mover of relative cooperation arrangement, the mover is connected with righting piece, and it is set to controlledly move relative to stator, to drive righting piece to move to target position, to correct the position of the chip to be measured.The above technical scheme adopts no core driving device, and only uses one stator, the position correction of the chip to be measured is realized by the movement of the mover, relative to the scheme using servo motor, the size of visual correction device can be reduced, meet small space installation demand.

Description

Technical Field

[0001] This utility model relates to the field of chip testing technology, and in particular to a chip visual correction device and chip testing equipment. Background Technology

[0002] Currently, after chip manufacturing is completed, electrical performance testing is required. To improve testing efficiency, fully automated or semi-automated testing equipment is typically used. Before testing, the chip needs to be moved between multiple workstations. Since the chip's position changes during this process, a vision correction device is needed to correct the chip's position to ensure accuracy and efficiency in testing, preventing misalignment from affecting normal testing.

[0003] Existing vision correction devices generally use multiple servo motors as drive sources to drive a slide to move the chip in multiple directions, thereby correcting the chip's position. Such vision correction devices have the problem of being large in size and occupying a lot of space, so there is an urgent need to design a smaller vision correction device. Utility Model Content

[0004] One objective of this invention is to provide a chip-based vision correction device that solves the technical problem of large size in existing vision correction devices.

[0005] A further objective of this invention is to improve the accuracy of chip correction.

[0006] Another objective of this invention is to provide a chip testing device having the aforementioned visual correction device.

[0007] Specifically, this utility model provides a vision correction device for a chip, including a support and at least one correction mechanism, each of the correction mechanisms comprising: A aligning component has a locking portion and an aligning hole extending along its axial direction, the locking portion being used to frame the outer periphery of the chip under test; A vision component is mounted on the bracket, and the optical axis of the vision component is coaxially arranged with the alignment hole of the alignment member, for acquiring the position information of the chip under test; The correction assembly is mounted on the bracket and includes a coreless drive device. The coreless drive device includes a stator and a mover arranged in a relatively cooperating manner. The mover is connected to the alignment member and is configured to move in a controlled manner relative to the stator to drive the alignment member to a target position, thereby correcting the position of the chip under test.

[0008] Optionally, the bracket includes a first mounting plate arranged horizontally, and the correction assembly further includes: A pair of spaced-apart first slide rails are mounted on the first mounting plate and extend along a first direction; A first sliding platform is slidably mounted on the first slide rail and connected to the alignment member and the mover. The first sliding platform is configured to move along the first slide rail under the drive of the coreless drive device, so as to drive the alignment member to move along the first direction, thereby adjusting the position of the chip under test in the first direction.

[0009] Optionally, the coreless drive device includes: The first coreless motor includes a first stator and a first mover. The first stator is mounted on the first mounting plate along the first direction. The first mover is connected to the first sliding platform and moves in a controlled manner along the first stator to drive the first sliding platform to move along the first slide rail.

[0010] Optionally, the corrective component further includes: A pair of spaced-apart second slide rails are mounted on the first sliding platform and extend along a second direction, which is perpendicular to the first direction; The second sliding platform is slidably mounted on the second slide rail and connected to the alignment member and the mover. The second sliding platform is configured to move along the second slide rail under the drive of the coreless drive device, so as to drive the alignment member to move along the second direction, thereby adjusting the position of the chip under test in the second direction.

[0011] Optionally, the coreless drive device further includes: The second coreless motor includes a second stator and a second mover. The second stator is mounted on the first mounting plate along the second direction. The second mover is connected to the second sliding platform and moves in a controlled manner along the second stator to drive the second sliding platform to move along the second slide rail.

[0012] Optionally, the corrective component further includes: A rotating component is sleeved on the adjusting component and connected to the adjusting component and the moving element; A bearing is installed between the rotating component and the second sliding platform; The rotating component is configured to rotate relative to the second sliding platform under the drive of the coreless driving device, so as to drive the alignment component to rotate, thereby adjusting the rotation angle of the chip under test in the horizontal direction. The coreless drive device further includes: The third coreless motor includes a third stator and a third rotor. The third stator is mounted on the second sliding platform along the first direction. The third rotor is connected to the rotating component and rotates in a controlled manner relative to the third stator to drive the rotating component to rotate.

[0013] Optionally, the adjusting member has an opening communicating with the adjusting hole, and the vision correction device further includes: An air blowing device, connected to the opening, is used to blow air into the alignment hole.

[0014] Optionally, the corrective mechanism further includes: The first grating ruler is installed on the first sliding platform and is used to measure the displacement of the first sliding platform; The second grating ruler is installed at the second sliding platform and is used to measure the displacement of the second sliding platform; A third grating ruler is installed at the rotating component to measure the rotation angle of the rotating component.

[0015] Optionally, the bracket further includes a second mounting plate arranged vertically, and the vision correction device further includes: The substrate is arranged vertically. A pair of third slide rails are vertically mounted on the base plate and slidably connected to the second mounting plate; A drive unit, connected to the second mounting plate, is configured to controllably drive the bracket to move vertically such that the snap-fit ​​portion frames the chip under test.

[0016] In particular, this utility model also provides a chip testing device, including the aforementioned visual correction device.

[0017] In this invention, the alignment mechanism has a locking part and an alignment hole extending along its axial direction. The locking part frames the outer periphery of the chip under test. The vision component is mounted on a bracket and coaxially arranged with the alignment hole to acquire the position information of the chip under test. The alignment component is mounted on the bracket and includes a coreless drive device. The coreless drive device includes a stator and a mover arranged in a relatively coordinated manner. The mover is connected to the alignment component and is configured to move in a controlled manner relative to the stator to drive the alignment component to the target position, thereby correcting the position of the chip under test. The above technical solution uses a coreless drive device and only one stator. The position correction of the chip under test is achieved by the movement of the mover. Compared with the prior art that uses a servo motor, the size of the vision correction device can be reduced, meeting the installation requirements of small spaces.

[0018] Furthermore, the correction mechanism in this invention also includes a first grating ruler, a second grating ruler, and a third grating ruler. The first grating ruler is installed at the first sliding platform to measure the displacement of the first sliding platform. The second grating ruler is installed at the second sliding platform to measure the displacement of the second sliding platform. The third grating ruler is installed at the rotating component to measure the rotation angle of the rotating component. The above technical solution uses multiple grating rulers to measure the displacement and rotation angle, which can improve the accuracy of the correction of the chip under test.

[0019] The above and other objects, advantages and features of this utility model will become more apparent to those skilled in the art from the following detailed description of specific embodiments of this utility model in conjunction with the accompanying drawings. Attached Figure Description

[0020] The following sections will describe some specific embodiments of the present invention in a detailed manner by way of example and not limitation, with reference to the accompanying drawings. The same reference numerals in the drawings denote the same or similar parts or components. Those skilled in the art should understand that these drawings are not necessarily drawn to scale. In the drawings: Figure 1 This is a schematic structural diagram of a vision correction device according to an embodiment of the present invention, taken at one angle. Figure 2 yes Figure 1 A schematic structural diagram of the correction components of the visual correction device shown; Figure 3 This is a schematic structure of the snap-fit ​​portion of the alignment component according to an embodiment of the present utility model; Figure 4 This is a schematic cross-sectional view of a vision correction device according to an embodiment of the present invention; Figure 5 This is a schematic cross-sectional view of a vision correction device according to another embodiment of the present invention; Figure 6 This is a schematic structural diagram of a vision correction device according to one embodiment of the present invention from another angle; Figure 7 yes Figure 6 A schematic enlarged view of part A.

[0021] Figure label: 100-Visual correction device, 10-Bracket, 20-Visual component, 30-Alignment component, 40-Correction component, 50-Base plate, 60-Third slide rail, 70-Driver, 41-First coreless motor, 411-First stator, 412-First mover, 42-First connecting plate, 43-Second coreless motor, 431-Second stator, 432-Second mover, 44-Second connecting plate, 45-Third coreless motor, 451-Third stator, 452-Third mover, 46-Third connecting plate, 47-Rotating component, 31 - Snap-fit ​​part, 32- Alignment hole, 33- Opening, 11- First mounting plate, 12- Second mounting plate, 481- First sliding platform, 482- Second sliding platform, 483- Second slide rail, 484- Bearing, 485- First slide rail, 81- First grating ruler, 811- First grating reading head, 812- First scale grating, 82- Second grating ruler, 821- Second grating reading head, 822- Second scale grating, 83- Third grating ruler, 831- Third grating reading head, 832- Third scale grating, 90- Air nozzle. Detailed Implementation

[0022] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain this utility model, and should not be construed as limiting this utility model.

[0023] In the description of this utility model, it should be understood that the terms "upper" and "lower" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0024] The terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature, that is, include one or more of that feature. In the description of this utility model, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified. When a feature "includes or contains" one or more of the features it encompasses, unless otherwise specifically described, this indicates that other features are not excluded and may be further included.

[0025] Unless otherwise expressly specified and limited, the terms "connection," "installation," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art should be able to understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0026] Unless otherwise specified, all terms (including technical and scientific terms) used in the description of this embodiment have the same meaning as commonly understood by one of ordinary skill in the art to which this application pertains. Figure 1 This is a schematic structural diagram of a vision correction device 100 according to an embodiment of the present invention, taken at one angle. Figure 2 yes Figure 1 A schematic structural diagram of the correction component 40 of the visual correction device 100 shown. Figure 3 This is a schematic structure of the locking portion 31 of the adjusting member 30 according to an embodiment of the present utility model.

[0027] like Figures 1 to 3 As shown, in one specific embodiment, the chip vision correction device 100 includes a support 10 and at least one correction mechanism. Each correction mechanism includes a aligning member 30, a vision component 20, and a correction component 40. The aligning member 30 has a locking portion 31 and a correction hole 32 extending along its axial direction. The locking portion 31 is used to frame the outer periphery of the chip under test. The vision component 20 is mounted on the support 10, and the optical axis of the vision component 20 is coaxially arranged with the correction hole 32 of the aligning member 30 to acquire the position information of the chip under test. The correction component 40 is mounted on the support 10 and includes a coreless drive device. The coreless drive device includes a stator and a mover arranged in a relatively mating manner. The mover is connected to the aligning member 30 and is configured to move in a controlled manner relative to the stator to drive the aligning member 30 to a target position, thereby correcting the position of the chip under test. Here, the chip under test is placed on a support platform, and the aligning member is located above the support platform, framing the outer periphery of the chip under test from above.

[0028] This embodiment employs a coreless drive device with only one stator. Position correction of the chip under test is achieved through the movement of the mover. Compared to existing technologies that use servo motors, this reduces the size of the vision correction device 100, meeting the requirements for installation in small spaces. It should be noted that conventional coreless motors include two stators, while this embodiment uses only one. This does not affect the accuracy or movement of the coreless motor; it only reduces the thrust.

[0029] See Figure 3 In some embodiments, the latching portion 31 includes four limiting plates, the shape of which is consistent with the shape of the chip under test. In this embodiment, the chip under test is square and slightly larger than the chip under test. After the latching portion 31 frames the chip under test from above, the correction component 40 drives the adjusting component 30 to move, thereby moving the chip under test to adjust its position.

[0030] In some embodiments, two correction mechanisms are arranged side by side, allowing simultaneous correction of two chips under test. In other embodiments, the number of correction mechanisms can be selected according to specific design requirements.

[0031] Figure 4 This is a schematic cross-sectional view of a vision correction device 100 according to an embodiment of the present invention. Figure 5 This is a schematic cross-sectional view of a vision correction device 100 according to another embodiment of the present invention. Figure 4 and Figure 5 As shown, and see Figures 1 to 3 In some embodiments, the bracket 10 includes a first mounting plate 11 arranged horizontally, and the correction assembly 40 further includes a pair of spaced-apart first slide rails 485 and a first sliding platform 481. The pair of first slide rails 485 are mounted on the first mounting plate 11 and extend along a first direction. The first sliding platform 481 is slidably mounted on the first slide rails 485 and connected to the alignment member 30 and the mover. The first sliding platform 481 is configured to move along the first slide rails 485 under the drive of a coreless drive device, so as to drive the alignment member 30 to move along the first direction, thereby adjusting the position of the chip under test in the first direction. Here, the first slide rail 485 is a cross roller slide rail, and the first direction is... Figure 1 in the Y direction.

[0032] In some embodiments, the coreless drive device includes a first coreless motor 41, which includes a first stator 411 and a first rotor 412. The first stator 411 is mounted on a first mounting plate 11 along a first direction, and the first rotor 412 is connected to a first sliding platform 481 and moves controllably along the first stator 411 to drive the first sliding platform 481 to move along a first slide rail 485. Here, the correction assembly 40 includes a first connecting plate 42, which is connected to the first rotor 412 and the first sliding platform 481. It can be understood that the first rotor 412 and the first sliding platform 481 are connected through the first connecting plate 42.

[0033] In some embodiments, the correction assembly 40 further includes a pair of spaced-apart second slide rails 483 and a second sliding platform 482. The pair of second slide rails 483 are mounted on the first sliding platform 481 and extend along a second direction, which is perpendicular to the first direction. The second sliding platform 482 is slidably mounted on the second slide rails 483 and connected to the alignment member 30 and the mover. The second sliding platform 482 is configured to move along the second slide rails 483 under the drive of the coreless drive device, thereby driving the alignment member 30 to move along the second direction, thereby adjusting the position of the chip under test in the second direction. Here, the second slide rail 483 is a cross roller slide rail, and the second direction is... Figure 1 The X direction is perpendicular to the Y direction. This can be understood as the second sliding platform 482 and the first sliding platform 481 being arranged in a stacked manner.

[0034] In some embodiments, the coreless drive device further includes a second coreless motor 43, which includes a second stator 431 and a second mover 432. The second stator 431 is mounted on the first mounting plate 11 along a second direction, and the second mover 432 is connected to the second sliding platform 482 and moves controllably along the second stator 431 to drive the second sliding platform 482 to move along the second slide rail 483. Here, the correction assembly 40 includes a second connecting plate 44, which is connected to the second mover 432 and the second sliding platform 482. It can be understood that the second mover 432 and the second sliding platform 482 are connected through the second connecting plate 44.

[0035] In some embodiments, the correction assembly 40 further includes a rotating member 47 and a bearing 484. The rotating member 47 is sleeved on the alignment member 30 and connected to both the alignment member 30 and the correction assembly 40. The bearing 484 is mounted between the rotating member 47 and the second sliding platform 482. The rotating member 47 is configured to rotate relative to the second sliding platform 482 under the drive of a coreless drive device, thereby driving the alignment member 30 to rotate and adjusting the rotation angle of the chip under test in the horizontal direction. Here, it can be understood that the rotation angle of the R-axis is adjusted, the X-axis and Y-axis are translational axes, and the R-axis is a rotational axis. The bearing 484 is a miniature thin-walled bearing.

[0036] In some embodiments, the coreless drive device further includes a third coreless motor 45, which includes a third stator 451 and a third rotor 452. The third stator 451 is mounted on the second sliding platform 482 along a first direction, and the third rotor 452 is connected to the rotating member 47 and is controlled to rotate relative to the third stator 451 to drive the rotating member 47 to rotate. Here, the correction assembly 40 includes a third connecting plate 46, which is connected to the third rotor 452 and the rotating member 47. It can be understood that the third rotor 452 and the rotating member 47 are connected through the third connecting plate 46.

[0037] See Figure 4 and Figure 5 In some embodiments, the alignment member 30 is cylindrical and passes through the first sliding platform 481 and the second sliding platform 482, as well as through the first mounting plate 11.

[0038] In some embodiments, the alignment member 30 is provided with an opening 33 communicating with the alignment hole 32. The vision correction device 100 also includes an air blowing device connected to the opening 33 for blowing air into the alignment hole 32. Specifically, an air nozzle 90 is installed at the opening 33, and the opening 33 is connected to the air blowing device through the air nozzle 90. Here, because when the vision correction device 100 aligns the chip under test in a high-temperature environment, air waves will appear in the alignment hole 32, causing the image acquired by the vision component 20 to jitter, resulting in the inability to accurately acquire the position data of the chip under test. Therefore, in this embodiment, air is continuously blown into the alignment hole 32 through the opening 33, so that the air layer in the alignment hole 32 does not fluctuate, thereby avoiding image jitter.

[0039] Figure 6 This is a schematic structural diagram of the vision correction device 100 according to one embodiment of the present invention from another angle. Figure 7 yes Figure 6 A schematic enlarged view of part A. (See diagram below.) Figure 6 and Figure 7 As shown, in some embodiments, the visual correction device 100 further includes a first grating ruler 81, a second grating ruler 82, and a third grating ruler 83. The first grating ruler 81 is installed at the first sliding platform 481 and is used to measure the displacement of the first sliding platform 481. The second grating ruler 82 is installed at the second sliding platform 482 and is used to measure the displacement of the second sliding platform 482. The third grating ruler 83 is installed at the rotating member 47 and is used to measure the rotation angle of the rotating member 47.

[0040] This embodiment uses multiple grating rulers to measure displacement and rotation angle, which can improve the accuracy of the calibration of the chip under test.

[0041] In some embodiments, both the first sliding platform 481 and the second sliding platform 482 are square. The first grating ruler 81 includes a first grating reading head 811 and a first scale grating 812; the second grating ruler 82 includes a second grating reading head 821 and a second scale grating 822; and the third grating ruler 83 includes a third grating reading head 831 and a third scale grating 832. The first scale grating 812 is attached to the side of the first sliding platform 481, and the first grating reading head 811 is mounted on the first mounting plate 11. The second scale grating 822 is attached to the side of the second sliding platform 482, and the second grating reading head 821 is mounted on the first sliding platform 481. The third scale grating 832 is arc-shaped and attached to the rotating member 47, and the third grating reading head 831 is mounted on the second sliding platform 482.

[0042] In some embodiments, the bracket 10 further includes a vertically arranged second mounting plate 12, which is perpendicular to and connected to the first mounting plate 11. The vision correction device 100 also includes a substrate 50, a pair of third slide rails 60, and a drive member 70. The substrate 50 is vertically arranged, and the pair of third slide rails 60 are vertically mounted on the substrate 50 and slidably connected to the second mounting plate 12. The drive member 70 is connected to the second mounting plate 12 and is configured to controllably drive the bracket 10 to move vertically, such that the latching portion 31 frames the outer periphery of the chip under test. Here, the bracket 10 moves vertically while driving the correction component 40. In this embodiment, the drive member 70 is a servo motor. In other embodiments, the drive member 70 may also be selected from other drive sources.

[0043] In some embodiments, the vision correction device 100 further includes a controller electrically connected to the first coreless motor 41, the second coreless motor 43, the third coreless motor 45, the vision component 20, and the drive unit 70, for controlling the first coreless motor 41, the second coreless motor 43, the third coreless motor 45, the vision component 20, and the drive unit 70.

[0044] This embodiment also provides a chip testing device, which includes the vision correction device 100 of any of the above embodiments. Details regarding the vision correction device 100 will not be provided here.

[0045] During correction, the controller first controls the drive component 70 to move the entire bracket 10 downwards, so that the locking part 31 of the alignment component 30 frames the chip under test. Then, the controller controls the light from the vision component 20 to pass through the alignment hole 32 to obtain the current position information of the chip under test, and compares the current position with the target position to obtain correction data. Afterwards, the controller controls the coreless drive device to move the alignment component 30 according to the correction data, so as to move the chip under test and thus correct the chip under test to the target position.

[0046] The visual correction device 100 provided in this embodiment can meet the requirements of smaller installation space and can meet the requirements of high-precision correction. The movement accuracy in the X-axis and Y-axis directions can reach ±2µm, and the rotation accuracy in the R-axis direction can reach ±0.01°.

[0047] Therefore, those skilled in the art should recognize that although many exemplary embodiments of the present invention have been shown and described in detail herein, many other variations or modifications conforming to the principles of the present invention can be directly determined or derived from the disclosure of the present invention without departing from the spirit and scope of the present invention. Therefore, the scope of the present invention should be understood and recognized as covering all such other variations or modifications.

Claims

1. A chip-based vision correction device, characterized in that, It includes a brace and at least one orthopedic mechanism, each of the orthopedic mechanisms comprising: A aligning component has a locking portion and an aligning hole extending along its axial direction, the locking portion being used to frame the outer periphery of the chip under test; A vision component is mounted on the bracket, and the optical axis of the vision component is coaxially arranged with the alignment hole of the alignment member, for acquiring the position information of the chip under test; The correction assembly is mounted on the bracket and includes a coreless drive device. The coreless drive device includes a stator and a mover arranged in a relatively cooperating manner. The mover is connected to the alignment member and is configured to move in a controlled manner relative to the stator to drive the alignment member to a target position, thereby correcting the position of the chip under test.

2. The visual correction device according to claim 1, characterized in that, The bracket includes a first mounting plate arranged horizontally, and the correction assembly further includes: A pair of spaced-apart first slide rails are mounted on the first mounting plate and extend along a first direction; A first sliding platform is slidably mounted on the first slide rail and connected to the alignment member and the mover. The first sliding platform is configured to move along the first slide rail under the drive of the coreless drive device, so as to drive the alignment member to move along the first direction, thereby adjusting the position of the chip under test in the first direction.

3. The visual correction device according to claim 2, characterized in that, The coreless drive device includes: The first coreless motor includes a first stator and a first mover. The first stator is mounted on the first mounting plate along the first direction. The first mover is connected to the first sliding platform and moves in a controlled manner along the first stator to drive the first sliding platform to move along the first slide rail.

4. The visual correction device according to claim 2, characterized in that, The corrective component also includes: A pair of spaced-apart second slide rails are mounted on the first sliding platform and extend along a second direction, which is perpendicular to the first direction; The second sliding platform is slidably mounted on the second slide rail and connected to the alignment member and the mover. The second sliding platform is configured to move along the second slide rail under the drive of the coreless drive device, so as to drive the alignment member to move along the second direction, thereby adjusting the position of the chip under test in the second direction.

5. The visual correction device according to claim 4, characterized in that, The coreless drive device further includes: The second coreless motor includes a second stator and a second mover. The second stator is mounted on the first mounting plate along the second direction. The second mover is connected to the second sliding platform and moves in a controlled manner along the second stator to drive the second sliding platform to move along the second slide rail.

6. The visual correction device according to claim 4, characterized in that, The corrective component also includes: A rotating component is sleeved on the adjusting component and connected to the adjusting component and the moving element; A bearing is installed between the rotating component and the second sliding platform; The rotating component is configured to rotate relative to the second sliding platform under the drive of the coreless driving device, so as to drive the alignment component to rotate, thereby adjusting the rotation angle of the chip under test in the horizontal direction. The coreless drive device further includes: The third coreless motor includes a third stator and a third rotor. The third stator is mounted on the second sliding platform along the first direction. The third rotor is connected to the rotating component and rotates in a controlled manner relative to the third stator to drive the rotating component to rotate.

7. The vision correction device according to any one of claims 1-6, characterized in that, The adjusting member has an opening communicating with the adjusting hole, and the vision correction device further includes: An air blowing device, connected to the opening, is used to blow air into the alignment hole.

8. The visual correction device according to claim 6, characterized in that, The corrective mechanism also includes: The first grating ruler is installed on the first sliding platform and is used to measure the displacement of the first sliding platform; The second grating ruler is installed at the second sliding platform and is used to measure the displacement of the second sliding platform; A third grating ruler is installed at the rotating component to measure the rotation angle of the rotating component.

9. The vision correction device according to any one of claims 1-6, characterized in that, The bracket further includes a second mounting plate arranged vertically, and the vision correction device further includes: The substrate is arranged vertically. A pair of third slide rails are vertically mounted on the base plate and slidably connected to the second mounting plate; A drive unit, connected to the second mounting plate, is configured to controllably drive the bracket to move vertically such that the snap-fit ​​portion frames the chip under test.

10. A chip testing device, characterized in that, Includes the vision correction device as described in any one of claims 1-9.

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