A glass substrate vertical AOI detection device

Abstract

The utility model discloses a glass substrate vertical AOI detection device belongs to precision manufacturing technical field, including vertical carrier assembly, first visual subassembly, second visual subassembly, first displacement component and the second displacement component of paired setting, utilize vertical carrier assembly to realize glass substrate micropore detection when vertical installation, and by the setting of vertical carrier assembly on first displacement component realizes the reciprocating displacement of glass substrate in the first direction, and by two second displacement components realize the displacement drive of two visual subassemblies in the second direction, through the orthogonal motion of glass substrate and two visual subassemblies in the vertical plane, can realize the alignment of each micropore and two visual subassemblies, and then complete the AOI detection of each micropore. The device in the utility model can realize the vertical clamping and micropore detection of glass substrate, avoid the bending deformation of glass substrate under the conventional horizontal detection mode, and ensure the accuracy and quality of micropore AOI detection.

Claims

1. A vertical AOI inspection device for glass substrates, characterized in that, include: Vertical carrier assembly for fixing glass substrates in an upright position; A vision component, wherein the vision component may be disposed on one side of the glass substrate in the thickness direction when the glass substrate is supported on the vertical carrier assembly, for AOI detection of each microhole on the glass substrate; The first displacement component is used to support the vertical carrier component and drive it to move back and forth in the first direction; The second displacement component is used to support the vision component and drive the vision component to move back and forth in the second direction; The first direction and the second direction are orthogonal directions in the vertical plane, with one direction being horizontal and the other being vertical.

2. The vertical AOI inspection device for glass substrates according to claim 1, characterized in that, The vertical carrier assembly includes an annular carrier disk with a through hole formed in the center of the carrier disk; and The carrier disk is provided with a fixing mechanism for fixing the glass substrate on the carrier disk and making the micro-hole to be detected on the glass substrate aligned with the central through hole of the carrier disk.

3. The vertical AOI inspection device for glass substrates according to claim 2, characterized in that, The fixing mechanism includes a negative pressure adsorption module disposed on the carrier plate; The negative pressure adsorption module includes several negative pressure adsorption holes opened on one end face of the carrier plate and an air connector disposed on the carrier plate; the air connector connects to each negative pressure adsorption hole and can be connected to a negative pressure suction system to provide negative pressure.

4. The vertical AOI inspection device for glass substrates according to claim 3, characterized in that, The negative pressure adsorption module forms an annular adsorption surface on one side of the carrier disk to adsorb the four edges of one side end face of the glass substrate. and / or Multiple limiting baffles are arranged circumferentially on the end face of the carrier plate used to adsorb the glass substrate, so as to limit the outer peripheral edge of the glass substrate after it is adsorbed into place. and / or A plurality of pressing mechanisms are provided on the end face of the carrier for adsorbing the glass substrate; the pressing mechanism includes a pressing block, which can be pulled away from the carrier and press the edge of the glass substrate with its end.

5. The vertical AOI inspection device for glass substrates according to claim 1, characterized in that, The vision component includes a first vision component and a second vision component disposed on both sides of the glass substrate in the thickness direction. Both the first and second vision components include a detection camera, a focusing axis, a mounting plate, a base plate, and a light source. The focusing axis is mounted on the base plate, and the detection camera is connected to the focusing axis via the mounting plate. The focusing axis controls the focus adjustment of the detection camera. The light source is connected to the object-side coaxial region of the detection camera and is used to illuminate the micro-hole to be detected. The light source is either coaxial or ring-shaped. The first vision component also includes a backlight source disposed on one side of the second vision component; the backlight source is mounted on the mounting plate of the second vision component and can be coaxial with the detection camera of the first vision component when the two vision components are working. The backlight source is used to illuminate the center of the micro-hole and the detection camera of the first vision component can automatically focus and capture an image of the center of the micro-hole.

6. The vertical AOI inspection device for glass substrates according to any one of claims 1 to 5, characterized in that, The first direction is horizontal, and the second direction is vertical; The first displacement component includes a first air-bearing guide rail with both ends fixed on the support base and extending along the first direction. A first air-bearing frame composed of multiple first air-bearing plates is sleeved on the first air-bearing guide rail, and a linear drive module is provided corresponding to the first air-bearing frame. Each of the first air-bearing plates has multiple throttling holes on its end face facing the first air-bearing guide rail, for introducing compressed air and ensuring that each first air-bearing plate forms an air-bearing gap with the first air-bearing guide rail when the first air-bearing frame is working; and The linear drive module includes a linear motor stator extending along a first direction and disposed on the first air-bearing guide rail, and a linear motor mover disposed on the first air-bearing frame. The linear motor mover can drive the first air-bearing frame to reciprocate through interaction with the linear motor stator.

7. The vertical AOI inspection device for glass substrates according to claim 6, characterized in that, The second displacement component includes a second air-bearing guide rail extending along a second direction, a second air-bearing frame sleeved on the outer periphery of the second air-bearing guide rail, and a drive mechanism corresponding to the second air-bearing frame. The second air flotation frame includes a plurality of second air flotation plates, and each second air flotation plate has a plurality of throttling holes on the side facing the second air flotation guide rail for introducing compressed air and forming an air flotation gap between the second air flotation plate and the second air flotation guide rail. The vision component is located on the side of the second air-bearing frame near the vertical vehicle assembly, and the second air-bearing frame can drive the vision component to move back and forth in the second direction under the action of the driving mechanism.

8. The vertical AOI inspection device for glass substrates according to claim 7, characterized in that, The second displacement component further includes a pulley module and a counterweight module; the counterweight module is connected to the second air-float frame through the pulley module and is used to balance the weight of the second air-float frame and the vision component mounted on the second air-float frame. The counterweight module includes a mounting bracket and a counterweight guide shaft; the counterweight guide shaft is arranged along a second direction, and its two ends are fixed by guide shaft mounting seats; the mounting bracket is used to place and install the counterweight block, and one side of it is slidably connected to the counterweight guide shaft through a linear bearing, and can reciprocate in the second direction under the guidance of the counterweight guide shaft; The pulley module includes a pull rope, a pulley mounting plate, and a pulley; the pulley is mounted on the pulley mounting plate via a pulley drive shaft; the pull rope passes around the pulley, with one end connected to the second air-float frame and the other end connected to the mounting bracket.

9. The vertical AOI inspection device for glass substrates according to any one of claims 1 to 5, characterized in that, The first direction is the vertical direction, and the second direction is the horizontal direction; The first displacement component includes a vertical base, a vertical guide rail extending along a first direction is provided on one side of the vertical base, and a carrier mounting plate is slidably mounted on the vertical guide rail; the carrier mounting plate is used for mounting the vertical carrier component, and a driving mechanism is provided corresponding to the carrier mounting plate; the carrier mounting plate can drive the vertical carrier component and the glass substrate on the vertical carrier component to move backward along the first direction under the action of the driving mechanism; The second displacement component includes a horizontal guide rail extending along a second direction. The vision component is slidably connected to the horizontal guide rail via a drive module, and the vision component can reciprocate in the second direction under the drive of the drive module. By controlling the first and second displacement components, the alignment of the two vision components with different micro-holes on the glass substrate and AOI detection can be achieved.

10. The vertical AOI inspection device for glass substrates according to claim 9, characterized in that, Low-friction cylinder mechanisms are respectively installed at both ends of the vehicle mounting plate. The piston rods of the two low-friction cylinder mechanisms are respectively connected to both ends of the vehicle mounting plate. After the low-friction cylinder mechanism is pressurized and ventilated, it generates an upward thrust to balance the overall weight of the vehicle mounting plate.

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