An electrochemical sensor measurement chamber

Abstract

The utility model relates to gas concentration measurement technical field, specifically disclose a kind of electrochemical sensor measuring chamber, including stainless steel base, inside base lining is equipped, both sides have air inlet, air outlet interface and joint;Base lining top is embedded with thermistor, inside inlay electrochemical sensor, there is horizontal flow buffer cavity between the two;Base top is fixed with stainless steel upper cover by screw, the upper cover inner wall top has polytetrafluoroethylene baffle, and two elastic electrode needles are below the plate and electrically connected wire.The device creates constant voltage, constant current detection environment for electrochemical sensor, allows sample gas to contact detection surface smoothly, detects gas temperature and compensates, can reduce pressure, temperature and flow error, makes the measurement trace gas concentration resolution reach ±1ppm, also through process let sensor be in sealed cavity, prevent gas from leaking.

Description

Technical Field

[0001] This utility model relates to the field of gas concentration measurement technology, and more specifically, to an electrochemical sensor measurement chamber. Background Technology

[0002] In numerous industries, including chemical and semiconductor manufacturing, accurate measurement of trace gas concentrations is crucial. For example, in the chemical industry, the POE (special polyolefin) process requires strict control of trace oxygen content; in semiconductor processes, the oxygen content in electroplating must be controlled within the range of 15-20 ppm, and in Czochralski silicon single crystal production, the oxygen content must be below 20 ppm to reduce crystal defects. However, current methods for measuring trace oxygen content primarily employ laser oxygen analyzers and infrared spectroscopy. While these methods achieve the measurement objective, they have significant drawbacks: the analyzers are expensive, placing a substantial economic burden on companies and limiting their widespread application. Furthermore, some existing measuring devices struggle to place the electrochemical sensor in an ideal detection environment during measurement, preventing stable contact between the sample gas and the sensor surface. Factors such as pressure, temperature, and flow rate can easily introduce measurement errors, affecting accuracy and failing to meet the industry's high requirements for trace gas concentration measurement. To address the problems existing in the aforementioned related technologies, this utility model proposes an electrochemical sensor measurement chamber, which aims to create a constant pressure and constant current detection environment for electrochemical sensors, reduce measurement errors, achieve high-resolution measurement, and reduce costs, thereby overcoming the shortcomings of existing technologies. Utility Model Content

[0003] In view of the above-mentioned technical problems in related technologies, this utility model provides an electrochemical sensor measurement chamber that can solve the above problems.

[0004] To achieve the above-mentioned technical objectives, the technical solution of this utility model is implemented as follows: An electrochemical sensor measuring chamber includes a stainless steel base. A base liner is fixedly installed at the bottom of the stainless steel base. An air inlet is provided on one side of the stainless steel base and connected to an air inlet connector. An air outlet is provided on the other side of the stainless steel base and connected to an air outlet connector. A thermistor is embedded in the top surface of the base liner. An electrochemical sensor is embedded inside the stainless steel base. A flow buffer chamber is provided between the bottom surface of the electrochemical sensor and the top surface of the base liner. A stainless steel top cover is fixedly installed on the top of the stainless steel base by screws. A polytetrafluoroethylene (PTFE) baffle is fixedly installed on the top of the inner wall of the stainless steel top cover. Two elastic electrode needles are provided at the bottom of the PTFE baffle, and wires are electrically connected to the elastic electrode needles.

[0005] Furthermore, an inlet buffer zone connected to the air inlet interface is provided on one side of the base lining, and an outlet buffer zone connected to the air outlet interface is provided on the other side of the base lining. An air inlet hole is provided on one side of the top of the base lining, which is connected to the inlet buffer zone. An air outlet hole is provided on the other side of the top of the base lining, which is connected to the outlet buffer zone.

[0006] Furthermore, a potting compound groove is provided on the top of the stainless steel cover, and the inside of the potting compound groove is filled with potting silicone, through which the wires pass.

[0007] Furthermore, a pressure-stabilizing flow meter is installed in connection with the air inlet connector.

[0008] Furthermore, an O-ring is provided at the joint between the stainless steel top cover and the stainless steel base.

[0009] The beneficial effects of this utility model are as follows: The device of this application places the electrochemical sensor in a constant pressure and constant flow detection environment, so that the sample gas to be measured can be stably contacted with the detection surface of the electrochemical sensor, and the temperature of the gas to be measured in its advection buffer chamber can be detected, and temperature compensation can be performed by the analysis instrument. It can reduce measurement errors introduced by pressure, temperature and flow rate, and achieve a resolution of ±1ppm for electrochemical sensors when measuring trace gas concentrations; By using O-rings and potting compound, the electrochemical sensor is placed in a sealed cavity to prevent the measured gas from leaking out. Attached Figure Description

[0010] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0011] The present invention will now be described in further detail with reference to the accompanying drawings.

[0012] Figure 1 This is a schematic diagram of the structure of a device for measuring trace gas concentration according to an embodiment of the present invention; Figure 2 This is a schematic diagram of the airflow orifice diversion of a device for measuring trace gas concentration according to an embodiment of this utility model; Figure 3 This is a schematic diagram of the connection of a pressure-stabilized flow meter for a device for measuring trace gas concentration according to an embodiment of this utility model.

[0013] In the picture: 1. Wire; 2. Encapsulating silicone; 3. Flexible electrode needle; 4. Screw; 5. Stainless steel top cover; 6. O-ring; 7. Electrochemical sensor; 8. Stainless steel base; 9. Inlet connector; 10. PTFE baffle; 11. Flow buffer chamber; 12. Thermistor; 13. Outlet connector; 14. Inlet hole; 15. Base liner; 16. Outlet hole; 17. Encapsulating glue tank; 18. Pressure regulator flow meter; 19. Sensor assembly; 20. Sample gas connector; 21. Inlet buffer zone; 22. Outlet buffer zone. Detailed Implementation

[0014] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model are within the protection scope of the present utility model.

[0015] Example 1: like Figure 2 As shown, an apparatus for measuring trace gas concentration according to an embodiment of the present invention includes a base liner 15. The gas to be measured is dispersed into a row of arc-shaped inlet holes 14 after entering the inlet buffer 21, flows smoothly through the horizontal flow buffer chamber 11, enters the outlet buffer 22 through a row of arc-shaped outlet holes 16, and is discharged through the outlet connector 13.

[0016] like Figure 3 As shown, an apparatus for measuring trace gas concentration according to an embodiment of the present invention includes a pressure-stabilized flow meter 18. The gas to be measured enters the pressure-stabilized flow meter 18 through the sample gas connector 20. After the pressure is self-balanced and adjusted, the gas under constant pressure and constant flow is sent to the sensor assembly 19 for detection.

[0017] In practical use, the device for measuring trace gas concentration according to this utility model includes a pressure-stabilized flow meter 18. The gas to be measured enters the pressure-stabilized flow meter 18 from the sample gas connector 20 for pressure balancing, so that the gas to be measured entering the sensor assembly is at constant pressure and constant flow. In the structure of sensor assembly 19, electrochemical sensor 7 is installed in stainless steel base 8. A base liner 15 is provided at the bottom of stainless steel base 8. An inlet buffer zone 21 is provided on the left side of the base liner 15. A row of arc-shaped air inlet holes 14 is provided above the inlet buffer zone 21. An outlet buffer zone 22 is provided on the right side of the base liner 15. A row of arc-shaped air outlet holes 16 is provided above the outlet buffer zone 22. The base liner 15 and the detection surface of electrochemical sensor 7 form a laminar flow buffer cavity 11. The gas to be tested enters the inlet buffer 21 through the inlet connector 9 and is then dispersed from a row of arc-shaped inlet holes 14 above and enters the horizontal buffer chamber 11. Then it enters the outlet buffer 22 from the corresponding row of arc-shaped outlet holes 16, so that the gas to be tested can make stable contact with the detection surface of the electrochemical sensor 7. A thermistor 12 is installed in the middle of the base liner 15. The electronic analyzer detects the temperature of the sample gas through the thermistor. The software performs temperature compensation to remove the measurement error caused by the temperature change of the sample gas. Finally, the electrochemical sensor achieves a resolution of ±1ppm when measuring trace gas concentration. The stainless steel base 8 is equipped with an air inlet connector 9 and an air outlet connector 13. The stainless steel base 8 is connected to the stainless steel top cover 5 with screws 4, which facilitates the installation and maintenance of the electrochemical sensor. An O-ring 6 is provided to seal the gap between the stainless steel base 8 and the stainless steel top cover 5. A polytetrafluoroethylene baffle 10 is provided inside the stainless steel top cover 5. Two elastic electrode needles 3 are provided on the polytetrafluoroethylene baffle 10. The elastic electrode needles 3 are soldered to fix the wire 1. The soldered part of the elastic electrode needles 3 and the wire 1 is filled with silicone 2 and a potting glue tank 17 is provided, so that the electrochemical sensor 7 is placed in a sealed cavity to prevent the gas to be measured from leaking out.

[0018] In summary, by utilizing the above-described technical solution of this utility model, and by placing the electrochemical sensor in a constant-pressure, cross-flow detection stage and detecting the temperature of its advection buffer chamber, temperature compensation is performed using analytical instruments. This reduces measurement errors introduced by pressure, temperature, and flow rate, enabling the electrochemical sensor to achieve a resolution of ±1 ppm in measuring trace gas concentrations.

[0019] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Images