An eddy current square resistance detection device

Abstract

The utility model relates to the square resistance detection field, concretely relates to a vortex square resistance detection device, including probe moving assembly and drive its lateral movement lateral movement mechanism: still including installation base, be used for supporting device whole, including crossbeam, crossbeam setting is long strip shape, hollow setting inside, and bottom is provided with linear slide rail. The utility model can measure square resistance in time in the composite copper foil film winding process, need not stop sampling, can fast feedback data, reduce the rework cost of sputtering process because of quality problem through accurate control square resistance. Realize measurement through vortex effect, do not contact with the film surface directly, avoid the damage to the film, also can not influence the continuity of winding process, to solve the problem that the real -time detection of the existing technology cannot record the continuous change curve of square resistance with time, winding position, need manual stop adjustment parameter, influence efficiency.

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