Camera mounting structure and clean room flow rate measurement system

Abstract

The utility model provides a kind of camera mounting structure and clean room flow rate measurement system, belong to clean room monitoring technical field, wherein camera mounting structure includes space support frame and camera mounting frame;Space support frame includes multiple longitudinal interlaced keels, and the side of keel is provided with support piece, and support piece includes the upper card slot of opening upwards and the lower card slot of opening downwards;Camera mounting frame includes upper mounting frame and lower mounting frame;The one end of upper mounting frame is provided with the first clamping plate for splicing in upper card slot;Lower mounting frame is below upper mounting frame, and the one end of lower mounting frame is provided with the second clamping plate for splicing in lower card slot;Upper mounting frame and lower mounting frame fixedly connect, and lock on support piece by first clamping plate and second clamping plate.The camera mounting structure provided by the utility model fixes camera mounting frame using the way of upper and lower opposite clamping, can effectively resist the up-down movement and lateral deviation of camera mounting frame, improve structural stability.

Description

Technical Field

[0001] This utility model belongs to the field of cleanroom monitoring technology, and more specifically, it relates to a camera mounting structure and a cleanroom flow velocity measurement system. Background Technology

[0002] Conventional flow velocity verification measurements in large-space cleanrooms primarily employ hot-wire anemometers and ultrasonic velocimetry. These methods are limited to point measurements and can disturb the airflow being measured. In large-space cleanroom flow field determination, traditional point-measurement techniques require significant manpower and time to complete a single measurement. Furthermore, the need for the sensor to extend into the airflow introduces disturbances, leading to substantial errors in the measurement results. As cleanroom validation requirements become increasingly stringent, area velocimetry techniques are needed to overcome the limitations of point-measurement methods.

[0003] Particle Image Velocimetry (PIV) is a fluid dynamics measurement technique based on image analysis. It involves scattering tracer particles in a flow field, performing multiple exposures using a pulsed laser sheet light source, recording the particle trajectories, and then calculating the velocity field distribution using algorithms such as autocorrelation, cross-correlation, or optical Young's fringe method to achieve transient non-contact measurement of the entire flow field.

[0004] The use of PIV (Particle Image Velocimetry) technology in large-space cleanrooms requires the installation of a high-speed camera (hereinafter referred to as the camera) in the cleanroom. The tracer particles are illuminated by a laser emitted by a laser sheet light generator, and the tracer particles released in the cleanroom are photographed and monitored by the camera. The magnitude and direction of the flow velocity on the relevant surface are calculated by the displacement of the tracer particles in two images.

[0005] However, in the current testing system, the camera needs to be mounted on a support structure in space using a mounting bracket. Existing mounting methods mostly use bolts for fixing, which is cumbersome to install and inconvenient for replacement, maintenance, and adjustment. Furthermore, existing brackets have excessively long cantilever arms and poor structural stability, which affects the vibration resistance of the mounting bracket and may even lead to poor camera measurement accuracy. Utility Model Content

[0006] The purpose of this invention is to provide a camera mounting structure and a cleanroom flow rate measurement system, aiming to improve the structural stability and ease of installation of the camera.

[0007] To achieve the above objectives, one embodiment of the present invention provides a camera mounting structure, comprising: A spatial support frame includes multiple longitudinally overlapping keels, and a support member is provided on one side of each keel. The support member includes an upper slot with an upward opening and a lower slot with a downward opening. A camera mounting bracket includes an upper mounting bracket and a lower mounting bracket; one end of the upper mounting bracket is provided with a first retaining plate for insertion into the upper slot; the lower mounting bracket is located below the upper mounting bracket, and one end of the lower mounting bracket is provided with a second retaining plate for insertion into the lower slot; The upper mounting bracket and the lower mounting bracket are longitudinally fitted and fixed together, and locked onto the support member by means of the first clamping plate and the second clamping plate; the end of the upper mounting bracket away from the first clamping plate is used to support the camera.

[0008] In another embodiment of this application, the upper card slot and the lower card slot are arranged symmetrically.

[0009] As another embodiment of this application, the support includes: The positioning plate is parallel to the side wall of the keel and spaced apart from the keel; A connector is vertically connected to the outer wall of the keel and the middle of the positioning plate; The positioning plate and the side wall of the keel form the upper slot and the lower slot through the connector.

[0010] In another embodiment of this application, both the first card plate and the second card plate are U-shaped plates.

[0011] In another embodiment of this application, the upper mounting bracket further includes: A load-bearing frame, which is connected to the first card plate, extends toward the side away from the keel; An extension frame is fixed to the end of the load-bearing frame away from the first card plate, and the extension frame is used to support the camera.

[0012] In another embodiment of this application, the extension frame includes: The extension frame body includes an upper frame, side supports, and a lower frame, wherein the area of ​​the upper frame is larger than the area of ​​the lower frame. A mounting plate is installed on the upper frame and is used to connect the camera.

[0013] In another embodiment of this application, the width of the load-bearing frame gradually increases along the side close to the keel; a longitudinal reinforcing plate is provided at the upper end of the load-bearing frame, and the end of the longitudinal reinforcing plate is connected to the extension frame.

[0014] In another embodiment of this application, both the load-bearing frame and the longitudinal reinforcing plate are provided with weight-reducing holes.

[0015] In another embodiment of this application, the lower mounting bracket is provided in a plurality of units, and the plurality of lower mounting brackets are spaced apart along the width direction of the upper mounting bracket.

[0016] The advantages of the camera mounting structure provided by this utility model are as follows: Compared with the prior art, the camera mounting structure of this utility model adopts a connection method of "card plate-card slot" cooperation, which only requires carding and positioning, avoiding the need for complicated positioning operation steps during installation, simplifying the assembly process, and reducing the installation difficulty; the support component is provided with upper and lower card slots, and the corresponding camera mounting frame adopts an upper mounting frame and lower mounting frame cooperation method, and fixes the camera mounting frame on the support component by upper and lower opposing clamping method, which can effectively resist the vertical movement and lateral displacement of the camera mounting frame, and ensure the structural stability of the camera mounting frame.

[0017] A cleanroom flow rate measurement system is also provided, characterized in that it employs a camera mounting structure as described in the first embodiment, comprising: The control module is located in the test space within the cleanroom; A laser sheet light emitter is located in the test space of a clean room, and the camera mounting structure is located on the output side of the laser sheet light emitter; the camera is mounted on the upper mounting bracket. The tracer particle generator and release device is located at the top of the cleanroom; The fan filter unit is located at the top of the cleanroom and is spaced apart from the tracer particle generating and releasing device.

[0018] The beneficial effects of the cleanroom flow velocity measurement system provided by this utility model are as follows: Compared with the prior art, the cleanroom flow velocity measurement system of this utility model installs a spatial support frame in the cleanroom space, and uses the grid frame formed by the spatial support frame to divide the cleanroom space into multiple detection areas; a camera mounting bracket is installed on the grid frame, and the camera is fixed with the camera mounting bracket. The installation process and operation steps of the camera mounting bracket are simplified by using a snap-fit ​​positioning method, which reduces the installation difficulty; at the same time, the support component is provided with upper and lower slots, and the corresponding camera mounting bracket adopts a cooperative method of upper and lower mounting brackets, and fixes the camera mounting bracket on the support component by upper and lower opposing clamping, which can effectively resist the vertical movement and lateral displacement of the camera mounting bracket, and ensure the structural stability after connection; thus ensuring the detection accuracy of the flow velocity measurement system. Attached Figure Description

[0019] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1A schematic diagram of the structure of the cleanroom flow velocity measurement system provided in this embodiment of the utility model; Figure 2 This is a schematic diagram of the camera mounting structure provided in an embodiment of the present utility model; Figure 3 A side view of the camera mounting structure provided in an embodiment of this utility model; Figure 4 This is a top view of the camera mounting structure provided in an embodiment of the present utility model.

[0021] In the diagram: 1. Space support frame; 2. Control cabinet; 3. Laser modulation synchronizer; 4. Computer host; 5. Computer monitor; 6. Laser sheet light emitter; 7. Camera; 8. Camera mounting bracket; 9. Fan filter unit; 10. Tracer ion generator and release device; 100. Keel; 101. Support component; 200. First clamping plate; 201. Bearing frame rod; 202. Longitudinal reinforcing plate; 203. Rear end rod; 210. Lower frame; 211. Side support; 212. Upper frame; 213. Fixing plate; 300. Second clamping plate; 301. Lower mounting bracket; 302. Lower reinforcing plate. Detailed Implementation

[0022] To make the technical problems, technical solutions, and beneficial effects of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.

[0023] Please see Figures 1 to 4 The camera mounting structure and cleanroom flow rate measurement system provided by this utility model will now be described. The camera mounting structure includes a spatial support frame 1 and a camera mounting frame 8. The spatial support frame 1 includes multiple longitudinally overlapping keels 100. A support member 101 is provided on one side of each keel 100. The support member 101 includes an upper slot with an upward opening and a lower slot with a downward opening. The camera mounting frame 8 includes an upper mounting frame and a lower mounting frame 301. One end of the upper mounting frame is provided with a first locking plate 200 for insertion into the upper slot. The lower mounting frame 301 is located below the upper mounting frame. One end of the lower mounting frame 301 is provided with a second locking plate 300 for insertion into the lower slot. The upper mounting frame and the lower mounting frame 301 are fixedly connected and locked to the support member 101 by means of the first locking plate 200 and the second locking plate 300. The end of the upper mounting frame away from the first locking plate 200 is used to support the camera 7.

[0024] The camera mounting structure provided by this utility model firstly involves setting a support member 101 on the keel 100 of the space support frame 1, forming a mounting position on the side of the keel 100. This mounting position includes an upper slot and a lower slot that overlap longitudinally. Then, the camera mounting frame 8 is divided into two parts, wherein the upper mounting frame is adapted to the upper slot, and the first locking plate 200 at its end extends into the upper slot. The lower mounting frame 301 is symmetrically arranged with the upper mounting frame, and the second locking plate 300 of the lower mounting frame 301 extends into the lower slot. Finally, by longitudinally locking the upper mounting frame and the lower mounting frame 301, the first locking plate 200 and the second locking plate 300 use the upper slot and the lower slot to lock the support member 101 between them.

[0025] The upper and lower mounting slots provide positioning and support structures for the camera mounting bracket 8. After the upper and lower mounting brackets 301 of the camera mounting bracket 8 are adjusted to their preset positions and temporarily fixed, the first locking plate 200 of the upper mounting bracket is aligned with the upper slot of the support member 101 and inserted. Then, the second locking plate 300 of the lower mounting bracket 301 is aligned with the lower slot of the support member 101 and inserted. Finally, the upper and lower mounting brackets 301 are fixedly connected by locking components. The locking components can be bolts, clips, or other structures. Taking bolts as an example, the bolt passes through the upper and lower mounting brackets 301 and is gradually tightened. After tightening, the first locking plate 200 and the second locking plate 300 clamp the support member 101 between them, so that the camera mounting bracket 8 is stably locked onto the support member 101, completing the overall installation.

[0026] Compared with the prior art, the camera mounting structure provided by this utility model adopts a connection method of "card plate-card slot" cooperation, which only requires carding and positioning, avoiding the need for complicated positioning operations during installation, simplifying the assembly process, and reducing the installation difficulty. The support member 101 is provided with both upper and lower card slots. The corresponding camera mounting frame 8 adopts a method of cooperation between the upper mounting frame and the lower mounting frame 301, and fixes the camera mounting frame 8 on the support member 101 by clamping it from top to bottom. This can effectively resist the vertical movement and lateral displacement of the camera mounting frame 8, and ensure the structural stability of the camera mounting frame 8.

[0027] Optionally, the support 101 and the keel 100 are integrally formed.

[0028] In some possible embodiments, please refer to Figures 2 to 3 The upper and lower card slots are symmetrically arranged.

[0029] When the upper and lower card slots are symmetrical about the horizontal plane, the first card plate 200 of the upper mounting bracket and the second card plate 300 of the lower mounting bracket 301 can be designed according to the principle of symmetrical adaptation. During the insertion operation, the first card plate 200 and the second card plate 300 can be synchronously positioned simply by aligning the camera mounting bracket 8 as a whole with the card slot structure of the support member 101, completing the insertion and alignment action in one go, further shortening the assembly time.

[0030] The symmetrical upper and lower card slots avoid repeated trial insertions due to card slot position offsets, and can automatically maintain a horizontal or preset installation posture after the camera mounting bracket 8 is assembled, reducing the subsequent calibration steps for the camera 7 angle, thus balancing installation speed and assembly accuracy.

[0031] Furthermore, the symmetrical slots ensure that the contact area and stress points between the first card plate 200 and the upper slot, and between the second card plate 3002 and the lower slot, are completely symmetrical. When the camera mounting bracket 8 bears its own weight, vibration, or external impact, the load is evenly transferred to the support member 101 through the symmetrical slots and cards, forming a balanced state of symmetrical force distribution. This prevents deformation and loosening of the slot on one side due to concentrated force, further improving the stability and fatigue resistance of the overall connection from a mechanical structural perspective.

[0032] In some possible embodiments, please refer to Figure 2 and Figure 3 The support member 101 includes a positioning plate and a connector. The positioning plate is parallel to the side wall of the keel 100 and spaced apart from the keel 100. The connector is vertically connected to the outer side wall of the keel 100 and the middle part of the positioning plate. The positioning plate and the side wall of the keel 100 form an upper slot and a lower slot through the connector.

[0033] The support member 101 is a transverse T-shaped structure. The support member 101 includes two parts: a positioning plate and a connector. The positioning plate is parallel to the side of the keel 100, and the connector is perpendicular to the positioning plate and connects the middle of the positioning plate and the middle of the keel 100, so that the upper end of the connector forms an upper slot and the lower end of the connector forms a lower slot.

[0034] The upper slot is formed by the upper half of the positioning plate and the upper half of the side wall of the keel 100, and the lower slot is formed by the lower half of the positioning plate and the lower half of the side wall of the keel 100.

[0035] Optionally, both the first locking plate 200 and the second locking plate 300 are U-shaped plates. The open end of the U-shaped plate of the first locking plate 200 faces downward. During the locking engagement, when one side of the first locking plate 200 is inserted into the upper locking slot, the upper part of the positioning plate simultaneously extends into the opening slot of the first locking plate 200. Similarly, the open end of the U-shaped plate of the second locking plate 300 faces upward. During the locking engagement, when one side of the second locking plate 300 is inserted into the lower locking slot, the lower part of the positioning plate simultaneously extends into the opening slot of the second locking plate 300. The first locking plate 200 and the upper part of the support member 101 form a mutually locking connection structure, and the second locking plate 300 and the lower part of the support member 101 form a mutually locking connection structure.

[0036] During installation, the upper mounting bracket and the lower mounting bracket 301 are fixedly connected, which brings the first clamping plate 200 and the second clamping plate 300 closer together, so that the closed end of the first clamping plate 200 and the closed end of the second clamping plate 300 clamp and fix the positioning plate between them.

[0037] In some possible embodiments, please refer to Figure 2 The upper mounting frame also includes a load-bearing frame and an extension frame; the load-bearing frame is connected to the first card plate 200 and extends toward the side away from the keel 100; the extension frame is fixed to the end of the load-bearing frame away from the first card plate 200 and is used to support the camera 7.

[0038] The width direction of the load-bearing frame is consistent with the length direction of the keel 100, and the length direction of the load-bearing frame is consistent with the width direction of the keel 100. The first end of the load-bearing frame in the length direction is connected to the first clamping plate 200 and fixed to one side of the keel 100 by means of the first clamping plate 200; the second end of the load-bearing frame in the length direction is connected to the extension frame, and the camera 7 is mounted on the extension frame.

[0039] The load-bearing frame extends along its length, forming a cantilever structure that creates installation space between the camera 7 and the keel 100, preventing the keel 100 from obstructing the camera 7 and hindering its movement and normal shooting. Furthermore, the length of the load-bearing frame can be customized to fit cameras 7 of different shapes and sizes.

[0040] Optionally, the extension frame includes an extension frame body and a fixing plate 213. The extension frame body includes an upper frame 212, a side support 211, and a lower frame 210. The area of ​​the upper frame 212 is larger than the area of ​​the lower frame 210. The fixing plate 213 is installed on the upper frame 212 and is used to connect the camera 7.

[0041] The extension frame body adopts a frame structure to improve support stability. The upper frame 212 and lower frame 210 are parallel. Connected by side supports 211, the entire extension frame body forms a frame structure with a trapezoidal longitudinal cross-section. The upper frame 212 has a larger area and can evenly bear the weight of the camera 7 through the fixing plate 213. The side supports 211 are distributed at an angle or vertically, concentrating the load of the upper frame 212 onto the smaller lower frame 210, and then transferring it to the keel 100 through the load-bearing frame, avoiding problems such as bending of the extension frame caused by localized stress concentration.

[0042] The upper frame 212 has the largest area and is horizontal. The fixing plate 213 is fixed to the top surface of the upper frame 212 by bolts, welding, or other methods, forming a flat mounting reference surface for the camera 7. Multiple mounting holes are provided on the fixing plate 213 for fixing the camera 7 with bolts.

[0043] The lower frame 210 and side supports 211 are connected to the load-bearing frame to provide support. The extension frame, as a trapezoidal frame that is wider at the top and narrower at the bottom, distributes the concentrated load of the upper frame 212 to the lower frame 210 through the side supports 211, and then transfers it to the load-bearing frame to avoid bending at the end of the extension frame due to load concentration.

[0044] Optionally, there are multiple side supports 211, which are respectively connected to the corners of the upper frame 212 and the lower frame 210. A reinforcing rib structure can be provided in the lower frame 210, and the reinforcing rib structure connects any two sides of the lower frame 210; several auxiliary supports can also be provided between any two side supports 211, and the auxiliary supports connect the lower frame 210 and the upper frame 212, with the auxiliary supports spaced apart from the side supports 211.

[0045] In some possible embodiments, please refer to Figures 2 to 4 The width of the load-bearing frame gradually increases along the side closest to the keel 100; a longitudinal reinforcing plate 202 is provided at the upper end of the load-bearing frame, and the end of the longitudinal reinforcing plate 202 is connected to the extension frame.

[0046] The width of the load-bearing frame gradually increases along its extension direction from the side connected to the extension frame towards the side connected to the keel 100. The load-bearing frame forms a triangular stable support structure, and the connection area between the load-bearing frame and the keel 100 is larger than the connection area between the load-bearing frame and the extension frame.

[0047] The load of camera 7 is concentrated at the end (short end) of the load-bearing frame. The structural change of the load-bearing frame causes the load on it to gradually spread from the small contact point at the end to the large connection point of the first card plate 200 through the gradually changing plate. The load-bearing frame forms a load buffer structure, which reduces the stress peak at the root of the load-bearing frame and completely avoids fatigue fracture caused by stress concentration.

[0048] A longitudinal reinforcing plate 202 is installed at the upper end of the load-bearing frame. The height of the longitudinal reinforcing plate 202 gradually increases from the end near the keel 100 towards the end of the extension frame. The longitudinal reinforcing plate 202 is a longitudinally arranged triangular structure. The longitudinal reinforcing plate 202 is connected to the side support 211. While increasing the support strength of the side support 211, it can also accurately offset the downward deflection moment at different positions, thereby improving the rigidity of the load-bearing frame and the extension frame.

[0049] Optionally, the load-bearing frame includes a front end rod, a rear end rod 203, and several supporting rods. The length of the front end rod is shorter than the length of the rear end rod 203. The front end rod is used to connect to the extension frame, and the rear end rod 203 is connected to the first clamping plate 200 to be fixed to the support member 101 of the keel 100. Several supporting rods are symmetrically arranged along the central axis of the load-bearing frame. For example, if there are three supporting rods, one of them is distributed along the central axis in the width direction of the load-bearing frame, connecting the midpoint of the front end rod and the midpoint of the rear end rod 203; the other two supporting rods are distributed on both sides of the central axis and symmetrically arranged along the central axis. Weight-reducing holes are formed between adjacent supporting rods.

[0050] Correspondingly, the number of longitudinal reinforcing plates 202 corresponds one-to-one with the supporting frame rods, and the longitudinal reinforcing plates 202 are perpendicular to the upper end face of the supporting frame rods 201. For example, there are three longitudinal reinforcing plates 202, which are also symmetrically distributed along the central axis of the width direction of the supporting frame. Furthermore, the longitudinal reinforcing plates 202 are provided with weight-reducing holes, which can be one or more. When there is only one weight-reducing hole, it is located at the center of the longitudinal reinforcing plate 202, making the longitudinal reinforcing plate 202 form a triangular frame structure.

[0051] In some possible embodiments, there are a plurality of lower mounting brackets 301, which are spaced apart along the width direction of the upper mounting bracket. Multiple lower mounting brackets 301 can be configured at intervals. During installation, multiple lower mounting brackets 301 are installed below the upper mounting bracket, which not only locks the upper mounting bracket but also supports it.

[0052] The lower mounting bracket 301 includes a lower mounting plate and a lower reinforcing plate 302. The lower reinforcing plate 302 is a triangular plate, which is fixed longitudinally below the lower mounting plate to form a reinforcing rib structure to improve the rigidity of the lower mounting plate.

[0053] Optionally, the number of lower mounting brackets 301 is the same as the number of support frame rods 201, and the lower mounting brackets 301 and support frame rods 201 are connected in a one-to-one correspondence. There are three lower mounting brackets 301, and the three lower mounting brackets 301 are fitted into the three upper support frame rods 201 in a one-to-one correspondence and are fixed with bolts.

[0054] The lower mounting bracket 301 extends along the length of the support frame, and its length is less than the length of the support frame. The length of the lower mounting bracket 301 can be set to one-half to two-thirds of the length of the support frame.

[0055] A cleanroom flow rate measurement system is also provided, which adopts the above-mentioned camera mounting structure and also includes a control module, a laser sheet light emitter 6, a tracer ion generating and releasing device 10, and a fan filter unit 9.

[0056] The control module is located in the test space of the clean room; the laser sheet light emitter 6 is located in the test space of the clean room, and the camera mounting structure is located on the output side of the laser sheet light emitter 6; the camera 7 is mounted on the upper mounting bracket; the tracer particle generating and releasing device is located at the top of the clean room; the fan filter unit 9 is located at the top of the clean room and is spaced apart from the tracer particle generating and releasing device.

[0057] For velocity field measurements in large cleanrooms, to improve detection accuracy, a spatial support frame 1 is constructed within the cleanroom to support the camera 7. The spatial support frame 1 includes multiple intersecting joists 100 to facilitate the selection of the camera 7's installation position. For example, the joists 100 can be fixedly assembled to form a 1000mm × 1000mm grid frame to facilitate the acquisition of relevant individual area images during testing, followed by full-area image aggregation. Specifically, the size of the grid frame of the spatial support frame 1 is related to the effective shooting range of the camera 7 used in PIV technology and can be adjusted according to the effective shooting range of the camera 7.

[0058] The cleanroom's fan filter unit 9, including the FFU fan filter unit 9, delivers tracer particles released by the tracer particle generator and release device into the cleanroom Fab production space. A laser emitted by the laser sheet light generator illuminates the relevant particles, and a high-speed camera 7 connected to a computer takes two images of the particles. The displacement of the tracer particles in the two images is used to calculate the magnitude and direction of the flow velocity on the relevant surface. By moving the positions of the camera 7 and the laser sheet light emitter 6, the flow field of multiple surface regions can be measured and calculated. By stitching together the velocity data from multiple surface regions, a large-area flow field can be displayed.

[0059] Compared with the prior art, the cleanroom flow velocity measurement system provided by this utility model has the following advantages: A spatial support frame 1 is installed in the cleanroom space, and the grid frame formed by the spatial support frame 1 divides the cleanroom space into multiple detection areas. A camera mounting bracket 8 is installed on the grid frame, and the camera 7 is fixed by the camera mounting bracket 8. The snap-fit ​​positioning method simplifies the installation process and operation steps of the camera mounting bracket 8, reducing the installation difficulty. Simultaneously, the support member 101 is provided with upper and lower slots, and the corresponding camera mounting bracket 8 is fixed to the support member 101 by the cooperation of the upper and lower mounting brackets 301, using an upward and downward opposing clamping method. This effectively resists the vertical movement and lateral displacement of the camera mounting bracket 8, ensuring the structural stability after connection and guaranteeing the detection accuracy of the flow velocity measurement system.

[0060] Optionally, the control module includes a control cabinet 2 located in the cleanroom. Inside the control cabinet 2 are a laser modulation synchronizer 3 and a computer host 4. The laser modulation synchronizer 3 is electrically connected to a laser sheet light emitter 6, and the computer host 4 is electrically connected to the laser modulation synchronizer 3 and a camera 7. A computer monitor 5 is also installed at the top of the control cabinet 2 to display captured images and flow rate measurement results.

[0061] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Images