A precision push-down chip performance detection device

CN224696023UActive Publication Date: 2026-08-28SUZHOU NAVITECH ELECTRONIC TECH CO LTD
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Patent Information

Application Number
CN202521667120.7
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-08-06
Publication Date
2026-08-28
Estimated Expiration
2035-08-06

AI Technical Summary

Technical Problem

当需要进行压力微调时,单机械的方式无法做到高精度下压,压力施加稳定性较差,从而对性能检测造成影响,并且压力施加过大容易造成芯片损坏

Benefits of technology

[0014]通过丝杆传动的方式提供快速下压效果,通过气体加压的方式提供稳定的精确的调压效果,从而保证芯片表面施压的稳定和精度,使得检测可靠,并且压力稳定的同时不易出现芯片被压坏的问题。

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Abstract

The utility model discloses a kind of precise lower chip performance detection devices, including screw rod lifting coarse adjustment mechanism and pneumatic fine adjustment mechanism, the moving rod end of screw rod lifting coarse adjustment mechanism is fixedly connected with pneumatic fine adjustment mechanism, the pneumatic fine adjustment mechanism includes shell cavity, piston head is provided in the shell cavity, the recessed air cavity is provided in piston head one end, gas passage is provided in the shell cavity, one end of the gas passage is connected with inlet-outlet pipe, the other end is connected with recessed air cavity through connection, piston head other end extends shell cavity and is connected with pressure sensor assembly, the pressure sensor assembly is also connected with lower heater. The utility model can stably exert pressure, guarantee the stability of detection, and chip is not easy to damage.
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