Docking device automatically opened and closed based on gas transmission
Patent Information
- Application Number
- CN202521683363.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-08-08
- Publication Date
- 2026-08-28
- Estimated Expiration
- 2035-08-08
AI Technical Summary
[0004]本实用新型要解决的技术问题是：为了解决现有对接装置较为繁琐、难以对接且带有杂质而影响半导体加工质量的技术问题，本实用新型提供一种基于气体传输自动开合的对接装置，通过对对接装置结构的改进，以便于固定气路在断开状态与连接状态之间来回进行切换，从而提高半导体的加工质量
1、本实用新型通过炉盖的移动以实现挡板部在对接状态与遮挡状态之间来回进行切换，通过配重块以实现挡板部从对接状态切换到遮挡状态，该方式结构简单，便于操作，无需额外提供驱动源，仅依靠炉盖的移动以及配重块自身重力的作用下便可实现挡板部在对接状态与遮挡状态之间自动进行切换，进而提高半导体的加工质量，同时，在不使用时，挡板部在配重块自身重力的作用下自动从对接状态切换成遮挡状态，以对连接部进行遮挡，以避免颗粒粉尘和人为落物掉落到连接部内。
Smart Images
Figure CN224698232U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of gas transmission technology, and in particular to a docking device based on automatic opening and closing of gas transmission. Background Technology
[0002] The precise control of the gas environment and the synergistic effect of vacuum systems and gas transmission in semiconductor manufacturing processes necessitate gas transmission for semiconductor vacuum equipment. Since the lifting and lowering of the furnace lid in semiconductor vacuum equipment often involves disconnecting and connecting pipelines, the connection and disconnection of the fixed gas path at the lifting point remains a challenge. Therefore, we urgently need a docking device based on automatic opening and closing of gas transmission.
[0003] Currently, the following problems exist in the connection of the furnace lid lifting pipe of semiconductor vacuum equipment: 1. The process of connecting with different organizations is quite cumbersome; 2. Common docking mechanisms often fail to connect properly or are not tightly connected, leading to air leakage; 3. Due to gravity, particulate dust or human error may sometimes fall into the air pipeline, contaminating the air pipeline that requires high cleanliness. In conclusion, all of the above issues can affect the processing quality of semiconductors. Utility Model Content
[0004] The technical problem to be solved by this utility model is that, in order to solve the technical problem that the existing docking device is cumbersome, difficult to dock, and contains impurities that affect the quality of semiconductor processing, this utility model provides a docking device based on automatic opening and closing of gas transmission. By improving the structure of the docking device, the fixed gas path can be switched back and forth between the disconnected state and the connected state, thereby improving the quality of semiconductor processing.
[0005] The technical solution adopted by this utility model to solve its technical problem is: a docking device based on automatic opening and closing of gas transmission. The docking device is located between a semiconductor vacuum device and a gas storage tank, and is used to transmit the gas stored in the gas storage tank to the semiconductor vacuum device. It includes: a connecting part, a baffle part, and two counterweights. The connecting part is located between the semiconductor vacuum device and the gas storage tank, and one side of the connecting part is connected to the gas storage tank. The baffle part is located on the other side of the connecting part and is rotatably connected to the connecting part. The counterweights are located on the side of the baffle part away from the connecting part. The two counterweights are... The baffle is not installed at either end of the baffle portion; wherein: when the furnace lid of the semiconductor vacuum equipment moves towards the side closer to the connecting portion, the furnace lid drives the baffle portion to rotate, so that the baffle portion is in a docking state, the furnace lid is connected to the connecting portion, and the gas stored in the gas storage tank can be transferred to the furnace lid through the connecting portion; when the furnace lid moves away from the connecting portion, the counterweight drives the baffle portion to rotate, so that the baffle portion is in a blocking state, the furnace lid is not connected to the connecting portion, the gas stored in the gas storage tank cannot be transferred to the furnace lid, and the baffle portion is used to block the other side of the connecting portion.
[0006] Therefore, by moving the furnace lid, the baffle can switch back and forth between the docking state and the shielding state. The counterweight can switch the baffle from the docking state to the shielding state. This method has a simple structure and is easy to operate. It does not require an additional drive source. The baffle can automatically switch between the docking state and the shielding state by relying solely on the movement of the furnace lid and the gravity of the counterweight. This improves the processing quality of semiconductors. At the same time, when not in use, the baffle automatically switches from the docking state to the shielding state under the gravity of the counterweight to shield the connection part and prevent particulate dust and human debris from falling into the connection part.
[0007] As a further improvement to the above technical solution, it also includes: two rotating shafts, which pass through the baffle portion and are connected to the baffle portion, and the rotating shafts are rotatably connected to the connecting portion.
[0008] As a further improvement to the above technical solution: the baffle part includes: a shielding plate and two connecting plates, the two connecting plates are respectively installed on both sides of the shielding plate, and the shielding plate is rotatably connected to the connecting part through the two connecting plates. The counterweight is located on the side of the connecting plate away from the connecting part, and the counterweight is installed on the connecting plate.
[0009] As a further improvement to the above technical solution, it also includes: a fixing plate, which is located on the side of the baffle portion away from the connecting portion, and the fixing plate is connected to the rotating shaft.
[0010] As a further improvement to the above technical solution: the connecting part includes: a housing, a sealing connecting plate and a transmission gas pipe, the baffle part is rotatably connected to the housing, the housing and the sealing connecting plate are connected by bolts, and multiple transmission gas pipes pass through the housing, with one end of the transmission gas pipe inserted into the gas storage tank and the other end of the transmission gas pipe inserted into the sealing connecting plate.
[0011] As a further improvement to the above technical solution: an O-ring is provided between the housing and the sealing connecting plate. Therefore, the O-ring improves the sealing effect between the housing and the sealing connecting plate, preventing the gas to be transmitted from leaking out through the gap between the housing and the sealing connecting plate.
[0012] As a further improvement to the above technical solution: a sealing groove is provided on the side of the housing near the sealing connecting plate, and the O-ring is embedded in the sealing groove.
[0013] As a further improvement to the above technical solution: the sealing connecting plate has a through hole, and the other end of the transmission air pipe is inserted into the through hole; a total of multiple transmission air pipes are provided, and the number of transmission air pipes is equal to the number of through holes.
[0014] As a further improvement to the above technical solution: the counterweight is located on the side of the connecting plate away from the shielding plate. Thus, the arrangement of the counterweight on the side of the connecting plate away from the shielding plate ensures that the counterweight and the shielding plate are located on opposite sides of the connecting plate, with the side of the connecting plate closer to the clock block being heavier. This allows the entire baffle to automatically switch from a docking state to a shielding state without external force.
[0015] As a further improvement to the above technical solution, it also includes a limiting block, which is located on the side of the rotation axis away from the baffle portion and is mounted on the connecting portion. Thus, through the cooperation of the limiting block and the counterweight, the rotation of the baffle portion is limited, so that after the baffle portion switches from the docking state to the blocking state, the blocking plate completely blocks the connecting portion.
[0016] Compared with the prior art, the beneficial effects of this utility model are: 1. This utility model achieves the switching of the baffle between the docking state and the shielding state by moving the furnace lid, and the switching of the baffle from the docking state to the shielding state is achieved by a counterweight. This method has a simple structure and is easy to operate. No additional drive source is required. The baffle can automatically switch between the docking state and the shielding state by relying solely on the movement of the furnace lid and the gravity of the counterweight, thereby improving the processing quality of semiconductors. At the same time, when not in use, the baffle automatically switches from the docking state to the shielding state under the gravity of the counterweight to shield the connection part and prevent particulate dust and human-caused objects from falling into the connection part.
[0017] 2. This utility model can improve the sealing effect between the housing and the sealing connection plate by using an O-ring, so as to prevent the gas to be transmitted from leaking out through the gap between the housing and the sealing connection plate.
[0018] 3. This utility model uses the method of setting the counterweight block on the side of the connecting plate away from the shielding plate, so that the counterweight block and the shielding plate are respectively located on both sides of the connecting plate, and the side of the connecting plate closer to the clock block is heavier. The entire baffle can automatically switch from the docking state to the shielding state without the action of external force.
[0019] 4. This utility model limits the rotation of the baffle by the cooperation of the limiting block and the counterweight, so that when the baffle switches from the docking state to the blocking state, the blocking plate completely blocks the connecting part. Attached Figure Description
[0020] The present invention will be further described below with reference to the accompanying drawings and embodiments.
[0021] Figure 1 This is a schematic diagram of the docking state of the docking device based on gas transmission automatic opening and closing according to this utility model; Figure 2 This is a first-view structural schematic diagram of the docking device based on gas transmission automatic opening and closing in the shielded state of this utility model. Figure 3 This is a schematic diagram of the structure of the docking device based on gas transmission automatic opening and closing in the shielding state from a second perspective. Figure 4 This is an exploded view of the connecting part of this utility model; Figure 5 This is a rendering of the installation effect of the docking device based on gas transmission automatic opening and closing according to this utility model.
[0022] In the diagram: 1. Connecting part; 101. Housing; 102. Sealing connection plate; 103. Transmission air pipe; 104. O-ring seal; 105. Sealing groove; 106. Through hole; 2. Baffle section; 201. Baffle plate; 202. Connecting plate; 3. Counterweight; 301. Limiting groove; 4. Rotation axis; 5. Fixing plate; 6. Limit block. Detailed Implementation
[0023] The present invention will now be described in further detail with reference to the accompanying drawings. These drawings are simplified schematic diagrams, illustrating only the basic structure of the present invention, and therefore only show the components relevant to the present invention.
[0024] In the description of this utility model, it should be understood that the terms "center," "longitudinal," "transverse," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential," etc., indicating the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, features defined with "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more.
[0025] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.
[0026] like Figures 1 to 5The diagram shows the preferred embodiment of this utility model. This embodiment features an automatic opening and closing docking device based on gas transfer. The docking device is located between a semiconductor vacuum device and a gas storage tank, and is used to transfer gas stored in the gas storage tank to the semiconductor vacuum device. It includes: a connecting part 1, a baffle part 2, and two counterweights 3. The connecting part 1 is located between the semiconductor vacuum device and the gas storage tank, and one side of the connecting part 1 is connected to the gas storage tank. The baffle part 2 is located on the other side of the connecting part 1, and the baffle part 2 is rotatably connected to the connecting part 1. The counterweights 3 are located on the side of the baffle part 2 away from the connecting part 1. The two counterweights 3 are... Do not install at both ends of the baffle part 2; wherein: when the furnace cover of the semiconductor vacuum equipment moves to the side closer to the connecting part 1, the furnace cover drives the baffle part 2 to rotate so that the baffle part 2 is in a docking state, the furnace cover is connected to the connecting part 1, and the gas stored in the gas storage tank can be transferred to the furnace cover through the connecting part 1; when the furnace cover moves to the side away from the connecting part 1, the counterweight 3 drives the baffle part 2 to rotate so that the baffle part 2 is in a blocking state, the furnace cover is not connected to the connecting part 1, the gas stored in the gas storage tank cannot be transferred to the furnace cover, and the baffle part 2 is used to block the other side of the connecting part 1. Therefore, by moving the furnace lid, the baffle 2 can switch back and forth between the docking state and the shielding state. The counterweight 3 can switch the baffle 2 from the docking state to the shielding state. This method has a simple structure and is easy to operate. No additional drive source is required. The baffle 2 can automatically switch between the docking state and the shielding state by relying solely on the movement of the furnace lid and the gravity of the counterweight 3, thereby improving the semiconductor processing quality. At the same time, when not in use, the baffle 2 automatically switches from the docking state to the shielding state under the gravity of the counterweight 3 to shield the connection part 1 and prevent particulate dust and human debris from falling into the connection part 1.
[0027] It should be noted that: I. For example Figure 1 As shown, the shielding part being in the docking state means that the connecting plate 202 of the shielding part and the connecting part 1 are perpendicular to each other; II. Figure 2 , Figure 3 As shown, the state of the shielding part being shielded means that the connecting plate 202 of the shielding part is parallel to the connecting part 1, and the shielding plate 201 is located directly above the connecting part 1.
[0028] In this embodiment, it also includes: two rotating shafts 4, which pass through the baffle portion 2 and are connected to the baffle portion 2, and the rotating shafts 4 are rotatably connected to the connecting portion 1.
[0029] In this embodiment, the baffle part 2 includes a baffle plate 201 and two connecting plates 202. The two connecting plates 202 are respectively installed on both sides of the baffle plate 201, and the baffle plate 201 is rotatably connected to the connecting part 1 through the two connecting plates 202. The counterweight 3 is located on the side of the connecting plate 202 away from the connecting part 1, and the counterweight 3 is installed on the connecting plate 202. Specifically, the rotating shaft 4 passes through the connecting plate 202 and is connected to the connecting plate 202.
[0030] In this embodiment, it also includes a fixing piece 5, which is located on the side of the baffle portion 2 away from the connecting portion 1, and the fixing piece 5 is connected to the rotating shaft 4.
[0031] In this embodiment, the connecting part 1 includes: a housing 101, a sealing connecting plate 102, and a transmission air pipe 103. The baffle part 2 is rotatably connected to the housing 101. The housing 101 and the sealing connecting plate 102 are connected by bolts. Multiple transmission air pipes 103 penetrate the housing 101, with one end of each transmission air pipe 103 inserted into a gas storage tank and the other end inserted into the sealing connecting plate 102. An O-ring seal 104 is provided between the housing 101 and the sealing connecting plate 102. A sealing groove 105 is provided on the side of the housing 101 near the sealing connecting plate 102, and the O-ring seal 104 is embedded in the sealing groove 105. The sealing connecting plate 102 has a through hole 106, and the other end of each transmission air pipe 103 is inserted into the through hole 106. Multiple transmission air pipes 103 are provided, and the number of transmission air pipes 103 is equal to the number of through holes 106. Therefore, the O-ring 104 can improve the sealing effect between the housing 101 and the sealing connecting plate 102, so as to prevent the gas to be transmitted from leaking out through the gap between the housing 101 and the sealing connecting plate 102.
[0032] Specifically, the rotating shaft 4 is rotatably connected to the housing 101.
[0033] In this embodiment, the counterweight 3 is located on the side of the connecting plate 202 away from the shielding plate 201. Therefore, this arrangement ensures that the counterweight 3 and the shielding plate 201 are located on opposite sides of the connecting plate 202, with the side of the connecting plate 202 closer to the clock block being heavier. This allows the entire baffle section 2 to automatically switch from a docking state to a shielding state without external force.
[0034] In this embodiment, a limiting block 6 is also included. The limiting block 6 is located on the side of the rotating shaft 4 away from the baffle portion 2, and the limiting block 6 is mounted on the connecting portion 1. Thus, through the cooperation of the limiting block 6 and the counterweight block 3, the rotation of the baffle portion 2 is limited, so that after the baffle portion 2 switches from the docking state to the blocking state, the blocking plate 201 completely blocks the connecting portion 1 (i.e., the blocking plate 201 is located directly above the sealing connecting plate 102).
[0035] Specifically, a limiting groove 301 is provided on the side of the counterweight 3 near the limiting block 6, and the end of the limiting block 6 away from the housing 101 extends into the limiting groove 301; during the process of the baffle part 2 switching from the blocking state to the docking state, the limiting block 6 will not interfere with the rotation of the baffle part 2. During the process of the baffle part 2 switching from the docking state to the blocking state, when the limiting block 6 abuts against the counterweight 3, it indicates that the baffle part 2 has switched from the docking state to the blocking state, and the baffle part 2 no longer rotates, and the blocking plate 201 completely blocks the connecting part 1.
[0036] Specifically, the limiting block 6 is installed on the housing 101.
[0037] The gas transfer process of this semiconductor vacuum equipment is as follows: First, the furnace cover and the sealing connecting plate 102 are not in contact; at this time, the semiconductor vacuum equipment is not transferring gas. Next, the furnace cover moves towards the side closer to the connecting part 1. After the furnace cover contacts the fixing plate 5, pressure is applied to the baffle part 2 through the fixing plate 5. With the cooperation of the rotating shaft 4, the baffle part 2 is moved from a blocking state (e.g., ...). Figure 2 , Figure 3 (As shown) Switch to docking mode (as shown) Figure 1 As shown), to achieve automatic opening of the entire docking device, after the furnace cover contacts the sealing connecting plate 102, the valve of the furnace cover (not shown in the figure) and the valve of the gas storage tank (not shown in the figure) are opened to allow the gas to be transferred from the gas storage tank to the furnace cover; finally, after the gas to be transferred is transferred, the valve of the furnace cover and the valve of the gas storage tank are closed. At this time, the furnace cover moves away from the side of the furnace cover, and with the cooperation of the counterweight 3, the baffle part 2 moves from the docking state (as shown in the figure) to the docking state. Figure 1 (As shown) Switch to occlusion mode (e.g.) Figure 2 , Figure 3 As shown in the figure, this is to achieve automatic closure of the entire docking device.
[0038] In summary, this invention achieves the switching of the baffle 2 between the docking state and the shielding state by moving the furnace lid, and the switching of the baffle 2 from the docking state to the shielding state by the counterweight 3. This method has a simple structure, is easy to operate, and does not require an additional driving source. The baffle 2 can automatically switch between the docking state and the shielding state by relying solely on the movement of the furnace lid and the gravity of the counterweight 3, thereby improving the semiconductor processing quality. At the same time, when not in use, the baffle 2 automatically switches from the docking state to the shielding state under the gravity of the counterweight 3 to shield the connecting part 1 and prevent particulate dust and human-caused objects from falling into the connecting part 1.
[0039] The above description is based on the preferred embodiments of this utility model. Through the above description, those skilled in the art can make various changes and modifications without departing from the technical concept of this utility model. The technical scope of this utility model is not limited to the contents of the specification, but must be determined by the scope of the claims.
Claims
1. A docking device based on automatic opening and closing of gas transfer, wherein the docking device is located between a semiconductor vacuum device and a gas storage tank, and is used to transfer gas stored in the gas storage tank to the semiconductor vacuum device, characterized in that, include: A connecting part (1) is located between the semiconductor vacuum equipment and the gas storage box, and one side of the connecting part (1) is connected to the gas storage box; A baffle portion (2) is located on the other side of the connecting portion (1), and the baffle portion (2) is rotatably connected to the connecting portion (1); Two counterweights (3) are located on the side of the baffle part (2) away from the connecting part (1), and the two counterweights (3) are respectively installed at both ends of the baffle part (2); Wherein: when the furnace cover of the semiconductor vacuum equipment moves to the side closer to the connecting part (1), the furnace cover drives the baffle part (2) to rotate so that the baffle part (2) is in a docking state, the furnace cover is connected to the connecting part (1), and the gas stored in the gas storage box can be transferred to the furnace cover through the connecting part (1). When the furnace cover moves away from the connecting part (1), the counterweight (3) drives the baffle part (2) to rotate so that the baffle part (2) is in a blocking state, the furnace cover is not connected to the connecting part (1), the gas stored in the gas storage box cannot be transferred to the furnace cover, and the baffle part (2) is used to block the other side of the connecting part (1).
2. The docking device based on gas transmission for automatic opening and closing according to claim 1, characterized in that, Also includes: Two rotating shafts (4) pass through the baffle part (2) and are connected to the baffle part (2). The rotating shafts (4) are rotatably connected to the connecting part (1).
3. The docking device based on gas transmission for automatic opening and closing according to claim 1, characterized in that, The baffle portion (2) includes: A shield (201) and two connecting plates (202) are provided. The two connecting plates (202) are respectively installed on both sides of the shield (201). The shield (201) is rotatably connected to the connecting part (1) through the two connecting plates (202). The counterweight (3) is located on the side of the connecting plate (202) away from the connecting part (1). The counterweight (3) is installed on the connecting plate (202).
4. The docking device based on gas transmission for automatic opening and closing according to claim 2, characterized in that, Also includes: The fixing piece (5) is located on the side of the baffle part (2) away from the connecting part (1), and the fixing piece (5) is connected to the rotating shaft (4).
5. The docking device based on gas transmission for automatic opening and closing according to claim 1, characterized in that, The connecting part (1) includes: The housing (101), the sealing connecting plate (102), and the transmission air pipe (103) are provided. The baffle part (2) is rotatably connected to the housing (101). The housing (101) and the sealing connecting plate (102) are connected by bolts. Multiple transmission air pipes (103) pass through the housing (101). One end of the transmission air pipe (103) is inserted into the gas storage tank, and the other end of the transmission air pipe (103) is inserted into the sealing connecting plate (102).
6. The docking device based on gas transmission for automatic opening and closing according to claim 5, characterized in that, An O-ring (104) is provided between the housing (101) and the sealing connection plate (102).
7. The docking device based on gas transmission for automatic opening and closing according to claim 6, characterized in that, The housing (101) has a sealing groove (105) on the side near the sealing connecting plate (102), and the O-ring (104) is embedded in the sealing groove (105).
8. The docking device based on gas transmission for automatic opening and closing according to claim 5, characterized in that, The sealing connection plate (102) has a through hole (106), and the other end of the transmission air pipe (103) is inserted into the through hole (106); Multiple transmission air pipes (103) are provided, and the number of transmission air pipes (103) is equal to the number of through holes (106).
9. The docking device based on gas transmission for automatic opening and closing according to claim 3, characterized in that, The counterweight (3) is located on the side of the connecting plate (202) away from the shielding plate (201).
10. The docking device based on gas transmission for automatic opening and closing according to claim 2, characterized in that, Also includes: The limiting block (6) is located on the side of the rotating shaft (4) away from the baffle (2) and is mounted on the connecting part (1).