Water-cooled unit for simple harmonic filter dust collector

Abstract

This utility model relates to the field of water cooling for dust collectors, specifically a water cooling device for a harmonic filter dust collector. It includes a cooling plate fitted onto a tube sheet. The cooling plate has internal cooling water channels with inlets and outlets extending through the outer wall of the cooling plate. The cooling plate also has ventilation holes corresponding to the ventilation holes in the tube sheet. This harmonic filter dust collector water cooling device cools the cooling plate through internal water circulation. Furthermore, the tube sheet is cooled through metal heat conduction. This ensures that the tube sheet, initially in contact with hot air, is cooled more quickly, improving the cooling efficiency of the dust collector's interior. It also ensures that excess heat is carried away during operation, reducing the working temperature of the filter bags, extending their lifespan, and preventing an increase in furnace pressure in the single crystal furnace, which could ultimately lead to an increase in the oxygen content of the crystal rods.

Description

Technical Field

[0001] This utility model relates to the field of water cooling for dust collectors, specifically to a water cooling device for a simple harmonic filter dust collector. Background Technology

[0002] Semiconductor material production uses CZ-Chorski Czochralski single crystal technology, with furnace temperatures ranging from 1416℃ to 1570℃ and a total operating time of 510 hours per furnace. During long-term operation, the internal temperature of the harmonic filter dust collector is around 120℃-600℃. The PTEF filter bags we use can only withstand working environments of ≤200℃, which will cause the dust collector filter bags to shrink in diameter, deform, and break at high temperatures.

[0003] Chinese patent application number CN201520955350.3 discloses a simple harmonic dust collector for monocrystalline silicon and polycrystalline silicon, which can reduce the contamination of vacuum oil, greatly extend the replacement cycle of vacuum oil, and most importantly, greatly extend the continuous production time of monocrystalline silicon and polycrystalline silicon, thus significantly reducing equipment, time, labor, and raw material costs.

[0004] However, in the semiconductor materials manufacturing industry, furnaces generate a mixture of high-temperature silica dust, carbon monoxide, carbon dioxide, silica, and silica-argon gas. The furnace is connected to a harmonic filter dust collector via pipes, storing the volatiles at the bottom of the dust collector. A main pump connected to the dust collector provides suction to expel the gas from the furnace. The high-temperature gases and volatiles generated inside the furnace cause the filter bags to be exposed to high temperatures for extended periods, leading to filter bag shrinkage, deformation, and perforation. Once the filter bags are damaged, the volatiles generated inside the furnace are directly sucked into the main pump, causing it to jam, seriously affecting production safety and product quality. Simultaneously, filter bag problems can lead to increased furnace pressure in the single crystal furnace, ultimately resulting in increased oxygen content in the crystal rods, affecting product quality.

[0005] Therefore, it is necessary to design a simple harmonic filter dust collector water cooling device that can remove excess heat during device operation, reduce the temperature of the filter bag's working environment, extend the filter bag's service life, and prevent the single crystal furnace pressure from increasing, which would ultimately lead to an increase in the oxygen content of the crystal rods. Utility Model Content

[0006] The purpose of this utility model is to provide a water-cooling device for a simple harmonic filter dust collector.

[0007] To achieve this objective, the present invention adopts the following technical solution: A water-cooling device for a simple harmonic filter dust collector is provided, including a cooling plate, which is fitted and installed above the tube sheet. The cooling plate has cooling water channels inside, and the inlet and outlet of the cooling water channels extend out of the outer wall of the cooling plate. The cooling plate has air holes that correspond one-to-one with the air vents of the tube sheet.

[0008] Furthermore, the cooling water channel is curved to bypass multiple rows of air vents.

[0009] Furthermore, the diameter of the cooling water channel cross-section is 10mm.

[0010] Furthermore, the cooling plate is made of stainless steel.

[0011] Furthermore, the cooling plate has annular steps on both the top and bottom sides.

[0012] Furthermore, the cooling plate has multiple connection holes in its circumferential direction for bolts to pass through.

[0013] Furthermore, the pressure at the inlet is greater than 1.5 MPa.

[0014] The beneficial effects of this invention are as follows: This simple harmonic filter dust collector water-cooling device cools the cooling plate through internal water-cooling circulation. Furthermore, the tube sheet is cooled through metal heat conduction. This ensures that the tube sheet, which initially comes into contact with hot air, is cooled more quickly, improving the cooling efficiency inside the dust collector. It also ensures that excess heat is carried away during operation, reducing the working temperature of the filter bags, extending their service life, and preventing an increase in furnace pressure in the single crystal furnace, which could ultimately lead to an increase in the oxygen content of the crystal rods.

[0015] Furthermore, the modification and installation structures are simple, making it easy to adapt to dust collectors of different sizes, manufacturers, and models. It also features low technical upgrade investment, high adaptability, and does not affect the dust collector's filtration efficiency. Attached Figure Description

[0016] To more clearly illustrate the technical solutions of the embodiments of this utility model, the accompanying drawings used in the embodiments of this utility model will be briefly introduced below.

[0017] Figure 1 This is a schematic diagram showing the installation status of the cooling plate; Figure 2 for Figure 1 A three-dimensional structural breakdown diagram; Figure 3 This is a schematic diagram of the three-dimensional structure of the cooling plate; Figure 4 This is a schematic diagram of the cooling water channel configuration of the cooling plate. Figure 5 This is a schematic diagram of the position of the perforated plate in the prior art; In the diagram: 1. Cooling plate; 1a. Cooling water channel; 1b. Water inlet; 1c. Water outlet; 1d. Vent hole; 1e. Annular step; 1f. Connecting hole; 2. Flower plate; 2a. Vent hole. Detailed Implementation

[0018] The technical solution of this utility model will be further described below with reference to the accompanying drawings and specific embodiments.

[0019] The accompanying drawings are for illustrative purposes only and are schematic diagrams, not actual images. They should not be construed as limiting the scope of this patent. To better illustrate the embodiments of this utility model, some parts in the drawings may be omitted, enlarged, or reduced, and do not represent the actual dimensions of the product.

[0020] Reference Figures 1 to 5 The water-cooling device for the harmonic filter dust collector shown includes a cooling plate 1, which is fitted onto the tube sheet 2. The cooling plate 1 has cooling water channels 1a inside, with inlets 1b and outlets 1c extending from the outer wall of the cooling plate 1. The cooling plate 1 has air holes 1d corresponding to the air vents 2a of the tube sheet. The cooling plate 1 is cooled by water circulation within it. Then, through metal heat conduction, the tube sheet 2 is cooled, ensuring that the tube sheet 2, initially in contact with hot air, is cooled more quickly, improving the cooling efficiency inside the dust collector. This ensures that excess heat is carried away during operation, reducing the working temperature of the filter bags, extending their lifespan, and preventing an increase in furnace pressure in the single crystal furnace, which could ultimately lead to an increase in the oxygen content of the crystal rods.

[0021] When a 100°C high-temperature airflow passes through the vent 2a, the heat is reduced by 34.7%, and the airflow intensity remains unchanged; this can both ensure the pumping speed of the main pump and effectively reduce the temperature of the main pump.

[0022] The inlet 1b of the cooling water channel 1a can share the cooling water with the single crystal furnace, which does not require additional complex water supply structure design.

[0023] The cooling water channel 1a is curved and bypasses multiple rows of air vents 1d. By configuring the cooling water channel 1a in a curved manner, the cooling water can be heated within the cooling plate 1 for a longer period of time, thereby achieving a better cooling effect.

[0024] The cooling water channel 1a has a cross-sectional diameter of 10mm. This 10mm design allows the circulating water to reduce the temperature inside the dust collector to <60℃, effectively preventing problems such as high-temperature shrinkage, deformation, and rupture of the filter bags inside the dust collector, and extending the filter bag's service life by more than 4 times.

[0025] The cooling plate 1 is made of stainless steel. The stainless steel material can be either 304 or 316 stainless steel.

[0026] The cooling plate 1 has annular steps 1e on both its upper and lower sides. By setting the annular steps 1e, it is possible to make it more tightly fitted to the dust collector during installation.

[0027] The cooling plate 1 has multiple connecting holes 1f along its circumference for bolts to pass through. Through these connecting holes 1f, the cooling plate 1 can be clamped between the upper and lower tanks, and then connected with bolts to complete the installation. This installation method ensures that the outer circumference of the cooling plate 1 is unobstructed, and the inlet 1b and outlet 1c are located outside the tank, facilitating direct connection. The simplified installation structure does not increase additional costs, and the installation is relatively easy. This makes it highly adaptable, easily compatible with dust collectors of different sizes, manufacturers, and models. Furthermore, it requires minimal technical upgrade investment, offers high adaptability, and does not affect the dust collector's filtration efficiency.

[0028] The pressure at inlet 1b is greater than 1.5 MPa, which enables the heat inside the harmonic filter dust collector to be fully removed, reducing the temperature inside the tank.

[0029] The above are merely preferred embodiments of the present invention. It should be noted that those skilled in the art can make various improvements and modifications without departing from the technical principles of the present invention, and these improvements and modifications should also be considered within the scope of protection of the present invention.

Claims

1. A water-cooling device for a simple harmonic filter dust collector, characterized in that, Includes a cooling plate (1), which is attached to the top of the tube sheet (2). The cooling plate (1) has a cooling water channel (1a) inside. The inlet (1b) and outlet (1c) of the cooling water channel (1a) extend out of the outer wall of the cooling plate (1). The cooling plate (1) has air holes (1d) that correspond one-to-one with the air vents (2a) of the tube sheet.

2. The water-cooling device for a simple harmonic filter dust collector as described in claim 1, characterized in that, The cooling water channel (1a) is curved and bypasses multiple rows of air vents (1d).

3. The water-cooling device for the simple harmonic filter dust collector as described in claim 1, characterized in that, The cross-sectional diameter of the cooling water channel (1a) is 10 mm.

4. The water-cooling device for a simple harmonic filter dust collector as described in claim 1, characterized in that, The material of the cooling plate (1) is stainless steel.

5. The water-cooling device for a simple harmonic filter dust collector as described in claim 1, characterized in that, The cooling plate (1) has annular steps (1e) on both the upper and lower sides.

6. The water-cooling device for a simple harmonic filter dust collector as described in claim 1, characterized in that, The cooling plate (1) has multiple connecting holes (1f) in the circumferential direction for bolts to pass through.

7. The water-cooling device for a simple harmonic filter dust collector as described in claim 1, characterized in that, The pressure at the inlet (1b) is greater than 1.5 MPa.

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