A foam filter

Abstract

This utility model relates to the field of filtration technology and discloses a foam filter. The foam filter includes a first plate and a second plate arranged opposite to each other. The first plate has multiple air inlets, and the second plate has multiple air outlets, with each air inlet corresponding to one air outlet. A surrounding plate connects the first plate and the second plate. Multiple foam modules are arranged side by side in a receiving space and spaced apart in a first direction. Each foam module includes a first surface and a second surface arranged in the first direction, both of which are the large surfaces of the foam module. A partition is connected between any two adjacent foam modules, separating the two adjacent foam modules. The air inlets and outlets corresponding to the foam modules are located on both sides of the foam module in the first direction, with the first surface being the windward surface. This solution improves the problem that foam filters are difficult to meet the increasingly stringent AMC control requirements of cleanrooms.

Description

Technical Field

[0001] This utility model relates to the field of filtration technology, and in particular to a foam filter. Background Technology

[0002] In the semiconductor manufacturing industry, airborne molecular contaminants (AMCs)—such as acidic gases HF and SO2, alkaline gases NH3, and volatile organic compounds (VOCs)—can cause circuit board corrosion or photolithography process failure. Therefore, chemical filters are typically used to control AMC concentrations at the ppb level. In recent years, the development of advanced semiconductor processes has placed even stricter demands on AMC control. For example, the control of recalcitrant organic compounds in activated carbon (RC) requires specialized filters to reduce the RC concentration to below 0.1 ppbv to protect the lithography machine lens.

[0003] Currently, installing chemical filters on FFUs is the main method for controlling AMC (Air Quality Management) in cleanrooms, and foam filters are a commonly used type of chemical filter. Foam filters have the characteristics of strong decontamination ability and low pressure loss; however, their filtration performance in limited spaces is difficult to meet the increasingly stringent control trends of cleanroom AMC. Utility Model Content

[0004] This invention provides a foam filter to improve the problem that foam filters are difficult to meet the increasingly stringent control trends of cleanroom AMC.

[0005] To achieve the above objectives, this utility model provides the following technical solution:

[0006] A foam filter, comprising:

[0007] The first plate and the second plate are arranged opposite to each other. The first plate is provided with multiple air inlets, and the second plate is provided with multiple air outlets. The multiple air inlets and the multiple air outlets correspond one-to-one.

[0008] A surrounding panel is connected between the first plate and the second plate, and the surrounding panel, together with the first plate and the second plate, forms a circumferentially closed receiving space;

[0009] The spacer includes a baffle and multiple foam modules corresponding to the air inlets. The multiple foam modules are arranged side by side and spaced apart in a first direction in the accommodating space. Each foam module includes a first surface and a second surface arranged in the first direction, and the first surface and the second surface are the large surfaces of the foam module. All surfaces of any foam module other than the first surface and the second surface are closed. A baffle is connected between any two adjacent foam modules, and the baffle blocks the path between the two adjacent foam modules. The air inlets and air outlets corresponding to the foam modules are respectively located on both sides of the foam modules in the first direction, and the first surface is the windward surface.

[0010] Optionally, the enclosure panel, together with the first plate and the second plate, forms a cuboid structure, with the first direction parallel to the direction of the longest side of the cuboid.

[0011] Optionally, the foam module has a cuboid structure.

[0012] Optionally, both the first surface and the second surface are perpendicular to the first direction.

[0013] Optionally, the two foam modules on both sides of the partition are a first foam module and a second foam module, respectively;

[0014] The partition is fixed in the receiving space. The partition includes a first baffle, a second baffle, and a connecting plate. The first baffle is located on the side of the first foam module facing the first plate and closes the surface of the first foam module facing the first plate. The second baffle is located on the side of the second foam module facing the second plate and closes the surface of the second foam module facing the second plate. The connecting plate connects the first plate and the second plate and blocks the path between the first foam module and the second foam module.

[0015] Optionally, the partition includes a first limiting plate, which is connected to the end of the first baffle away from the connecting plate and fits against the first surface of the first foam module, extending in the direction from the first plate to the second plate; the connecting plate, the first baffle, and the first limiting plate cooperate to limit the first foam module.

[0016] Optionally, the partition includes a second limiting plate, which is connected to the end of the second baffle away from the connecting plate and fits against the second surface of the second foam module, extending in the direction from the second plate to the first plate; the connecting plate, the second baffle, and the second limiting plate cooperate to limit the second foam module.

[0017] Optionally, it includes a first positioning plate fixed within the receiving space, the first positioning plate being located on the side of the first foam module facing the second plate in the first direction;

[0018] The first positioning plate forms a limiting groove, and the end of the first foam module in the first direction that is closer to the second plate is limited in the limiting groove.

[0019] Optionally, a second positioning plate is fixed within the receiving space, the second positioning plate being located on the side of the last foam module in the first direction facing the first plate body;

[0020] The second positioning plate forms a limiting groove, and the end of the last foam module in the first direction that is closer to the first plate is limited in the limiting groove.

[0021] Optionally, at least one of the first and second sides of the foam module is covered with a carbon fiber filter cloth.

[0022] In this application, multiple foam modules are arranged at intervals along a first direction in the containment space, and one large surface (i.e., the first surface) of each foam module is the windward surface, and the other large surface (i.e., the second surface) is the air outlet surface. Compared with the case of setting a whole foam module in the containment space in related technologies, it can increase the total windward area of ​​the filter unit (i.e., the above-mentioned multiple foam modules) in the foam filter, which is conducive to improving the filtration performance of the foam filter and reducing wind resistance, thereby saving energy consumption, and thus better meeting the increasingly stringent control requirements of cleanroom AMC in limited spaces. Attached Figure Description

[0023] Figure 1 A schematic diagram of the structure of a foam filter provided in an embodiment of this utility model;

[0024] Figure 2 for Figure 1 The image shows a cross-sectional view (AA) of the foam filter.

[0025] Figure 3 for Figure 1 A diagram showing the foam filter in direction B;

[0026] Figure 4 A schematic diagram of a partial structure of a foam filter provided in an embodiment of this utility model;

[0027] Icons: 1-First plate; 11-Air inlet; 2-Second plate; 21-Exhaust outlet; 3-Enclosure; 4-Baffle; 41-First baffle; 42-Second baffle; 43-Connecting plate; 44-First limiting plate; 45-Second limiting plate; 5-Foam module; 51-First side; 52-Second side; 5A-First foam module; 5B-Second foam module; 6-First positioning plate; 7-Second positioning plate; 8-Carbon-reinforced filter cloth. Detailed Implementation

[0028] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0029] Figure 1 This is a schematic diagram of the structure of a foam filter provided in an embodiment of this application. Figure 2 for Figure 1 The image shows an AA cross-sectional view of the foam filter. Figure 1 and Figure 2 As shown in the figure, a foam filter provided in this application embodiment includes a first plate 1, a second plate 2, a surrounding plate 3, a baffle 4, and multiple foam modules 5. The first plate 1 and the second plate 2 are arranged opposite to each other. The first plate 1 has multiple air inlets 11, and the second plate 2 has multiple air outlets 21, with each air inlet 11 corresponding to one air outlet 21. The surrounding plate 3 connects the first plate 1 and the second plate 2, forming a circumferentially closed containment space M together with the first plate 1 and the second plate 2; that is, the surrounding plate 3 has no holes. The surrounding plate 3 serves as structural support and airflow containment.

[0030] The aforementioned multiple foam modules 5 correspond one-to-one with the aforementioned multiple air inlets 11, and the multiple foam modules 5 are arranged side by side in the accommodating space M and spaced apart in the first direction N; each foam module 5 includes a first surface 51 and a second surface 52 arranged in the first direction N, and the first surface 51 and the second surface 52 are the large surfaces of the foam module 5, that is, the area of ​​the first surface 51 and the second surface 52 is larger than the area of ​​the other surfaces of the foam module 5; furthermore, the surfaces of any foam module 5 other than the first surface 51 and the second surface 52 are all closed; any two adjacent foam modules 5 are connected by a partition 4, which blocks the path between the two adjacent foam modules 5 (that is, isolates the two adjacent foam modules 5); the air inlets 11 and the exhaust outlets 21 corresponding to the foam modules 5 are respectively located on both sides of the foam module 5 in the first direction N, and the first surface 51 of the foam module 5 is the windward surface. In other words, the first surface 51 and the second surface 52 of the foam module 5 are located between the air inlet 11 and the air outlet 21 corresponding to the foam module 5, and the first surface 51 is closer to the air inlet 11.

[0031] The foam module 5 cannot be folded. In this application, multiple foam modules 5 are arranged at intervals along the first direction N in the accommodating space M, and one large surface (i.e., the first surface 51) of each foam module 5 is the windward surface, and the other large surface (i.e., the second surface 52) is the air outlet surface. Compared with the case of setting a whole foam module 5 in the accommodating space M in the related technology, the total windward area of ​​the filter unit (i.e., the above-mentioned multiple foam modules 5) in the foam filter can be increased, which is conducive to improving the filtration performance of the foam filter and reducing wind resistance, thereby saving energy consumption, and thus better meeting the increasingly strict control requirements of cleanroom AMC in a limited space.

[0032] For example, the foam module 5 can be a polyurethane module.

[0033] It is easy to understand that each air inlet 11 can be independent or interconnected. As long as the airflow enters from the first surface 51 of each foam module 5 and exits from the second surface 52 of that foam module 5, it is acceptable. It is easy to understand that the surfaces of the foam module 5 other than the first surface 51, the second surface 52, the surface facing the first plate 1, and the surface facing the second plate 2 are enclosed by the enclosure 3.

[0034] In specific implementation, the connection between the enclosure 3 and the first plate 1 and the second plate 2 can be either welded or screwed, etc., and the specific connection method is not limited in this application. Figure 3 As shown, the enclosure 3 may be provided with through holes for each foam module 5 to pass through, so as to facilitate the installation and maintenance of each foam module 5. Of course, the above-mentioned through holes may not be provided on the enclosure 3. Instead, the enclosure 3 is first connected to the first plate 1, and after each foam module 5 is installed into the receiving space M, the enclosure 3 is then connected to the second plate 2.

[0035] In some embodiments, the enclosure 3, together with the first plate 1 and the second plate 2, forms a cuboid structure. The first direction N is parallel to the direction of the longest side of the cuboid, so that more foam modules 5 can be arranged in the accommodating space M, thereby maximizing the total windward area of ​​the filter units (i.e., the multiple foam modules 5) in the foam filter.

[0036] In some embodiments, the foam module 5 is a cuboid structure. It is easy to understand that the cuboid foam module 5 can be a hollow structure or a solid structure. When the foam module 5 is a solid cuboid structure, the filtration effect is better.

[0037] Please continue to refer to Figure 2 Both the first surface 51 and the second surface 52 are perpendicular to the first direction N, so as to set more foam modules 5 in the accommodating space M, thereby maximizing the total windward area of ​​the filter unit (i.e., the above-mentioned multiple foam modules 5) in the foam filter.

[0038] Please continue to refer to Figure 2 The two foam modules 5 on both sides of the partition 4 are respectively the first foam module 5A and the second foam module 5B. In some embodiments, the partition 4 is fixed in the receiving space M. The partition 4 includes a first baffle 41, a second baffle 42 and a connecting plate 43. The first baffle 41 is located on the side of the first foam module 5A facing the first plate 1 and closes the surface of the first foam module 5A facing the first plate 1. The second baffle 42 is located on the side of the second foam module 5B facing the second plate 2 and closes the surface of the second foam module 5B facing the second plate 2. The connecting plate 43 connects the first plate 1 and the second plate 2 and blocks the path between the first foam module 5A and the second foam module 5B.

[0039] Furthermore, the baffle 4 also includes a first limiting plate 44, which is connected to the end of the first baffle 41 away from the connecting plate 43, and extends in the direction from the first plate 1 to the second plate 2, conforming to the first surface 51 of the first foam module 5A. The connecting plate 43, the first baffle 41, and the first limiting plate 44 cooperate to limit and support the first foam module 5A. It is easy to understand that, in order to reduce the loss of windward area, the length of the first limiting plate 44 in the direction from the first plate 1 to the second plate 2 will not be too long, as long as it can cooperate with the connecting plate 43 and the first baffle 41 to limit the first foam module 5A.

[0040] In some embodiments, the partition 4 includes a second limiting plate 45, which is connected to the end of the second baffle 42 away from the connecting plate 43, and extends in the direction from the second plate 2 to the first plate 1, conforming to the second surface 52 of the second foam module 5B. The connecting plate 43, the second baffle 42, and the second limiting plate 45 cooperate to limit and support the second foam module 5B. It is easy to understand that, in order to reduce the loss of windward area, the length of the second limiting plate 45 in the direction from the second plate 2 to the first plate 1 will not be too long, as long as it can cooperate with the connecting plate 43 and the second baffle 42 to limit the first foam module 5A.

[0041] In this embodiment, the baffle 4 can guide the airflow to pass through the designated foam module 5 in an orderly manner.

[0042] Please continue to refer to Figure 2 In some embodiments, the foam filter includes a first positioning plate 6 fixed within the receiving space M, the first positioning plate 6 being located on the side of the first foam module 5 facing the second plate 2 in the first direction N. The first positioning plate 6 forms a limiting groove, and the end of the first foam module 5 in the first direction N near the second plate 2 is confined in the limiting groove to achieve installation and fixation.

[0043] Please continue to refer to Figure 2 In some embodiments, the foam filter includes a second positioning plate 7 fixed within the receiving space M. The second positioning plate 7 is located on the side of the last foam module 5 in the first direction N facing the first plate 1. The second positioning plate 7 forms a limiting groove, and the end of the last foam module 5 in the first direction N near the first plate 1 is limited in the limiting groove to achieve installation and fixation.

[0044] It is easy to understand that the first positioning plate 6 and the second positioning plate 7 are used to support the foam module 5 and seal the corresponding surfaces of the foam module 5.

[0045] like Figure 4 As shown, in some embodiments, at least one of the first surface 51 and the second surface 52 of at least one foam module 5 is covered with carbon-reinforced filter cloth 8 to further improve the filtration performance of the foam filter.

[0046] In specific implementation, at least one of the first surface 51 and the second surface 52 of one or more foam modules 5 may be covered with carbon-reinforced filter cloth 8. Taking a foam module 5 as an example, either the first surface 51 or the second surface 52 may be covered with carbon-reinforced filter cloth 8, or both the first surface 51 and the second surface 52 may be covered with carbon-reinforced filter cloth 8.

[0047] For example, the carbon-coated filter cloth 8 can be adhered to the corresponding first side 51 or second side 52.

[0048] Obviously, those skilled in the art can make various modifications and variations to this utility model without departing from its spirit and scope. Therefore, if these modifications and variations fall within the scope of the claims of this utility model and their equivalents, this utility model also intends to include these modifications and variations.

Claims

1. A foam filter, characterized in that, include: The first plate and the second plate are arranged opposite to each other. The first plate is provided with multiple air inlets, and the second plate is provided with multiple air outlets. The multiple air inlets and the multiple air outlets correspond one-to-one. A surrounding panel is connected between the first plate and the second plate, and the surrounding panel, together with the first plate and the second plate, forms a circumferentially closed receiving space; The spacer includes a baffle and multiple foam modules corresponding to the air inlets. The multiple foam modules are arranged side by side and spaced apart in a first direction in the accommodating space. Each foam module includes a first surface and a second surface arranged in the first direction, and the first surface and the second surface are the large surfaces of the foam module. All surfaces of any foam module other than the first surface and the second surface are closed. A baffle is connected between any two adjacent foam modules, and the baffle blocks the path between the two adjacent foam modules. The air inlets and air outlets corresponding to the foam modules are respectively located on both sides of the foam modules in the first direction, and the first surface is the windward surface.

2. The foam filter according to claim 1, characterized in that, The enclosure panel, together with the first plate and the second plate, forms a cuboid structure, with the first direction parallel to the direction of the longest side of the cuboid.

3. The foam filter according to claim 2, characterized in that, The foam module has a rectangular parallelepiped structure.

4. The foam filter according to claim 2, characterized in that, Both the first surface and the second surface are perpendicular to the first direction.

5. The foam filter according to claim 2, characterized in that, The two foam modules on both sides of the partition are a first foam module and a second foam module, respectively. The partition is fixed in the receiving space. The partition includes a first baffle, a second baffle, and a connecting plate. The first baffle is located on the side of the first foam module facing the first plate and closes the surface of the first foam module facing the first plate. The second baffle is located on the side of the second foam module facing the second plate and closes the surface of the second foam module facing the second plate. The connecting plate connects the first plate and the second plate and blocks the path between the first foam module and the second foam module.

6. The foam filter according to claim 5, characterized in that, The partition includes a first limiting plate, which is connected to the end of the first baffle away from the connecting plate and fits against the first surface of the first foam module, extending in the direction from the first plate to the second plate; the connecting plate, the first baffle and the first limiting plate cooperate to limit the first foam module.

7. The foam filter according to claim 5, characterized in that, The partition includes a second limiting plate, which is connected to the end of the second baffle away from the connecting plate and fits against the second surface of the second foam module, extending in the direction from the second plate to the first plate; the connecting plate, the second baffle and the second limiting plate cooperate to limit the second foam module.

8. The foam filter according to any one of claims 1-7, characterized in that, Includes a first positioning plate fixed within the accommodating space, the first positioning plate being located on the side of the first foam module facing the second plate in the first direction; The first positioning plate forms a limiting groove, and the end of the first foam module in the first direction that is closer to the second plate is limited in the limiting groove.

9. The foam filter according to any one of claims 1-7, characterized in that, Includes a second positioning plate fixed within the accommodating space, the second positioning plate being located on the side of the last foam module in the first direction facing the first plate body; The second positioning plate forms a limiting groove, and the end of the last foam module in the first direction that is closer to the first plate is limited in the limiting groove.

10. The foam filter according to any one of claims 1-7, characterized in that, At least one of the first and second sides of the foam module is covered with carbon fiber filter cloth.

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