An atomizing nozzle for supplying polishing fluid

Abstract

This invention aims to provide an atomizing nozzle for supplying polishing slurry, comprising a main body, a water-air mixing chamber, an acoustic resonance chamber, a nozzle outlet, a material interface, and an airflow interface. The main body contains the water-air mixing chamber, the acoustic resonance chamber, and the nozzle outlet sequentially arranged from left to right. The water-air mixing chamber and the acoustic resonance chamber are connected by a connecting hole. The left outer wall of the main body has a material interface and an airflow interface, both arranged along the same diameter direction, with one end connected to the water-air mixing chamber and the other end extending out of the main body shell. The device structure of this invention is scientifically and rationally designed, ultrasonically atomizing and spraying the polishing slurry to more comprehensively cover the entire surface of the polishing pad. This greatly increases the contact and reaction opportunities between the chemically active components in the polishing slurry and materials such as quartz glass, thereby improving the polishing rate.

Description

Technical Field

[0001] This utility model relates to the field of polishing machinery and equipment technology, and in particular to an atomizing nozzle for supplying polishing fluid. Background Technology

[0002] Chemical mechanical polishing (CMP) is an advanced surface treatment technology that combines chemical reactions with mechanical grinding. It is widely used in surface treatment in fields such as semiconductors, optoelectronics, microelectromechanical systems (MEMS), and integrated circuits. In CMP processes, a polishing slurry is sprayed at pressure between a rotating workpiece and a polishing pad to perform chemical etching and mechanical grinding. However, traditionally, the polishing slurry is delivered to the polishing pad via dripping or jetting, resulting in uneven liquid distribution on the pad, inconsistent polishing rates, and potentially significant waste due to excessive slurry being ejected. Furthermore, prolonged excessive dripping can saturate the polishing pad, affecting its porosity and elasticity, thus impacting the polishing effect. Utility Model Content

[0003] In view of the technical problems existing in the background art, the present invention aims to provide an atomizing nozzle for supplying polishing slurry. The device has a scientific and reasonable structural design, which enables the polishing slurry to cover the entire surface of the polishing pad more comprehensively, greatly increasing the opportunity for the chemically active components in the polishing slurry to contact and react with materials such as quartz glass, thereby improving the polishing rate and other problems.

[0004] To solve the above problems, the technical solution of this utility model is as follows: A polishing slurry supply atomizing nozzle includes a main body, a water-air mixing chamber, an acoustic resonance chamber, a nozzle orifice, a material interface, and an airflow interface. The water-air mixing chamber, the acoustic resonance chamber, and the nozzle orifice are arranged sequentially from left to right inside the main body. The water-air mixing chamber and the acoustic resonance chamber are connected by a connecting hole. The material interface and the airflow interface are respectively provided on the left outer wall of the main body. The material interface and the airflow interface are arranged along the same diameter direction, with one end connected to the water-air mixing chamber and the other end extending out of the main body shell.

[0005] The water-air mixing chamber is divided into an interface section, a frustum section, and a connecting section A along its axis from left to right. The right end of the interface section is connected to the bottom surface of the frustum section, and the top surface of the frustum section is connected to the connecting section A. The right end of the connecting section A is connected to the left end of the connecting hole through a conical constricted section A. The acoustic resonance chamber is divided into a conical constricted section B, a connecting section B, and a conical constricted section C along its axis from left to right. The top of the cone of the conical constricted section B is connected to the right end of the connecting hole, and the bottom surface of the cone of the conical constricted section B is connected to the left end of the connecting section B. The connecting section B is connected to the nozzle through the conical constricted section C.

[0006] The interface segment, connected segment A, and connected segment B are all cylindrical cavities.

[0007] The end of the connecting segment A is provided with an atomizing plate, the outer circular surface of which is sealed to the inner wall of the connecting segment A, and at least a portion of which is composed of a screen.

[0008] The pore size of the screen on the atomizing plate is 2-4 μm.

[0009] The atomizing plates are all composed of sieves.

[0010] A motor is provided on the outer wall of the left end of the main body, and the output shaft of the motor passes through the left side wall of the main body axially to the right. A stirring rod is also provided, and the left end of the stirring rod is connected to the output shaft of the motor. The right end of the stirring rod passes through the water-air mixing chamber, the connecting hole, and the acoustic resonance chamber axially and extends to the nozzle. A thin rod provided at the right end of the stirring rod extends into the nozzle. A gap is left between the stirring rod and the inner wall of the connecting hole, and a gap is left between the thin rod and the inner wall of the nozzle.

[0011] The gap between the stirring rod and the connecting hole is 0.5-1.5 mm.

[0012] The inner wall of the material interface is uniformly covered with a layer of hydrophobic and anti-corrosion coating.

[0013] The hydrophobic and anti-corrosion coating material is PTFE.

[0014] The beneficial effects of this utility model are as follows: This invention utilizes a combination structure of material and airflow interfaces arranged opposite each other, along with a water-air mixing chamber, to fully mix materials. The material's self-flow is achieved through segmented expansion or contraction of different diameters. The atomizing plate performs primary atomization of the mixed material, which then enters the acoustic resonance chamber under pressure after passing through a connecting hole. In the acoustic resonance chamber, high-frequency vibrations generate high-frequency sound waves to further atomize the primary droplets, resulting in well-atomized polishing fluid. The atomized polishing fluid droplets are smaller, more evenly distributed, and better penetrate the microporous structure of the polishing pad, significantly improving polishing uniformity and speed.

[0015] The atomization process of this invention can precisely control the flow rate and distribution of droplets. The nano-sized droplets are more easily absorbed and utilized by the polishing pad, avoiding unnecessary waste.

[0016] The atomization produced by this invention produces very fine and dispersed droplets, avoiding the formation of air bubbles due to large-flow droplets or jets impacting the polishing pad, which could lead to abnormal local polishing rates. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the overall structure of this utility model; Figure 2This is a schematic diagram of the appearance and structure of this utility model.

[0018] The names and numbers of the parts in the diagram are as follows: 1 is the main body, 2 is the water-air mixing chamber, 3 is the acoustic resonance chamber, 4 is the nozzle, 5 is the atomizing plate, 6 is the material interface, 7 is the airflow interface, 8 is the stirring rod, 9 is the motor, 10 is the interface section, 11 is the frustum section, 12 is the connecting section A, 13 is the conical necked section A, 14 is the connecting hole, 15 is the conical necked section B, 16 is the connecting section B, 17 is the conical necked section C, and 18 is the thin rod. Detailed Implementation

[0019] The following description, in conjunction with the accompanying drawings, details the implementation methods and embodiments of this utility model and their working processes.

[0020] Referring to the accompanying drawings, an atomizing nozzle for supplying polishing fluid in this embodiment includes a main body 1, a water-air mixing chamber 2, an acoustic resonance chamber 3, a nozzle orifice 4, a material interface 6, and an airflow interface 7. The water-air mixing chamber 2, the acoustic resonance chamber 3, and the nozzle orifice 4 are arranged sequentially from left to right inside the main body 1. The water-air mixing chamber 2 and the acoustic resonance chamber 3 are connected by a connecting hole 14. The material interface 6 and the airflow interface 7 are respectively provided on the left outer wall of the main body 1. The material interface 6 and the airflow interface 7 are arranged along the same diameter direction, with one end communicating with the water-air mixing chamber 2 and the other end extending out of the outer shell of the main body 1.

[0021] The water-air mixing chamber 2 is divided into an interface section 10, a frustum section 11, and a connecting section A12 along its axis from left to right. The right end of the interface section 10 is connected to the bottom surface of the frustum section 11, and the top surface of the frustum section 11 is connected to the connecting section A12. The right end of the connecting section A12 is connected to the left end of the connecting hole 14 through a conical constricted section A13. The acoustic resonance chamber 3 is divided into a conical constricted section B15, a connecting section B16, and a conical constricted section C17 along its axis from left to right. The top of the conical constricted section B15 is connected to the right end of the connecting hole 14, and the bottom surface of the conical constricted section B15 is connected to the left end of the connecting section B16. The connecting section B16 is connected to the nozzle 4 through the conical constricted section C17. By varying the diameter of the segmented expansion or contraction, the material is guided from the water-air mixing chamber 2 to the acoustic resonance chamber 3.

[0022] Interface segment 10, connecting segment A12, and connecting segment B16 are all cylindrical cavities.

[0023] The end of the connecting section A12 is provided with an atomizing plate 5. The outer circular surface of the atomizing plate 5 is sealed to the inner wall of the connecting section A12. At least a part of the atomizing plate 5 is composed of a screen.

[0024] The aperture of the sieve on the atomizing plate 5 is 3 μm.

[0025] The atomizing sheet 5 is entirely composed of sieves.

[0026] A motor 9 is provided on the outer wall of the left end of the main body 1. The output shaft of the motor 9 passes through the left side wall of the main body 1 axially to the right. A stirring rod 8 is also provided. The left end of the stirring rod 8 is connected to the output shaft of the motor 9. The right end of the stirring rod 8 passes through the water-air mixing chamber 2, the connecting hole 14, and the acoustic resonance chamber 3 axially and extends to the nozzle 4. A thin rod 18 provided at the right end of the stirring rod 8 extends into the nozzle 4. A gap is left between the stirring rod 8 and the inner wall of the connecting hole 14, and a gap is left between the thin rod 18 and the inner wall of the nozzle 4. The thin rod 18 of the stirring rod 8 can dislodge the polishing liquid adsorbed on the nozzle 4, preventing the nozzle 4 from being blocked by the polishing liquid.

[0027] The gap between the stirring rod 8 and the connecting hole 14 is 1 mm.

[0028] The inner wall of the material interface 6 is uniformly covered with a layer of hydrophobic and anti-corrosion coating.

[0029] The hydrophobic and anti-corrosion coating material is PTFE.

[0030] The working process of this embodiment is as follows: Polishing fluid and nitrogen enter the water-air mixing chamber 2 through the material interface 6 and the airflow interface 7, respectively. They are collected and thoroughly mixed in the water-air mixing chamber 2. The mixed material is filtered and initially atomized by the atomizing plate 5. The atomized droplets are squeezed through the connecting hole 14 and flow into the acoustic resonance chamber 3. Under the action of high-frequency sound waves generated by high-frequency vibration, the primary droplets are transformed into a nano-scale uniform atomized spray that is more suitable for chemical mechanical polishing. Finally, the atomized polishing fluid spray is sprayed out through the nozzle 4 and evenly sprayed onto the polishing pad for chemical corrosion and mechanical grinding. During the entire process, the motor 9 is started to rotate the stirring rod 8 to dislodge the polishing fluid adsorbed on the nozzle 4, preventing the nozzle 4 from being blocked by the polishing fluid.

Claims

1. An atomizing nozzle for supplying polishing slurry, comprising a main body (1), a water-air mixing chamber (2), an acoustic resonance chamber (3), a nozzle orifice (4), a material inlet (6), and an airflow inlet (7), characterized in that: The main body (1) is provided with a water-air mixing chamber (2), an acoustic resonance chamber (3) and a nozzle (4) from left to right. The water-air mixing chamber (2) and the acoustic resonance chamber (3) are connected by a connecting hole (14). The outer wall of the left side of the main body (1) is provided with a material interface (6) and an airflow interface (7). The material interface (6) and the airflow interface (7) are arranged along the same diameter direction, with one end connected to the water-air mixing chamber (2) and the other end extending out of the outer shell of the main body (1).

2. The atomizing nozzle for supplying polishing slurry according to claim 1, characterized in that: The water-air mixing chamber (2) is divided into an interface section (10), a frustum section (11), and a connecting section A (12) from left to right along its axis. The right end of the interface section (10) is connected to the bottom surface of the frustum section (11), and the top surface of the frustum section (11) is connected to the connecting section A (12). The right end of the connecting section A (12) is connected to the left end of the connecting hole (14) through a conical necked section A (13). The acoustic resonant cavity (3) is divided into a conical constricted section B (15), a connecting section B (16), and a conical constricted section C (17) along its axis from left to right. The top of the cone of the conical constricted section B (15) is connected to the right end of the connecting hole (14), and the bottom surface of the cone of the conical constricted section B (15) is connected to the left end of the connecting section B (16). The connecting section B (16) is connected to the nozzle (4) through the conical constricted section C (17).

3. The atomizing nozzle for supplying polishing slurry according to claim 2, characterized in that: Interface segment (10), connecting segment A (12), and connecting segment B (16) are all cylindrical cavities.

4. The atomizing nozzle for supplying polishing slurry according to claim 2, characterized in that: The end of the connecting segment A (12) is provided with an atomizing plate (5), the outer circular surface of the atomizing plate (5) is sealed to the inner wall of the connecting segment A (12), and at least a part of the atomizing plate (5) is composed of a screen.

5. The atomizing nozzle for supplying polishing slurry according to claim 4, characterized in that: The pore size of the screen on the atomizing plate (5) is 2-4 μm.

6. The atomizing nozzle for supplying polishing slurry according to claim 5, characterized in that: The atomizing sheet (5) is entirely composed of sieves.

7. The atomizing nozzle for supplying polishing slurry according to claim 2, characterized in that: The main body (1) is provided with a motor (9) on the outer wall of the left end. The output shaft of the motor (9) passes through the left side wall of the main body (1) along the right axis. A stirring rod (8) is also provided. The left end of the stirring rod (8) is connected to the output shaft of the motor (9). The right end of the stirring rod (8) passes through the water-air mixing chamber (2), the connecting hole (14), and the acoustic resonance chamber (3) along the axis and extends to the nozzle (4). A thin rod (18) provided at the right end of the stirring rod (8) extends into the nozzle (4). There is a gap between the stirring rod (8) and the inner wall of the connecting hole (14), and a gap between the thin rod (18) and the inner wall of the nozzle (4).

8. The atomizing nozzle for supplying polishing slurry according to claim 7, characterized in that: The gap between the stirring rod (8) and the connecting hole (14) is 0.5-1.5 mm.

9. The atomizing nozzle for supplying polishing slurry according to claim 1, characterized in that: The inner wall of the material interface (6) is uniformly covered with a layer of hydrophobic and anti-corrosion coating.

10. The atomizing nozzle for supplying polishing slurry according to claim 9, characterized in that: The hydrophobic and anti-corrosion coating material is PTFE.

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