Coating device

Abstract

This utility model provides a coating device, including a nozzle with a slit-shaped outlet, a liquid supply mechanism for supplying coating liquid to the nozzle and discharging the coating liquid from the outlet, a conveying mechanism for horizontally conveying a substrate, and a rotating body disposed below the nozzle and within the path of substrate translation. The rotating body is configured such that when the outlet moves downward to a set uniform coating position, the rotating body rotates and carries away excess coating liquid from the outlet, thus achieving uniform coating. Then, a scraper removes the coating liquid adhering to the outer periphery of the rotating body. Afterward, the rotating body drives the substrate to continue to translate during rotation, facilitating the application of coating liquid to the translated substrate by the nozzle. The structure is simple, reduces costs, avoids the phenomenon of transferring the substrate by raising and lowering lifting pin modules in the prior art, shortens the substrate waiting time, and improves work efficiency.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor coating technology, and in particular relates to a coating device. Background Technology

[0002] In existing semiconductor coating technology, the substrate is first placed on the lifting pin module on the protruding stage by a robot. Then, the lifting pin module descends to place the substrate on the stage. The substrate is then adsorbed and fixed on the stage by the vacuum negative pressure generated in the suction port on the stage. Then, the nozzle moves horizontally above the substrate to apply adhesive. After adhesive application, the robot transfers the coated substrate to the next process.

[0003] The above structure requires the cooperation of a robotic arm and a lifting pin module to complete the loading and unloading of the substrate. The loading and unloading cycle is long, which consumes a lot of time, has low productivity, and the complex structure increases production costs.

[0004] For the reasons mentioned above, there is an urgent need for a coating device that can solve the above problems. Utility Model Content

[0005] The purpose of this invention is to overcome the shortcomings of the prior art and provide a coating device with a simple structure and low cost. Unlike the prior art, it does not require lifting and lowering the lifting pin module to transfer the substrate, thus shortening the substrate waiting time and improving work efficiency.

[0006] This invention is achieved as follows: a coating device, comprising: The nozzle is configured to move vertically and has a slit-shaped discharge port; A liquid supply mechanism supplies coating liquid to the nozzle and discharges coating liquid from the outlet; A conveying mechanism for horizontally conveying the substrate to be coated; A rotating body is disposed below the nozzle and within the path of substrate translation. The rotating body is configured such that when the outlet moves downward to the set uniform coating position, the rotating body rotates along its axis at the original position according to a set rotation speed, number of revolutions and direction, for adhering excess coating liquid at the outlet to the outer peripheral surface of the rotating body. A scraper is used to scrape off the coating liquid adhering to the periphery of the rotating body; After the coating liquid adhering to the outer periphery of the rotating body is scraped off by the scraper, it is used to support the translation of the substrate and drive the substrate to continue to translate during the rotation. After the nozzle moves upward from the uniform coating position to the coating position, it is used to apply the coating liquid to the translating substrate.

[0007] Furthermore, the conveying mechanism includes a front conveying mechanism and a rear conveying mechanism spaced apart from the front conveying mechanism, with the rotating body disposed between the front conveying mechanism and the rear conveying mechanism.

[0008] Furthermore, it includes a vibration damping mechanism for preventing substrate vibration during coating, the vibration damping mechanism comprising a front air suspension platform located between the front conveying mechanism and the rotating body, and a rear air suspension platform located between the rotating body and the rear conveying mechanism.

[0009] Furthermore, both the front air suspension platform and the rear air suspension platform have an air intake area and an air blowing area, with the air intake area positioned lower than the air blowing area.

[0010] Furthermore, both the front air suspension platform and the rear air suspension platform are provided with at least two spaced grooves in the direction of substrate translation, and the air intake area is disposed in the groove.

[0011] Furthermore, both the front conveying mechanism and the rear conveying mechanism include multiple conveying wheels arranged at intervals in sequence and a motor that drives the multiple conveying wheels to rotate synchronously.

[0012] Furthermore, it includes a drive mechanism for driving the rotating body to rotate at a set speed and direction.

[0013] Preferably, the adhesive application position is located directly above the adhesive application position.

[0014] Furthermore, it includes a lifting mechanism for driving the nozzle to move vertically.

[0015] Furthermore, a waste liquid collection tank is provided below the rotating body for collecting the coating liquid scraped off by the scraper.

[0016] This utility model provides a coating device, including a nozzle with a slit-shaped outlet, a liquid supply mechanism for supplying coating liquid to the nozzle and discharging the coating liquid from the outlet, a conveying mechanism for horizontally conveying a substrate, and a rotating body disposed below the nozzle and within the path of substrate translation. The rotating body is configured such that when the outlet moves downward to a set uniform coating position, the rotating body rotates and carries away excess coating liquid from the outlet, thus achieving uniform coating. Then, a scraper removes the coating liquid adhering to the outer periphery of the rotating body. Afterward, the rotating body drives the substrate to continue to translate during rotation, facilitating the application of coating liquid to the translated substrate by the nozzle. The structure is simple, reducing costs. Unlike existing technologies, it does not require lifting and lowering lifting pin modules to transfer the substrate, shortening the substrate waiting time and improving work efficiency. Attached Figure Description

[0017] To more clearly illustrate the technical solution of this utility model, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 This is a structural diagram of the coating device provided in an embodiment of the present invention.

[0019] Figure 2 This is a structural diagram of the front air suspension platform or the rear air suspension platform in the coating device provided in the embodiments of this utility model.

[0020] Figure 3 This is a structural diagram of the lifting mechanism in the coating device provided in this embodiment of the utility model.

[0021] Figure 4 This is a block diagram showing the output control commands of the drive controller in the coating device provided in this embodiment of the utility model, which respectively control the liquid supply mechanism, the conveying mechanism, the suction mechanism, the blowing mechanism, the drive mechanism, and the lifting mechanism.

[0022] The realization of the purpose, functional features and advantages of this utility model will be further explained in conjunction with the embodiments and with reference to the accompanying drawings.

[0023] The reference numerals in the attached figures are explained as follows: substrate 10; Nozzle 100; Liquid supply mechanism 200; Conveying mechanism 300, front conveying mechanism 310, rear conveying mechanism 320; Rotating body 400, rotating shaft 410; Scraper 500; Vibration damping mechanism 600, front air suspension platform 610, rear air suspension platform 620, air intake area 630, air intake hole 631, air intake mechanism 632, air blowing area 640, air blowing hole 641, air blowing mechanism 642, groove 650. Drive mechanism 700; Lifting mechanism 800, base 810, connecting beam 820, crossbeam 830, screw motor 840, slide rail 850. Waste liquid collection tank 900, sidewall 910; Drive controller 20. Detailed Implementation

[0024] In this invention, the terms "upper," "lower," "left," "right," "front," "rear," "top," "bottom," "inner," "outer," "middle," "vertical," "horizontal," "lateral," and "longitudinal" indicate the orientation or state relationship based on the orientation or state relationship shown in the accompanying drawings. These terms are primarily for the purpose of better describing this invention and its embodiments, and are not intended to limit the indicated mechanisms, elements, or components to having a specific orientation, or to be constructed and operated in a specific orientation.

[0025] Furthermore, in addition to indicating location or state relationships, some of the aforementioned terms may also have other meanings. For example, the term "above" may also be used in certain situations to indicate a dependency or connection relationship. Those skilled in the art can understand the specific meaning of these terms in this utility model based on the specific circumstances.

[0026] Furthermore, the terms "installation," "setup," "equipped with," "connection," and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral structure; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium, or an internal connection between two mechanisms, components, or parts. Those skilled in the art can understand the specific meaning of these terms in this utility model based on the specific circumstances.

[0027] Furthermore, the terms "first," "second," etc., are primarily used to distinguish different mechanisms, components, or parts, whose specific types and structures may be the same or different, and are not intended to indicate or imply the relative importance or quantity of the indicated mechanisms, components, or parts. Unless otherwise stated, "a plurality of" means two or more.

[0028] To clarify the directional relationships in the diagram, a coordinate system with the vertical direction as the Z-direction and the horizontal plane as the XY-plane is appropriately labeled.

[0029] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention.

[0030] like Figure 1 As shown, an embodiment of the present invention provides a coating apparatus, comprising: The nozzle 100 is configured to move vertically and has a slit-shaped outlet (not shown) for coating the upper surface of the substrate 10 with a coating liquid. In this embodiment, the substrate 10 is preferably glass that is not easily bent or deformed. The liquid supply mechanism 200 supplies coating liquid to the nozzle 100 and discharges the coating liquid from the outlet; The conveying mechanism 300 is used for horizontally conveying the substrate 10 to be coated; The rotating body 400 is disposed below the nozzle 100 and within the path of the substrate 10 translation. The rotating body 400 is configured such that when the outlet moves downward to the set coating position, the rotating body 400 rotates along its axis at the set speed, number of revolutions and direction. This is used to adhere excess coating liquid at the outlet to the outer peripheral surface of the rotating body 400, so that the nozzle 100 can uniformly coat the coating liquid on the substrate 10. The scraper 500 is used to scrape off the coating liquid adhering to the outer periphery of the rotating body 400. In this embodiment, the scraper 500 slides in contact with the rotating body 400. After the coating liquid adhering to the outer periphery of the rotating body 400 is scraped off, even if the rotating body 400 contacts the lower surface of the substrate 10 to support the substrate 10, the coating liquid can be prevented from adhering to the lower surface of the substrate 10. This achieves the dual functions of uniform coating and driving the substrate 100 to translate, simplifying the product structure.

[0031] After the coating liquid adhering to the outer periphery of the rotating body 400 is scraped off by the scraper 500, it is used to support the translation of the substrate 10 and drive the substrate 10 to continue to translate during the rotation. In this embodiment, the rotating body 400 is configured such that the position of the upper end of its vertical diameter is the same as or approximately the same as the height position of the lower surface of the substrate 10.

[0032] After the nozzle 100 moves upward from the uniform coating position to the coating position, it is used to coat the translational substrate 10 with coating liquid. In this embodiment, the coating position is located directly above the uniform coating position, and the distance between the two is the thickness of one substrate 10.

[0033] Furthermore, the conveying mechanism 300 includes a front conveying mechanism 310 and a rear conveying mechanism 320 spaced apart from the front conveying mechanism 310. A rotating body 400 is provided between the front conveying mechanism 310 and the rear conveying mechanism 320 to jointly drive the substrate 10 to translate.

[0034] Furthermore, the coating apparatus includes a vibration damping mechanism 600 for preventing vibration of the substrate 10 during coating. The vibration damping mechanism 600 includes a front air suspension platform 610 located between the front conveying mechanism 310 and the rotating body 400, and a rear air suspension platform 620 located between the rotating body 400 and the rear conveying mechanism 320.

[0035] like Figure 2 and Figure 4As shown, the front air suspension platform 610 and the rear air suspension platform 620 both have an air intake area 630 facing the non-support area of ​​the substrate 10 and an air blowing area 640 for injecting gas. During the air blowing and air intake process, the substrate 10 is constrained at a set height position to prevent the substrate 10 from vibrating, so that the nozzle 100 can evenly coat the coating liquid on the substrate 10. The position of the air intake area 630 is lower than that of the air blowing area 640, so as to avoid the excessive adsorption force between the air intake area 630 and the substrate 10, which would prevent the substrate 10 from translating.

[0036] Furthermore, the front air suspension platform 610 and the rear air suspension platform 620 are each provided with at least two spaced grooves 650 in the direction of translation of the substrate 10, and the air intake area 630 is disposed in the groove 650.

[0037] In this embodiment, the air intake region 630 covers the entire upper surface of the front air suspension platform 610 and the rear air suspension platform 620. The air intake region 630 is composed of a plurality of air intake holes 631, and each air intake hole 631 is connected to the air intake mechanism 632. The air blowing region 640 is composed of a plurality of air blowing holes 641 arranged in an array, and each air blowing hole 641 is connected to the air blowing mechanism 642.

[0038] Furthermore, both the front conveying mechanism 310 and the rear conveying mechanism 320 include a plurality of conveying wheels 311 arranged in sequence at intervals and a conveying motor that drives the plurality of conveying wheels 311 to rotate synchronously.

[0039] Furthermore, the coating device includes a drive mechanism 700 for driving the rotating body 400 to rotate at a set speed and direction. In this embodiment, the drive mechanism 700 includes a synchronous belt and a drive motor for driving the synchronous belt to rotate. The two ends of the synchronous belt are respectively sleeved on the power output shaft of the drive motor and the rotation shaft 410 of the rotating body 400. The drive motor drives the synchronous belt to rotate, and the synchronous belt drives the rotating body 400 to rotate in conjunction with the synchronous belt.

[0040] like Figure 3 As shown, the coating apparatus further includes a lifting mechanism 800 for driving the nozzle 100 to move vertically.

[0041] Specifically, the lifting mechanism 800 includes two symmetrically spaced bases 810, a connecting beam 820 connected to the upper ends of the two bases 810, a crossbeam 830 located below the connecting beam 820, and a nozzle 100 detachably mounted on the lower surface of the crossbeam 830. Both bases 810 are equipped with a lead screw motor 840 for driving the crossbeam 830 to move vertically. A slide rail 850 for vertically guiding the crossbeam 820 is also provided in the base 810. In this embodiment, the two ends of the crossbeam 820 are directly or indirectly sleeved on the lead screw shaft of the lead screw motor 840. The nozzle 100 can move vertically up and down precisely by rotating the lead screw shaft.

[0042] Furthermore, the coating device includes a waste liquid collection tank 900, which is located below the rotating body 400 and is used to collect the coating liquid scraped off by the scraper 500. In this embodiment, the scraper 500 is installed on the upper end of the side wall 910 of the waste liquid collection tank 900 to reduce the installation space of the scraper 500.

[0043] like Figure 4 As shown, in this embodiment, the coating device also includes a drive controller 20, which is electrically connected to the liquid supply mechanism 200, the conveying mechanism 300, the suction mechanism 632, the blowing mechanism 642, the drive mechanism 700 and the lifting mechanism 800 respectively, to control their actions.

[0044] In this embodiment, a rotating body 400 is provided within the path of the conveying mechanism 300 that transports the substrate 10. This reduces the space occupied by the coating device. During rotation, the rotating body 400 can both remove excess adhesive from the nozzle 100, achieving a uniform coating, and have the scraper 500 remove the coating liquid adhering to the outer periphery of the rotating body 400. Afterward, the rotating body 400 can also drive the substrate 10 to translate, facilitating the application of the coating liquid by the nozzle 100 onto the substrate 10. This simplifies the structure and reduces production costs. Unlike existing technologies, there is no need to use lifting and lowering pin modules to transfer the substrate, shortening the waiting time for the substrate 10 and improving work efficiency. After the substrate 10 is coated, only vertical movement of the nozzle 100 to the uniform coating or application position is required; horizontal movement is unnecessary, shortening the distance the nozzle 100 travels. Therefore, the coating process of the substrate 10 can be achieved with high productivity.

[0045] The above description is the preferred embodiment of this utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the principle of this utility model, and these improvements and modifications are also considered to be within the protection scope of this utility model.

Claims

1. A coating apparatus, characterized in that, include: The nozzle is configured to move vertically and has a slit-shaped discharge port; A liquid supply mechanism supplies coating liquid to the nozzle and discharges coating liquid from the outlet; A conveying mechanism for horizontally conveying the substrate to be coated; A rotating body is disposed below the nozzle and within the path of substrate translation. The rotating body is configured such that when the outlet moves downward to the set uniform coating position, the rotating body rotates along its axis at the original position according to a set rotation speed, number of revolutions and direction, for adhering excess coating liquid at the outlet to the outer peripheral surface of the rotating body. A scraper is used to scrape off the coating liquid adhering to the periphery of the rotating body; After the coating liquid adhering to the outer periphery of the rotating body is scraped off by the scraper, it is used to support the translation of the substrate and drive the substrate to continue to translate during the rotation. After the nozzle moves upward from the uniform coating position to the coating position, it is used to apply the coating liquid to the translating substrate.

2. The coating apparatus according to claim 1, characterized in that, The conveying mechanism includes a front conveying mechanism and a rear conveying mechanism spaced apart from the front conveying mechanism, with the rotating body disposed between the front conveying mechanism and the rear conveying mechanism.

3. The coating apparatus according to claim 2, characterized in that, The invention includes a vibration damping mechanism for preventing substrate vibration during coating. The vibration damping mechanism includes a front air suspension platform located between the front conveying mechanism and the rotating body, and a rear air suspension platform located between the rotating body and the rear conveying mechanism.

4. The coating apparatus according to claim 3, characterized in that, Both the front air suspension platform and the rear air suspension platform have an air intake area and an air blowing area, with the air intake area positioned lower than the air blowing area.

5. The coating apparatus according to claim 4, characterized in that, Both the front air suspension platform and the rear air suspension platform are provided with at least two spaced grooves in the direction of substrate translation, and the air intake area is provided in the groove.

6. The coating apparatus according to claim 2, characterized in that, Both the front conveying mechanism and the rear conveying mechanism include multiple conveying wheels arranged at intervals in sequence and a motor that drives the multiple conveying wheels to rotate synchronously.

7. The coating apparatus according to claim 2, characterized in that, It includes a drive mechanism for driving the rotating body to rotate at a set speed and direction.

8. The coating apparatus according to claim 2, characterized in that, The adhesive application position is located directly above the adhesive spreading position.

9. The coating apparatus according to claim 2, characterized in that, It includes a lifting mechanism for driving the nozzle to move vertically.

10. The coating apparatus according to claim 2, characterized in that, It includes a waste liquid collection tank, located below the rotating body, for collecting the coating liquid scraped off by the scraper.

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