Energy-saving and environmentally friendly cleaning equipment for silicon wafer processing

Abstract

This utility model relates to an energy-saving and environmentally friendly cleaning device for silicon wafer processing, including a housing. The housing contains multiple cleaning chambers and a liquid storage chamber. The inner wall of the liquid storage chamber has multiple built-in grooves, and the top surface of each of these grooves is perforated by a shaft tube through a bearing. A filter screen is fixedly installed at the upper end of each shaft tube. The bottom surface of each of the cleaning chambers is perforated by a connecting shaft through a bearing, and a positioning plate is fixedly fitted onto the side wall of each connecting shaft. The advantages are: This utility model uses cleaning chambers, enabling simultaneous cleaning of multiple silicon wafers. Workers can load different silicon wafers into each cleaning chamber separately, using the moving plate and mounting grooves to stably hold the wafers. A drive motor rotates the multiple wafers, and a pump pumps the cleaning fluid into a spray plate to rinse the wafers. This eliminates the need for frequent start-ups and shutdowns, improving cleaning efficiency and enhancing the practicality of the equipment.

Description

Technical Field

[0001] This utility model belongs to the field of silicon wafer cleaning, specifically relating to an energy-saving and environmentally friendly cleaning equipment for silicon wafer processing. Background Technology

[0002] Silicon wafers are thin sheets made from high-purity silicon. They are a core material in the semiconductor and photovoltaic industries. After being processed through a series of complex processes, they can be used as carriers for products such as integrated circuits (chips) and solar cells. In actual processing of silicon wafers, cleaning equipment is required to clean them. In practice, silicon wafers have advantages such as structural stability, safe cleaning, and convenient operation.

[0003] Existing cleaning equipment requires sequential cleaning of various silicon wafers to avoid mixing. This cleaning method necessitates multiple start-stop cycles of the pump and motor, which affects the cleaning efficiency. Furthermore, to achieve energy conservation and environmental protection, the cleaning solution needs to be recycled. This process requires a filter to filter the cleaning solution, but lacks a cleaning mechanism. When the filter becomes clogged with impurities, it affects the recycling of the cleaning solution. Utility Model Content

[0004] To address the problems existing in the prior art, this utility model provides an energy-saving and environmentally friendly cleaning device for silicon wafer processing. It has the advantages of being able to clean multiple silicon wafers simultaneously and possessing a cleaning structure capable of clearing clogged filter structures, thereby solving the problems mentioned in the background art.

[0005] This utility model provides an energy-saving and environmentally friendly cleaning device for silicon wafer processing, including a housing. The housing contains multiple cleaning chambers and a liquid storage chamber. The inner wall of each liquid storage chamber has multiple built-in grooves, and the top surface of each built-in groove is perforated by a shaft tube via bearings. A filter screen is fixedly installed at the upper end of each shaft tube. The bottom surface of each cleaning chamber has a connecting shaft perforated by bearings. Positioning plates are fixedly fitted onto the side walls of each connecting shaft. Multiple movable plates are slidably fitted onto the side walls of each connecting shaft. The inner wall of each positioning plate on the same side has two sets of slots. The multiple connecting shafts... Two sets of clamping plates are welded to the side walls of the housing. Multiple sets of mounting slots are provided on the upper and lower parts of the multiple sets of positioning hole plates on the same side. A mounting cover is welded to the lower part of the housing, and a drive motor is fixedly inserted through the lower part of the mounting cover. A main gear is fixedly sleeved on the output end of the drive motor. A driven gear is fixedly sleeved on the lower side wall of the multiple sets of connecting shafts. A water spray plate is fixedly installed on the inner wall of the multiple sets of cleaning chambers. A water storage tank is fixedly installed on the upper part of the housing. A liquid guide pipe is installed between the multiple sets of water spray plates and the water storage tank. A pump is fixedly installed on the end face of the water storage tank, and a second suction pipe is clamped to the output end of the pump. A first suction pipe is clamped to the input end of the pump.

[0006] Preferably, the inner bottom surfaces of the multiple sets of built-in grooves are all penetrated by a mounting shaft through a bearing, a filter screen tube is fixedly installed between the multiple sets of shaft tubes and the multiple sets of mounting shafts, a second pulley is fixedly sleeved on the side wall of the multiple sets of mounting shafts, a first pulley is fixedly sleeved on the lower side wall of the multiple sets of connecting shafts, and a transmission belt is sleeved on the side wall of a set of first pulleys on the same side and a set of second pulleys on the same side.

[0007] Preferably, the sidewalls of the multiple sets of connecting shafts are provided with limiting grooves, and mounting screws slide through the interior of the multiple sets of limiting grooves. Two sets of mounting nuts and two sets of brake plates are sleeved on the sidewall of the same set of mounting screws.

[0008] Preferably, the mounting screws on the same side and the mounting nuts on the same side are threadedly engaged.

[0009] Preferably, the main gear meshes with multiple sets of driven gears.

[0010] Preferably, an electrical control box is installed on the side wall of the housing, and a control panel is installed inside the electrical control box. The control panel is electrically connected to the drive motor and the pump via wires.

[0011] Preferably, the lower part of the outer shell is welded with four sets of support legs.

[0012] Preferably, the inner walls of the multiple sets of cleaning chambers are all fixedly connected with drain pipes, and the side walls of the multiple sets of drain pipes are all provided with drain valves.

[0013] Preferably, the inner walls of the multiple sets of cleaning chambers are provided with through openings, and the interior of the multiple sets of through openings is provided with sealing plugs.

[0014] The beneficial effects of this utility model are as follows:

[0015] (1) This utility model adopts a cleaning chamber, which can realize the simultaneous cleaning of multiple silicon wafers. Workers can put different silicon wafers into each cleaning chamber separately, and use the moving perforated plate and mounting slot to stably hold the silicon wafers. Then, the drive motor drives the multiple silicon wafers to rotate, and the pump pumps the cleaning liquid into the spray plate to rinse the multiple silicon wafers. There is no need to start and stop the equipment multiple times, which improves the cleaning efficiency and enhances the practicality of the equipment.

[0016] (2) This utility model adopts a liquid storage chamber, an internal tank, a shaft tube and a filter screen. After the cleaning liquid washes the silicon wafer, it enters the internal tank through the filter screen, shaft tube and filter tube, and finally flows into the liquid storage chamber. The filter screen can intercept impurities. When it is necessary to clean the filter screen, the drive motor can drive the mounting shaft, filter tube and filter screen to rotate through the main gear, driven gear, first pulley, second pulley and transmission belt. The impurities are thrown off by centrifugal force, which effectively avoids the situation where the filter structure is blocked and affects the circulation of cleaning liquid, and provides a guarantee for the continuous and stable operation of the equipment. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 This is a schematic diagram of the structure of the energy-saving and environmentally friendly cleaning equipment for silicon wafer processing proposed in this utility model;

[0019] Figure 2 This is a perspective view of the movable perforated plate proposed in this utility model;

[0020] Figure 3 This is a top view of the main gear and driven gear proposed in this utility model;

[0021] Figure 4 This utility model proposes Figure 1 Enlarged view of A in the middle;

[0022] Figure 5 This utility model proposes Figure 1 A magnified view of B in the middle.

[0023] Figure Labels

[0024] 1. Outer shell; 2. Cleaning chamber; 3. Liquid storage chamber; 4. Internal groove; 5. Shaft tube; 6. Filter screen cover; 7. Mounting shaft; 8. Filter screen tube; 9. Connecting shaft; 10. Positioning perforated plate; 11. Moving perforated plate; 12. Slot; 13. Mounting groove; 14. Slotted plate; 15. Drive motor; 16. Main gear; 17. Driven gear; 18. Spray plate; 19. Water storage tank; 20. Liquid guide pipe; 21. Pump; 22. First suction pipe; 23. Second suction pipe; 24. Sewage pipe; 25. First pulley; 26. Second pulley; 27. Transmission belt; 28. Limiting groove; 29. ​​Mounting screw; 30. Mounting nut; 31. Brake plate; 32. Mounting cover. Detailed Implementation

[0025] To make the objectives, technical solutions, and advantages of this utility model clearer, the technical solutions of this utility model will be described in detail below. Obviously, the described embodiments are only a part of the embodiments of this utility model, and not all of them. Based on the embodiments of this utility model, all other implementation methods obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0026] In the description of this application, it should be understood that the terms "upper", "lower", "inner", "outer", "top", "bottom", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0027] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" or "several" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0028] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0029] According to an embodiment of the present invention, an energy-saving and environmentally friendly cleaning device for silicon wafer processing is provided.

[0030] Please see Figure 1 , Figure 2 , Figure 3 , Figure 4 and Figure 5An energy-saving and environmentally friendly cleaning device for silicon wafer processing includes a housing 1. The housing 1 contains multiple cleaning chambers 2 and a liquid storage chamber 3. The inner wall of the liquid storage chamber 3 has multiple built-in grooves 4, and the top surfaces of each built-in groove 4 are perforated by a shaft tube 5 via bearings. A filter screen 6 is fixedly installed at the upper end of each shaft tube 5. The bottom surfaces of each cleaning chamber 2 are perforated by a connecting shaft 9 via bearings, and the side walls of each connecting shaft 9 are fixedly fitted with positioning plates 10. Multiple... The moving perforated plate 11 has two sets of slots 12 on the inner wall of multiple sets of positioning perforated plates 10 on the same side. Two sets of clamping plates 14 are welded to the side walls of multiple sets of connecting shafts 9. Multiple sets of mounting slots 13 are provided on the upper and lower parts of the multiple sets of positioning perforated plates 10 on the same side. A mounting cover 32 is welded to the lower part of the outer shell 1, and a drive motor 15 is fixedly inserted through the lower part of the mounting cover 32. A main gear 16 is fixedly sleeved at the output end of the drive motor 15. Driven gears 17 are fixedly sleeved on the lower side walls of the multiple sets of connecting shafts 9. The inner walls of the multiple sets of cleaning chambers 2... Each of the multiple spray plates 18 is fixedly installed, and a water storage tank 19 is fixedly installed on the upper part of the outer casing 1. Liquid guide pipes 20 are installed between each spray plate 18 and the water storage tank 19. A pump 21 is fixedly installed on the end face of the water storage tank 19, and a second suction pipe 23 is snapped into the output end of the pump 21. One end of the second suction pipe 23 is inserted into the interior of the liquid storage chamber 3, ensuring that the pump 21 can extract the water from the liquid storage chamber 3 through the second suction pipe 23. A first suction pipe 22 is snapped into the input end of the pump 21, and one end of the first shaft tube 5 is inserted into the water storage chamber. Inside the tank 19, the pump 21 ensures that the water inside the second suction pipe 23 can be pumped into the water storage tank 19 through the first suction pipe 22, enabling simultaneous cleaning of multiple silicon wafers. Workers can load different silicon wafers into each cleaning chamber 2, and use the moving perforated plate 11 and mounting groove 13 to stably hold the silicon wafers. Then, the drive motor 15 drives the multiple silicon wafers to rotate, and the pump 21 pumps the cleaning fluid into the spray plate 18 to rinse the multiple silicon wafers. This eliminates the need for multiple start-ups and shutdowns of the equipment, improving cleaning efficiency and enhancing the practicality of the equipment.

[0031] Please see Figure 1 and Figure 5Multiple sets of built-in tanks 4 have mounting shafts 7 passing through their inner bottom surfaces via bearings. Multiple sets of shaft tubes 5 are fixedly installed between the multiple sets of mounting shafts 7. Second pulleys 26 are fixedly sleeved on the side walls of the multiple sets of mounting shafts 7. First pulleys 25 are fixedly sleeved on the lower side walls of the multiple sets of connecting shafts 9. A transmission belt 27 is sleeved on the side walls of a set of first pulleys 25 and a set of second pulleys 26 on the same side. After the cleaning fluid washes the silicon wafer, it enters the built-in tank 4 through the filter screen cover 6, shaft tubes 5 and filter screen tubes 8, and finally flows into the liquid storage chamber 3. The filter screen cover 6 can intercept impurities. When it is necessary to clean the filter screen cover 6, the drive motor 15 can drive the mounting shafts 7, filter screen tubes 8 and filter screen cover 6 to rotate through the main gear 16, driven gear 17, first pulley 25, second pulley 26 and transmission belt 27. The centrifugal force throws off the impurities, effectively avoiding the situation where the filter structure is blocked and affects the circulation of the cleaning fluid, thus ensuring the continuous and stable operation of the equipment.

[0032] Please see Figure 1 and Figure 4 Each of the multiple sets of connecting shafts 9 has a limiting groove 28 on its side wall. Each of the multiple sets of limiting grooves 28 has a mounting screw 29 that slides through it. On the same side, the side wall of a set of mounting screws 29 is fitted with two sets of mounting nuts 30 and two sets of brake plates 31.

[0033] Please see Figure 1 and Figure 4 The mounting screws 29 on the same side are threaded together with the two sets of mounting nuts 30 on the same side, which facilitates the adjustment of the position of the two sets of mounting nuts 30 on the same side.

[0034] Please see Figure 1 and Figure 5 The main gear 16 meshes with multiple sets of driven gears 17, ensuring that the main gear 16 can drive the multiple sets of driven gears 17 to rotate.

[0035] Please see Figure 1 An electrical control box is installed on the side wall of the outer casing 1, and a control panel is installed inside the electrical control box. The control panel is electrically connected to the drive motor 15 and the pump 21 via wires. The control circuit of the control panel can be implemented by simple programming by those skilled in the art. It is common knowledge in the art. It is only used and not modified. Therefore, the control method and circuit connection will not be described in detail.

[0036] Please see Figure 1 The lower part of the outer shell 1 is welded with four sets of support legs, which serve to support and fix the outer shell 1.

[0037] Please see Figure 1 Each of the multiple sets of cleaning chambers 2 has a drain pipe 24 fixedly running through its inner wall, and each of the multiple sets of drain pipes 24 has a drain valve on its side wall. The multiple sets of drain pipes 24 serve to drain liquid.

[0038] Please see Figure 1 Each of the multiple cleaning chambers 2 has a through-hole on its inner wall, and each of the multiple through-holes is equipped with a sealing plug. Workers can move various silicon wafers into the multiple cleaning chambers 2 through the multiple through-holes.

[0039] Working principle:

[0040] In actual use of energy-saving and environmentally friendly cleaning equipment for silicon wafer processing, workers can move a silicon wafer through a set of through-holes into a set of cleaning chambers 2 on the same side. Then, multiple sets of movable perforated plates 11 on the same side are moved apart. At this time, multiple silicon wafers can be moved between the multiple sets of movable perforated plates 11 on the same side. Multiple sets of mounting slots 13 on the same side can ensure the stability of clamping multiple silicon wafers. Then, two sets of brake plates 31 on the same side can be lowered. When the two sets of brake plates 31 on the same side are in close contact with the uppermost set of movable perforated plates 11 on the same side, the installation of multiple silicon wafers is completed by using the threaded engagement of a set of mounting screws 29 on the same side and two sets of mounting nuts 30 on the same side. Workers can manually rotate the two sets of mounting nuts 30 clockwise and counterclockwise. When the two sets of mounting nuts 30 on the same side are in close contact with the two sets of brake plates 31 on the same side, the installation of multiple silicon wafers is completed. Two sets of clamping plates 14 and two sets of clamping slots 12 on the same side can ensure the stability of the up-and-down movement of multiple sets of moving hole plates 11 on the same side. Then, a set of sealing plugs is used to block a set of through holes on the same side. The installation of other silicon wafers can be achieved in the same way. At this time, the control panel can be used to make the drive motor 15 and the pump 21 work. The output end of the drive motor 15 can drive the main gear 16 to rotate. Since the main gear 16 meshes with multiple sets of driven gears 17, the rotating main gear 16 can drive multiple sets of driven gears 17 to rotate. The rotating multiple sets of driven gears 17 can drive multiple sets of driven gears 17 to rotate. The rotating multiple sets of driven gears 17 can make multiple silicon wafers rotate through multiple sets of connecting shafts 9. During this process, the pump 21 can pump the cleaning fluid in the storage chamber 3 through the second suction pipe. 23 and the first suction pipe 22 are pumped into the water storage tank 19. Then, the cleaning fluid can enter the interior of multiple sets of spray plates 18 through multiple sets of guide pipes 20. Finally, the sprayed water can rinse multiple silicon wafers. Through the cleaning chamber 2, multiple silicon wafers can be cleaned simultaneously, improving the practicality of the energy-saving and environmentally friendly cleaning equipment for silicon wafer processing. Simultaneously, as can be seen from the above operation, the cleaning fluid sprayed through the multiple sets of spray plates 18 can rinse multiple silicon wafers. The falling cleaning fluid can enter the interior of multiple sets of built-in tanks 4 through multiple sets of filter screens 8, multiple sets of shaft tubes 5, and multiple sets of filter screens 8. Finally, the cleaning fluid can enter the interior of the storage chamber 3. During this process, multiple sets of filter screens 6 can intercept impurities in the cleaning fluid from entering the interior of the multiple sets of shaft tubes 5. When it is necessary to clean the multiple sets of filters... When the filter screen 6 is in operation, the control panel activates the drive motor 15. The output of the drive motor 15 rotates multiple connecting shafts 9 via the main gear 16 and multiple driven gears 17. The rotating connecting shafts 9, through multiple first pulleys 25, multiple second pulleys 26, and a transmission belt 27, rotate multiple mounting shafts 7. The rotating mounting shafts 7, through multiple filter tubes 8 and multiple shaft tubes 5, rotate the filter screen 6. Using centrifugal force, impurities adsorbed on the surface of the multiple filter tubes 8 are thrown off. By opening and closing multiple drain valves, the cleaning fluid inside the multiple cleaning chambers 2 is discharged through multiple drain pipes 24. The filter screen 6, with its storage chamber 3, built-in tank 4, shaft tube 5, and filter screen 6, provides a cleaning structure capable of cleaning clogged filter structures.This ensures the continued use of energy-efficient and environmentally friendly cleaning equipment for silicon wafer processing.

[0041] The above description is merely a specific embodiment of this utility model, but the protection scope of this utility model is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this utility model should be included within the protection scope of this utility model. Therefore, the protection scope of this utility model should be determined by the protection scope of the claims.

Claims

1. An energy-saving and environmentally friendly cleaning equipment for silicon wafer processing, characterized in that, Includes an outer shell (1), the inner interior of which is provided with multiple sets of cleaning chambers (2) and liquid storage chambers (3). The inner wall of the liquid storage chamber (3) is provided with multiple sets of built-in grooves (4), and the inner top surface of each set of built-in grooves (4) is pierced by a shaft tube (5) through a bearing. The upper end of each set of shaft tubes (5) is fixedly installed with a filter screen cover (6). The inner bottom surface of each set of cleaning chambers (2) is pierced by a connecting shaft (9) through a bearing. The side wall of each set of connecting shafts (9) is fixedly sleeved with a positioning hole plate (10). The side wall of each set of connecting shafts (9) is slidably sleeved with multiple sets of moving hole plates (11). The inner wall of each set of positioning hole plates (10) on the same side is provided with two sets of slots (12). The side wall of each set of connecting shafts (9) is welded with two sets of slots (14). The inner wall of each set of positioning hole plates (10) on the same side is provided with two sets of slots (12). Multiple sets of mounting slots (13) are provided on the upper and lower parts of the outer shell (1). A mounting cover (32) is welded to the lower part of the outer shell (1), and a drive motor (15) is fixedly passed through the lower part of the mounting cover (32). A main gear (16) is fixedly sleeved at the output end of the drive motor (15). A driven gear (17) is fixedly sleeved on the lower side wall of multiple sets of connecting shafts (9). A water spray plate (18) is fixedly installed on the inner wall of multiple sets of cleaning chambers (2). A water storage tank (19) is fixedly installed on the upper part of the outer shell (1). A liquid guide pipe (20) is installed between multiple sets of water spray plates (18) and water storage tank (19). A pump (21) is fixedly installed on the end face of the water storage tank (19), and a second pump pipe (23) is snapped at the output end of the pump (21). A first pump pipe (22) is snapped at the input end of the pump (21).

2. The energy-saving and environmentally friendly cleaning equipment for silicon wafer processing according to claim 1, characterized in that, The inner bottom surfaces of the multiple sets of built-in grooves (4) are all connected by a bearing through an installation shaft (7). A filter screen tube (8) is fixedly installed between the multiple sets of shaft tubes (5) and the multiple sets of installation shafts (7). A second pulley (26) is fixedly sleeved on the side wall of the multiple sets of installation shafts (7). A first pulley (25) is fixedly sleeved on the lower side wall of the multiple sets of connecting shafts (9). A transmission belt (27) is sleeved on the side wall of the first pulley (25) on the same side and the second pulley (26) on the same side.

3. The energy-saving and environmentally friendly cleaning equipment for silicon wafer processing according to claim 1, characterized in that, Each of the multiple sets of connecting shafts (9) has a limiting groove (28) on its sidewall. Each of the multiple sets of limiting grooves (28) has a mounting screw (29) that slides through it. Each set of mounting screws (29) on the same side has two sets of mounting nuts (30) and two sets of brake plates (31) fitted onto its sidewall.

4. The energy-saving and environmentally friendly cleaning equipment for silicon wafer processing according to claim 3, characterized in that, The mounting screws (29) on the same side and the mounting nuts (30) on the same side are threadedly engaged.

5. The energy-saving and environmentally friendly cleaning equipment for silicon wafer processing according to claim 1, characterized in that, The main gear (16) meshes with multiple sets of driven gears (17).

6. The energy-saving and environmentally friendly cleaning equipment for silicon wafer processing according to claim 1, characterized in that, An electrical control box is installed on the side wall of the outer casing (1), and a control panel is installed inside the electrical control box. The control panel is electrically connected to the drive motor (15) and the pump (21) via wires.

7. The energy-saving and environmentally friendly cleaning equipment for silicon wafer processing according to claim 1, characterized in that, The lower part of the outer shell (1) is welded with four sets of support legs.

8. The energy-saving and environmentally friendly cleaning equipment for silicon wafer processing according to claim 1, characterized in that, The inner walls of the multiple sets of cleaning chambers (2) are all fixedly connected to drain pipes (24), and the side walls of the multiple sets of drain pipes (24) are all equipped with drain valves.

9. The energy-saving and environmentally friendly cleaning equipment for silicon wafer processing according to claim 1, characterized in that, The inner walls of the multiple sets of cleaning chambers (2) are provided with through openings, and the interior of the multiple sets of through openings is provided with sealing plugs.

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