A single crystal furnace auxiliary chamber cleaning device

Abstract

This utility model belongs to the technical field of cleaning devices, specifically a cleaning device for a single crystal furnace auxiliary chamber. It includes a transport vehicle with a hydraulic cylinder fixedly connected to its center; a fixed frame fixedly connected to the top of the hydraulic cylinder; a motor fixedly connected to the bottom of the fixed frame; a block fixedly connected to the output end of the motor; multiple damping rods fixedly connected to the side wall of the block; and a cleaning block fixedly connected to the end of each damping rod. By using the motor to drive the damping rods, the position of the wear-resistant polyester bristles is adjusted through centrifugal force. Simultaneously, the damping rods utilize their own extension resistance to reduce the excessive centrifugal force when the motor starts, quickly throwing out the wear-resistant polyester bristles. This allows for rapid adjustment of the wear-resistant polyester bristle position when encountering different single crystal furnace auxiliary chambers. Therefore, it can quickly adapt to various single crystal furnace auxiliary chambers during cleaning. Furthermore, the wear-resistant polyester bristles have partial rigidity, allowing for direct contact with the friction of the single crystal furnace auxiliary chamber, thereby increasing the cleaning effect.

Description

Technical Field

[0001] This utility model relates to the field of cleaning device technology, specifically a cleaning device for a single crystal furnace auxiliary chamber. Background Technology

[0002] The core of the single crystal furnace consists of a main furnace chamber (including a heating system and crucible assembly, responsible for silicon melting and crystal growth) and a secondary chamber (a detachable vacuum chamber used for loading, preheating, and crystal removal after growth, isolating external contamination) forming the basic framework.

[0003] The cleanliness of the sub-chamber of the single crystal furnace affects the normal growth process of the single crystal silicon rod. It is necessary to maintain a certain level of cleanliness in the sub-chamber of the single crystal furnace. After each single crystal silicon rod production is completed in the single crystal furnace, the interior of the sub-chamber of the single crystal furnace needs to be cleaned.

[0004] Existing cleaning methods for single crystal furnace sub-chambers often encounter sub-chambers of various sizes, but the size of the cleaning tools is usually fixed, making it difficult to effectively clean sub-chambers of different sizes.

[0005] Therefore, a single crystal furnace auxiliary chamber cleaning device is proposed to address the above problems. Utility Model Content

[0006] In order to overcome the shortcomings of the prior art, at least one technical problem raised in the background art is solved.

[0007] The technical solution adopted by this utility model to solve its technical problem is as follows: A single crystal furnace auxiliary chamber cleaning device of this utility model includes a transport vehicle, a hydraulic cylinder fixedly connected to the middle of the transport vehicle; a fixed frame fixedly connected to the top of the hydraulic cylinder; a motor fixedly connected to the bottom of the fixed frame; a block fixedly connected to the output end of the motor; multiple damping rods fixedly connected to the side wall of the block; a cleaning block fixedly connected to the end of the damping rod; and multiple wear-resistant polyester bristles fixedly connected to the side wall of the cleaning block. By using the motor to drive the damping rods to adjust the position of the wear-resistant polyester bristles through centrifugal force, the damping rods can use their own extension resistance to reduce the excessive centrifugal force when the motor is first started, thus quickly throwing out the wear-resistant polyester bristles. The position of the wear-resistant polyester bristles can be quickly adjusted when encountering different single crystal furnace auxiliary chambers. Therefore, it can quickly adapt to various different single crystal furnace auxiliary chambers when cleaning them. At the same time, the wear-resistant polyester bristles have partial rigidity, which can directly contact the friction force of the single crystal furnace auxiliary chamber when in contact with it, thereby increasing the cleaning effect.

[0008] Preferably, the cleaning block has multiple mounting rods fixed to its side wall; a counterweight is threaded to the top of each mounting rod; by adding mounting rods and counterweights, the weight of the cleaning block can be increased when adjusting the wear-resistant polyester bristles, so that it generates more centrifugal force during rotation. At the same time, the counterweights, through threaded connection, can increase their own stability after installation and reduce shaking during rotation.

[0009] Preferably, the abrasion-resistant polyester bristles are fixedly attached to the ends of the bristles; the bristles are located at the root of the abrasion-resistant polyester bristles and are triangular; by adding the bristles, the residue can be dispersed by impact before the abrasion-resistant polyester bristles clean it. Since it is rotating, the bending direction and the rotation direction of the abrasion-resistant polyester bristles are opposite, so the residue can be treated by the bristles before the abrasion-resistant polyester bristles clean it.

[0010] Preferably, a first protective shell and a second protective shell are sequentially installed in the middle of the hydraulic cylinder; the first protective shell and the second protective shell are connected by a connecting assembly; a surrounding plate is fixed to the top of the transport vehicle; the surrounding plate is located below the first protective shell and the second protective shell; by adding the first protective shell and the second protective shell, the residue can be blocked by the first protective shell and the second protective shell after falling, so as not to come into contact with the hydraulic cylinder, and then guided into the interior of the surrounding plate for collection, thereby increasing protection.

[0011] Preferably, the connecting assembly includes a pair of first magnets; the first magnets and the first protective shell are fixedly connected; a pair of second magnets are fixedly connected to the inner wall of the second protective shell; the second magnets and the first magnets are correspondingly arranged; by using the first magnets and the second magnets, the first protective shell and the second protective shell can be quickly connected by magnetic force during assembly, thereby achieving rapid and stable connection.

[0012] Preferably, a support plate is fixedly connected to the inner wall of the first protective shell and the second protective shell; the support plate is located between the hydraulic cylinder and the first protective shell; by adding the support plate, the contact area of ​​the first protective shell and the second protective shell on the hydraulic cylinder can be increased, thereby increasing the contact area after installation.

[0013] The advantages of this utility model are: 1. The single crystal furnace auxiliary chamber cleaning device of this utility model uses a motor to drive a damping rod to adjust the position of the wear-resistant polyester bristles through centrifugal force. At the same time, the damping rod can use its own extension resistance to reduce the excessive centrifugal force when the motor starts, so as to quickly throw out the wear-resistant polyester bristles. The position of the wear-resistant polyester bristles can be quickly adjusted when encountering different single crystal furnace auxiliary chambers. Thus, it can quickly adapt to a variety of different single crystal furnace auxiliary chambers when cleaning them. At the same time, the wear-resistant polyester bristles have partial rigidity, which can directly contact the friction force of the single crystal furnace auxiliary chamber when in contact with it, thereby increasing the cleaning effect.

[0014] 2. The single crystal furnace auxiliary chamber cleaning device of this utility model can increase the weight of the cleaning block when adjusting the wear-resistant polyester brush bristles by adding a mounting rod and a counterweight, so that it generates more centrifugal force during rotation. At the same time, the counterweight can increase its own stability after installation by threaded connection, reducing shaking during rotation. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0016] Figure 1 This is a schematic diagram of the main body of this utility model; Figure 2 This is a schematic diagram of the structure of the square block in this utility model; Figure 3 This is a schematic diagram of the structure of the fixing frame in this utility model; Figure 4 This is a schematic diagram of the mounting rod in this utility model; Figure 5 This is a schematic diagram of the support plate in this utility model.

[0017] In the diagram: 1. Transport vehicle; 11. Hydraulic cylinder; 12. Fixing frame; 13. Motor; 14. Block; 15. Damping rod; 16. Cleaning block; 17. Wear-resistant polyester bristles; 2. Mounting rod; 21. Counterweight block; 3. Protrusion; 4. First protective shell; 41. Second protective shell; 42. Enclosure; 43. Connecting assembly; 5. First magnet; 51. Second magnet; 6. Support plate. Detailed Implementation

[0018] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present utility model.

[0019] Specific implementation examples are given below.

[0020] like Figures 1 to 5As shown in the embodiment of this utility model, a single crystal furnace auxiliary chamber cleaning device includes a transport vehicle 1, a hydraulic cylinder 11 fixedly connected to the middle of the transport vehicle 1; a fixing frame 12 fixedly connected to the top of the hydraulic cylinder 11; a motor 13 fixedly connected to the bottom of the fixing frame 12; a block 14 fixedly connected to the output end of the motor 13; multiple damping rods 15 fixedly connected to the side wall of the block 14; a cleaning block 16 fixedly connected to the end of the damping rod 15; and multiple wear-resistant polyester bristles 17 fixedly connected to the side wall of the cleaning block 16. During operation, the cleaning block... When cleaning the sub-chamber of a single crystal furnace, the sub-chamber is usually lifted first and then cleaned. After lifting the sub-chamber, the transport vehicle 1 is placed below it. Then, the hydraulic cylinder 11 is started to drive the motor 13 and the block 14 to move into the sub-chamber. Once the sub-chamber reaches the bottom, the motor 13 is started, which drives the block 14 to rotate. During rotation, centrifugal force extends the damping rod 15 to both sides. After extension, the cleaning block 16 drives the wear-resistant polyester bristles 17 towards the single crystal. The abrasion-resistant polyester bristles 17 are close to the inner wall of the single crystal furnace chamber. When they bend upon contact with the inner wall, the current rotation speed can be maintained. The faster the rotation speed, the greater the centrifugal force, and the longer the damping rod 15 extends. Thus, the extension distance of the damping rod 15 can be adjusted by centrifugal force. Subsequently, the continuous rotation drives the abrasion-resistant polyester bristles 17 to rub against the inner wall of the single crystal furnace chamber for cleaning. During cleaning, the hydraulic cylinder 11 is used to adjust the height to move and clean. The position of the abrasion-resistant polyester bristles 17 is adjusted by the damping rod 15 driven by the motor 13 through centrifugal force. At the same time, the damping rod 15 can use its own extension resistance to reduce the excessive centrifugal force when the motor 13 is first started, which causes the abrasion-resistant polyester bristles 17 to be thrown out quickly. The position of the abrasion-resistant polyester bristles 17 can be quickly adjusted when encountering different single crystal furnace chambers. Thus, it can quickly adapt to various single crystal furnace chambers when cleaning. At the same time, the abrasion-resistant polyester bristles 17 have partial rigidity, which can directly contact the single crystal furnace chamber with friction when in contact with it, thereby increasing the cleaning effect.

[0021] like Figures 1 to 4 As shown, multiple mounting rods 2 are fixed to the side wall of the cleaning block 16; a counterweight 21 is threadedly connected to the top of the mounting rod 2; during operation, before cleaning, the corresponding counterweight 21 can be installed on the mounting rod 2 according to the required extension length, thereby increasing the weight of the cleaning block 16 itself, which in turn generates a stronger centrifugal force during rotation, thus assisting in the adjustment of the wear-resistant polyester bristles 17; by adding the mounting rods 2 and the counterweight 21, the weight of the cleaning block 16 can be increased when adjusting the wear-resistant polyester bristles 17, so that it generates more centrifugal force during rotation. At the same time, the counterweight 21, through the threaded connection, can increase its own stability after installation and reduce shaking during rotation.

[0022] like Figure 4As shown, multiple protrusions 3 are fixed to the ends of the wear-resistant polyester bristles 17; the protrusions 3 are located at the root of the wear-resistant polyester bristles 17 and are triangular; during operation, when the wear-resistant polyester bristles 17 bends in contact with the inner wall of the single crystal furnace, the protrusions 3 will be in close contact with the inner wall of the single crystal furnace. At this time, the protrusions 3 will impact the residues attached to the inner wall of the single crystal furnace when they come into contact with the residues, thus dispersing them, and then sweeping them off by the wear-resistant polyester bristles 17; by adding protrusions 3, the residues can be impacted and dispersed by the protrusions 3 before the wear-resistant polyester bristles 17 cleans them. Since it is rotating, the bending direction and the rotation direction of the wear-resistant polyester bristles 17 are opposite, so the residues can be treated by the protrusions 3 before the wear-resistant polyester bristles 17 cleans them.

[0023] like Figures 2 to 5 As shown, a first protective shell 4 and a second protective shell 41 are sequentially installed in the middle of the hydraulic cylinder 11; the first protective shell 4 and the second protective shell 41 are connected by a connecting assembly 43; a surrounding plate 42 is fixed to the top of the transport vehicle 1; the surrounding plate 42 is located below the first protective shell 4 and the second protective shell 41; during operation, some residue will fall down through the gaps between them during cleaning, and at this time it will come into contact with the first protective shell 4 and the second protective shell 41, and then move along their surfaces, and finally detach from the surfaces of the first protective shell 4 and the second protective shell 41 and enter the interior of the surrounding plate 42. When it is necessary to clean the surfaces of the first protective shell 4 and the second protective shell 41, they can also be quickly disassembled by the connecting assembly 43; by adding the first protective shell 4 and the second protective shell 41, the residue can be blocked by the first protective shell 4 and the second protective shell 41 after falling, and will not come into contact with the hydraulic cylinder 11, and then be guided into the interior of the surrounding plate 42 for collection, thereby increasing protection.

[0024] like Figure 5 As shown, the connecting component 43 includes a pair of first magnets 5; the first magnets 5 and the first protective shell 4 are fixedly connected; a pair of second magnets 51 are fixedly connected to the inner wall of the second protective shell 41; the second magnets 51 and the first magnets 5 are correspondingly arranged; during operation, when disassembling the first protective shell 4 and the second protective shell 41, the first protective shell 4 can be pulled outward to separate the first magnets 5 and the second magnets 51, thus detaching them from each other; by using the first magnets 5 and the second magnets 51, the first protective shell 4 and the second protective shell 41 can be quickly connected by magnetic force during assembly, thus achieving rapid and stable connection.

[0025] like Figures 2 to 5As shown, a support plate 6 is fixedly connected to the inner wall of the first protective shell 4 and the second protective shell 41; the support plate 6 is located between the hydraulic cylinder 11 and the first protective shell 4; during operation, when the first protective shell 4 and the second protective shell 41 are placed, the support plate 6 will contact the hydraulic cylinder 11, and after contact, the internal support of the first protective shell 4, the second protective shell 41 and the hydraulic cylinder 11 will be increased, thus making the installation more stable; by adding the support plate 6, the contact area of ​​the first protective shell 4 and the second protective shell 41 on the hydraulic cylinder 11 can be increased, thereby increasing the contact area after installation.

[0026] Working principle: When cleaning the sub-chamber of a single crystal furnace, the sub-chamber is usually lifted first and then cleaned. After lifting the sub-chamber, the transport vehicle 1 is placed below the sub-chamber, and then the hydraulic cylinder 11 is started to drive the motor 13 and the block 14 to move into the sub-chamber. When it reaches the bottom of the sub-chamber, the motor 13 is started, which drives the block 14 to rotate. During rotation, the centrifugal force extends the damping rod 15 to both sides. After extension, the cleaning block 16 drives the wear-resistant polyester bristles 17 to approach the inner wall of the sub-chamber. When the bristles 17 bend in contact with the inner wall of the single crystal furnace, the current rotation speed can be maintained. The faster the rotation speed, the greater the centrifugal force, and the longer the damping rod 15 extends. Thus, the extension distance of the damping rod 15 can be adjusted by centrifugal force. Subsequently, the continuous rotation drives the wear-resistant polyester bristles 17 to rub against the inner wall of the single crystal furnace for cleaning. During cleaning, the hydraulic cylinder 11 is used to adjust the height to move and clean. Before cleaning, the corresponding counterweight 21 can be installed on the mounting rod 2 according to the required extension length to increase the weight of the cleaning block 16 itself. This reduces the centrifugal force generated during rotation. The force is stronger, which can assist in the adjustment of the wear-resistant polyester bristles 17; when the wear-resistant polyester bristles 17 bends in contact with the inner wall of the single crystal furnace, the protrusion 3 will be in close contact with the inner wall of the single crystal furnace. At this time, the protrusion 3 will impact the residue attached to the inner wall of the single crystal furnace, dispersing it, and then sweeping it off by the wear-resistant polyester bristles 17; when cleaning, some residue will fall down through the gaps, and at this time it will come into contact with the first protective shell 4 and the second protective shell 41, and then move along its surface, finally detaching from the surface of the first protective shell 4 and the second protective shell 41 and entering the inner wall. Inside the enclosure 42, the first protective shell 4 and the second protective shell 41 can be quickly disassembled via the connecting assembly 43 when cleaning is required. When disassembling the first protective shell 4 and the second protective shell 41, simply pull the first protective shell 4 outward to separate the first magnet 5 and the second magnet 51, thus detaching them from each other. When placing the first protective shell 4 and the second protective shell 41, the support plate 6 will contact the hydraulic cylinder 11. After contact, the internal support of the first protective shell 4, the second protective shell 41, and the hydraulic cylinder 11 will be increased, thus making the installation more stable.

[0027] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed utility model.

Claims

1. A cleaning device for a sub-chamber of a single crystal furnace, characterized by: The system includes a transport vehicle (1), a hydraulic cylinder (11) fixedly connected to the middle of the transport vehicle (1); a fixing frame (12) fixedly connected to the top of the hydraulic cylinder (11); a motor (13) fixedly connected to the bottom of the fixing frame (12); a block (14) fixedly connected to the output end of the motor (13); a plurality of damping rods (15) fixedly connected to the side wall of the block (14); a cleaning block (16) fixedly connected to the end of the damping rod (15); and a plurality of wear-resistant polyester bristles (17) fixedly connected to the side wall of the cleaning block (16).

2. A single crystal furnace subchamber cleaning device according to claim 1, wherein: The cleaning block (16) has multiple mounting rods (2) fixed to its side wall; the top of the mounting rod (2) is threaded with a counterweight (21).

3. A single crystal furnace subchamber cleaning device as defined in claim 2, wherein: The abrasion-resistant polyester bristles (17) are fixed with a plurality of protrusions (3) at their ends; the protrusions (3) are located at the root of the abrasion-resistant polyester bristles (17) and are triangular.

4. A single crystal furnace subchamber cleaning device as defined in claim 3, wherein: The hydraulic cylinder (11) is equipped with a first protective shell (4) and a second protective shell (41) in sequence in the middle; the first protective shell (4) and the second protective shell (41) are connected by a connecting assembly (43); a side panel (42) is fixed to the top of the transport vehicle (1); the side panel (42) is located below the first protective shell (4) and the second protective shell (41).

5. A single crystal furnace sub-chamber cleaning device as defined in claim 4, wherein: The connecting component (43) includes a pair of first magnets (5); the first magnets (5) and the first protective shell (4) are fixedly connected; a pair of second magnets (51) are fixedly connected to the inner wall of the second protective shell (41); the second magnets (51) and the first magnets (5) are correspondingly arranged.

6. A single crystal furnace subchamber cleaning device as defined in claim 5, wherein: A support plate (6) is fixed to the inner wall of the first protective shell (4) and the second protective shell (41); the support plate (6) is located between the hydraulic cylinder (11) and the first protective shell (4).

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