A leveling device for planar targets

Abstract

This disclosure relates to the technical field of target material processing. One embodiment of this disclosure provides a leveling device for planar targets, comprising: a device frame and a movable stage. The movable stage is disposed on the device frame, a fixed propulsion assembly is disposed on the device frame and the movable stage, and a leveling assembly is disposed on the device frame. The fixed propulsion assembly includes a notch formed at one end of the surface of the movable stage. A pair of cylinders are disposed on the outside of the device frame, with the cylinder output ends extending through the movable stage into the notch. A clamping block is disposed at the cylinder output end. A pair of sliding grooves are formed on the surface of the device frame, and the bottom of the movable stage is slidably connected to the sliding grooves. An elongated hole is formed on the surface of the device frame, and a drive screw is rotatably connected to the elongated hole. This technical solution solves the technical problem that existing devices often use an overall pressure leveling method, making it difficult to achieve targeted and precise correction of local protrusions or depressions on the target surface.

Description

Technical Field

[0001] The embodiments disclosed herein relate to the technical field of target material processing, and more specifically, to a leveling device for planar targets. Background Technology

[0002] In high-end manufacturing fields such as semiconductors, displays, and photovoltaics, planar sputtering targets are core materials in coating processes, and their flatness directly affects the uniformity of thin film deposition and device performance. Planar sputtering targets are prone to deformation such as warping and dents during processing such as rolling and cutting, and need to be corrected with precision using leveling equipment to ensure that their flatness meets the micron-level requirements. Therefore, leveling equipment is a key link in ensuring the quality of sputtering targets. Currently, traditional planar target leveling equipment has significant drawbacks, with instability in localized leveling being a prominent issue. Existing equipment mostly employs a leveling method that applies pressure across the entire surface, making it difficult to precisely correct localized protrusions or depressions on the target surface. During localized leveling, uneven pressure distribution and insufficient precision in controlling the force points can easily lead to overpressure deformation in the leveled area or the formation of new warping in adjacent areas. This instability has a particularly significant impact on high-purity, thin planar sputtering targets, potentially leading to microcracks due to localized stress concentration and directly causing the target to be scrapped. Simultaneously, inconsistent local leveling results can cause problems such as arc discharge and film thickness deviations during the coating process, reducing the yield of downstream products. To solve this problem, companies often need to add multiple leveling processes, which not only extends the production cycle but also increases material loss. Therefore, developing a planar sputtering target leveling device that can improve the stability of local leveling has become an urgent need to enhance the processing quality of high-end sputtering targets. Utility Model Content

[0003] To overcome the above-mentioned defects, the embodiments of this disclosure provide a planar target material leveling device, which solves the technical problem that existing devices mostly adopt the overall pressure leveling method, making it difficult to achieve targeted and precise correction for local protrusions or depressions on the target material surface.

[0004] According to one aspect, at least one embodiment of this disclosure provides a leveling device for a planar target, comprising: The equipment rack and the mobile platform, wherein the mobile platform is mounted on the equipment rack; A fixed propulsion assembly is disposed on the equipment frame and the movable platform; A leveling assembly, which is mounted on the equipment rack; The fixed propulsion assembly includes a notch, which is formed at one end of the surface of the moving platform. A pair of cylinders are provided on the outside of the equipment frame. The output end of the cylinders extends through the moving platform into the notch, and a clamping block is provided at the output end of the cylinders.

[0005] As a further technical solution, a pair of sliding grooves are provided on the surface of the equipment frame, and the bottom of the moving platform is slidably connected in the sliding grooves. An elongated hole is provided on the surface of the equipment frame, and a drive screw is rotatably connected in the elongated hole.

[0006] As a further technical solution, a drive motor is provided at the bottom of the equipment frame, and a transmission gear is provided at the output end of the drive motor and one end of the drive screw. The transmission gears mesh with each other, and the upper surface of the clamping block is slightly higher than the surface of the moving table.

[0007] As a further technical solution, the leveling component includes a base frame, which is connected to the bottom of the equipment frame via a vertical linear drive. Movable columns are provided at the four opposite corners of the base frame surface, and the movable columns are movably fitted into the equipment frame.

[0008] As a further technical solution, a flat plate is provided at the upper end of the movable column, and a number of leveling convex layers are provided on the bottom surface of the flat plate, and the lower end surface of the leveling convex layers is an arc-shaped transition structure surface.

[0009] As a further technical solution, the lower end face of the leveling convex layer is a smooth structural surface with low friction.

[0010] As a further technical solution, the moving stage has an L-shaped structure, the upper surface of the clamping block is slightly higher than the surface of the moving stage, and the higher part of the clamping block is lower than the thickness of the target material.

[0011] As a further technical solution, the surface of the mobile platform is a non-slip structural surface with high friction.

[0012] The beneficial effects of the embodiments disclosed herein are as follows: In this disclosure, the leveling component solves the problem of difficulty in correcting local defects through overall pressure by employing a localized, precise pressure application design. Multiple leveling protrusions can target specific protrusions or depressions on the target surface, while the arc-shaped transition surface disperses pressure to prevent overpressure deformation, and the smooth surface reduces frictional damage. Vertical linear drive, in conjunction with the movable column, enables highly precise height adjustment to adapt to targets of varying thicknesses, ensuring controllable leveling force, improving local correction accuracy, meeting micron-level flatness requirements, and reducing target scrap due to over-leveling. Attached Figure Description

[0013] To more clearly illustrate the technical solutions in the embodiments of this disclosure, the accompanying drawings used in the description of the embodiments of this disclosure will be briefly introduced below. Obviously, the drawings described below are merely some exemplary embodiments of this disclosure. For those skilled in the art, other drawings can be obtained based on the content of the exemplary embodiments of this disclosure and these drawings without any creative effort.

[0014] Figure 1 This is a schematic diagram of a structure in one embodiment of the present disclosure; Figure 2 This is an isometric drawing of the present disclosure; Figure 3 This is an isometric sectional view of the present disclosure; In the diagram: 1. Equipment frame; 2. Moving platform; 3. Fixed propulsion assembly; 3-1. Groove; 3-2. Cylinder; 3-3. Clamping block; 3-4. Slide groove; 3-5. Elongated hole; 3-6. Drive screw; 3-7. Drive motor; 3-8. Transmission gear; 4. Leveling assembly; 4-1. Base frame; 4-2. Movable column; 4-3. Flat plate; 4-4. Leveling protrusion. Detailed Implementation

[0015] The present disclosure will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present disclosure and are not intended to limit the scope of the disclosure.

[0016] To keep the drawings concise, each drawing only schematically shows the parts relevant to the disclosure; these do not represent the actual structure of the product. Furthermore, for ease of understanding, in some drawings, only one of components with the same structure or function is schematically shown, or only one is labeled. In this document, "one" not only means "only one," but can also mean "more than one," and "several" includes "two" and "more than two."

[0017] In this document, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linkage" should be interpreted broadly. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to mechanical connections or electrical connections; they can refer to direct connections or indirect connections through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this disclosure based on the specific circumstances.

[0018] In this disclosure, unless otherwise expressly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0019] In the description of this embodiment, terms such as "upper," "lower," "left," and "right" are based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of description and simplification of operation, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this disclosure.

[0020] Furthermore, in the description of this application, the terms "first," "second," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0021] like Figures 1-3 As shown, it illustrates a planar target leveling device according to an embodiment of the present disclosure, comprising: The equipment rack 1 and the mobile platform 2 are mounted on the equipment rack 1; A fixed propulsion assembly 3 is disposed on the equipment frame 1 and the mobile platform 2; Leveling component 4, which is mounted on the equipment rack 1; The fixed propulsion assembly 3 includes a notch 3-1, which is formed at one end of the surface of the moving platform 2. A pair of cylinders 3-2 are provided on the outside of the equipment frame 1. The output end of the cylinders 3-2 extends through the moving platform 2 into the notch 3-1. A clamping block 3-3 is provided at the output end of the cylinders 3-2. A pair of sliding grooves 3-4 are formed on the surface of the equipment frame 1. The bottom of the moving platform 2 is slidably connected to the sliding grooves 3-4. An elongated hole 3-5 is formed on the surface of the equipment frame 1. A drive screw 3-6 is rotatably connected in the elongated hole 3-5. A drive motor 3-7 is provided at the bottom of the equipment frame 1. A transmission gear 3-8 is provided at the output end of the drive motor 3-7 and at one end of the drive screw 3-6. The transmission gears 3-8 mesh with each other. The upper surface of the clamping block 3-3 is slightly higher than the surface of the moving platform 2.

[0022] In some examples, to achieve stable clamping and precise propulsion of the target, a fixed propulsion assembly 3 is designed. This assembly includes a notch 3-1 on one end of the surface of the moving stage 2, which is opened along the width direction to provide movement space for the clamping block 3-3. A pair of cylinders 3-2 on the outside of the equipment frame 1 are symmetrically fixed by a bracket, and their output ends extend into the notch 3-1 through a through hole on the side of the moving stage 2. The clamping block 3-3 at the end is a rectangular block to enhance the friction with the target. A pair of sliding grooves 3-4 on the surface of the equipment frame 1 are parallel to each other along the length direction. The slider at the bottom of the moving stage 2 is slidably connected in the sliding grooves 3-4 to ensure that the moving stage 2 moves in a straight line. The elongated hole 3-5 on the surface of the equipment frame 1 is parallel to the sliding groove 3-4, and the drive screw 3-6 inside is rotatably connected by a bearing. The rod body and the screw hole at the bottom of the moving stage 2 are threaded together to form a screw drive structure. The drive motor 3-7 at the bottom of the equipment frame 1 is fixed by bolts, and its output end meshes with the transmission gear 3-8 at one end of the drive screw 3-6 to form a gear transmission mechanism.

[0023] During operation, the target material is placed on the moving stage 2. The output end of cylinder 3-2 retracts the clamping block 3-3 to clamp the target material onto the moving stage 2, achieving stable clamping. The drive motor 3-7 starts, driving the drive screw 3-6 to rotate via the transmission gear 3-8. Guided by the slide groove 3-4, the moving stage 2 moves smoothly along the surface of the equipment frame 1, pushing the target material towards the leveling assembly 4. The clamping block 3-3 driven by cylinder 3-2 can quickly clamp or release the target material, accommodating targets of different sizes. The cooperation between the drive screw 3-6 and the transmission gear 3-8 ensures that the moving stage 2's advance speed is uniform and controllable, guaranteeing accurate target material delivery. The guiding effect of the slide groove 3-4 prevents the moving stage 2 from deviating, ensuring stable target material delivery direction. This assembly, through the combination of pneumatic clamping and screw propulsion, achieves stable clamping and accurate delivery of the target material, providing reliable assurance for the leveling process.

[0024] like Figures 1-3 As shown in the figure, the leveling component 4 proposed in this embodiment includes a base frame 4-1. The base frame 4-1 is connected to the bottom of the equipment rack 1 by a vertical linear drive. Movable columns 4-2 are provided at the four opposite corners of the surface of the base frame 4-1. The movable columns 4-2 are movably fitted into the equipment rack 1. A flat plate 4-3 is provided at the upper end of the movable column 4-2. A plurality of leveling protrusions 4-4 are provided on the bottom surface of the flat plate 4-3. The lower end surface of the leveling protrusions 4-4 is an arc-shaped transition structure surface.

[0025] In some examples, the leveling assembly 4 achieves flexible leveling and height adaptation of the target material through lifting adjustment and arc-shaped pressure. The base frame 4-1 at the bottom of the equipment frame 1 is connected to the output end of a vertical linear drive device (such as a hydraulic cylinder) and can be raised and lowered vertically. The movable columns 4-2 at the four corners of the base frame 4-1 extend vertically upward, pass through guide holes on the surface of the equipment frame 1, and are movably fitted. The columns and guide holes are fitted with a clearance fit, providing guidance and support. The flat plate 4-3 at the upper end of the movable column 4-2 is horizontally set and fixed to the column with bolts. Several leveling protrusions 4-4 on the bottom surface are evenly distributed along the length direction. The cross-section of the protrusions is arc-shaped, and the arc-shaped transition structure surface at the lower end is smooth and flat, adapting to the surface of the target material.

[0026] During operation, the vertical linear drive device raises or lowers the base frame 4-1 according to the target thickness. The movable column 4-2 moves synchronously with the base frame 4-1, causing the plate 4-3 to adjust its height, ensuring a suitable distance between the leveling protrusion 4-4 and the target surface. When the target is pushed below the plate 4-3, the plate 4-3 descends, and the arc-shaped surface of the leveling protrusion 4-4 contacts the target surface, applying pressure for leveling. The vertical linear drive device allows for flexible height adjustment of the plate 4-3, accommodating targets of different thicknesses. The cooperation between the movable column 4-2 and the guide hole ensures smooth lifting and lowering of the plate 4-3, preventing uneven leveling due to tilting. The arc-shaped transition structure of the leveling protrusion 4-4 disperses stress during pressure application, preventing excessive local pressure on the target and damage. Simultaneously, multi-point arc contact achieves flexible leveling, improving leveling accuracy. Multiple leveling protrusions 4-4 are distributed along the length, enabling comprehensive leveling of the target surface and ensuring consistent overall flatness. This component, with its height adjustable and arc-shaped pressure design, enables precise leveling and height adaptation of the target material, meeting the leveling requirements of targets of different specifications.

[0027] For example, such as Figure 3 As shown, the lower end face of the leveling convex layer 4-4 is a smooth structural surface with low friction.

[0028] In some examples, the lower end face of the leveling protrusion 4-4 is a smooth structural surface with low friction, which reduces frictional damage to the target surface during leveling. The smooth surface allows the leveling protrusion 4-4 to slide more smoothly against the target during pressure application, avoiding scratches on the target surface and ensuring the target's appearance quality. Simultaneously, the low friction characteristics allow the protrusion to uniformly transmit pressure, resulting in more balanced force on the target, improving the leveling effect, and reducing leveling deviations caused by uneven frictional resistance.

[0029] For example, such as Figure 1 As shown, the moving stage 2 has an L-shaped structure, the upper surface of the clamping block 3-3 is slightly higher than the surface of the moving stage 2, and the part of the clamping block 3-3 that is higher is lower than the thickness of the target material.

[0030] In some examples, the moving stage 2 has an L-shaped structure, which provides lateral restraint for the target material and prevents it from shifting during pushing. The upper surface of the clamping block 3-3 is slightly higher than the surface of the moving stage 2, and the protruding part is lower than the thickness of the target material. This ensures that the clamping block 3-3 can effectively clamp the target material, while preventing the protruding part from hindering the movement of the target material or causing it to deform. This design allows the target material to be accurately advanced under stable clamping, improving the stability of the leveling process.

[0031] For example, such as Figure 1 As shown, the surface of the moving platform 2 is a non-slip structural surface with high friction.

[0032] In some examples, the surface of the moving stage 2 is a high-friction, non-slip structure, which enhances the friction with the bottom of the target. The non-slip surface prevents the target from slipping during pushing or leveling, ensuring its synchronized movement with the moving stage 2 and avoiding positional shifts caused by relative sliding, thus guaranteeing accurate leveling. Simultaneously, the high friction helps maintain the target's stable placement before clamping, facilitating operation.

[0033] In practical use: The flat target is placed on the anti-slip surface of the L-shaped moving platform 2. The cylinder 3-2 pushes the clamping block 3-3 out of the slot 3-1, which, together with the moving platform 2, clamps the target. The protruding part of the clamping block 3-3 is lower than the thickness of the target to avoid deformation. The drive motor 3-7 drives the drive screw 3-6 to rotate through the transmission gear 3-8. The moving platform 2 moves smoothly along the slide 3-4, pushing the target to the bottom of the leveling component 4. The vertical linear drive drives the base frame 4-1 to rise, and the movable column 4-2 guides the plate 4-3 to move down. The arc-shaped surfaces of several leveling protrusions 4-4 contact the surface of the target, applying targeted pressure to correct local protrusions or depressions. The smooth protrusions reduce friction damage. After completion, the plate 4-3 returns to its original position, and the moving platform 2 pulls the target out, achieving precise leveling throughout the process.

[0034] It should be noted that the above embodiments are only used to illustrate the technical solutions of this disclosure and are not intended to limit it. Although this disclosure has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solutions of this disclosure without departing from the spirit and scope of the technical solutions of this disclosure, and all such modifications and substitutions should be covered within the scope of the claims of this disclosure.

Claims

1. A leveling device for a planar target, characterized in that, include: Equipment rack (1) and mobile platform (2), the mobile platform (2) being mounted on the equipment rack (1); A fixed propulsion assembly (3) is disposed on the equipment frame (1) and the mobile platform (2); A leveling component (4) is mounted on the equipment rack (1); The fixed propulsion assembly (3) includes a notch (3-1), which is formed at one end of the surface of the moving platform (2). A pair of cylinders (3-2) are provided on the outside of the equipment frame (1). The output end of the cylinders (3-2) extends through the moving platform (2) into the notch (3-1). A clamping block (3-3) is provided at the output end of the cylinders (3-2).

2. The planar target leveling device according to claim 1, characterized in that, The equipment frame (1) has a pair of sliding grooves (3-4) on its surface. The bottom of the moving platform (2) is slidably connected in the sliding grooves (3-4). The equipment frame (1) has an elongated hole (3-5) on its surface. A drive screw (3-6) is rotatably connected in the elongated hole (3-5).

3. The planar target leveling device according to claim 2, characterized in that, The bottom of the equipment frame (1) is provided with a drive motor (3-7). The output end of the drive motor (3-7) and one end of the drive screw (3-6) are both provided with transmission gears (3-8). The transmission gears (3-8) mesh with each other. The upper surface of the clamping block (3-3) is slightly higher than the surface of the moving table (2).

4. The planar target leveling device according to claim 1, characterized in that, The leveling component (4) includes a base frame (4-1), which is connected to the bottom of the equipment rack (1) by a vertical linear drive. Movable columns (4-2) are provided at the four corners of the surface of the base frame (4-1), and the movable columns (4-2) are movably fitted into the equipment rack (1).

5. The planar target leveling device according to claim 4, characterized in that, The upper end of the movable column (4-2) is provided with a flat plate (4-3), and the bottom surface of the flat plate (4-3) is provided with a plurality of leveling convex layers (4-4), and the lower end surface of the leveling convex layers (4-4) is an arc-shaped transition structure surface.

6. The planar target leveling device according to claim 5, characterized in that, The lower end face of the leveling convex layer (4-4) is a smooth structural surface with low friction.

7. The planar target leveling device according to claim 1, characterized in that, The moving stage (2) has an L-shaped structure. The upper surface of the clamping block (3-3) is slightly higher than the surface of the moving stage (2), and the part of the clamping block (3-3) that is higher is lower than the thickness of the target material.

8. The leveling device for a planar target material according to claim 1, characterized in that, The surface of the mobile platform (2) is a non-slip structure with high friction.

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