Rotary multi-station electrostatic chuck assembly tool

Abstract

The utility model belongs to the technical field of industrial production, concretely relates to a rotary multi-station electrostatic chuck assembly tool, including including drive motor and a plurality of electrostatic chuck body, the output of drive motor is fixed with the rotating seat, the outside of rotating seat top is fixed with the same number of vertical box body with electrostatic chuck body, one end of vertical box body is fixed with the circular box body, a plurality of electrostatic chuck body are installed on a plurality of circular box bodies respectively through clamping mechanism, and the top of circular box body and the bottom of electrostatic chuck body are fixed with the placement tray, and the top of placement tray is installed with a plurality of ball clamping mechanism including linear drive execution subassembly fixed in the inner side of rotating seat. The utility model can fix the electrostatic chuck body quickly and stably, the electrostatic chuck body will automatically correct the position under the action of uniform clamping force in the fixing process, simplifies the installation and replacement process of electrostatic chuck body, and promotes the operation convenience.

Description

Technical Field

[0001] This utility model belongs to the field of industrial production technology, specifically relating to a rotary multi-station electrostatic chuck assembly fixture. Background Technology

[0002] In the semiconductor, microelectronics, flat panel display, optics, and electronic component industries, traditional assembly fixtures are prone to workpiece deformation and surface scratches when fixing thin and precision workpieces such as wafers and glass substrates during production, processing, and assembly. To address this, the industry has combined electrostatic chucks for non-contact fixing to ensure accuracy and surface quality, and rotating multi-station fixtures to allow simultaneous operation at each station. The integrated fixtures can improve work efficiency.

[0003] However, existing rotary multi-station electrostatic chuck assembly fixtures have drawbacks when the electrostatic chuck needs maintenance or replacement due to surface dust accumulation or malfunction:

[0004] Most fixtures use individual bolts to fix each electrostatic chuck individually. During maintenance and replacement, it is necessary to disassemble and install bolts on a large number of chucks one by one. In addition, the compact layout of multiple workstations and limited operating space make the bolt disassembly and assembly process cumbersome and time-consuming. In addition, some fixtures use a support plate and elastic pressure strips for fixing. The electrostatic chuck can be placed directly on the support plate of the fixture base and then pressed and fixed by the elastic pressure strips on both sides. No complicated tools are required, and the installation operation is extremely simple. However, this method lacks a precise positioning constraint structure. The support plate can only provide bottom support and cannot effectively limit the radial position of the electrostatic chuck. When the electrostatic chuck is placed, it is easy to cause the center of the electrostatic chuck to be misaligned with the preset reference center of the fixture due to manual placement deviation. This will cause the position of the workpiece to shift during subsequent adsorption and processing, affecting the assembly accuracy. Utility Model Content

[0005] The purpose of this invention is to provide a rotary multi-station electrostatic chuck assembly fixture that can quickly and securely fix the electrostatic chuck body. During the fixing process, the electrostatic chuck body will automatically correct its position under the action of uniform clamping force, simplifying the installation and replacement process of the electrostatic chuck body and improving the convenience of operation.

[0006] The specific technical solution adopted by this utility model is as follows:

[0007] A rotary multi-station electrostatic chuck assembly fixture includes a drive motor and multiple electrostatic chuck bodies. A rotating base is fixed to the output end of the drive motor. A vertical box, the same number as the electrostatic chuck bodies, is fixed to the outer side of the top of the rotating base. A circular box is fixed to one end of each vertical box. Multiple electrostatic chuck bodies are respectively mounted on multiple circular boxes via a clamping mechanism. A placement plate is fixed to the top of each circular box and located at the bottom of the electrostatic chuck body. Multiple ball bearings are installed on the top of the placement plate.

[0008] The clamping mechanism includes a linear drive actuator fixed inside the rotating seat. The output end of the linear drive actuator and the inner side of the rotating seat are fixed with a mounting plate. The outer side of the mounting plate is fixed with a number of bearing plates equal to the number of circular boxes. The bearing plates are slidably connected to the rotating seat and to the circular boxes. A circular disk is fixed at one end of the bearing plate and inside the circular box. A plurality of rectangular plates are rotatably connected to the circular disk. The number of rectangular plates is four, and the four rectangular plates are evenly distributed on the circular disk in a cross shape.

[0009] A positioning block is rotatably connected to one end of the rectangular plate, located on the outside of the electrostatic chuck body. The positioning block is slidably connected to the circular box in the horizontal direction. Two rectangular blocks are fixed to one side of the positioning block, and the two rectangular blocks abut against the outer top and inner top of the circular box, respectively.

[0010] The top of the positioning block is fixed with a positioning post by bolts, and the positioning post is made of elastic material.

[0011] The technical effects achieved by this utility model are as follows:

[0012] This invention can quickly and securely fix the electrostatic chuck body. During the fixing process, the electrostatic chuck body will automatically correct its position under the action of uniform clamping force, simplifying the installation and replacement process of the electrostatic chuck body and improving the ease of operation. Attached Figure Description

[0013] Figure 1 This is a schematic diagram of the structure of this utility model;

[0014] Figure 2 This is a cross-sectional view of the interior of the rotating seat in this utility model;

[0015] Figure 3 This is an exploded view of the electrostatic chuck body and the circular box in this utility model;

[0016] Figure 4 This is a cross-sectional view of the interior of the circular box in this utility model.

[0017] The attached diagram lists the components represented by each number as follows:

[0018] 1. Drive motor; 2. Rotating seat; 3. Vertical housing; 4. Circular housing; 5. Electrostatic chuck body; 6. Mounting plate; 7. Bearing plate; 8. Circular plate; 9. Rectangular plate; 10. Positioning block; 11. Positioning column; 12. Rectangular block; 13. Placement plate; 14. Ball bearing; 15. Linear drive actuator. Detailed Implementation

[0019] To make the objectives and advantages of this utility model clearer, the following detailed description is provided in conjunction with embodiments. It should be understood that the following text is merely used to describe one or more specific embodiments of this utility model and does not strictly limit the scope of protection specifically claimed by this utility model.

[0020] Example 1:

[0021] like Figure 1-4 As shown, a rotary multi-station electrostatic chuck assembly fixture includes a control host, a drive motor 1 and multiple electrostatic chuck bodies 5. The output end of the drive motor 1 is fixed with a rotating base 2. A protective cover is rotatably connected to the bottom of the rotating base 2. The drive motor 1 is installed inside the protective cover at the bottom of the rotating base 2. When in use, the protective cover can be fixed to the designated working area with bolts to provide protection for the drive motor 1 and prevent water stains and dust from adhering.

[0022] The outer side of the top of the rotating seat 2 is fixed with the same number of vertical boxes 3 as the electrostatic chuck body 5. The multiple vertical boxes 3 are evenly distributed in a ring on the outer side of the top of the rotating seat 2. A circular box 4 is fixed at the end of the vertical box 3 away from the rotating seat 2. The multiple electrostatic chuck bodies 5 are respectively installed on the multiple circular boxes 4 through a clamping mechanism. The clamping mechanism includes a linear drive execution component 15 fixed inside the rotating seat 2.

[0023] The drive motor 1, the electrostatic chuck body 5, and the linear drive actuator 15 are all electrically connected to the control host to realize the transmission of signals and power. The control host, drive motor 1, electrostatic chuck body 5, and linear drive actuator 15 are all existing mature technologies.

[0024] The drive motor 1 directly outputs rotational motion, which drives the rotating base 2 to rotate synchronously, providing rotational driving force for subsequent actions;

[0025] The electrostatic chuck body 5 generates an electric field by applying high voltage DC current to the electrode layer, which polarizes the charge on the wafer surface, thereby firmly adsorbing the wafer onto the chuck surface and ensuring the wafer's stable position during processing.

[0026] The linear drive actuator 15 can be a hydraulic cylinder, a pneumatic cylinder, or a lifting motor, used to drive the mounting plate 6 to achieve lifting and lowering actions;

[0027] The control host receives external instructions such as processing parameters input by the operator and linkage signals of the automatic system. Through electrical connection lines, it outputs precise control signals to various components, such as wafer adsorption start and stop, lifting height of mounting plate 6, start and stop of drive motor 1, and rotation speed.

[0028] This embodiment does not describe in detail the specific structure and working principle of the control host, drive motor 1, electrostatic chuck body 5 and linear drive execution component 15. The core solution of this technical solution lies in the specific structure of the clamping mechanism.

[0029] See attached document Figure 2 , 3 and attached Figure 4 The output end of the linear drive execution component 15 is fixed with a mounting plate 6 located inside the rotating seat 2. The outer side of the mounting plate 6 is fixed with the same number of bearing plates 7 as the circular box 4. Both the rotating seat 2 and the circular box 4 are provided with vertical grooves to accommodate the up and down movement of the bearing plates 7. The bearing plates 7 and the rotating seat 2, as well as the bearing plates 7 and the circular box 4, are slidably connected through the vertical grooves.

[0030] A circular plate 8 is fixed at one end of the bearing plate 7 and inside the circular box 4. The center of the circular plate 8 is aligned with the center of the circular box 4 in the vertical direction. Four rectangular plates 9 are rotatably connected to the circular plate 8 by pins, and the four rectangular plates 9 are evenly distributed on the circular plate 8 in a cross shape with a 90° included angle.

[0031] Aligning the center of the circular disc 8 with the center of the circular box 4 in the vertical direction and setting the position of the rectangular plate 9 can reduce the lateral eccentric torque during clamping, prevent the electrostatic chuck body 5 from being pushed off-center, and ensure that the center of the electrostatic chuck body 5 coincides with the center of the circular box 4.

[0032] See attached document Figure 2 and attached Figure 4 The rectangular plates 9 are set to be four in number, which makes it easier to form symmetrical and balanced circumferential constraints when clamping the circular base. Under the action of symmetrical force, they are automatically corrected to ensure that the center of the electrostatic chuck body 5 coincides with the center of the circular box 4.

[0033] The rectangular plate 9 is located at the end away from the circular disk 8 and on the outside of the electrostatic chuck body 5, and is rotatably connected to the positioning block 10 by a pin.

[0034] See attached document Figure 2 , 3 and attached Figure 4 The circular box 4 is provided with a sliding groove that adapts to the sliding part and movement trajectory of the positioning block 10, and the circular box 4 and the positioning block 10 are slidably connected through the sliding groove.

[0035] To limit the vertical displacement of the positioning block 10 when it slides, two rectangular blocks 12 are fixed on one side of the positioning block 10. The two rectangular blocks 12 abut against the outer top of the circular box 4 and the inner top of the circular box 4, respectively. The vertical freedom of the positioning block 10 in the slide groove is restricted by the two rectangular blocks 12, ensuring that the positioning block 10 can only slide stably in the horizontal direction.

[0036] When using:

[0037] Multiple electrostatic chuck bodies 5 are placed on top of multiple circular boxes 4. At this time, the electrostatic chuck bodies 5 are positioned between multiple positioning blocks 10 on the circular boxes 4. The linear drive actuator 15 operates, allowing the mounting plate 6 to rise. Through the linkage of the support plate 7, the circular plate 8, and the rectangular plate 9, combined with the limiting effect of the sliding groove and the rectangular block 12 on the circular box 4, and the layout design of the four rectangular plates 9, the multiple positioning blocks 10 on the circular box 4 move synchronously towards the center of the circular box 4, i.e., closer to the electrostatic chuck body 5. After the positioning block 10 contacts the electrostatic chuck body 5, the circular... Multiple positioning blocks 10 on the housing 4 clamp the electrostatic chuck body 5. As the multiple positioning blocks 10 continue to retract synchronously, the electrostatic chuck body 5 will automatically correct its position radially under the action of uniform clamping force until the multiple positioning blocks 10 on the circular housing 4 are all tightly attached to the electrostatic chuck body 5. At this time, the center of the electrostatic chuck body 5 is forced to coincide with the center of the circular housing 4, realizing concentric positioning of the two, and at the same time, the electrostatic chuck body 5 is firmly fixed on the circular housing 4. By adjusting the rising height of the mounting plate 6, it can be adapted to fix electrostatic chuck bodies 5 with different outer diameters.

[0038] When it is necessary to replace or maintain the electrostatic chuck body 5, the linear drive actuator 15 operates again, allowing the mounting plate 6 to rise. Through the linkage of the support plate 7, the circular plate 8, and the rectangular plate 9, multiple positioning blocks 10 on the circular box 4 move synchronously in a direction away from the center of the circular box 4 and closer to the electrostatic chuck body 5, thereby releasing the fixation of the electrostatic chuck body 5. At this time, the electrostatic chuck body 5 can be taken out for repair or replacement.

[0039] See attached document Figure 3 A placement plate 13 is fixed on the top of the circular box 4 and at the bottom of the electrostatic chuck body 5. Multiple balls 14 are evenly embedded on the top of the placement plate 13. The balls 14 can roll freely around their own axis, and the top of the balls 14 is slightly higher than the upper surface of the placement plate 13.

[0040] The rolling characteristics of the ball 14 convert sliding friction into rolling friction, which greatly reduces the resistance to radial movement of the electrostatic chuck body 5, allowing it to smoothly complete position correction under the slight push of the clamping force and ensure final concentricity.

[0041] The drive motor 1 is installed at the geometric center of the multi-station base platform. Multiple electrostatic chuck bodies 5 can adsorb and fix multiple materials to ensure the stability of the material position during the assembly process. When the drive motor 1 operates, the rotating seat 2 is rotated. At this time, the vertical box 3, the circular box 4 and the electrostatic chuck bodies 5 on the circular box 4 follow the rotating seat 2 to rotate. This can drive multiple electrostatic chuck bodies 5 and the materials adsorbed on them to be smoothly transferred one by one to the designated processing station, inspection station, unloading station, etc., according to the preset path, so as to realize the automated alternating operation between multiple stations and improve the overall assembly and processing efficiency.

[0042] Example 2:

[0043] See attached document Figure 1 - Appendix Figure 4 This embodiment is an improvement on embodiment 1. The only difference between this embodiment and embodiment 1 is that the top of the positioning block 10 is detachably fixed with a positioning post 11 by bolts. The positioning post 11 is made of silicone or latex elastic material.

[0044] When the clamping shell is clamped by the irregularly shaped electrostatic chuck body 5, the positioning post 11 is fixed on the top of the positioning block 10. Multiple positioning blocks 10 move synchronously towards the center of the circular box 4, that is, towards the electrostatic chuck body 5. The positioning post 11 contacts the electrostatic chuck body 5 until all positioning posts 11 are tightly attached to the surface of the electrostatic chuck body 5. At this time, the positioning post 11 undergoes adaptive deformation due to the force, and through deformation, it completely fits the irregular surface of the irregularly shaped electrostatic chuck body 5, and finally the electrostatic chuck body 5 is firmly fixed on the electrostatic chuck body 5.

[0045] Therefore, by filling the uneven structure on the surface of the electrostatic chuck body 5 through the deformation of the positioning post 11, the actual contact area is significantly increased, which solves the problem of unstable clamping point caused by the irregular surface of irregular parts. The material characteristics of the positioning post 11 can avoid the scratching and wear of the outer shell of the electrostatic chuck body 5 by rigid contact. It is especially suitable for protecting the vulnerable parts such as protrusions and edges that may exist on the irregular electrostatic chuck body 5. The tight fit after deformation can generate a uniformly distributed friction force. Even if the shape of the electrostatic chuck body 5 is irregular, it can achieve stable positioning through the resultant force constraint.

[0046] In summary, this utility model can quickly adapt to and securely fix the corresponding electrostatic chuck body 5 for materials of different specifications and shapes. During the fixing process, the electrostatic chuck body 5 will automatically correct its position under the action of uniform clamping force, simplifying the installation and replacement process of the electrostatic chuck body 5 and improving the convenience of operation.

[0047] The above are merely preferred embodiments of this utility model. It should be noted that those skilled in the art can make various improvements and modifications without departing from the principles of this utility model, and these improvements and modifications should also be considered within the scope of protection of this utility model. Structures, devices, and operating methods not specifically described or explained in this utility model, unless otherwise specified or limited, shall be implemented using conventional methods in the field.

Claims

1. A rotary multi-station electrostatic chuck assembly tooling, comprising a driving motor (1) and a plurality of electrostatic chuck bodies (5), characterized in that: The output end of the drive motor (1) is fixed with a rotating base (2). The outer side of the top of the rotating base (2) is fixed with the same number of vertical boxes (3) as the electrostatic chuck bodies (5). One end of the vertical box (3) is fixed with a circular box (4). Multiple electrostatic chuck bodies (5) are respectively mounted on multiple circular boxes (4) through a clamping mechanism. The clamping mechanism includes a linear drive execution component (15) fixed inside the rotating base (2). The output end of the linear drive execution component (15) and located inside the rotating base (2) is fixed with a mounting plate (6). The mounting plate (6) has a number of bearing plates (7) equal to the number of circular boxes (4) fixed on its outer side. The bearing plates (7) are slidably connected to the rotating seat (2) and the circular boxes (4). A circular disk (8) is fixed at one end of the bearing plate (7) and inside the circular boxes (4). Multiple rectangular plates (9) are rotatably connected to the circular disk (8). A positioning block (10) is rotatably connected at one end of the rectangular plate (9) and outside the electrostatic chuck body (5). The positioning block (10) is slidably connected to the circular boxes (4) in the horizontal direction.

2. The rotary multi-station electrostatic chuck assembly tooling of claim 1, wherein: The circular box (4) is provided with a groove that adapts to the shape and movement trajectory of the positioning block (10). Two rectangular blocks (12) are fixed on one side of the positioning block (10), and the two rectangular blocks (12) abut against the outer top of the circular box (4) and the inner top of the circular box (4) respectively.

3. The rotary multi-station electrostatic chuck assembly tooling of claim 1, wherein: A placement plate (13) is fixed on the top of the circular box (4) and at the bottom of the electrostatic chuck body (5), and a plurality of ball bearings (14) are installed on the top of the placement plate (13).

4. The rotary multi-station electrostatic chuck assembly tooling of claim 1, wherein: The top of the positioning block (10) is fixed with a positioning post (11) by bolts, and the positioning post (11) is made of elastic material.

5. The rotary multi-station electrostatic chuck assembly tooling of claim 1, wherein: The number of rectangular plates (9) is four, and the four rectangular plates (9) are evenly distributed in a cross shape on the circular disk (8).

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