A wafer thinning grinding wheel tooth sticking device

Abstract

This utility model discloses a wafer thinning grinding wheel tooth bonding device, relating to the technical field of wafer processing equipment. The device includes a platform, a substrate fixing base, two XY-axis drive mechanisms, a vertical plate, and a pressing mechanism. The substrate fixing base fixes the grinding wheel substrate via a three-jaw chuck and is driven to rotate by a motor. The XY-axis drive mechanisms respectively drive a material handling robot and a glue application tube to complete the picking and placing of grinding wheel teeth and the application of glue. A lifting cylinder on the vertical plate drives a pressing fixture and a pressing ring to achieve precise positioning and pressing of the grinding wheel teeth. This utility model realizes automated grinding wheel tooth bonding, improves positioning accuracy and bonding strength, and is suitable for large-scale production.

Description

Technical Field

[0001] This utility model relates to the field of mechanical technology, specifically to a wafer thinning grinding wheel tooth adhesion device. Background Technology

[0002] Wafer thinning grinding wheels are key tools in the wafer fabrication process, and their performance directly affects the accuracy and efficiency of wafer thinning. The core structure of the grinding wheel includes a circular grinding wheel base and grinding wheel teeth evenly distributed along the edge of the base. The adhesion quality between the grinding wheel teeth and the base (such as positioning accuracy and adhesion strength) is an important factor determining the service life of the grinding wheel and the processing effect.

[0003] Traditional grinding wheel tooth adhesion processes rely heavily on manual operation, which has the following drawbacks:

[0004] Uneven application of adhesive by hand can easily lead to insufficient bonding strength of the grinding wheel teeth, causing them to fall off during use;

[0005] The low positioning accuracy when manually placing the grinding wheel teeth results in poor grinding wheel balance, which affects the wafer processing accuracy.

[0006] The inconsistent pressure applied manually, coupled with low production efficiency, makes it difficult to meet the demands of large-scale production.

[0007] Therefore, there is an urgent need for a grinding wheel tooth sticking device with a high degree of automation, precise positioning, and stable pressing to solve the above problems. Utility Model Content

[0008] In view of this, the purpose of this application is to provide a wafer thinning grinding wheel tooth sticking device to solve the problem.

[0009] To achieve the above objectives, this utility model provides the following technical solution:

[0010] The equipment includes a platform with four legs at the bottom to support the overall structure; a base fixing seat is rotatably mounted on the top of the platform, and a three-jaw chuck is provided on the base fixing seat to firmly fix the grinding wheel base and prevent it from shifting during processing.

[0011] Two XY-axis drive mechanisms are symmetrically arranged on both sides of the top of the platform, with their moving ends connected to the material handling robot and the glue application tube, respectively.

[0012] The material handling robot is used to automatically grab the grinding wheel teeth and move them to the designated position;

[0013] The adhesive applicator is used to precisely apply adhesive to the sticky areas of the grinding wheel substrate.

[0014] The specific structure of the XY axis drive mechanism includes:

[0015] Vertical poles fixed to the platform;

[0016] Vertical slide rails installed on the front of the vertical rod;

[0017] The Y-axis cylinder installed at the top of the vertical rod has its telescopic end connected to the Y-axis moving block, and the Y-axis moving block slides in cooperation with the vertical slide rail to achieve vertical movement in the Y direction;

[0018] An X-axis cylinder is installed on the front of the Y-axis moving block, and its telescopic end is connected to the X-axis moving block to realize horizontal movement in the X direction.

[0019] The material handling robot and the glue application tube are respectively installed at the bottom of the X-axis moving block of the two XY-axis drive mechanisms. Through the coordinated action of the X-axis cylinder and the Y-axis cylinder, precise movement in the XY direction is achieved.

[0020] The platform has a vertical plate on the back, and a support is mounted on the front of the vertical plate. The support integrates the pressing-related drive components.

[0021] Two lifting cylinders are located on both sides of the support, and their telescopic ends are connected to a pressing ring, which is used to press the glued grinding wheel teeth onto the grinding wheel base to ensure a tight bond.

[0022] A lifting cylinder is located in the middle of the support and is used to drive the pressing mechanism to achieve precise positioning.

[0023] The bottom end of the lifting cylinder is rotatably connected to a pressing fixture. The pressing fixture has a positioning groove on its side for precise positioning when the grinding wheel teeth are placed. The bottom of the pressing fixture has a protrusion, and the top of the base fixing seat has a matching groove. Through the cooperation of the protrusion and the groove, the pressing fixture and the base fixing seat are precisely aligned.

[0024] In addition, a motor is installed at the bottom of the platform. The output end of the motor is connected to the base fixing seat to drive the grinding wheel base to rotate synchronously with the base fixing seat, so as to complete the bonding operation of multiple grinding wheel teeth in the circumferential direction.

[0025] Compared with the prior art, the beneficial effects of this utility model are:

[0026] 1. High degree of automation: Through the coordinated action of the XY axis drive mechanism, the material handling robot, the glue application tube and the pressing mechanism, the picking and placing of grinding wheel teeth, glue application and pressing are fully automated, reducing manual intervention and improving production efficiency;

[0027] 2. Precise positioning: The three-jaw chuck fixes the base, the positioning groove of the pressing fixture defines the position of the grinding wheel teeth, and the protrusion and groove are matched for alignment. These multiple positioning structures ensure the installation accuracy of the grinding wheel teeth on the base and improve the balance of the grinding wheel.

[0028] 3. Strong adhesion: The pressing ring and pressing fixture are driven by the lifting cylinder to apply stable pressure, ensuring uniform glue application and tight adhesion between the grinding wheel teeth and the substrate, reducing the risk of falling off during use;

[0029] 4. High continuity: The motor drives the base to rotate, which can continuously complete the bonding operation of multiple grinding wheel teeth in the circumferential direction, adapting to the needs of large-scale production.

[0030] The above description is only an overview of the technical solution of this application. In order to better understand the technical means of this application and implement it in accordance with the contents of the specification, and to make the above and other objects, features and advantages of this application more obvious and understandable, the preferred embodiments of this application are described in detail below with reference to the accompanying drawings.

[0031] The above and other objects, advantages and features of this application will become more apparent to those skilled in the art from the following detailed description of specific embodiments in conjunction with the accompanying drawings. Attached Figure Description

[0032] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort. In all drawings, similar elements or parts are generally identified by similar reference numerals. In the drawings, the elements or parts are not necessarily drawn to scale.

[0033] Figure 1 This is a schematic diagram of the structure of this utility model;

[0034] Figure 2 This is a structural diagram of the XY axis drive mechanism in this utility model.

[0035] In the diagram: 1. Support leg; 2. Motor; 3. Base fixing seat; 4. XY axis drive mechanism; 5. Material handling robot; 6. Lifting cylinder one; 7. Lifting cylinder two; 8. Vertical plate; 9. Support; 10. Glue application tube; 11. Pressing ring; 12. Pressing fixture; 13. Platform; 41. Vertical rod; 42. Vertical slide rail; 43. X-axis cylinder; 44. Y-axis cylinder; 45. X-axis moving block; 46. Y-axis moving block. Detailed Implementation

[0036] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, not all embodiments. In the following description, specific details such as specific configurations and components are provided merely to help fully understand the embodiments of this application. Therefore, those skilled in the art should understand that various changes and modifications can be made to the embodiments described herein without departing from the scope and spirit of this application. In addition, for clarity and brevity, descriptions of known functions and structures are omitted in the embodiments.

[0037] Furthermore, reference numerals and / or letters may be repeated in different examples within this application. Such repetition is for the purpose of simplification and clarity and does not in itself indicate a relationship between the various embodiments and / or settings discussed.

[0038] In this article, the term "and / or" is merely a description of the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can mean: A exists alone, B exists alone, and A and B exist simultaneously. The term " / and" in this article describes another type of relationship between related objects, indicating that two relationships can exist. For example, A / and B can mean: A exists alone, and A and B exist alone. In addition, the character " / " in this article generally indicates that the related objects before and after it are in an "or" relationship.

[0039] It should also be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion.

[0040] Please see Figure 1-2 This utility model provides a technical solution for a wafer thinning grinding wheel tooth sticking device: the device includes a platform 13, the bottom of which is provided with four support legs 1 for supporting the overall structure; a base fixing seat 3 is rotatably installed on the top of the platform 13, and the base fixing seat 3 is provided with a three-jaw chuck for firmly fixing the grinding wheel base and preventing it from shifting during processing.

[0041] Two XY axis drive mechanisms 4 are symmetrically arranged on both sides of the top of platform 13, and their movable ends are respectively connected to the material handling robot 5 and the glue application tube 10.

[0042] The material handling robot 5 is used to automatically grab the grinding wheel teeth and move them to the designated position;

[0043] The adhesive applicator 10 is used to precisely apply adhesive to the sticky areas of the grinding wheel substrate.

[0044] The specific structure of the XY axis drive mechanism 4 includes:

[0045] Vertical rod 41 fixed on platform 13;

[0046] Vertical slide rail 42 is installed on the front of the vertical rod 41;

[0047] The Y-axis cylinder 44, installed at the top of the vertical rod 41, has its telescopic end connected to the Y-axis moving block 46, and the Y-axis moving block 46 slides in cooperation with the vertical slide rail 42 to achieve vertical movement in the Y direction.

[0048] An X-axis cylinder 43 is installed on the front of the Y-axis moving block 46, and its telescopic end is connected to the X-axis moving block 45 to realize horizontal movement in the X direction.

[0049] The material handling robot 5 and the glue application tube 10 are respectively installed at the bottom of the X-axis moving block 45 of the two XY-axis drive mechanisms 4. Through the coordinated action of the X-axis cylinder 43 and the Y-axis cylinder 44, precise movement in the XY direction is achieved.

[0050] Platform 13 has a vertical plate 8 on its back, and a support 9 is mounted on the front of the vertical plate 8. The support 9 integrates the pressing-related driving components.

[0051] Two lifting cylinders 6 are located on both sides of the support 9, and their telescopic ends are connected to the pressing rings 11, which are used to press the coated grinding wheel teeth onto the grinding wheel base to ensure tight adhesion.

[0052] A lifting cylinder 27, located in the middle of the support 9, is used to drive the pressing mechanism to achieve precise positioning.

[0053] The bottom end of the lifting cylinder 7 is rotatably connected to the pressing fixture 12. The pressing fixture 12 has a positioning groove on its side for precise positioning when the grinding wheel teeth are placed. The bottom of the pressing fixture 12 has a protrusion, and the top of the base fixing seat 3 has a matching groove. Through the cooperation of the protrusion and the groove, the pressing fixture 12 and the base fixing seat 3 are precisely aligned.

[0054] In addition, a motor 2 is provided at the bottom of the platform 13. The output end of the motor 2 is connected to the base fixing seat 3 for driving the grinding wheel base to rotate synchronously with the base fixing seat 3, so as to complete the bonding operation of multiple grinding wheel teeth in the circumferential direction.

[0055] In practical use, the base is fixed: the grinding wheel base to be processed is placed on the base fixing seat 3, and the grinding wheel base is firmly fixed by tightening with a three-jaw chuck to prevent it from shifting in subsequent operations.

[0056] Alignment of the pressing fixture: Activate the lifting cylinder 2 7, which extends its telescopic end, causing the pressing fixture 12 to move downward; the protrusion at the bottom of the pressing fixture 12 precisely matches the groove at the top of the base fixing seat 3, achieving concentric alignment between the pressing fixture 12 and the grinding wheel base; at this time, the pressing fixture 12 covers the top of the grinding wheel base, and the positioning groove on its side corresponds to the preset installation position of the grinding wheel teeth.

[0057] Glue application operation: The XY axis drive mechanism 4 controlling the glue application tube 10 operates as follows: Y-axis cylinder 44 drives Y-axis moving block 46 to adjust its height along vertical slide rail 42; X-axis cylinder 43 drives X-axis moving block 45 to move horizontally, so that the glue application tube 10 is precisely moved to the positioning groove of the pressing fixture 12; the glue application tube 10 applies glue to the surface of the grinding wheel substrate corresponding to the positioning groove. After completion, the XY axis drive mechanism 4 drives the glue application tube 10 to reset, starts motor 2, and motor 2 drives the substrate fixing seat 3 to rotate the grinding wheel substrate by a preset angle, such as the interval angle between two adjacent grinding wheel teeth; thus achieving continuous glue application; after each positioning groove is coated with glue...

[0058] Grinding wheel tooth picking and placing: The XY axis drive mechanism 4 connected to the picking robot 5 is controlled to move the picking robot 5 to the grinding wheel tooth storage location to pick up the grinding wheel teeth; then, the XY axis drive mechanism 4 drives the picking robot 5 to move above the positioning groove of the pressing fixture 12, and puts the grinding wheel teeth into the positioning groove so that the bottom of the grinding wheel teeth contacts the glued substrate surface. The positioning groove radially limits the grinding wheel teeth. The motor 2 is started, and the motor 2 drives the substrate fixing seat 3 to rotate the grinding wheel substrate by a preset angle, which corresponds to the interval angle between two adjacent grinding wheel teeth, so as to realize the placement of multiple grinding wheel teeth.

[0059] Pressing operation: Start the lifting cylinder 6, its telescopic end extends, driving the pressing ring 11 to move downward, the pressing ring 11 contacts the top of the grinding wheel teeth and applies a preset pressure; maintain the pressing state for 30 seconds to allow the adhesive to fully adhere and ensure that the grinding wheel teeth and the substrate are initially bonded; then, the lifting cylinder 6 retracts, driving the pressing ring 11 to return to its original position.

[0060] Work completed: After all grinding wheel teeth are bonded, lifting cylinder 2 7 retracts, driving pressing fixture 12 to return to its original position; the three-jaw chuck releases, removing the grinding wheel with bonded teeth, completing one work cycle.

[0061] The above description is merely a preferred embodiment of this utility model and does not limit the scope of protection of this utility model. For those skilled in the art, this utility model can have various modifications and variations. Any changes, modifications, substitutions, integrations, and parameter alterations made to these embodiments within the spirit and principles of this utility model, through conventional substitutions or methods that achieve the same function without departing from the principles and spirit of this utility model, fall within the scope of protection of this utility model.

Claims

1. A wafer thinning grinding wheel tooth adhesion device, characterized in that, include: The platform (13) has four legs (1) at its bottom for support; The base fixing seat (3) is rotatably mounted on the top of the platform (13) and is provided with a three-jaw chuck for fixing the grinding wheel base; Two XY axis drive mechanisms (4) are symmetrically arranged on the top two sides of the platform (13), and their movable ends are respectively connected to a material handling robot (5) and a glue application tube (10) for picking up and placing grinding wheel teeth and applying glue.

2. The wafer thinning grinding wheel tooth adhesion equipment according to claim 1, characterized in that, The platform (13) has a vertical plate (8) on its back, and a support (9) is installed on the front of the vertical plate (8). The support (9) is provided with: Two lifting cylinders (6) are located on both sides of the support (9); The second lifting cylinder (7) is located in the middle of the support (9) and is used to drive the pressing mechanism.

3. The wafer thinning grinding wheel tooth adhesion equipment according to claim 1 or 2, characterized in that, The bottom end of the lifting cylinder (7) is rotatably connected to a pressing fixture (12), and the pressing fixture (12) has a positioning groove on its side for precise positioning of the grinding wheel teeth.

4. The wafer thinning grinding wheel tooth adhesion equipment according to claim 3, characterized in that, The bottom of the pressing fixture (12) is provided with a protrusion, and the top of the base fixing seat (3) is provided with a matching groove to achieve precise alignment between the pressing fixture (12) and the base fixing seat (3).

5. The wafer thinning grinding wheel tooth adhesion equipment according to claim 2, characterized in that, The telescopic end of the lifting cylinder (6) is connected to a pressing ring (11), which is used to press the coated grinding wheel teeth onto the grinding wheel base.

6. The wafer thinning grinding wheel tooth adhesion equipment according to claim 1, characterized in that, The bottom of the platform (13) is provided with a motor (2), the output end of which is connected to the base fixing seat (3) for driving the grinding wheel base to rotate.

7. The wafer thinning grinding wheel tooth adhesion equipment according to claim 1, characterized in that, The XY axis drive mechanism (4) includes: A vertical rod (41) is fixed to the platform (13); A vertical slide rail (42) is installed on the front of the vertical rod (41); A Y-axis cylinder (44) is installed at the top of the vertical rod (41), and its telescopic end is connected to a Y-axis moving block (46). The Y-axis moving block (46) is slidably engaged with the vertical slide rail (42). The X-axis cylinder (43) is installed on the front of the Y-axis moving block (46), and its telescopic end is connected to the X-axis moving block (45). The material handling robot (5) and the pressing ring (11) are respectively installed at the bottom of the X-axis moving block (45) of the two XY-axis drive mechanisms (4) to achieve precise movement in the XY direction.

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