A tool for handling semiconductor components

Abstract

The utility model belongs to the technical field of semiconductor processing, concretely relates to a tool for the assembling and disassembling of semiconductor spare parts, including inner step sealing compression ring, the detachable installation of limit arc block is possible on the inner step sealing compression ring, the inner ring surface of inner step sealing compression ring is connected with step guide ring, the inner step sealing compression ring, limit arc block and step guide ring all are coaxial arrangement, the utility model discloses through the coaxial design of inner step sealing compression ring, limit arc block and step guide ring, establish unified reference axis from structure, solve the concentricity deviation problem of sealing washer and ESC in manual assembly, and the detachable design of limit arc block through screw fixation is convenient for adapting different specifications ESC and wearing replacement, is convenient for maintenance replacement, reduces the tool use cost.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor processing technology, specifically relating to a tooling for loading and unloading semiconductor components. Background Technology

[0002] In the semiconductor manufacturing field, the electrostatic chuck (ESC), as a core component of wafer processing, directly affects the vacuum sealing performance and process stability of the equipment when assembled with the sealing ring. Since the ESC and sealing ring are mostly interference fits, especially for specialized semiconductor sealing rings used in ultra-high vacuum environments, traditional manual assembly methods struggle to ensure concentricity. This challenge directly leads to inaccurate sealing ring assembly, affecting the overall product performance and sealing effect. Utility Model Content

[0003] In view of the above-mentioned shortcomings in the prior art, the present invention provides a tooling for loading and unloading semiconductor components to solve the problems in the background art.

[0004] To solve the above-mentioned technical problems, the present invention adopts the following technical solution: A tooling for loading and unloading semiconductor components includes an inner stepped sealing ring, on which a limiting arc block is detachably installed, and a stepped guide ring is connected to the inner ring surface of the inner stepped sealing ring. The inner stepped sealing ring, the limiting arc block, and the stepped guide ring are all coaxially arranged.

[0005] Furthermore, multiple limiting arc-shaped blocks are detachably installed on the inner step sealing ring along the circumferential direction. The multiple limiting arc-shaped blocks are evenly distributed and together form an annular limiting structure coaxial with the inner step sealing ring.

[0006] Furthermore, all of the aforementioned limiting arc-shaped blocks are detachably mounted on the inner circumferential surface of the inner step sealing ring using screws.

[0007] Furthermore, the top surface of the base of the stepped guide ring is coplanar with the top surface of the base of the inner stepped sealing ring.

[0008] Furthermore, the height of the inner step sealing ring protrusion is greater than the height of the step guide ring protrusion.

[0009] Furthermore, the height of the limiting arc block is greater than the height of the protruding portion of the step guide ring.

[0010] Furthermore, the height of the protruding portion of the inner stepped sealing ring is greater than the height of the limiting arc-shaped block.

[0011] Furthermore, the protruding portion of the inner stepped sealing ring is provided with multiple through grooves along the circumferential direction, and the multiple through grooves are distributed at equal intervals.

[0012] Compared with the prior art, this utility model has the following advantages: 1. By using the coaxial design of the inner stepped sealing ring, the limiting arc block and the stepped guide ring, a unified reference axis is established structurally, solving the problem of concentricity deviation between the sealing ring and ESC in manual assembly; 2. Through the progressively increasing gradient design of the inner stepped sealing ring, the limiting arc block, and the stepped guide ring, a multi-layered stepped protection is formed, which gradually offsets the interference force, avoids excessive local compression of the sealing ring, and ensures the sealing effect. 3. The detachable design of the limit arc block, which is fixed by screws, facilitates the adaptation to different specifications of ESC and the replacement of worn parts, making maintenance and replacement easier and reducing tooling costs. Attached Figure Description

[0013] Figure 1 This is a three-dimensional structural schematic diagram of an embodiment of a tooling for loading and unloading semiconductor components according to the present invention; Figure 2 This is a top view schematic diagram of an embodiment of a tooling for loading and unloading semiconductor components according to the present invention; Figure 3 This is an exploded structural diagram of an embodiment of a tooling for loading and unloading semiconductor components according to the present invention; Figure 4 This is an exploded side view of an embodiment of a tooling for loading and unloading semiconductor components according to the present invention; The reference numerals in the accompanying drawings include: inner step sealing ring (1), limiting arc block (2), step guide ring (3), screw (4), and through groove (5). Detailed Implementation

[0014] To enable those skilled in the art to better understand this utility model, the technical solution of this utility model will be further described below in conjunction with the accompanying drawings and embodiments.

[0015] The accompanying drawings are for illustrative purposes only and are schematic diagrams, not actual images. They should not be construed as limiting the scope of this patent. To better illustrate the embodiments of this utility model, some components in the drawings may be omitted, enlarged, or reduced, and do not represent the actual dimensions of the product. It is understandable to those skilled in the art that some well-known structures and their descriptions may be omitted in the drawings.

[0016] In the accompanying drawings of this utility model, the same or similar reference numerals correspond to the same or similar components. In the description of this utility model, it should be understood that if terms such as "upper," "lower," "left," "right," "inner," and "outer" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, they are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or component referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, the terms used to describe positional relationships in the drawings are only for illustrative purposes and should not be construed as limiting this patent. For those skilled in the art, the specific meaning of the above terms can be understood according to the specific circumstances.

[0017] In the description of this utility model, unless otherwise explicitly specified and limited, the term "connection" or similar designation indicating the connection relationship between components should be interpreted broadly. For example, it can refer to a fixed connection, a detachable connection, or an integral part; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0018] Example 1: like Figure 1-4 As shown, this utility model provides a tooling for loading and unloading semiconductor components, comprising an inner stepped sealing ring 1, a limiting arc block 2 detachably mounted on the inner stepped sealing ring 1, and a stepped guide ring 3 connected to the inner ring surface of the inner stepped sealing ring 1. The inner stepped sealing ring 1, the limiting arc block 2, and the stepped guide ring 3 are all coaxially arranged, with the stepped guide ring 3 serving as a guide to guide the sealing ring to accurately enter the position. Through the coaxial design of the inner stepped sealing ring 1, the limiting arc block 2, and the stepped guide ring 3, the structural design avoids the problem of difficulty in ensuring the concentricity of the sealing ring and ESC (electrostatic chuck) during manual assembly of the sealing ring. Furthermore, the limiting arc block 2 is detachable, and when the limiting arc block 2 wears out due to long-term use, it can be disassembled and replaced separately. When installing sealing rings for different specifications of ESCs, the limiting arc block 2 can be disassembled separately before installing the sealing ring, without replacing the entire inner stepped sealing ring 1.

[0019] Among them, multiple limiting arc blocks 2 are detachably installed on the inner step sealing pressure ring 1 along the circumferential direction. The multiple limiting arc blocks 2 are evenly distributed and together form an annular limiting structure coaxial with the inner step sealing pressure ring 1, which forms a uniform radial constraint on the sealing ring and prevents the sealing ring from tilting during the assembly process.

[0020] Among them, multiple limiting arc-shaped blocks 2 are detachably installed on the inner circumferential surface of the inner step sealing ring 1 by screws 4.

[0021] Among them, the top surface of the base of the stepped guide ring 3 is coplanar with the top surface of the base of the inner stepped sealing ring 1, ensuring that the installation reference of the tooling and ESC are consistent.

[0022] Among them, the height of the protruding part of the inner step sealing ring 1 is greater than the height of the protruding part of the step guide ring 3. The protruding part of the inner step sealing ring 1 preferentially cooperates with the ESC positioning to form a step-type protection structure to avoid the sealing ring being excessively squeezed.

[0023] The height of the limiting arc block 2 is greater than the height of the protruding part of the stepped guide ring 3, forming a stepped protective structure to prevent the sealing ring from being excessively squeezed.

[0024] Among them, the height of the protruding part of the inner step sealing ring 1 is greater than the height of the limiting arc block 2, forming a multi-layer step design to ensure that the ESC, sealing ring and tooling structure are concentric.

[0025] The inner stepped sealing ring 1 has multiple through grooves 5 along the circumferential direction on its protruding part. The multiple through grooves 5 are evenly distributed. Pressing the inner stepped sealing ring 1 at the through grooves 5 can expel the air between the ESC and the inner stepped sealing ring 1 during interference fit. At the same time, it provides a small amount of elastic deformation space for the ring to adapt to interference fit fluctuations, avoid damage to the sealing ring by rigid fit, and ensure sealing effect.

[0026] Working Principle: The tooling uses the coaxiality of the inner stepped sealing ring 1, the limiting arc block 2, and the stepped guide ring 3 as the core reference to ensure that the axes of all components are consistent during assembly. During assembly, the stepped guide ring 3 first guides the sealing ring to accurately enter the preset position along the axis. Multiple equally spaced limiting arc blocks 2 form an annular limiting structure, applying uniform radial constraint to the sealing ring to prevent it from skewing during interference fit. The inner stepped sealing ring 1 is preferentially positioned and fitted with the ESC. Through the height gradient design of "inner stepped sealing ring 1 > limiting arc block 2 > stepped guide ring 3", a multi-layered stepped protection is formed, which gradually offsets the offset caused by interference force, ensuring that the sealing ring and ESC are concentrically fitted. At the same time, the detachable design of the limiting arc block 2, which is fixed by screws 4, facilitates the adaptation to different specifications of ESC and wear replacement. The through groove 5 of the inner stepped sealing ring 1 can discharge air during assembly and provide a small deformation space to avoid rigid compression damage to the sealing ring. Ultimately, it achieves accurate and stable assembly of the sealing ring under interference fit, improving the sealing effect.

[0027] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

[0028] The above are merely embodiments of this utility model. The circuits, electronic components, and modules involved are all prior art, fully achievable by those skilled in the art, and require no further explanation. The content protected by this application does not involve improvements to the software or methods. Commonly known structures and characteristics in the solution are not described in detail here. Those skilled in the art are aware of all common technical knowledge in the field to which this utility model pertains prior to the application date or priority date, are able to access all existing technologies in that field, and possess the ability to apply conventional experimental methods prior to that date. Those skilled in the art can, under the guidance of this application, improve and implement this solution in conjunction with their own capabilities. Some typical known structures or methods should not be obstacles for those skilled in the art to implement this application. It should be noted that those skilled in the art can make several modifications and improvements without departing from the structure of this utility model. These should also be considered within the scope of protection of this utility model, and will not affect the effectiveness of the implementation of this utility model or the practicality of the patent.

Claims

1. A tooling for loading and unloading semiconductor components, characterized in that: It includes an inner step sealing ring (1), on which a limiting arc block (2) is detachably installed, and a step guide ring (3) is connected to the inner ring surface of the inner step sealing ring (1). The inner step sealing ring (1), the limiting arc block (2) and the step guide ring (3) are all coaxially arranged.

2. The tooling for loading and unloading semiconductor components as described in claim 1, characterized in that: Multiple limiting arc blocks (2) are detachably installed on the inner step sealing ring (1) along the circumferential direction. The multiple limiting arc blocks (2) are distributed at equal intervals and together form an annular limiting structure coaxial with the inner step sealing ring (1).

3. The tooling for loading and unloading semiconductor components as described in claim 2, characterized in that: Multiple limiting arc blocks (2) are detachably mounted on the inner circumferential surface of the inner step sealing ring (1) by screws (4).

4. The tooling for loading and unloading semiconductor components as described in claim 3, characterized in that: The top surface of the base of the stepped guide ring (3) is coplanar with the top surface of the base of the inner stepped sealing ring (1).

5. The tooling for loading and unloading semiconductor components as described in claim 4, characterized in that: The height of the protruding part of the inner step sealing ring (1) is greater than the height of the protruding part of the step guide ring (3).

6. The tooling for loading and unloading semiconductor components as described in claim 5, characterized in that: The height of the limiting arc block (2) is greater than the height of the protruding part of the step guide ring (3).

7. The tooling for loading and unloading semiconductor components as described in claim 6, characterized in that: The height of the protruding part of the inner step sealing ring (1) is greater than the height of the limiting arc block (2).

8. The tooling for loading and unloading semiconductor components as described in claim 7, characterized in that: The protruding part of the inner step sealing ring (1) is provided with multiple through grooves (5) along the circumferential direction, and the multiple through grooves (5) are distributed at equal intervals.

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