A material box transfer and conveying equipment and conveyor line

Abstract

This utility model relates to a material bin transfer and conveying device and conveyor line, including a lifting assembly, a lifting drive assembly, a conveying assembly, and a conveying drive assembly. The entire device is divided into four independent modules. When a module malfunctions, it can be disassembled and repaired independently without dismantling the entire device, improving maintenance efficiency. Furthermore, the device can be installed modularly, reducing overall installation complexity. Two different conveying assembly forms are provided, allowing for flexible replacement and combination according to actual needs. This enables the conveying device to adapt to different process scenarios and load requirements, achieving "one machine for multiple uses," significantly reducing equipment investment costs and improving asset utilization. Simultaneously, the independent modular structure allows for "plug-and-play" expansion through series connection, greatly reducing the complexity and cost of production line upgrades.

Description

Technical Field

[0001] This utility model relates to the field of conveying equipment technology, and in particular to a material box transfer conveying equipment and conveying line. Background Technology

[0002] In the semiconductor manufacturing industry, the wafer pod (FOUP) serves as the core carrier for silicon wafers. Its automated, pollution-free, and highly reliable transfer between various process equipment on the production line is crucial to ensuring production efficiency and chip yield. FOUP transfer equipment not only needs to complete the lifting and connecting of tracks at different heights, but also needs to meet stringent requirements such as stable operation, precise positioning, low vibration, and ease of maintenance.

[0003] Currently, wafer cassette transfer equipment used in the semiconductor industry mostly adopts the form of a lifting mechanism with a conveying module. However, in practical applications, the existing technology has the following significant problems: First, the equipment suffers from poor adaptability and configurability. Semiconductor production lines frequently need to handle wafer cassettes of different sizes and different process cycles. Traditional transfer equipment often features fixed conveyor components (such as belts or rollers) rigidly integrated with the lifting mechanism. Switching products or meeting new process requirements often necessitates replacing or customizing the entire conveyor unit or even the entire machine. This lack of modular flexibility leads to high investment costs, low equipment utilization, and an inability to quickly respond to production line upgrades and product changes. Second, maintenance is extremely difficult, resulting in huge downtime costs. Semiconductor manufacturing demands extremely high cleanroom standards and availability for equipment. The integrated design of existing equipment results in a compact internal structure but poor maintainability. If a critical component fails, the limited repair space often necessitates large-scale disassembly, or even removing the entire machine from the cleanroom for repair. This process not only introduces the risk of particulate contamination but also causes prolonged production downtime, resulting in significant economic losses.

[0004] Therefore, in order to solve the specific technical problems mentioned above in the field of wafer cassette transport, there is an urgent need for a wafer cassette transfer and transport equipment that is novel in design, reliable in operation, easy to maintain, and highly modular, so as to meet the increasingly stringent production requirements of the semiconductor manufacturing industry. Utility Model Content

[0005] Therefore, the technical problem to be solved by this utility model is to overcome the fact that the conveying part of traditional transfer equipment in the prior art is mostly fixed and rigidly integrated with the lifting mechanism. If it is necessary to switch products or meet new process requirements, it is often necessary to replace or customize the entire conveying unit or even the whole machine. The equipment lacks modular flexibility, resulting in high investment costs, low equipment utilization, and difficult maintenance.

[0006] To solve the above-mentioned technical problems, this utility model provides a material bin transfer and conveying device, including, The lifting assembly includes a base, a first drive shaft, a cam, a guide shaft, and a lifting seat. Two bases are symmetrically arranged. A first drive shaft is rotatably mounted on each of the two bases. The two first drive shafts are parallel to each other and each end of the first drive shaft is coaxially mounted with a cam. A guide shaft perpendicular to the first drive shaft is provided on each of the two bases. The two lifting seats are parallel to each other above the two first drive shafts and are slidably connected to the two guide shafts. The bottom of each lifting seat contacts the two cams on its corresponding first drive shaft. A lifting drive assembly includes a mounting bracket and a first drive source. The mounting bracket is connected to any base, and the first drive source is mounted on the mounting bracket to drive a first drive shaft to rotate. The conveying assembly is provided in multiple sets and spaced apart along the length of the lifting seat. Each conveying assembly includes a frame, a conveyor belt and drive wheels. The frame is vertically connected between two lifting seats. Multiple drive wheels are provided and rotatably mounted on the frame. The conveyor belt is connected to the drive wheels. A conveyor drive assembly includes a base, a second drive shaft, and a second drive source. The base is connected to the frame, the second drive shaft is disposed on the base parallel to the first drive shaft to drive each conveyor belt to rotate, and the second drive source is disposed on the base to drive the second drive shaft to rotate.

[0007] In one embodiment of this utility model, the conveying assembly adopts a belt conveying structure or a chain conveying structure. When a belt conveying structure is adopted, the drive wheel is a pulley and the conveyor belt is a belt. When a chain conveying structure is adopted, the drive wheel is a sprocket and the conveyor belt is a chain, and multiple sprockets are coaxially arranged on the second drive shaft.

[0008] In one embodiment of this utility model, two bearing seats are symmetrically arranged on the two bases respectively, and the two ends of the first drive shaft are rotatably connected to the two bearing seats respectively through bearings.

[0009] In one embodiment of this utility model, a connecting plate is provided on any of the bases, and a sensor is provided on the connecting plate. A sensing element corresponding to the position of the sensor is connected to the bottom of a lifting seat located above the base.

[0010] In one embodiment of the present invention, the frame includes two parallel mounting plates, the two ends of the two mounting plates are respectively perpendicularly connected to two lifting seats, and a plurality of mounting shafts are perpendicularly connected between the two mounting plates, and each of the drive wheels is rotatably connected to one of the mounting shafts.

[0011] In one embodiment of this utility model, the base includes two parallel end plates, and two symmetrical connecting rods are vertically connected between the two end plates. The connecting rods are connected to the bottom of each mounting plate. The two ends of the second drive shaft are rotatably connected to the two end plates respectively. The second drive source is disposed on any end plate for driving the second drive shaft to rotate.

[0012] In one embodiment of this utility model, a linear bearing is connected to the lifting seat and is slidably connected to the guide shaft through the linear bearing.

[0013] In one embodiment of this utility model, the first driving source and the second driving source are a flashlight drum, a three-phase geared motor or a servo motor.

[0014] In one embodiment of this utility model, a base connector is connected between each end of the two bases.

[0015] A conveyor line comprising a bin transfer conveyor as described in any of the preceding claims.

[0016] The above-mentioned technical solution of this utility model has the following advantages compared with the prior art: This utility model discloses a material bin transfer and conveying device and conveyor line, which is divided into four independent modules: a lifting assembly, a lifting drive assembly, a conveying assembly, and a conveying drive assembly. When a module malfunctions, it can be disassembled and repaired independently without dismantling the entire device, improving maintenance efficiency. Furthermore, during installation, the modules can be hoisted, positioned, and fixed separately, reducing the overall installation complexity and the need for large specialized tools. Two different conveying assembly structures are provided, allowing for flexible replacement and combination according to actual needs. This enables the conveying equipment to adapt to different process scenarios and load requirements, achieving "one machine for multiple uses," significantly reducing equipment investment costs and improving asset utilization. Simultaneously, the independent modular structure allows for "plug-and-play" expansion through series connection, greatly reducing the complexity and cost of production line upgrades. Attached Figure Description

[0017] To make the content of this utility model easier to understand, the present utility model will be further described in detail below with reference to specific embodiments and accompanying drawings. Figure 1 This is a perspective view of a preferred embodiment of the hopper transfer and conveying device of this utility model; Figure 2 This is a schematic diagram of the overall structure of the hopper transfer and conveying device according to a preferred embodiment of the present invention; Figure 3This is a schematic diagram of the lifting assembly and lifting drive assembly of the hopper transfer and conveying equipment according to a preferred embodiment of the present invention; Figure 4 This is a schematic diagram showing the position of the sensor in the preferred embodiment of the hopper transfer and conveying device of this utility model; Figure 5 This is a schematic diagram of the conveying component (when using a belt conveyor structure) and the conveying drive component of the hopper transfer and conveying equipment according to a preferred embodiment of the present invention. Figure 6 This is a schematic diagram of the conveying component (when using a chain conveying structure) of the hopper transfer and conveying equipment according to a preferred embodiment of this utility model; Figure 7 This is a schematic diagram of the conveying drive assembly (for chain conveyor structures) of a preferred embodiment of the bin transfer and conveying equipment of this utility model.

[0018] Explanation of reference numerals in the accompanying drawings: 1. Lifting assembly; 11. Base; 12. First drive shaft; 13. Cam; 14. Guide shaft; 15. Lifting seat; 16. Bearing seat; 17. Linear bearing; 18. Base connector; 2. Lifting drive assembly; 21. Mounting bracket; 22. First drive source; 3. Conveying assembly; 31. Frame; 32. Conveyor belt; 33. Drive wheel; 4. Conveying drive assembly; 41. Base; 411. End plate; 412. Connecting rod; 42. Second drive shaft; 43. Second drive source; 5. Sensor; 6. Sensing element. Detailed Implementation

[0019] The present invention will be further described below with reference to the accompanying drawings and specific embodiments, so that those skilled in the art can better understand and implement the present invention. However, the embodiments are not intended to limit the present invention.

[0020] Example 1, refer to Figures 1-7 As shown, this utility model discloses a material bin transfer and conveying device, comprising, The lifting assembly 1 includes a base 11, a first drive shaft 12, a cam 13, a guide shaft 14, and a lifting seat 15. Two bases 11 are symmetrically arranged. A first drive shaft 12 is rotatably mounted on each of the two bases 11. The two first drive shafts 12 are parallel to each other and a cam 13 is coaxially mounted at both ends of each first drive shaft 12. A guide shaft 14 perpendicular to the first drive shaft 12 is provided on each of the two bases 11. The two lifting seats 15 are respectively arranged parallel above the two first drive shafts 12 and are slidably connected to the two guide shafts 14. The bottom of the two lifting seats 15 contacts the two cams 13 on their respective first drive shafts 12. The lifting drive assembly 2 includes a mounting frame 21 and a first drive source 22. The mounting frame 21 is connected to any base 11, and the first drive source 22 is mounted on the mounting frame 21 to drive the first drive shaft 12 to rotate. The conveying assembly 3 is provided in multiple sets and is spaced apart on the lifting seat 15 along the length direction. Each conveying assembly 3 includes a frame 31, a conveyor belt 32 and a drive wheel 33. The frame 31 is vertically connected between the two lifting seats 15. Multiple drive wheels 33 are provided and are rotatably mounted on the frame 31. The conveyor belt 32 is connected to the drive wheel 33. The conveyor drive assembly 4 includes a base 41, a second drive shaft 42, and a second drive source 43. The base 41 is connected to the frame 31. The second drive shaft 42 is parallel to the first drive shaft 12 and is disposed on the base 41 to drive each conveyor belt 32 to rotate. The second drive source 43 is disposed on the base 41 to drive the second drive shaft 42 to rotate.

[0021] This utility model discloses a material bin transfer and conveying device, which is divided into four independent modules: a lifting assembly 1, a lifting drive assembly 2, a conveying assembly 3, and a conveying drive assembly 4. When a module malfunctions, it can be disassembled and repaired independently without dismantling the entire device, improving maintenance efficiency. Furthermore, during installation, the modules can be hoisted, positioned, and fixed separately, reducing the overall installation complexity and the need for large specialized tools. Two different structural forms of the conveying assembly 3 are provided, allowing for flexible replacement and combination according to actual needs. This enables the conveying device to adapt to different process scenarios and load requirements, achieving "one machine for multiple uses," significantly reducing equipment investment costs and improving asset utilization. Simultaneously, the independent modular structure allows for "plug-and-play" expansion through series connection, greatly reducing the complexity and cost of production line upgrades.

[0022] Specifically, the same end of the two first drive shafts 12 is connected to a synchronous pulley or sprocket and is connected by a synchronous belt or chain. The first drive source 22 is connected to another synchronous pulley or sprocket connected to any of the first drive shafts 12 via a synchronous belt or chain. When the output shaft of the first drive source 22 rotates, it can drive the two first drive shafts 12 to rotate synchronously.

[0023] When the first drive shaft 12 rotates, it drives the cams 13 at both ends of the shaft to rotate. The long diameter end of the cam 13 pushes the lifting seat 15 to move upward along the guide shaft 14. When the short diameter end of the cam 13 contacts the lifting seat 15, the lifting seat 15 descends under its own weight or the weight of the hopper, thereby realizing the lifting action of the lifting seat 15.

[0024] Multiple conveyor components 3 are arranged side-by-side on the lifting platform 15, and can move up and down with the lifting platform 15 to lift the items being conveyed on the conveyor line, thereby realizing the change of the product conveying direction on the conveyor line. Furthermore, the conveyor components 3 support both belt and chain types, and can be interchanged according to actual needs, making them highly adaptable.

[0025] The conveyor drive assembly 4 is designed for two types of conveyor assemblies 3, with the same overall structure. Multiple sets of conveyor assemblies 3 are driven by the same drive shaft (second drive shaft 42) to ensure that all conveyor belts 32 rotate at the same speed, and to avoid the material box from shifting or jamming due to speed difference during the conveying process.

[0026] Furthermore, the conveying assembly 3 adopts either a belt conveyor structure or a chain conveyor structure. When using a belt conveyor structure, the drive wheel 33 is a pulley, and the conveyor belt 32 is a belt; when using a chain conveyor structure, the drive wheel 33 is a sprocket, the conveyor belt 32 is a chain, and multiple sprockets are coaxially arranged on the second drive shaft 42. Specifically, the switchability of the two conveying structures allows the equipment to flexibly respond to different material characteristics and working conditions. The belt conveyor structure is suitable for conveying lightweight boxes and boxes with easily scratched surfaces. The flexible contact of the belt can avoid wear on the surface of the box, and the operating noise is low, making it suitable for noise-sensitive environments. The chain conveyor structure is suitable for heavy-duty boxes, high-temperature environments, or dusty scenarios. The rigid structure of the chain has a stronger load-bearing capacity and better wear resistance and corrosion resistance. Specifically, the two structural forms of the conveying assembly 3 are based on the same frame 31 and drive system frame design, thus having the same interface for connection with the lifting seat 15, enabling free switching.

[0027] Furthermore, two bearing seats 16 are symmetrically arranged on the two bases 11 respectively, and the two ends of the first drive shaft 12 are rotatably connected to the two bearing seats 16 respectively through bearings.

[0028] Reference Figure 4As shown, a connecting plate is further provided on any base 11, and a sensor 5 is provided on the connecting plate. A sensing element 6 corresponding to the position of the sensor 5 is connected to the bottom of a lifting seat 15 located above the base 11. Specifically, when the lifting seat 15 rises to the highest position or falls to the lowest position, the sensing element 6 triggers the sensor 5, which can accurately determine whether the lifting action is in place. Furthermore, by presetting the position of the sensing element 6 or using multiple sets of sensors 5, multiple key positions during the lifting process (such as the intermediate pause position and the deceleration position) can be detected, providing data support for precise control. Specifically, when the lifting seat 15 reaches the limit position, the sensor 5 triggers a signal and transmits it to the control system, which immediately stops the operation of the first drive source 22 to avoid mechanical overload, damage to the cam 13 or guide shaft 14, or collision with other equipment caused by excessive lifting of the lifting seat 15; if the lifting seat 15 does not reach the target position within a preset time (e.g., the sensor 5 does not detect the sensing element 6), the system can determine that there is an abnormal situation such as jamming or drive failure, and promptly trigger an alarm and stop the machine to prevent the fault from escalating.

[0029] Reference Figure 5 and Figure 7 As shown, the frame 31 further includes two parallel mounting plates, each end of which is perpendicularly connected to one of the two lifting seats 15. Multiple mounting shafts are perpendicularly connected between the two mounting plates, and each drive wheel 33 is rotatably connected to one of the mounting shafts. Specifically, the mounting plates, as the longitudinal skeleton of the frame 31, are arranged in parallel and perpendicularly connected to the lifting seats 15 at both ends, forming a support frame spanning the two lifting seats 15. The mounting shafts, as transverse connectors, are vertically fixed between the two mounting plates, and each mounting shaft corresponds to a drive wheel 33, forming a rotational support point for the drive wheel 33. This structure makes the frame 31 a key intermediate carrier connecting the lifting assembly 1 and the conveying function. It is rigidly connected to the lifting seats 15 through the mounting plates, rising and falling synchronously with the lifting seats 15; and it supports the drive wheels 33 and the conveyor belt 32 through the mounting shafts, bearing the load of the material box conveying. It is conceivable that the "double-plate" structure formed by the two parallel mounting plates, compared to a single plate or frame structure, can improve torsional resistance with the same amount of material. When the material bin experiences eccentric loading on the conveyor belt 32, the mounting plate can distribute stress through its own rigidity, preventing the frame 31 from bending laterally. The vertically connected mounting shaft further enhances the stability of the distance between the two mounting plates, preventing deformation of the mounting plates due to long-term load. The hollow design of "mounting plate + distributed mounting shaft" reduces material usage compared to an integral pallet structure, significantly lowering the load on the lifting assembly 1 (especially in high-frequency lifting scenarios, reducing drive source energy consumption and extending equipment life). Simultaneously, the hollow structure facilitates the installation and maintenance of the conveyor belt 32 and also provides space for the arrangement of the conveyor drive assembly 4.

[0030] Furthermore, the base 41 includes two parallel end plates 411, with two symmetrical connecting rods 412 vertically connected between the two end plates 411. The connecting rods 412 are connected to the bottom of each mounting plate. The two ends of the second drive shaft 42 are rotatably connected to the two end plates 411 respectively. The second drive source 43 is disposed on any end plate 411 to drive the second drive shaft 42 to rotate. Specifically, the connecting rods 412 are provided with connection holes for connecting to the mounting plates of the frame 31. This standardized interface allows the base 41 to adapt to conveying components 3 of different lengths. By simply adjusting the spacing of the end plates 411 and the length of the connecting rods 412, the conveying requirements of different material boxes can be met without redesigning the overall structure of the drive system.

[0031] Reference Figure 4 As shown, a linear bearing 17 is further connected to the lifting seat 15 and slidably connected to the guide shaft 14 via the linear bearing 17. Specifically, the linear bearing 17 allows the first drive source 22 to drive the lifting seat 15 without outputting excessive torque, reducing energy consumption and preventing the lifting seat 15 from "jamming" or "tilting" due to uneven frictional resistance, ensuring that the material box remains horizontal during the lifting process.

[0032] Furthermore, the first drive source 22 and the second drive source 43 are adopted as flashlight drums, three-phase geared motors or servo motors.

[0033] Furthermore, a base connector 18 is connected between each end of the two bases 11 to enhance the stability and rigidity of the base 11 structure.

[0034] In embodiment two, this utility model also discloses a conveyor line, including the hopper transfer and conveying equipment as in embodiment one.

[0035] Obviously, the above embodiments are merely illustrative examples for clear explanation and are not intended to limit the implementation. Those skilled in the art will recognize that other variations or modifications can be made based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. However, obvious variations or modifications derived therefrom are still within the protection scope of this invention.

Claims

1. A material bin transfer and conveying device, characterized in that: include, The lifting assembly includes a base, a first drive shaft, a cam, a guide shaft, and a lifting seat. Two bases are symmetrically arranged. A first drive shaft is rotatably mounted on each of the two bases. The two first drive shafts are parallel to each other and each end of the first drive shaft is coaxially mounted with a cam. A guide shaft perpendicular to the first drive shaft is provided on each of the two bases. The two lifting seats are parallel to each other above the two first drive shafts and are slidably connected to the two guide shafts. The bottom of each lifting seat contacts the two cams on its corresponding first drive shaft. A lifting drive assembly includes a mounting bracket and a first drive source. The mounting bracket is connected to any base, and the first drive source is mounted on the mounting bracket to drive a first drive shaft to rotate. The conveying assembly is provided in multiple sets and spaced apart along the length of the lifting seat. Each conveying assembly includes a frame, a conveyor belt and drive wheels. The frame is vertically connected between two lifting seats. Multiple drive wheels are provided and rotatably mounted on the frame. The conveyor belt is connected to the drive wheels. A conveyor drive assembly includes a base, a second drive shaft, and a second drive source. The base is connected to the frame, the second drive shaft is disposed on the base parallel to the first drive shaft to drive each conveyor belt to rotate, and the second drive source is disposed on the base to drive the second drive shaft to rotate.

2. The material box transfer and conveying equipment according to claim 1, characterized in that: The conveying assembly adopts a belt conveyor structure or a chain conveyor structure. When a belt conveyor structure is adopted, the drive wheel is a pulley and the conveyor belt is a belt. When a chain conveyor structure is adopted, the drive wheel is a sprocket and the conveyor belt is a chain, and multiple sprockets are coaxially arranged on the second drive shaft.

3. The material box transfer and conveying equipment according to claim 1, characterized in that: Two bearing seats are symmetrically arranged on each of the two bases, and the two ends of the first drive shaft are rotatably connected to the two bearing seats respectively through bearings.

4. The material box transfer and conveying equipment according to claim 1, characterized in that: A connecting plate is provided on any of the bases, and a sensor is provided on the connecting plate. A sensing element corresponding to the position of the sensor is connected to the bottom of a lifting seat located above the base.

5. The material bin transfer and conveying equipment according to claim 1, characterized in that: The frame includes two parallel mounting plates, with each end of the two mounting plates vertically connected to two lifting seats. Multiple mounting shafts are vertically connected between the two mounting plates, and each drive wheel is rotatably connected to one of the mounting shafts.

6. The material bin transfer and conveying equipment according to claim 5, characterized in that: The base includes two parallel end plates, and two symmetrical connecting rods are vertically connected between the two end plates. The connecting rods are connected to the bottom of each mounting plate. The two ends of the second drive shaft are rotatably connected to the two end plates respectively. The second drive source is disposed on any end plate for driving the second drive shaft to rotate.

7. The material box transfer and conveying equipment according to claim 1, characterized in that: A linear bearing is connected to the lifting seat and is slidably connected to the guide shaft through the linear bearing.

8. The material box transfer and conveying equipment according to claim 1, characterized in that: The first and second drive sources are electric flashlight drums, three-phase geared motors, or servo motors.

9. The material bin transfer and conveying equipment according to claim 1, characterized in that: A base connector is connected between each end of the two bases.

10. A conveyor line, characterized in that: Includes the hopper transfer and conveying equipment as described in any one of claims 1-9.

Images