A precision lifting mechanism for glass substrates

Abstract

This utility model relates to a precision lifting mechanism for a glass substrate, comprising a substrate, with four through-holes at the top corners of the substrate. A lead screw module and a drive system are inserted into each of the four holes. The drive system is fixedly mounted on the substrate and drives the lead screw modules. The drive system can drive the lead screw modules, thereby moving the mounting plate and base plate vertically. The high positioning accuracy of the ball screw allows for high-precision control of the vertical movement of the mounting plate and base plate.

Description

Technical Field

[0001] This utility model relates to the field of glass substrate lifting, and in particular to a precision lifting mechanism for glass substrates. Background Technology

[0002] Panel coating equipment is commonly used in the electronics manufacturing industry and is widely used in the production of panels for liquid crystal displays (LCDs), organic light-emitting diodes (OLEDs), optoelectronic thin films, and solar cells.

[0003] During these production processes, precision coating technology places extremely high demands on coating uniformity, thickness control, and surface finish. To meet these precise control requirements, many coating equipment rely on precision lifting mechanisms for the glass substrate.

[0004] The above-mentioned existing technical solutions have the following defects: In the existing technology, the lifting mechanism of coating equipment mostly adopts a single-axis drive combined with a guide column structure. The single-axis drive will cause poor synchronization between the axes, causing the substrate to tilt. The torsional vibration of the lead screw will affect the positioning accuracy. At the same time, there is a lack of real-time synchronization compensation mechanism. Utility Model Content

[0005] The purpose of this invention is to provide a precision lifting mechanism for glass substrates to solve the problems existing in the prior art.

[0006] The above-mentioned technical objective of this utility model is achieved through the following technical solution:

[0007] A precision lifting mechanism for a glass substrate includes a substrate, with a first circular hole extending vertically through each of the four top corners of the substrate. A lead screw module is inserted into each of the first circular holes, and a drive system is fixedly mounted on the substrate. The drive system is used to drive the lead screw module.

[0008] By adopting the above technical solution, the mounting plate and the base plate can be moved up and down by the drive system lead screw module. The high positioning accuracy of the lead screw enables high-precision control of the up and down movement of the mounting plate and the base plate.

[0009] In a further embodiment, the lead screw module includes a first sleeve, a cover plate, a deep groove ball bearing, a ball screw, an internal threaded sleeve, a first gear, and a second sleeve. An integrally formed first ring is provided on the outer side of the top end of the first sleeve. A centripetal protrusion is provided on the top end of the first sleeve. The first sleeve is inserted into a first circular hole. The bottom end face of the first ring is in contact with the top end face of the base plate. A cover plate is fixedly installed at the bottom of the first sleeve. The axis of the cover plate is collinear with the axis of the first sleeve. The cover plate has a second circular hole that extends vertically. The deep groove ball bearing is fixedly installed inside the first sleeve. The top end face of the deep groove ball bearing is in contact with the bottom end face of the centripetal protrusion. The bottom end face of the deep groove ball bearing is in contact with the top end face of the cover plate. The ball screw is inserted into the deep groove ball bearing. Inside the bearing, the ball screw is screwed to an internally threaded sleeve. The top end of the internally threaded sleeve is provided with an integrally formed second ring. The internally threaded sleeve is fitted with a second sleeve. The top end of the second sleeve is provided with a first gear. The bottom end of the second sleeve is provided with an integrally formed third ring. The bottom end face of the first gear is in contact with the top end face of the third ring. The bottom of the second sleeve is provided with an integrally formed first cylindrical protrusion. The bottom end face of the first cylindrical protrusion is in contact with the top end face of the deep groove ball bearing. The outer diameter of the first cylindrical protrusion is smaller than the outer diameter of the second sleeve. The bottom of the first cylindrical protrusion is provided with an integrally formed second cylindrical protrusion. The second cylindrical protrusion extends downward to the bottom of the cover plate. The outer diameter of the second cylindrical protrusion is smaller than the outer diameter of the first cylindrical protrusion.

[0010] By adopting the above technical solution, the ball screw can be moved up and down under the action of the drive system through the installation of the internal threaded sleeve and the ball screw, and finally the mounting plate and the base plate can be accurately raised and lowered.

[0011] In a further embodiment, the top end of each ball screw is fixedly installed to a mounting plate, and the bottom end of each ball screw is fixedly installed to a base plate.

[0012] By adopting the above technical solution, and by installing the ball screw with the mounting plate and the base plate, the problem of poor synchronization caused by single-axis drive is solved.

[0013] In a further embodiment, the drive system includes a servo motor, a second gear, a third gear, and a fourth gear. The servo motor is fixedly mounted on the bottom of the substrate. The second gear is fixedly mounted with the servo motor. The axis of the servo motor is collinear with the axis of the second gear. Third gears are provided on both the left and right sides of the second gear. A fourth gear is provided at the front end of the second gear. The synchronous belt is fixedly connected to the second, third, and fourth gears to form a closed loop.

[0014] By adopting the above technical solution, the second gear has a braking function. Through the action of the servo motor braking mechanism, the second wheel can be stopped quickly. At this time, the setting of the third and fourth gears can help the equipment stop more smoothly and reduce the impact and vibration caused by sudden stop.

[0015] In a further embodiment, the angle between the second gear and the third gears on its left and right sides is greater than 120 degrees, the angle between the fourth gear and the first gears on its left and right sides is greater than 120 degrees, and the angle between the first gear, the second gear and the third gear is greater than 120 degrees.

[0016] By adopting the above technical solutions, transmission stability can be improved, load-bearing capacity can be enhanced, spatial layout can be optimized, and wear can be reduced and service life extended. At the same time, it can also reduce sliding friction between the toothed synchronous belt and each pulley.

[0017] In a further embodiment, a support plate is fixedly installed on the top of the base plate, the support plate penetrates the base plate, and the top of the support plate is fixedly installed with the mounting plate.

[0018] By adopting the above technical solution, a solid support is provided for the entire structure, enhancing its overall stability and load-bearing capacity. Secondly, the top of the support plate is fixedly installed to the mounting plate, ensuring the accuracy and stability of the mounting plate's position and preventing displacement or loosening due to vibration or external forces.

[0019] In summary, this utility model has the following beneficial effects:

[0020] 1. By using a ball screw, the frictional resistance can be reduced and the positioning accuracy can be improved.

[0021] 2. By setting up servo motors, precise control of position and speed can be achieved;

[0022] 3. By using the first gear, second gear, third gear, fourth gear and synchronous belt, a more stable and synchronized transmission effect can be achieved. Attached Figure Description

[0023] Figure 1 This is an overall schematic diagram of the present invention, used to illustrate the structural connection relationship between the drive system and the lead screw module;

[0024] Figure 2 This is a cross-sectional view of the lead screw module structure;

[0025] Figure 3 This is a schematic diagram of the drive system structure and connections;

[0026] Figure 4This is a schematic diagram of the connection structure between the timing belt and the fourth gear.

[0027] In the diagram, 1. Base plate; 2. First sleeve; 3. Cover plate; 4. Deep groove ball bearing; 5. Ball screw; 6. Internal threaded sleeve; 7. First gear; 8. Second sleeve; 9. Mounting plate; 10. Base plate; 11. Servo motor; 12. Second gear; 13. Third gear; 14. Fourth gear; 15. Synchronous belt; 16. Support plate. Detailed Implementation

[0028] The present invention will be further described in detail below with reference to the accompanying drawings.

[0029] Identical parts are indicated by the same reference numerals. It should be noted that the terms "front," "rear," "left," "right," "upper," and "lower" used in the following description refer to the attached figures. Figure 1 In this specification, the terms "bottom surface" and "top surface," "inner" and "outer" refer to the direction toward or away from the geometry of a specific component. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this specification, "a plurality of" means two or more, unless otherwise explicitly and specifically defined by the direction of the center.

[0030] Example 1:

[0031] like Figure 1 - Figure 4As shown, a precision lifting mechanism for a glass substrate includes a substrate 1. Each of the four corners of the top of the substrate 1 has a first circular hole that extends vertically through it, and a lead screw module is inserted into each of the first circular holes. A drive system is fixedly installed on the substrate 1, and the drive system is used to drive the lead screw module. The lead screw module includes a first sleeve 2, a cover plate 3, a deep groove ball bearing 4, a ball screw 5, an internal threaded sleeve 6, a first gear 7, and a second sleeve 8. The outer side of the top of the first sleeve 2 is provided with an integrally formed first ring. The top of the first sleeve 2 has a centripetal protrusion. The first sleeve 2 is inserted into a first circular hole. The bottom end face of the first ring is in contact with the top end face of the base plate 1. The bottom of the first sleeve 2 is fixedly installed with the cover plate 3. The axis of the cover plate 3 is collinear with the axis of the first sleeve 2. The cover plate 3 has a second circular hole that extends vertically. The deep groove ball bearing 4 is fixedly installed inside the first sleeve 2. The top end face of the deep groove ball bearing 4 is in contact with the bottom end face of the centripetal protrusion. The bottom end face of the deep groove ball bearing 4 is in contact with the top end face of the cover plate 3. The ball screw 5 is inserted into the deep groove ball bearing 4 and is screwed to the internal threaded sleeve 6. The top end of the internally threaded sleeve 6 is provided with an integrally formed second ring. The internally threaded sleeve 6 is fitted with a second sleeve 8. The top end of the second sleeve 8 is provided with a first gear 7. The bottom end of the second sleeve 8 is provided with an integrally formed third ring. The bottom end face of the first gear 7 is in contact with the top end face of the third ring. The bottom of the second sleeve 8 is provided with an integrally formed first cylindrical protrusion. The bottom end face of the first cylindrical protrusion is in contact with the top end face of the deep groove ball bearing 4. The deep groove ball bearing 4 lifts the second sleeve 8. There is a gap between the bottom end face of the second sleeve 8 and the top end face of the first sleeve 2. The outer diameter of the first cylindrical protrusion is smaller than the outer diameter of the second sleeve 8. The bottom of the first cylindrical protrusion is provided with an integrally formed second cylindrical protrusion. The second cylindrical protrusion extends downward to the bottom of the cover plate 3. The outer diameter of the second cylindrical protrusion is smaller than the outer diameter of the first cylindrical protrusion. The top ends of the ball screws 5 are all fixedly installed with the mounting plate 9, and the bottom ends of the ball screws 5 are all fixedly installed with the base plate 10. The drive system includes a servo motor 11, a second gear 12, a third gear 13, a fourth gear 14, and a synchronous belt 15. The servo motor 11 is fixedly mounted on the bottom of the base plate 1. The second gear 12 is fixedly mounted to the servo motor 11, and the axis of the servo motor 11 is collinear with the axis of the second gear 12. Third gears 13 are located on both sides of the second gear 12, and a fourth gear 14 is located at the front end of the second gear 12. The synchronous belt 15 is fixedly connected to the second gear 12, third gear 13, and fourth gear 14 to form a closed loop. The angle between the second gear 12 and the third gears 13 on its left and right sides is greater than 120 degrees. The angle between the fourth gear 14 and the first gears 7 on its left and right sides is greater than 120 degrees. The angle between the first gear 7, the second gear 12, and the third gear 13 is greater than 120 degrees. A support plate 16 is fixedly mounted on the top of the base plate 10, penetrating the base plate 1. The top of the support plate 16 is fixedly mounted to the mounting plate 9.

[0032] Specific implementation process: The component to be processed is placed in the component. The servo motor 11 drives the second gear 12 at the top to rotate. The second gear 12 rotates the synchronous belt 15. The synchronous belt 15, the third gear 13, the fourth gear 14 and the first gear 7 form a closed-loop drive system. Under the action of the synchronous belt 15, the drive system starts to work. Because the second sleeve 8 is sleeved on the internal thread sleeve 6, and the first gear 7 is sleeved on the outside of the second sleeve 8, the rotation of the first gear 7 drives the second sleeve 8 to rotate, which in turn drives the internal thread sleeve 6 to rotate. The rotation of the internal thread sleeve 6 causes the ball screw 5 to move up and down. Because the top of the ball screw 5 is fixedly installed with the mounting plate 9 and the bottom of the ball screw 5 is fixedly installed with the base plate 10, the mounting plate 9 and the base plate 10 move up and down with the ball screw 5. The ball screw 5 has the characteristic of high positioning accuracy, thus realizing precise control of lifting.

[0033] In the embodiments disclosed in this utility model, the terms "installation," "connection," "linking," and "fixing" should be interpreted broadly. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; "linking" can be a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in the embodiments disclosed in this utility model according to the specific circumstances.

[0034] This specific embodiment is merely an explanation of the present utility model and is not intended to limit the present utility model. After reading this specification, those skilled in the art can make modifications to this embodiment without contributing any inventive step, but as long as they are within the scope of the claims of the present utility model, they are protected by patent law.

Claims

1. A glass substrate precision lifting mechanism characterized by, include: The substrate (1) has four through holes at the top corners of the substrate (1), and each of the four holes has a lead screw module inserted into it. The drive system is fixedly installed on the substrate (1). The drive system is used to drive the lead screw module. The lead screw module includes a first sleeve (2), a cover plate (3), a deep groove ball bearing (4), a ball screw (5), an internal thread sleeve (6), a first gear (7), and a second sleeve (8). An integrally formed first ring is provided on the outer side of the top end of the first sleeve (2). A centripetal protrusion is provided on the top end of the first sleeve (2). The first sleeve (2) is inserted into the first circular hole. The bottom end face of the first ring is in contact with the top end face of the substrate (1). A cover plate (3) is fixedly installed on the bottom of the first sleeve (2). The axis of the cover plate (3) is collinear with the axis of the first sleeve. A second circular hole is provided through the top and bottom of the cover plate (3). The deep groove ball bearing (4) is fixedly installed in the first sleeve (2). The top end face of the deep groove ball bearing (4) is in contact with the bottom end face of the centripetal protrusion. The bottom end face of the deep groove ball bearing (4) is in contact with the cover plate. (3) The top surface of the ball screw (5) is fitted together with the deep groove ball bearing (4). The ball screw (5) is screwed to the internal thread sleeve (6). The top of the internal thread sleeve (6) is provided with an integrally formed second ring. The internal thread sleeve (6) is fitted with a second sleeve (8). The top of the second sleeve (8) is provided with a first gear (7). The bottom of the second sleeve (8) is provided with an integrally formed third ring. The bottom surface of the first gear (7) is fitted together with the top surface of the third ring. The bottom of the second sleeve (8) is provided with an integrally formed first cylindrical protrusion. The bottom surface of the first cylindrical protrusion is fitted together with the top surface of the deep groove ball bearing (4). The outer diameter of the first cylindrical protrusion is smaller than the outer diameter of the second sleeve (8). The bottom of the first cylindrical protrusion is provided with an integrally formed second cylindrical protrusion. The second cylindrical protrusion extends downward to the bottom of the cover plate (3). The outer diameter of the second cylindrical protrusion is smaller than the outer diameter of the first cylindrical protrusion.

2. The precision glass substrate lift mechanism of claim 1, wherein: The top end of each ball screw (5) is fixedly installed with the mounting plate (9), and the bottom end of each ball screw (5) is fixedly installed with the base plate (10).

3. The precision glass substrate lift mechanism of claim 1, wherein: The drive system includes a servo motor (11), a second gear (12), a third gear (13), a fourth gear (14), and a timing belt (15). The servo motor (11) is fixedly mounted on the bottom of the base plate (1). The second gear (12) is fixedly mounted on the servo motor (11). The axis of the servo motor (11) is collinear with the axis of the second gear (12). The second gear (12) has a third gear (13) on both its left and right sides. The second gear (12) has a fourth gear (14) at its front end. The timing belt (15) is fixedly connected to the second gear (12), the third gear (13), and the fourth gear (14) to form a closed loop.

4. The precision glass substrate lift mechanism of claim 3, wherein: The angle between the second gear (12) and the third gear (13) on its left and right sides is greater than 120 degrees, the angle between the fourth gear (14) and the first gear (7) on its left and right sides is greater than 120 degrees, and the angle between the first gear (7), the second gear (12) and the third gear (13) is greater than 120 degrees.

5. The precision glass substrate lift mechanism of claim 2, wherein: A support plate (16) is fixedly installed on the top of the base plate (10). The support plate (16) penetrates the base plate (1). The top of the support plate (16) is fixedly installed with the mounting plate (9).

Images