An apparatus for multi-target confocal coating of powdered materials

Abstract

A multi-target confocal coating apparatus for powdered materials, belonging to the field of vacuum coating technology, solves the problems of existing coating equipment, such as simple structure, fixed target position, and uneven coating on the product surface. It includes a worktable transition support seat set in the vacuum chamber, an angle adjustment shaft rotatably mounted within a bearing fixing seat, a worktable rotating shaft bearing seat located in the middle of the angle adjustment shaft, and a worktable rotating shaft bearing seat inserted into the worktable rotating shaft bearing seat via a worktable rotating shaft at its lower part. The lower end of the worktable rotating shaft is connected to the upper end of the transition connecting shaft via a rotating shaft drive universal joint, and the lower end of the transition connecting shaft is connected to the drive inner shaft via a rotating shaft drive universal joint. Several sets of magnetically controlled targets with adjustable target angles are arranged above the rotating worktable. This apparatus allows the powdered material to rotate evenly during coating, and the angle of the worktable can be adjusted according to the product shape. The target angle can also be adjusted according to the angle of the worktable, resulting in high target utilization and adaptability to various powdered material products.

Description

Technical Field

[0001] This utility model belongs to the field of vacuum coating technology, specifically relating to a device for multi-target confocal coating of powdered materials. Background Technology

[0002] Utilizing vacuum coating equipment to achieve surface coating and modification of powdered materials is a crucial area of ​​focus in the field of powder coating technology. The core issue is how to achieve a completely uniform coating on the surface of powdered materials. Traditional powder coating equipment has a simple structure and a fixed target position. Since powdered materials mostly move in free fall or roll along an inclined plane, this leads to uneven coating. Therefore, to improve the uniformity of powder coating and increase the types of multiple coatings, it is necessary to improve existing powder coating equipment. Utility Model Content

[0003] This invention addresses the aforementioned problems by providing a multi-target confocal coating device for powdered materials. This device allows for uniform rotation of powdered materials during coating, adjusts the angle of the worktable according to the product shape, adapts to various types of powdered materials, and adjusts the target angle to follow the worktable angle. It achieves high target utilization, diverse coating types, reduced coating costs, and improved product surface quality.

[0004] The technical solution adopted by this utility model is as follows: The device for multi-target confocal coating of powdered materials includes a worktable transition support seat set in a vacuum chamber. The upper part of the worktable transition support seat is provided with a bearing fixing seat, and the bearing fixing seat and the worktable transition support seat are combined to form a hollow cylindrical structure. An angle adjustment shaft arranged along the diameter direction is rotatably arranged inside the bearing fixing seat. A worktable rotating shaft bearing seat is set in the middle of the angle adjustment shaft. A rotating worktable is set above the worktable rotating shaft bearing seat and at the top opening of the bearing fixing seat. The lower part of the rotating worktable is inserted into the worktable rotating shaft bearing seat via a worktable rotating shaft. The lower end of the worktable rotating shaft is movably connected to the upper end of the transition connecting rotating shaft via a rotating shaft transmission universal joint. The lower end of the transition connecting rotating shaft is connected to a drive inner shaft that penetrates the bottom of the vacuum chamber via a rotating shaft transmission universal joint. The drive end of the drive inner shaft located outside the vacuum chamber is connected to a drive motor via a transmission mechanism. Several sets of target head angle adjustable magnetic control targets are also set above the rotating worktable and inside the vacuum chamber.

[0005] The rotary worktable includes a cylindrical body with an open top. A rotating shaft connection is located at the bottom of the cylindrical body, and several sets of triangular inclined baffles are evenly distributed on the inner wall of the cylindrical body's inner cavity. The rotary worktable is connected to the upper end of the worktable's rotating shaft via the rotating shaft connection, and the several sets of triangular inclined baffles arranged on the inner wall of the cylindrical body are used to stir the powdered material product to be coated, ensuring the uniformity of the coating on the surface of the powdered material product.

[0006] The adjustable-angle magnetically controlled target includes a magnetically controlled target head, which is mounted inside the vacuum chamber via a target head connecting frame. A target head angle adjustment mechanism is also provided between the magnetically controlled target head and the target head connecting frame. A corrugated pipe is fitted onto the outer side of the movable structure of the target head angle adjustment mechanism. The hollow structure of the target head connecting frame also has a pipeline routing cavity inside, within which power lines and cooling water pipes are installed. This allows the magnetically controlled target head to be positioned inside the vacuum chamber, above the rotary table, using the target head connecting frame, and its position to be adjusted via the target head angle adjustment mechanism.

[0007] A target head shield is provided in front of the magnetically controlled target head. The rotation drive end of the target head shield is connected to the shield connecting shaft, which is connected to the side of the magnetically controlled target head via a connecting bracket. The drive end of the shield connecting shaft is connected to one end of a cylinder drive shaft via a cylinder drive universal joint. The other end of the cylinder drive shaft, extending out of the vacuum chamber, is connected to the drive end of a rotary cylinder. The rotary cylinder and cylinder drive shaft drive the target head shield to reciprocate around the shield connecting shaft, thereby shielding the target material of the magnetically controlled target with an adjustable target head angle according to the coating requirements, preventing target material contamination. Simultaneously, the cylinder drive universal joint between the shield connecting shaft and the cylinder drive shaft allows the cylinder drive shaft to adapt more readily to changes in the magnetically controlled target head angle.

[0008] Angle adjustment dials are provided at both ends of the angle adjustment shaft on the bearing mounting seat. Each dial includes a dial body with an adjustment shaft connection hole in the center. The dial body is connected to the end of the angle adjustment shaft via a connecting bolt within the connection hole. The dial body also has a locking pin arc-shaped clearance, within which a dial locking screw is installed. Marking graduations are also provided on the arc-shaped edge of the locking pin arc-shaped clearance. The angle adjustment dials are used to indicate the angle of rotation of the worktable's rotating shaft bearing seat and the worktable around the angle adjustment shaft. The dial locking screw within the locking pin arc-shaped clearance is used to lock the tilt position of the rotating worktable.

[0009] The beneficial effects of this utility model are as follows: This utility model employs a worktable transition support seat located within a vacuum chamber. A bearing fixing seat is located on the upper part of the worktable transition support seat. An angle adjustment shaft arranged along the diameter direction is rotatably mounted inside the bearing fixing seat. A worktable rotating shaft bearing seat is located in the middle of the angle adjustment shaft. A rotating worktable is located above the worktable rotating shaft bearing seat and at the top opening of the bearing fixing seat. The lower part of the rotating worktable is inserted into the worktable rotating shaft bearing seat via a worktable rotating shaft. The lower end of the worktable rotating shaft is movably connected to the upper end of the transition connecting rotating shaft via a rotating shaft drive universal joint. The lower end of the transition connecting rotating shaft is connected to a drive inner shaft penetrating the bottom of the vacuum chamber via a rotating shaft drive universal joint. The structure features several sets of adjustable-angle magnetron sputtering targets, resulting in a rational and compact design. The rotating worktable allows for angle adjustment, enabling the mixing and uniform coating of powdered materials, ensuring stable coating processes and improving sputtering stability. Furthermore, the adjustable-angle multi-target confocal design increases process versatility, allowing for the proportioning of target elements according to actual needs to achieve multi-element coatings. The adjustable target holder angle further enhances target utilization by adapting to the specific requirements of the coated product. In actual production, it enables stable output of different elements for the same product and different products using the same elements, achieving coating diversity, reducing coating costs, and effectively improving product surface quality. Attached Figure Description

[0010] Figure 1 This is a schematic diagram of the structure of this utility model.

[0011] Figure 2 yes Figure 1 Side view.

[0012] Figure 3 yes Figure 1 A schematic diagram of a rotary table in a computer.

[0013] Figure 4 yes Figure 3 Top view.

[0014] Figure 5 yes Figure 1 A schematic diagram of a structure for adjusting the angle dial in a clock face.

[0015] Figure 6 yes Figure 1 A schematic diagram of a magnetically controlled target with adjustable target head angle.

[0016] Figure 7 yes Figure 6 Side view (with the target shield removed).

[0017] The numbers in the diagram are explained as follows: 1. Vacuum chamber; 2. Worktable transition support; 3. Bearing fixing seat; 4. Angle adjustment shaft; 5. Worktable rotating shaft bearing seat; 6. Worktable rotating shaft; 7. Rotary worktable; 8. Transition connecting shaft; 9. Rotating shaft transmission universal joint; 10. Drive inner shaft; 11. Angle adjustment dial; 12. Dial locking screw; 13. Target head angle adjustable magnetic control target; 14. Cylindrical body; 15. Rotating shaft connection part; 16. Cylindrical inner cavity; 17. Triangular inclined baffle; 18. Dial body; 19. Adjustment shaft connection hole; 20. Marking scale; 21. Locking nail arc-shaped clearance; 22. Magnetic control target head; 23. Target head angle adjustment mechanism; 24. Target head connecting frame; 25. Bellows; 26. Target head shield; 27. Shield connecting shaft; 28. Cylinder transmission shaft; 29. ​​Cylinder transmission universal joint; 30. Rotary cylinder; 31. Power line and cooling water pipe; 32. Pipeline layout passage. Detailed Implementation

[0018] according to Figures 1-7 The specific structure of this utility model is described in detail. The device for multi-target confocal coating of powdered materials includes a worktable transition support 2 disposed within a vacuum chamber 1. A bearing fixing seat 3 is disposed on the upper part of the worktable transition support 2. The bearing fixing seat 3 and the worktable transition support 2 together form a hollow cylindrical structure. An angle adjustment shaft 4, arranged along the diameter of the bearing fixing seat's cross-section, is rotatably disposed inside the bearing fixing seat 3. Angle adjustment scales 11 are respectively disposed at both ends of the angle adjustment shaft 4. The angle adjustment scales 11 are composed of a scale body 18. An adjustment shaft connecting hole 19 is disposed in the middle of the scale body 18. The scale body 18 is connected to the end of the angle adjustment shaft 4 by a connecting bolt disposed in the adjustment shaft connecting hole 19. Furthermore, a locking pin arc-shaped clearance 21 is provided on the scale body 18, and a scale locking screw 12 is disposed within the locking pin arc-shaped clearance 21. Marking graduations 20 are also provided on the arc-shaped edge of the locking pin arc-shaped clearance 21. Furthermore, the angle adjustment dial 11 is used to indicate the angle of rotation of the worktable spindle bearing seat 5 and the rotary worktable 7 on it around the angle adjustment shaft 4, and the tilted position of the rotary worktable 7 is locked by the dial locking screw 12 set in the arc-shaped relief opening 21 of the locking nail.

[0019] A worktable pivot bearing seat 5 is provided in the middle of the angle adjustment shaft 4. A rotary worktable 7 is provided above the worktable pivot bearing seat 5 and at the top opening of the bearing fixing seat 3. The lower part of the rotary worktable 7 is inserted into the worktable pivot bearing seat 5 through the worktable rotation shaft 6. The rotary worktable 7 is composed of a cylindrical body 14 with an open upper end. A rotation shaft connecting part 15 is provided at the bottom of the cylindrical body 14. Furthermore, several sets of triangular inclined baffles 17 are evenly distributed on the inner wall of the inner cavity 16 of the cylindrical body 14. Thus, the rotary worktable 7 is connected to the upper end of the worktable rotation shaft 6 through the rotation shaft connecting part 15, and the several sets of triangular inclined baffles 17 arranged on the inner wall of the inner cavity 16 are used to stir the powdered material product to be coated, so as to ensure the uniformity of the coating on the surface of the powdered material product.

[0020] Meanwhile, the lower end of the worktable rotation shaft 6 is movably connected to the upper end of the transition connection shaft 8 through the shaft transmission universal joint 9. The lower end of the transition connection shaft 8 is connected to the drive inner shaft 10 that runs through the bottom of the vacuum chamber 1 through the shaft transmission universal joint 9. The drive end of the drive inner shaft 10 located outside the vacuum chamber 1 is connected to the drive motor through the transmission mechanism. The drive inner shaft 10 is also concentrically fitted with a drive outer shaft. The upper end of the drive outer shaft is connected to the bottom of the worktable transition support seat 2, so as to use the drive outer shaft to drive the bearing fixing seat 3 and the rotating worktable 7 as a whole to correspond with the target head angle adjustable magnetic control target 13 (find the positioning point), and then drive the rotating worktable 7 to rotate through the internal drive inner shaft 10.

[0021] In addition, several sets of adjustable-angle magnetically controlled targets 13 (e.g., three sets) are installed above the rotary table 7 and inside the vacuum chamber 1. Each adjustable-angle magnetically controlled target 13 includes a magnetically controlled target head 22, which is mounted inside the vacuum chamber 1 via a target head connecting frame 24. A target head angle adjustment mechanism 23 is also provided between the magnetically controlled target head 22 and the target head connecting frame 24, and a bellows 25 is fitted onto the outer side of the movable structure of the target head angle adjustment mechanism 23. Furthermore, a pipeline routing cavity 32 is provided inside the hollow structure of the target head connecting frame 24, containing power lines and cooling water pipes 31. This allows the magnetically controlled target head 22 to be positioned inside the vacuum chamber 1 and above the rotary table 7 using the target head connecting frame 24, and the position of the corresponding magnetically controlled target head 22 to be adjusted according to the actual angle of the rotary table 7 via the target head angle adjustment mechanism 23.

[0022] A target head shield 26 is also provided in front of the magnetic control target head 22 of the target head angle adjustable magnetic control target 13. The rotation drive end of the target head shield 26 is connected to the shield connecting shaft 27. The shield connecting shaft 27 is connected to the side of the magnetic control target head 22 through a connecting frame. The drive end of the shield connecting shaft 27 is connected to one end of the cylinder drive shaft 28 through a cylinder drive universal joint 29. The other end of the cylinder drive shaft 28 extending outside the vacuum chamber 1 is connected to the drive end of the rotary cylinder 30. Thus, the target head shield 26 is driven to reciprocate around the shield connecting shaft 27 by the rotary cylinder 30 and the cylinder drive shaft 28, so as to shield the corresponding target head angle adjustable magnetic control target 13 according to the coating requirements, which facilitates processing. The cylinder drive universal joint 29 provided between the shield connecting shaft 27 and the cylinder drive shaft 28 can make the transmission of the cylinder drive shaft 28 more adaptable to the change of the angle of the magnetic control target head 22.

[0023] When using this multi-target confocal coating apparatus for powdered materials, firstly, the position of the worktable shaft bearing seat 5 and the rotating worktable 7 on it is adjusted according to the shape of the powdered material. The rotation angle is marked using the angle adjustment dial 11. Then, the tilted position of the rotating worktable 7 is locked by the dial locking screw 12 located in the arc-shaped clearance opening 21 of the locking pin. At the same time, the target angle adjustment mechanism 23 is used to adjust the corresponding target angle adjustable magnetic control target 13. Then, the rotation of the drive outer shaft drives the bearing fixing seat 3 and the rotating worktable 7 to move as a whole, so that the angle between the rotating worktable 7 and the target angle adjustable magnetic control target 13 is aligned in a straight line. Then, the vacuum chamber 1 is evacuated. When the working vacuum level is reached, the drive motor drives the drive inner shaft 10 to drive the rotating worktable 7 to rotate continuously. Then, the magnetic control target is started to begin coating, so that the powdered material product contained in the rotating worktable 7 is uniformly coated.

Claims

1. An apparatus for multi-target confocal coating of powdered materials, comprising a stage transition support (2) disposed within a vacuum chamber (1), characterized in that: The upper part of the workbench transition support (2) is provided with a bearing fixing seat (3). The bearing fixing seat (3) and the workbench transition support (2) are combined to form a hollow cylindrical structure. The bearing fixing seat (3) is rotatably provided with an angle adjustment shaft (4) arranged along the diameter direction. The middle part of the angle adjustment shaft (4) is provided with a workbench rotating shaft bearing seat (5). Above the workbench rotating shaft bearing seat (5) and at the top opening of the bearing fixing seat (3), a rotary workbench (7) is provided. The lower part of the rotary workbench (7) is inserted into a workbench rotating shaft (6). Inside the worktable rotating shaft bearing seat (5), the lower end of the worktable rotating shaft (6) is movably connected to the upper end of the transition connecting shaft (8) through the rotating shaft transmission universal joint (9). The lower end of the transition connecting shaft (8) is connected to the drive inner shaft (10) that runs through the bottom of the vacuum chamber (1) through the rotating shaft transmission universal joint (9). The drive end of the drive inner shaft (10) located outside the vacuum chamber (1) is connected to the drive motor through the transmission mechanism. Above the rotating worktable (7) and inside the vacuum chamber (1), there are also several sets of target head angle adjustable magnetic control targets (13).

2. The apparatus for multi-target confocal coating of powdered materials according to claim 1, characterized in that: The rotary worktable (7) includes a cylindrical body (14) with an open top. A rotating shaft connection part (15) is provided at the bottom of the cylindrical body (14). Furthermore, several sets of triangular inclined baffles (17) are evenly distributed on the inner wall of the inner cavity (16) of the cylindrical body (14).

3. The apparatus for multi-target confocal coating of powdered materials according to claim 1, characterized in that: The target angle adjustable magnetic control target (13) includes a magnetic control target head (22). The magnetic control target head (22) is set inside the vacuum chamber (1) through a target head connecting frame (24). A target head angle adjustment mechanism (23) is also provided between the magnetic control target head (22) and the target head connecting frame (24). A corrugated pipe (25) is also sleeved on the outside of the movable structure of the target head angle adjustment mechanism (23). A pipeline routing cavity (32) is also provided inside the hollow structure of the target head connecting frame (24). A power line and a cooling water pipe (31) are provided inside the pipeline routing cavity (32).

4. The apparatus for multi-target confocal coating of powdered materials according to claim 3, characterized in that: A target head shield (26) is provided in front of the magnetically controlled target head (22). The rotation drive end of the target head shield (26) is connected to the shield connecting shaft (27). The shield connecting shaft (27) is connected to the side of the magnetically controlled target head (22) through a connecting frame. The drive end of the shield connecting shaft (27) is connected to one end of the cylinder drive shaft (28) through a cylinder drive universal joint (29). The other end of the cylinder drive shaft (28) extending out of the vacuum chamber (1) is connected to the drive end of the rotary cylinder (30).

5. The apparatus for multi-target confocal coating of powdered materials according to claim 1, characterized in that: Angle adjustment dials (11) are respectively provided at both ends of the angle adjustment shaft (4) on the bearing mounting seat (3). The angle adjustment dial (11) includes a dial body (18). An adjustment shaft connection hole (19) is provided in the middle of the dial body (18). The dial body (18) is connected to the end of the angle adjustment shaft (4) by a connecting bolt provided in the adjustment shaft connection hole (19). Furthermore, a locking pin arc-shaped relief opening (21) is provided on the dial body (18). A dial locking screw (12) is provided in the locking pin arc-shaped relief opening (21). Marking scales (20) are also provided on the dial body at the arc-shaped edge of the locking pin arc-shaped relief opening (21).

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