Graphite ring deposition jig and deposition furnace

Abstract

The utility model discloses a kind of graphite ring deposition jig and deposition furnace, graphite ring deposition jig includes fixed rod and liftable movable movable rod, the first receiving member for receiving graphite ring is equipped on the fixed rod, the second receiving member for receiving graphite ring is equipped on the movable rod, when the movable rod drives second receiving member to rise to the above of first receiving member, the graphite ring is received on second receiving member, when the movable rod drives second receiving member to descend to the below of first receiving member, the graphite ring is received on first receiving member. The utility model has the advantages of being able to eliminate the deposition barrier caused by fixed contact, good deposition effect and high overall deposition efficiency.

Description

Technical Field

[0001] This utility model relates to the field of vapor deposition equipment technology, and in particular to a graphite ring deposition fixture and deposition furnace. Background Technology

[0002] In the silicon carbide vapor deposition process, the graphite ring deposition stage has long relied on the traditional method of molybdenum wire suspension. Specifically, the molybdenum wire is used to directly contact the graphite ring workpiece, and the suspension effect of the molybdenum wire is used to place the graphite ring in a suitable deposition position in the vapor deposition furnace so that silicon carbide atoms in the vapor phase can be deposited on the surface of the graphite ring to form the required coating.

[0003] Because the contact between the molybdenum wire and the graphite ring is a fixed contact, the contact point creates a "physical barrier" to the deposition of silicon carbide atoms in the vapor phase during the deposition process. This prevents the deposited atoms from uniformly covering the contact area, thus disrupting the continuity and uniformity of the deposition layer and creating "contact point defects." Furthermore, the vapor deposition furnace operates in a high-temperature, strongly reducing atmosphere, and the molybdenum wire is chemically unstable in this environment, making it prone to embrittlement and breakage. The brittleness of the molybdenum wire necessitates frequent replacement, increasing production costs. Additionally, broken molybdenum wires falling into the furnace can contaminate the furnace cavity, leading to product scrap and severely impacting production efficiency and product quality. Utility Model Content

[0004] The technical problem to be solved by this utility model is to overcome the shortcomings of the prior art and provide a graphite ring deposition fixture and deposition furnace that can eliminate deposition barriers caused by fixed contact, achieve good deposition effect and high overall deposition efficiency.

[0005] To solve the above-mentioned technical problems, the present invention adopts the following technical solution: A graphite ring deposition fixture includes a fixed rod and a movable rod that can be raised and lowered. The fixed rod is provided with a first receiving member for receiving the graphite ring, and the movable rod is provided with a second receiving member for receiving the graphite ring. When the movable rod drives the second receiving member to rise above the first receiving member, the graphite ring is received on the second receiving member. When the movable rod drives the second receiving member to descend below the first receiving member, the graphite ring is received on the first receiving member.

[0006] As a further improvement to the above technical solution: The fixed rod and the movable rod are arranged at intervals, and the first receiving member and the second receiving member are both located between the fixed rod and the movable rod, with the first receiving member and the second receiving member being staggered from each other.

[0007] The fixed rod is fitted with a first clamp, and the first receiving member is disposed on the first clamp. The movable rod is fitted with a second clamp, and the second receiving member is disposed on the second clamp.

[0008] Both the first receiving component and the second receiving component are horizontal screws. The first receiving component is threadedly connected to the first clamp, and the second receiving component is threadedly connected to the second clamp.

[0009] The first clamp and the second clamp are formed by assembling a pair of detachable half clamps.

[0010] Both the first and second receiving components are made of graphite.

[0011] Both the first and second receiving parts are made of carbon fiber.

[0012] A deposition furnace comprising at least one of the aforementioned graphite ring deposition fixtures.

[0013] As a further improvement to the above technical solution: The deposition furnace also includes a fixed top plate and a fixed bottom plate. A movable plate that can be raised and lowered is provided below the fixed bottom plate. One end of the fixed rod is connected to the fixed top plate and the other end is connected to the fixed bottom plate. The lower end of the movable rod passes through the fixed bottom plate and is connected to the movable plate.

[0014] The graphite ring deposition fixture is located at the edge of the fixed base plate.

[0015] Compared with the prior art, the advantages of this utility model are: 1. The graphite ring deposition fixture of this utility model, through the lifting and lowering of the movable rod, allows the graphite ring to periodically and alternately contact the first and second receiving parts, so that the contact points between the graphite ring and the first and second receiving parts change dynamically, eliminating the deposition obstruction caused by fixed contact, and achieving a good deposition effect. Compared with the molybdenum wire suspension technology, it occupies less space, can deposit other workpieces while depositing graphite rings, makes full use of the muffle space in the deposition furnace, increases the single deposition throughput, and has a high overall deposition efficiency.

[0016] 2. The graphite ring deposition fixture of this utility model allows the graphite ring to be deposited in the space between the fixed rod and the movable rod during deposition, which can further improve space utilization and overall deposition efficiency. By staggering the first and second receiving parts, collisions between the first and second receiving parts can be prevented when the movable rod is raised or lowered, resulting in a reasonable layout.

[0017] 3. The graphite ring deposition fixture of this utility model uses graphite as the first and second receiving parts. Compared with molybdenum wire, graphite has significantly better high-temperature resistance and resistance to strong reducing atmosphere. It is not easy to break brittle in the furnace environment, thus reducing the frequency of material replacement and lowering production costs. At the same time, the graphite horizontal screw has a lower risk of breakage than molybdenum wire, avoiding furnace pollution and product scrap caused by breakage and falling, thereby improving production efficiency and stability.

[0018] 4. The deposition furnace of this utility model, through the lifting and lowering of the movable rod, allows the graphite ring to periodically and alternately contact the first and second receiving parts, so that the contact points between the graphite ring and the first and second receiving parts change dynamically, eliminating the deposition obstruction caused by fixed contact, resulting in a better deposition effect; compared with the molybdenum wire suspension technology, it occupies less space, and can deposit other workpieces while depositing graphite rings, making full use of the muffle space in the deposition furnace, increasing the single deposition throughput, and improving the overall deposition efficiency; multiple graphite ring deposition fixtures are provided in the deposition furnace, further enhancing the deposition efficiency.

[0019] 5. In the deposition furnace of this utility model, the graphite ring deposition fixture is located at the edge of the fixed base plate, which can make room in the middle of the fixed base plate for deposition of other workpieces, thus improving space utilization and further enhancing the overall deposition efficiency. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the graphite ring deposition fixture and deposition furnace of this utility model.

[0021] Figure 2 This is a front view of the graphite ring deposition fixture and deposition furnace of this utility model.

[0022] Figure 3 This is a top view of the graphite ring deposition fixture and deposition furnace of this utility model.

[0023] Legend: 1. Fixed rod; 11. First receiving part; 12. First clamp; 2. Movable rod; 21. Second receiving part; 22. Second clamp; 31. Fixed top plate; 32. Fixed bottom plate; 33. Movable plate; 9. Graphite ring. Detailed Implementation

[0024] The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0025] In the description of this utility model, it should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0026] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.

[0027] In this utility model, unless otherwise explicitly specified and limited, the terms "assembly," "connection," "joining," and "fixing" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0028] Example 1: like Figures 1 to 3 As shown, the graphite ring deposition fixture of this embodiment includes a fixed rod 1 and a movable rod 2 that can be raised and lowered. The fixed rod 1 is provided with a first receiving member 11 for receiving the graphite ring 9, and the movable rod 2 is provided with a second receiving member 21 for receiving the graphite ring 9. When the movable rod 2 drives the second receiving member 21 to rise above the first receiving member 11, the graphite ring 9 is received on the second receiving member 21. When the movable rod 2 drives the second receiving member 21 to fall below the first receiving member 11, the graphite ring 9 is received on the first receiving member 11.

[0029] In this embodiment of the graphite ring deposition fixture, during operation, the graphite ring 9 is hung on the first receiving member 11 or the second receiving member 21. The deposition furnace is started to bring the furnace to the high temperature and atmosphere conditions required for silicon carbide vapor deposition. Simultaneously, the movable rod 2 is controlled to move up and down at a set cycle (e.g., every 1-20 minutes). When the movable rod 2 drives the second receiving member 21 to rise above the first receiving member 11, the graphite ring 9 is received on the second receiving member 21. When the movable rod 2 drives the second receiving member 21 to descend below the first receiving member 11, the graphite ring 9 is received on the first receiving member 11. After deposition is completed, the graphite ring 9 is removed after the furnace temperature drops to a safe range. In other embodiments, multiple sets of the first receiving member 11 and the second receiving member 21 can be set to achieve simultaneous deposition of multiple graphite rings 9.

[0030] In this embodiment, the graphite ring deposition fixture is raised and lowered by the movable rod 2, allowing the graphite ring 9 to periodically and alternately contact the first receiving part 11 and the second receiving part 21. This dynamic change in the contact points between the graphite ring 9 and the first and second receiving parts 11 and 21 eliminates deposition obstruction caused by fixed contact, resulting in a better deposition effect. Compared with the molybdenum wire suspension technology, it occupies less space and can deposit other workpieces while depositing the graphite ring 9, making full use of the muffle space in the deposition furnace, increasing the single deposition throughput, and achieving high overall deposition efficiency.

[0031] Furthermore, in this embodiment, the fixed rod 1 and the movable rod 2 are arranged at intervals, and the first receiving member 11 and the second receiving member 21 are both located between the fixed rod 1 and the movable rod 2, with the first receiving member 11 and the second receiving member 21 being staggered from each other. During deposition, the graphite ring 9 can be deposited in the space between the fixed rod 1 and the movable rod 2, which can further improve space utilization and overall deposition efficiency; by staggering the first receiving member 11 and the second receiving member 21, collision between the first receiving member 11 and the second receiving member 21 can be prevented when the movable rod 2 is raised or lowered, resulting in a reasonable layout.

[0032] Furthermore, in this embodiment, a first clamp 12 is fitted onto the fixed rod 1, and a first receiving member 11 is disposed on the first clamp 12. A second clamp 22 is fitted onto the movable rod 2, and a second receiving member 21 is disposed on the second clamp 22. The first receiving member 11 is mounted on the fixed rod 1 via the first clamp 12, and the second receiving member 21 is mounted on the movable rod 2 via the second clamp 22, facilitating the replacement and position adjustment of the first receiving member 11 and the second receiving member 21.

[0033] Furthermore, in this embodiment, both the first receiving member 11 and the second receiving member 21 are horizontal screws. The first receiving member 11 is threadedly connected to the first clamp 12, and the second receiving member 21 is threadedly connected to the second clamp 22, which facilitates loading and unloading.

[0034] Furthermore, in this embodiment, the first clamp 12 and the second clamp 22 are formed by assembling a pair of detachable half clamps. The first clamp 12 and the second clamp 22 are formed by splicing, which facilitates the adjustment of the positions of the first clamp 12 and the second clamp 22 on the fixed rod 1 and the movable rod 2.

[0035] Furthermore, in this embodiment, both the first receiving component 11 and the second receiving component 21 are made of graphite. Compared to molybdenum wire, the graphite-made first receiving component 11 and second receiving component 21 exhibit significantly better high-temperature resistance and resistance to strong reducing atmospheres. They are less prone to brittle fracture in the furnace environment, thus reducing the frequency of consumable replacement and lowering production costs. Simultaneously, the graphite-made transverse screw has a lower risk of breakage than the molybdenum wire, avoiding furnace contamination and product scrap caused by breakage and falling parts, thereby improving production efficiency and stability. Of course, in other embodiments, the first receiving component 11 and the second receiving component 21 can also be made of carbon-carbon materials, which also possess the aforementioned advantages.

[0036] The specific deposition process is as follows: Clamping stage: Based on the size and quantity of the graphite rings 9 to be deposited, select the appropriate length of the first receiving part 11 and the second receiving part 21, screw the first receiving part 11 and the second receiving part 21 into the threaded holes of the first clamp 12 and the second clamp 22, and then hang the graphite rings 9 on the first receiving part 11 or the second receiving part 21 to complete the clamping. Deposition stage: Start the deposition furnace to bring the furnace to the high temperature and atmosphere conditions required for silicon carbide vapor deposition. At the same time, control the movable rod 2 to move up and down at a set cycle (e.g., once every 1-20 minutes) to ensure that the contact points between the graphite ring 9 and the first receiving part 11 and the second receiving part 21 change dynamically to achieve uniform deposition. Completion stage: After deposition is completed, wait for the temperature inside the furnace to drop to a safe range, then remove the graphite ring. At this point, the deposition layer on its surface is continuous and uniform, with no contact point defects.

[0037] Example 2: like Figures 1 to 3 As shown, the deposition furnace of this embodiment includes multiple graphite ring deposition fixtures from Embodiment 1.

[0038] In this embodiment, the deposition furnace is raised and lowered by the movable rod 2, allowing the graphite ring 9 to periodically and alternately contact the first receiving part 11 and the second receiving part 21. This dynamically changes the contact points between the graphite ring 9 and the first receiving part 11 and the second receiving part 21, eliminating deposition obstruction caused by fixed contact and resulting in good deposition effect. Compared with the molybdenum wire suspension technology, it occupies less space and can deposit other workpieces while depositing the graphite ring 9, making full use of the muffle space in the deposition furnace, increasing the single deposition throughput, and improving the overall deposition efficiency. The deposition furnace has multiple graphite ring deposition fixtures, further enhancing the deposition efficiency.

[0039] Furthermore, in this embodiment, the deposition furnace also includes a fixed top plate 31 and a fixed bottom plate 32. A movable plate 33, which can be raised and lowered, is provided below the fixed bottom plate 32. One end of the fixed rod 1 is connected to the fixed top plate 31, and the other end is connected to the fixed bottom plate 32. The lower end of the movable rod 2 passes through the fixed bottom plate 32 and is connected to the movable plate 33. Each graphite ring deposition fixture can be raised and lowered by the movable plate 33, resulting in a simple and reliable structure.

[0040] Furthermore, in this embodiment, the graphite ring deposition fixture is located at the edge of the fixed base plate 32, which allows space in the middle of the fixed base plate 32 to be used for deposition of other workpieces, resulting in higher space utilization and further improving the overall deposition efficiency.

[0041] Preferably, in this embodiment, multiple graphite ring deposition fixtures are arranged at intervals along the edge of the fixed base plate 32 (not shown in the figure), resulting in a compact structure and reasonable layout.

[0042] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model in any way. Although the present utility model has been disclosed above with reference to preferred embodiments, it is not intended to limit the present utility model. Any person skilled in the art can make many possible variations and modifications to the technical solution of the present utility model using the methods and techniques disclosed above, or modify it into equivalent embodiments with equivalent changes, without departing from the spirit and technical solution of the present utility model. Therefore, any simple modifications, equivalent substitutions, equivalent changes and modifications made to the above embodiments based on the technical essence of the present utility model without departing from the content of the technical solution of the present utility model shall still fall within the protection scope of the technical solution of the present utility model.

Claims

1. A graphite ring deposition fixture, characterized in that: The device includes a fixed rod (1) and a movable rod (2) that can be raised and lowered. The fixed rod (1) is provided with a first receiving part (11) for receiving a graphite ring (9), and the movable rod (2) is provided with a second receiving part (21) for receiving a graphite ring (9). When the movable rod (2) drives the second receiving part (21) to rise above the first receiving part (11), the graphite ring (9) is received on the second receiving part (21). When the movable rod (2) drives the second receiving part (21) to fall below the first receiving part (11), the graphite ring (9) is received on the first receiving part (11).

2. The graphite ring deposition fixture according to claim 1, characterized in that: The fixed rod (1) and the movable rod (2) are arranged at intervals. The first receiving part (11) and the second receiving part (21) are both located between the fixed rod (1) and the movable rod (2). The first receiving part (11) and the second receiving part (21) are staggered.

3. The graphite ring deposition fixture according to claim 1, characterized in that: The fixed rod (1) is fitted with a first clamp (12), and the first receiving part (11) is provided on the first clamp (12). The movable rod (2) is fitted with a second clamp (22), and the second receiving part (21) is provided on the second clamp (22).

4. The graphite ring deposition fixture according to claim 3, characterized in that: The first receiving part (11) and the second receiving part (21) are both horizontal screws. The first receiving part (11) is threadedly connected to the first clamp (12), and the second receiving part (21) is threadedly connected to the second clamp (22).

5. The graphite ring deposition fixture according to claim 3, characterized in that: The first clamp (12) and the second clamp (22) are formed by assembling a pair of detachable half clamps.

6. The graphite ring deposition fixture according to any one of claims 1 to 5, characterized in that: Both the first receiving component (11) and the second receiving component (21) are made of graphite.

7. The graphite ring deposition fixture according to any one of claims 1 to 5, characterized in that: Both the first receiving part (11) and the second receiving part (21) are made of carbon carbon material.

8. A deposition furnace, characterized in that: It includes at least one graphite ring deposition tooling as described in any one of claims 1 to 7.

9. The deposition furnace according to claim 8, characterized in that: The deposition furnace also includes a fixed top plate (31) and a fixed bottom plate (32). A movable plate (33) that can be raised and lowered is provided below the fixed bottom plate (32). One end of the fixed rod (1) is connected to the fixed top plate (31) and the other end is connected to the fixed bottom plate (32). The lower end of the movable rod (2) passes through the fixed bottom plate (32) and is connected to the movable plate (33).

10. The deposition furnace according to claim 9, characterized in that: The graphite ring deposition fixture is located at the edge of the fixed base plate (32).

Images