A single crystal furnace lid

Abstract

The utility model discloses a single crystal furnace furnace cover, including base, the upper end fixed assembly of base has single crystal furnace body, the upper end fixed assembly of single crystal furnace body has flange plate, four hoisting bolt structures evenly set up, guarantee the stability of single crystal furnace through base, process raw materials through single crystal furnace body, form the closed work space through the cooperation of furnace cover seat and top cap structure, maintain internal high temperature and high -purity argon environment, reduce heat loss and the invasion of outside impurity, through the effect of hoisting bolt structure, can fix together split type furnace cover, when needing single hoisting furnace cover seat and flange plate or top cap structure simultaneously, it is convenient to fix and cooperate hoisting equipment, only need to disassemble functional module when split type furnace cover maintenance, do not need integral hoisting, save maintenance time, convenient to use, and the practicality is strong, through the effect of top cap structure, change furnace cover insulating layer from traditional homogeneous thick layer to gradient function layer.

Description

Technical Field

[0001] This utility model relates to the field of single crystal furnace technology, specifically to a single crystal furnace cover. Background Technology

[0002] The furnace lid is one of the core components of the Czochralski method for growing single-crystal silicon. Located at the top of the furnace, it works with the furnace body and crucible lid to form a sealed chamber, maintaining a high internal temperature (usually 1400–1550°C) and a high-purity argon environment, reducing heat loss and the intrusion of external impurities (such as oxygen and moisture). Traditional furnace lids are integral structures (especially for large single-crystal furnaces, with diameters exceeding 1m), requiring overall hoisting and disassembly. Insulation materials (such as graphite felt) are prone to pulverization under prolonged heat, and replacement requires cleaning residual debris and reinstallation, which can take several hours and is time-consuming and labor-intensive. Utility Model Content

[0003] The purpose of this invention is to provide a single crystal furnace cover to solve the problems mentioned in the background art.

[0004] To achieve the above objectives, this utility model provides the following technical solution: a single crystal furnace cover, including a base, a single crystal furnace body fixedly mounted on the upper end of the base, a flange fixedly mounted on the upper end of the single crystal furnace body, another flange connected to the upper end of the flange by a screw, and a furnace cover seat fixedly mounted on the inner wall of the upper flange, and a top cover structure connected to the inner wall of the furnace cover seat by four lifting bolt structures, the four lifting bolt structures being evenly arranged.

[0005] Preferably, the lifting bolt structure includes a bolt that passes through the furnace cover seat and is screwed to the top cover structure. Rotary shafts are rotatably mounted on both sides of the bolt, and lifting rings are fixedly mounted on the outer walls of the two rotating shafts.

[0006] Preferably, the top cover structure includes a top cover shell, an Invar support layer is fixedly assembled on the inner wall of the top cover shell, a graphite felt layer is fitted onto the inner wall of the Invar support layer, a carbon composite material layer is adhered and fixed to the inner wall of the graphite felt layer, and the carbon composite material layer and the graphite felt layer are connected to the Invar support layer by five screws, one of which is located on the top and the remaining four screws are evenly distributed on the bottom.

[0007] Preferably, a tray is fixedly mounted on the lower inner wall of the furnace cover seat, and the top cover structure is snapped into the tray.

[0008] Compared with existing technologies, the advantages of this utility model are as follows: the base ensures the stability of the single crystal furnace; the furnace body processes raw materials; the combination of the furnace cover seat and the top cover structure forms a sealed working space, maintaining a high internal temperature and a high-purity argon gas environment, reducing heat loss and the intrusion of external impurities; the lifting bolt structure can fix the split furnace cover together; and when it is necessary to lift the furnace cover seat and flange or the top cover structure separately, it is convenient to fix them and cooperate with the lifting equipment; maintenance of the split furnace cover only requires disassembling the functional modules. No overall hoisting is required, saving maintenance time. It is easy to use and highly practical. Through the function of the top cover structure, the furnace cover insulation layer is changed from the traditional homogeneous thick layer to a gradient functional layer. The side near the furnace cavity uses a material with high reflectivity and low thermal conductivity (multi-layer carbon-carbon composite material with thermal conductivity <5W / (m·K). The middle layer is filled with high-purity graphite felt (thermal conductivity 10~15W / (m·K)) to buffer thermal shock. The outer side (contact surface with the furnace body) uses a low-expansion alloy (such as Invar) support structure to reduce thermal deformation. At the same time, it is assembled with screws, making disassembly and replacement convenient and quick. Attached Figure Description

[0009] Figure 1 This is a three-dimensional structural schematic diagram of the present invention;

[0010] Figure 2 This is a three-dimensional sectional view of the top cover structure of this utility model;

[0011] Figure 3 This is a three-dimensional schematic diagram of the lifting bolt structure;

[0012] Figure 4 This is a sectional view of the assembly plan of the furnace cover base and top cover structure.

[0013] In the diagram: 1-base, 2-single crystal furnace body, 3-flange, 4-furnace cover seat, 5-lifting bolt structure, 51-bolt, 52-rotating shaft, 53-lifting ring, 6-top cover structure, 61-top cover shell, 62-Invar support layer, 63-graphite felt layer, 64-carbon composite material layer, 65-screw, 7-pallet. Detailed Implementation

[0014] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0015] Please see Figure 1-4This utility model provides a single crystal furnace cover, including a base 1, a single crystal furnace body 2 fixedly assembled on the upper end of the base 1, a flange 3 fixedly assembled on the upper end of the single crystal furnace body 2, another flange 3 connected to the upper end of the flange 3 by a screw, and a furnace cover seat 4 fixedly assembled on the inner wall of the upper flange 3. A top cover structure 6 is connected to the inner wall of the furnace cover seat 4 by four lifting bolt structures 5, and the four lifting bolt structures 5 are evenly arranged.

[0016] The base 1 ensures the stability of the single crystal furnace, while the furnace body 2 processes the raw materials. The furnace cover seat 4 and top cover structure 6 work together to form a sealed working space, maintaining a high internal temperature and a high-purity argon gas environment, reducing heat loss and the intrusion of external impurities. The lifting bolt structure 5 secures the separate furnace covers together. It also facilitates the fixing of the furnace cover seat 4 and flange 3 or the top cover structure 6 when they need to be lifted separately, allowing for easy coordination with lifting equipment. Maintenance of the separate furnace cover only requires disassembling the functional modules; the entire furnace cover does not need to be lifted. It saves maintenance time, is easy to use, and is highly practical. Through the function of the top cover structure 6, the furnace cover insulation layer is changed from the traditional homogeneous thick layer to a gradient functional layer. The side near the furnace cavity uses a material with high reflectivity and low thermal conductivity (multi-layer carbon-carbon composite material with thermal conductivity <5W / (m·K). The middle layer is filled with high-purity graphite felt (thermal conductivity 10~15W / (m·K)) to buffer thermal shock. The outer side (contact surface with the furnace body) uses a low-expansion alloy (such as Invar) support structure to reduce thermal deformation. At the same time, it is easy and quick to disassemble and replace by screw assembly.

[0017] The lifting bolt structure 5 includes a bolt 51, which passes through the furnace cover seat 4 and is screwed to the top cover structure 6. Rotating shafts 52 are rotatably mounted on both sides of the bolt 51, and lifting rings 53 are fixedly mounted on the outer walls of the two rotating shafts 52.

[0018] When the top cover structure 6 is inserted into the furnace cover seat 4, it is fixed around the perimeter by bolts 51. When the furnace cover seat 4 needs to be hoisted, it is removed and the furnace cover seat 4 is separated from the top cover structure 6 and fixed separately on the furnace cover seat 4. The components are hoisted by bending the lifting ring 53. Similarly, the top cover structure 6 can also be hoisted.

[0019] The top cover structure 6 includes a top cover shell 61. An Invar support layer 62 is fixedly assembled on the inner wall of the top cover shell 61. A graphite felt layer 63 is attached to the inner wall of the Invar support layer 62. A carbon composite material layer 64 is adhered and fixed to the inner wall of the graphite felt layer 63. The carbon composite material layer 64 and the graphite felt layer 63 are connected to the Invar support layer 62 by five screws 65, one of which is located on the top and the remaining four screws 65 are evenly distributed on the bottom.

[0020] The furnace cover insulation layer is changed from the traditional homogeneous thick layer to a gradient functional layer. The side near the furnace cavity uses a carbon composite material layer 64 with high reflectivity and low thermal conductivity (thermal conductivity <5W / (m·K). The middle layer is filled with a high-purity graphite felt layer 63 (thermal conductivity 10~15W / (m·K)) to buffer thermal shock. The outer side (the surface in contact with the furnace body) uses a low-expansion alloy Invar support layer 62 to support the structure and reduce thermal deformation. At the same time, it is assembled with screws 65, making disassembly and replacement convenient and quick.

[0021] A tray 7 is fixedly mounted on the lower inner wall of the furnace cover seat 4, and the top cover structure 6 is snapped into the tray 7.

[0022] The tray 7 serves to support the top cover structure 6.

[0023] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A furnace cover for a single crystal furnace, characterized in that: Includes a base (1), on the upper end of which a single crystal furnace body (2) is fixedly mounted, and on the upper end of which a flange (3) is fixedly mounted, and on the upper end of which another flange (3) is connected by a screw, and on the inner wall of the upper flange (3) a furnace cover seat (4) is fixedly mounted, and on the inner wall of which a top cover structure (6) is connected by four lifting bolt structures (5), and the four lifting bolt structures (5) are evenly arranged.

2. The furnace cover for a single crystal furnace according to claim 1, characterized in that: The lifting bolt structure (5) includes a bolt (51), which passes through the furnace cover seat (4) and is screwed to the top cover structure (6). Rotating shafts (52) are rotatably mounted on both sides of the bolt (51), and lifting rings (53) are fixedly mounted on the outer walls of the two rotating shafts (52).

3. The furnace cover for a single crystal furnace according to claim 1, characterized in that: The top cover structure (6) includes a top cover shell (61), an Invar support layer (62) is fixedly assembled on the inner wall of the top cover shell (61), a graphite felt layer (63) is attached to the inner wall of the Invar support layer (62), a carbon composite material layer (64) is adhered and fixed to the inner wall of the graphite felt layer (63), and the carbon composite material layer (64) and the graphite felt layer (63) are connected to the Invar support layer (62) by five screws (65), one of the screws (65) is located on the top, and the remaining four screws (65) are evenly arranged on the bottom.

4. A single-crystal furnace cover according to claim 1, characterized in that: A tray (7) is fixedly mounted on the lower inner wall of the furnace cover seat (4), and the top cover structure (6) is snapped into the tray (7).

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