A feeder for Czochralski single crystal production

Abstract

This utility model belongs to the field of single crystal preparation technology, specifically a feeder for Czochralski single crystal production, including a feeding tube; a cover is fixedly connected to the top of the feeding tube; a crushing chamber is fixedly connected to the top of the cover; a feed inlet is opened on one side of the crushing chamber; a set of first rotary motors is installed on one side of the crushing chamber; blades are fixedly connected to the output end of the first rotary motors; a cylinder is installed on the top of the crushing chamber; a pressure plate is fixedly connected to the output end of the cylinder; a set of inclined plates is fixedly connected to the inner wall of the crushing chamber; the inclined plates are set above the blades; the first rotary motor drives the blades to cut, and the cylinder pushes the pressure plate to squeeze the silicon material, realizing the coordinated crushing of cutting and squeezing, increasing the crushing efficiency of silicon material. The inclined plates guide the silicon material to fall between the blades, which can reduce silicon material accumulation or deviation, increase crushing uniformity, reduce large pieces of silicon material from entering the single crystal furnace directly from both sides of the blades, and increase the production quality and stability of the single crystal furnace.

Description

Technical Field

[0001] This utility model relates to the field of single crystal preparation technology, specifically a feeder for Czochralski single crystal production. Background Technology

[0002] Czochralski crystals are single-crystal silicon grown using the Czochralski method. Their atoms are arranged continuously in a periodically ordered lattice, without grain boundaries, and exhibit excellent electrical properties. This method involves contacting a seed crystal with a silicon melt and, through steps such as crystal pulling, shoulder formation, and constant-diameter growth, allowing silicon atoms to grow in an orderly manner along the seed crystal lattice to form a single crystal. As a core raw material for the semiconductor and photovoltaic industries, Czochralski crystals are widely used in the manufacture of chips, solar cells, and other products due to their high purity and structural integrity.

[0003] During the production of Czochralski single crystals, a certain amount of high-purity polycrystalline silicon material is pre-stored in the storage device of the feeder. Then, according to the production process requirements, the control system triggers the feeding action, and the silicon material is transported from the storage device to the feeding channel through pushing, vibration or spiral conveying. The silicon material falls accurately into the high-temperature quartz crucible through the feeding channel, completing the feeding process.

[0004] When silicon melts, the temperature difference between the inside and the surface of a large piece of silicon can lead to local overheating or incomplete melting, resulting in impurity precipitation or crystal defects. Therefore, a feeder for Czochralski single crystal production is proposed to address the above problems. Utility Model Content

[0005] In order to overcome the shortcomings of the prior art, at least one technical problem raised in the background art is solved.

[0006] The technical solution adopted by this utility model to solve its technical problem is as follows: A feeder for Czochralski single crystal production includes a feed tube; a set of support legs are fixedly connected to the surface of the feed tube; a set of universal wheels are installed at the bottom of the support legs; a cover is fixedly connected to the top of the feed tube; a crushing chamber is fixedly connected to the top of the cover; a feed inlet is opened on one side of the crushing chamber; a first rotary motor is installed on one side of the crushing chamber; a blade is fixedly connected to the output end of the first rotary motor; a cylinder is installed on the top of the crushing chamber; a pressure plate is fixedly connected to the output end of the cylinder; the pressure plate is set inside the crushing chamber; a set of inclined plates is fixedly connected to the inner wall of the crushing chamber; the inclined plates are set above the blades; the first rotary motor drives the blades to cut, and the cylinder pushes the pressure plate to squeeze the silicon material, achieving coordinated crushing of cutting and squeezing, increasing the silicon material crushing efficiency, reducing debris splashing, and the inclined plates guiding the silicon material into the space between the blades can reduce silicon material accumulation or deviation, increase crushing uniformity, reduce large pieces of silicon material from directly entering the single crystal furnace from both sides of the blades, and increase the production quality and stability of the single crystal furnace.

[0007] Preferably, a gear ring is rotatably connected to the bottom of the feeding tube; an expansion cylinder is threadedly connected to the middle of the gear ring; the inner wall of the feeding tube is threaded; a discharge tube is fixedly connected to the bottom of the expansion cylinder; a support plate is fixedly connected to one side of the feeding tube; a second rotary motor is installed on the top of the support plate; a transmission wheel is fixedly connected to the output end of the second rotary motor; the transmission wheel and the gear ring are meshed; the second rotary motor drives the transmission wheel to rotate the gear ring, causing the expansion cylinder to move up and down along the threaded inner wall of the feeding tube, allowing the discharge tube to reach the bottom of the crucible in the single crystal furnace. This reduces the splashing of silicon material out of the crucible when it falls from a height, thus reducing material waste. The threaded structure allows the expansion cylinder to extend and retract, adapting to different crucible depths, reducing replacement costs, and improving versatility.

[0008] Preferably, a ventilation opening is provided on one side of the crushing chamber; the ventilation opening is correspondingly arranged to the feed inlet; a filter screen is fixedly connected to the middle of the ventilation opening; an air pipe is fixedly connected to one side of the crushing chamber; the air pipe is correspondingly arranged to the filter screen; a dust removal device is connected through the air pipe to directly remove the dust generated during the crushing of silicon material in the crushing chamber, reducing the amount of dust entering the single crystal furnace with the silicon material, thereby reducing the impact on the purity of the silicon material. The corresponding arrangement of the ventilation opening and the feed inlet can reduce the pollution of the surrounding environment caused by dust overflowing from the feed inlet. The filter screen in the middle of the ventilation opening intercepts smaller silicon material particles, allowing them to continue to participate in the subsequent crushing or feeding process, improving the overall utilization rate of raw materials.

[0009] Preferably, a guide plate is fixed to one side of the crushing chamber; the guide plate is correspondingly set to the feed inlet; the guide plate is inclined; by the inclined setting of the guide plate and the partial wrapping of the feed inlet, the silicon material is placed on the surface of the guide plate and slides down the inclined surface to the feed inlet by gravity, which reduces the difficulty of alignment when feeding and increases the feeding speed. The partial wrapping of the feed inlet by the guide plate forms a structure similar to a flow guide, which increases the dust removal efficiency.

[0010] Preferably, a baffle is fixed to the top of the feeding pipe; the baffle is arranged in a ring; the baffle is inclined; by the ring-shaped inclined arrangement of the baffle, the crushed silicon material is gathered towards the center along its inclined surface, reducing the direct impact of silicon material on or getting stuck in the threaded part of the inner wall of the feeding pipe, reducing the frequency of downtime for cleaning, and increasing the continuity of processing.

[0011] Preferably, a fixing ring is fixedly connected to the bottom of the discharge pipe; a set of comb teeth is fixedly connected to the surface of the fixing ring; the comb teeth are symmetrically arranged; when the crucible rotates, the comb teeth push the silicon material to spread in all directions, reducing the uneven accumulation of silicon material in a certain area due to gravity when it enters the crucible, so that the silicon material is evenly distributed in the crucible, reducing the situation of excessively thick or thin local areas, and increasing the uniformity of silicon material distribution in the crucible.

[0012] The advantages of this utility model are: 1. The feeder for Czochralski single crystal production described in this utility model uses a first rotary motor to drive the blades to cut, and a cylinder to push the pressure plate to squeeze the silicon material, thereby achieving coordinated crushing of cutting and squeezing, increasing the crushing efficiency of silicon material, reducing debris splashing, and a set of inclined plates to guide the silicon material to fall between the blades, which can reduce silicon material accumulation or deviation, increase crushing uniformity, reduce large pieces of silicon material from entering the single crystal furnace directly from both sides of the blades, and increase the production quality and stability of the single crystal furnace.

[0013] 2. The feeder for Czochralski single crystal production described in this utility model uses a second rotary motor to drive a transmission wheel, which in turn drives a gear ring to rotate. This causes the expansion cylinder to move up and down along the inner wall thread of the feeding tube, allowing the discharge tube to reach the bottom of the crucible inside the single crystal furnace. This reduces the amount of silicon material splashing out of the crucible when it falls from a height, thus preventing material waste. The threaded structure enables the expansion cylinder to extend and retract, adapting to different crucible depths, reducing replacement costs, and improving versatility. Attached Figure Description

[0014] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0015] Figure 1 This is a schematic diagram of the main body of this utility model; Figure 2 This is a schematic diagram of the feeding tube in this utility model; Figure 3 This is a schematic diagram of the crushing chamber in this utility model; Figure 4 This is a schematic diagram of the structure of the baffle in this utility model; Figure 5 This is a schematic diagram of the expansion tube in this utility model.

[0016] In the diagram: 1. Feeding pipe; 11. Support leg; 12. Caster wheel; 13. Cover; 14. Crushing chamber; 15. Feed inlet; 16. First rotary motor; 17. Blade; 18. Cylinder; 19. Pressure plate; 110. Inclined plate; 2. Gear ring; 21. Expansion cylinder; 22. Discharge pipe; 23. Support plate; 24. Second rotary motor; 25. Drive wheel; 3. Ventilation port; 31. Filter screen; 32. Air pipe; 4. Guide plate; 5. Baffle; 6. Fixing ring; 61. Comb teeth. Detailed Implementation

[0017] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present utility model.

[0018] Specific implementation examples are given below.

[0019] like Figures 1 to 3 As shown in the embodiment of this utility model, a feeder for Czochralski single crystal production includes a feeding tube 1; a set of support legs 11 are fixedly connected to the surface of the feeding tube 1; a set of universal wheels 12 are installed at the bottom of the support legs 11; a cover 13 is fixedly connected to the top of the feeding tube 1; a crushing chamber 14 is fixedly connected to the top of the cover 13; a feed inlet 15 is opened on one side of the crushing chamber 14; a set of first rotary motors 16 are installed on one side of the crushing chamber 14; a blade 17 is fixedly connected to the output end of the first rotary motor 16; a cylinder 18 is installed on the top of the crushing chamber 14; a pressure plate 19 is fixedly connected to the output end of the cylinder 18; the pressure plate 19 is set inside the crushing chamber 14; a set of inclined plates 110 are fixedly connected to the inner wall of the crushing chamber 14; the inclined plates 110 are set above the blades 17; during operation, the feeding tube 1 is pushed to rotate the universal wheels 12. The feeding pipe 1 is moved above the single crystal furnace, and the first rotary motor 16 is turned on to drive the blades 17 to rotate. Silicon material is fed in through the feed port 15 and slides down the inclined plate 110 between a set of blades 17. The first rotary motor 16 and the blades 17 work together to crush the silicon material. The cylinder 18 is controlled to extend and retract, pushing the pressure plate 19 to squeeze the silicon material. The crushed silicon material falls into the single crystal furnace through the feeding pipe 1. The first rotary motor 16 drives the blades 17 to cut the silicon material, and the cylinder 18 pushes the pressure plate 19 to squeeze the silicon material, achieving coordinated crushing of cutting and squeezing, increasing the silicon material crushing efficiency, reducing debris splashing, and the inclined plate 110 guides the silicon material to fall between the blades 17 to reduce silicon material accumulation or deviation, increase crushing uniformity, and reduce large pieces of silicon material from directly entering the single crystal furnace from both sides of the blades 17, thereby increasing the production quality and stability of the single crystal furnace.

[0020] like Figures 1 to 5As shown, a gear ring 2 is rotatably connected to the bottom of the feeding pipe 1; an expansion cylinder 21 is threadedly connected to the middle of the gear ring 2; the inner wall of the feeding pipe 1 is threaded; a discharge pipe 22 is fixedly connected to the bottom of the expansion cylinder 21; a support plate 23 is fixedly connected to one side of the feeding pipe 1; a second rotary motor 24 is mounted on the top of the support plate 23; a transmission wheel 25 is fixedly connected to the output end of the second rotary motor 24; the transmission wheel 25 and the gear ring 2 are meshed; during operation, after the silicon material is crushed, the second rotary motor 24 is controlled so that its output end drives the transmission wheel 25 to rotate, and the transmission wheel 25 drives the gear ring 2 to rotate. The expansion cylinder 21 moves up and down, positioning the discharge pipe 22 at the bottom of the crucible inside the single crystal furnace. A valve is installed inside the discharge pipe 22; opening the valve allows the crushed silicon material to pass through the discharge pipe 22 into the crucible. A second rotary motor 24 drives the transmission wheel 25, which in turn rotates the gear ring 2, causing the expansion cylinder 21 to move up and down along the inner thread of the feeding pipe 1, allowing the discharge pipe 22 to reach the bottom of the crucible inside the single crystal furnace. This reduces the amount of silicon material splashing out of the crucible when falling from a height, thus minimizing material waste. The threaded structure allows the expansion cylinder 21 to extend and retract, adapting to different crucible depths, reducing replacement costs, and improving versatility.

[0021] like Figures 1 to 3 As shown, a ventilation opening 3 is provided on one side of the crushing chamber 14; the ventilation opening 3 is correspondingly set with the feed inlet 15; a filter screen 31 is fixedly connected to the middle of the ventilation opening 3; an air pipe 32 is fixedly connected to one side of the crushing chamber 14; the air pipe 32 is correspondingly set with the filter screen 31; during operation, the end of the air pipe 32 is connected to a dust removal device, and the dust removal device is turned on to remove the dust generated by crushing inside the crushing chamber 14. The filter screen 31 intercepts smaller silicon materials, reducing the amount that is sucked away with the airflow. The dust generated when crushing silicon materials in the crushing chamber 14 is directly sucked away through the air pipe 32, reducing the amount of dust that enters the single crystal furnace with the silicon materials, thereby reducing the impact on the purity of the silicon materials. The ventilation opening 3 is correspondingly set with the feed inlet 15, which can reduce the amount of dust that overflows from the feed inlet 15 and causes pollution to the surrounding environment. The filter screen 31 in the middle of the ventilation opening 3 intercepts smaller silicon material particles, allowing them to continue to participate in the subsequent crushing or feeding process, improving the overall utilization rate of raw materials.

[0022] like Figures 1 to 3 As shown, a guide plate 4 is fixedly connected to one side of the crushing chamber 14; the guide plate 4 is correspondingly set with the feed inlet 15; the guide plate 4 is inclined; during operation, the guide plate 4 partially wraps around the feed inlet 15, with its lower end connected to the feed inlet 15. Silicon material is placed on the surface of the guide plate 4 and then slides down its inclined surface to the crushing zone. By using the inclined setting of the guide plate 4 and partially wrapping around the feed inlet 15, the silicon material is placed on the surface of the guide plate 4 and slides down its inclined surface to the feed inlet 15 with the help of gravity, reducing the difficulty of alignment during feeding and increasing the feeding speed. The guide plate 4 partially wraps around the feed inlet 15 to form a structure similar to a flow guide, which increases the dust removal efficiency.

[0023] like Figure 4 As shown, a baffle 5 is fixed to the top of the feeding pipe 1; the baffle 5 is arranged in a ring; the baffle 5 is inclined; during operation, when the crushed silicon material falls into the interior of the expansion cylinder 21, it moves along the inclined surface of the baffle 5 towards the center and then falls, reducing the contact with the threaded part of the inner wall of the feeding pipe 1 during the fall and causing jamming. By the annular inclined arrangement of the baffle 5, the crushed silicon material is gathered towards the center along its inclined surface, reducing the direct impact of the silicon material on or getting stuck in the threaded part of the inner wall of the feeding pipe 1, reducing the frequency of downtime for cleaning, and increasing the continuity of processing.

[0024] like Figure 1 , Figure 2 and Figure 5 As shown, a fixing ring 6 is fixedly connected to the bottom of the discharge pipe 22; a set of comb teeth 61 is fixedly connected to the surface of the fixing ring 6; the comb teeth 61 are symmetrically arranged; during operation, after the silicon material enters the crucible, the crucible is rotated, and the comb teeth 61 push the silicon material to move, making it flat and reducing the gaps between the silicon materials. When the crucible rotates, the comb teeth 61 push the silicon material to spread in all directions, reducing the uneven accumulation of silicon material in a certain area due to gravity when it enters the crucible, so that the silicon material is evenly distributed in the crucible, reducing the situation of excessively thick or thin local areas, and increasing the uniformity of silicon material distribution in the crucible.

[0025] Working principle: By pushing the feeding pipe 1 to rotate the universal wheel 12, the feeding pipe 1 is moved above the single crystal furnace. The first rotary motor 16 is turned on, causing the blades 17 to rotate. Silicon material is fed in from the feed port 15, sliding down the inclined plate 110 between a set of blades 17. The first rotary motor 16 and the blades 17 work together to crush the silicon material. The cylinder 18 is controlled to extend and retract, pushing the pressure plate 19 to squeeze the silicon material. The crushed silicon material falls into the single crystal furnace through the feeding pipe 1. After crushing the silicon material, the second rotary motor 24 is controlled, causing its output end to drive the transmission wheel 25 to rotate. The transmission wheel 25 drives the gear ring 2 to rotate, realizing the up and down movement of the expansion cylinder 21, so that the discharge pipe 22 is at the bottom of the crucible in the single crystal furnace. The unit is equipped with a valve. Opening the valve allows the crushed silicon material to enter the crucible through the discharge pipe 22. The end of the air pipe 32 is connected to the dust removal device. Activating the dust removal device removes the dust generated during crushing inside the crushing chamber 14. The filter screen 31 intercepts smaller silicon materials, reducing their removal by airflow. The guide plate 4 partially encloses the feed inlet 15, with its lower end connected to the feed inlet 15. The silicon material is placed on the surface of the guide plate 4 and then slides down its slope into the crushing zone. When the crushed silicon material falls into the expansion cylinder 21, it moves along the inclined surface of the baffle 5 towards the center before falling, reducing the risk of jamming due to contact with the threaded part of the inner wall of the feed pipe 1. After the silicon material enters the crucible, the crucible is rotated, and the comb teeth 61 push the silicon material to move, making it flat and reducing the gaps between the silicon materials.

[0026] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed utility model.

Claims

1. A feeder for Czochralski single crystal production, characterized in that: The device includes a feeding pipe (1); a set of support legs (11) are fixedly connected to the surface of the feeding pipe (1); a set of casters (12) are installed at the bottom of the support legs (11); a cover (13) is fixedly connected to the top of the feeding pipe (1); a crushing chamber (14) is fixedly connected to the top of the cover (13); a feed inlet (15) is opened on one side of the crushing chamber (14); a set of first rotary motors (16) is installed on one side of the crushing chamber (14); a blade (17) is fixedly connected to the output end of the first rotary motor (16); a cylinder (18) is installed on the top of the crushing chamber (14); a pressure plate (19) is fixedly connected to the output end of the cylinder (18); the pressure plate (19) is set inside the crushing chamber (14); a set of inclined plates (110) is fixedly connected to the inner wall of the crushing chamber (14); the inclined plates (110) are set above the blades (17).

2. The feeder for Czochralski single crystal production according to claim 1, characterized in that: The bottom of the feeding pipe (1) is rotatably connected to a gear ring (2); the middle of the gear ring (2) is threadedly connected to an expansion cylinder (21); the inner wall of the feeding pipe (1) is threaded; the bottom of the expansion cylinder (21) is fixedly connected to a discharge pipe (22); a support plate (23) is fixedly connected to one side of the feeding pipe (1); a second rotary motor (24) is installed on the top of the support plate (23); a transmission wheel (25) is fixedly connected to the output end of the second rotary motor (24); the transmission wheel (25) and the gear ring (2) are meshed.

3. The feeder for Czochralski single crystal production according to claim 2, characterized in that: A ventilation opening (3) is provided on one side of the crushing chamber (14); the ventilation opening (3) and the feed inlet (15) are correspondingly arranged; a filter screen (31) is fixedly connected to the middle of the ventilation opening (3); an air pipe (32) is fixedly connected to one side of the crushing chamber (14); the air pipe (32) and the filter screen (31) are correspondingly arranged.

4. A feeder for Czochralski single crystal production according to claim 3, characterized in that: A guide plate (4) is fixedly connected to one side of the crushing chamber (14); the guide plate (4) is correspondingly set with the feed inlet (15); the guide plate (4) is inclined.

5. A feeder for Czochralski single crystal production according to claim 4, characterized in that: The top of the feeding pipe (1) is fixedly connected to a baffle (5); the baffle (5) is arranged in a ring; the baffle (5) is arranged at an angle.

6. A feeder for Czochralski single crystal production according to claim 5, characterized in that: The bottom of the discharge pipe (22) is fixedly connected to a fixing ring (6); a set of comb teeth (61) is fixedly connected to the surface of the fixing ring (6); the comb teeth (61) are symmetrically arranged.

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