A single crystal furnace crystal stabilizing device
Patent Information
- Application Number
- CN202521823710.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-08-26
- Publication Date
- 2026-09-01
- Estimated Expiration
- 2035-08-26
AI Technical Summary
[0003]现有的部分稳晶方式,是先通过打开观察窗,将稳晶拍移动至籽晶下侧,通过稳晶拍内侧的槽对籽晶进行限位支撑,使得籽晶不会继续晃动,但这个过程中,需要观察窗一直打开,导致外侧杂质易进入副室内侧,影响籽晶的生产质量,降低装置的实用性;因此,针对上述问题提出一种单晶炉稳晶装置
1.本实用新型通过设置支撑块、稳晶拍、滑槽、滑块和活动板,先吊起籽晶至合适高度,通过活动板推动滑块在滑槽内侧滑动支撑,使得滑块能够推起稳晶拍转动至与窗框垂直,此时再将籽晶放置在稳晶拍内侧进行限位,使得其不再继续晃动,并在使用后,拉动活动板外移,使得滑块拉动稳晶拍向下转动至靠近窗框,进而使得稳晶拍不会对籽晶后续的拉直升起产生限制,且在活动板收纳至靠近窗框时,活动板不会与滑块完全垂直,而是具有一定倾斜角度,以便于其后续推起时能够减少滑块受到的阻力,并因装置使用时,无需打开窗框,使得外侧杂质不易进入副室内侧导致籽晶受到污染,提高了装置使用的稳定性;
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Figure CN224704729U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of Czochralski single crystal technology, specifically a single crystal furnace crystal stabilization device. Background Technology
[0002] The single crystal furnace can automatically select and load the auxiliary chamber and automatically raise and lower the seed crystal. The auxiliary chamber is usually rotated to return to its position. Since the tungsten wire rope is connected to the weight, chuck and seed crystal, the rotation of the auxiliary chamber will cause the weight, chuck and seed crystal to swing. In order to prevent the seed crystal from swinging and affecting its subsequent molding, it is necessary to limit the seed crystal so that it no longer shakes.
[0003] Existing methods for stabilizing crystals involve opening the observation window and moving the stabilizing plate to the underside of the seed crystal. The seed crystal is then supported and limited by the grooves on the inner side of the stabilizing plate, preventing it from shaking. However, this process requires the observation window to remain open, which allows impurities from the outside to easily enter the inner side of the auxiliary chamber, affecting the production quality of the seed crystal and reducing the practicality of the device. Therefore, a single crystal furnace stabilizing device is proposed to address the above problems. Utility Model Content
[0004] In order to overcome the shortcomings of the prior art, at least one technical problem raised in the background art is solved.
[0005] The technical solution adopted by this utility model to solve its technical problem is as follows: A single crystal furnace stabilizing device of this utility model includes a window frame, a glass plate fixedly connected to the inner side of the window frame, a support block fixedly connected to the inner side of the window frame, a stabilizing plate rotatably connected to the inner side of the support block, a sliding groove formed on the inner side of the stabilizing plate, a slider slidably connected to the inner side of the sliding groove, and a movable plate rotatably connected to the inner side of the slider. The movable plate and the window frame are slidably connected. This step, by setting up the support block, stabilizing plate, sliding groove, slider, and movable plate, first hoists the seed crystal to a suitable height, and then pushes the slider to slide and support it within the sliding groove through the movable plate, allowing the slider to push... The stabilizing plate is rotated until it is perpendicular to the window frame. At this point, the seed crystal is placed inside the stabilizing plate for limiting its movement, preventing further wobbling. After use, the movable plate is pulled outward, causing the slider to pull the stabilizing plate downward and closer to the window frame. This ensures that the stabilizing plate does not restrict the subsequent straightening and lifting of the seed crystal. When the movable plate is retracted close to the window frame, it is not completely perpendicular to the slider but has a certain tilt angle, which reduces the resistance encountered by the slider when it is pushed up later. Since the window frame does not need to be opened during use, external impurities are less likely to enter the inner side of the sub-chamber and contaminate the seed crystal, thus improving the stability of the device.
[0006] Preferably, the inner side of the crystal stabilizer is provided with a slot, and the inner side of the support block is slidably connected with an insert block. The slot and the insert block are used in conjunction. This step, by setting the slot and the insert block, allows the insert block to be inserted into the slot at different positions when the crystal stabilizer supports the seed crystal or when the crystal stabilizer is rotated to be stored near the window frame. This further restricts and fixes the position of the crystal stabilizer, making its storage or support more stable and improving the stability of the device.
[0007] Preferably, the surface of the movable plate is provided with a reinforcing groove, a support rod is fixedly connected to the outside of the window frame, a spring is fixedly connected to one end of the support rod, and a reinforcing plate is fixedly connected to the output end of the spring. The reinforcing plate and the reinforcing groove work together. This step, by setting up the reinforcing groove, support rod, spring, and reinforcing plate, ensures that when the crystal stabilizer supports the seed crystal or rotates to be close to the window frame for storage, the movable plate will move synchronously. After the movable plate moves, the reinforcing groove will align with the protruding part of one end of the reinforcing plate. At this time, under the push of the spring, the protruding part of one end of the reinforcing plate will insert into the inside of the reinforcing groove, thereby further restricting and fixing the position of the movable plate. This allows the movable plate to further restrict and fix the position of the slider and the crystal stabilizer, improving the stability of the device.
[0008] Preferably, an extension plate is fixedly connected to the upper side of the reinforcing plate, and a through groove is formed on the surface of the insert block. The through groove and the extension plate are slidably connected. This step, by setting the extension plate and the through groove, allows the reinforcing plate to be inserted into the reinforcing groove after the insert block is inserted into the slot, thereby causing the extension plate to move downward and one end of the extension plate to be inserted into the through groove. This further restricts and fixes the position of the insert block, thereby further improving the stability of the device.
[0009] Preferably, a guide block is fixedly connected to the upper side of the crystal stabilizing paddle, and an inclined surface is provided on one side of the guide block. This step, by setting the guide block and the inclined surface, allows the inclined surface of the guide block to guide the seed crystal when it is placed on the upper side of the crystal stabilizing paddle, so that the seed crystal can be aligned with the groove on the surface of the crystal stabilizing paddle, making the centering and positioning of the seed crystal more convenient and stable, and improving the stability of the device.
[0010] Preferably, an inclined plate is fixedly connected to the inner side of the window frame, and the inclined plate is used in conjunction with the crystal stabilizer. This step, by setting the inclined plate, allows the crystal stabilizer to contact the inclined plate when it is stored close to the window frame, so that the inclined plate can easily support the stored crystal stabilizer at a certain angle, thereby making the storage position and angle of the crystal stabilizer more stable and improving the stability of the device.
[0011] The advantages of this utility model are: 1. This utility model, by setting up a support block, a crystal stabilizer, a chute, a slider, and a movable plate, first lifts the seed crystal to a suitable height. The movable plate pushes the slider to slide and support it inside the chute, allowing the slider to push the crystal stabilizer to rotate perpendicular to the window frame. At this point, the seed crystal is placed inside the crystal stabilizer for limiting its movement, preventing further wobbling. After use, the movable plate is pulled outward, causing the slider to pull the crystal stabilizer downward and rotate it closer to the window frame. This ensures that the crystal stabilizer does not restrict the subsequent straightening and lifting of the seed crystal. When the movable plate is retracted to near the window frame, it is not completely perpendicular to the slider but has a certain tilt angle, which reduces the resistance encountered by the slider when it is pushed up later. Since the window frame does not need to be opened during use, external impurities are less likely to enter the inner side of the sub-chamber and contaminate the seed crystal, thus improving the stability of the device. 2. By setting slots and inserts, this utility model allows for the insertion of sliding inserts into slots at different positions when the crystal stabilizer supports the seed crystal or when the crystal stabilizer is rotated to be stored near the window frame. This further restricts and fixes the position of the crystal stabilizer, making its storage or support more stable and improving the stability of the device. Attached Figure Description
[0012] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0013] Figure 1 This is a front view of the three-dimensional structure of this utility model; Figure 2 This is a side view of the three-dimensional structure of this utility model; Figure 3 This is a schematic diagram of the stable crystal beater structure of this utility model; Figure 4 This is a schematic diagram of the support block structure in this utility model; Figure 5 This is a schematic diagram of the stable crystal plate and support block structure of this utility model.
[0014] In the diagram: 1. Window frame; 2. Glass plate; 3. Support block; 4. Stabilizer; 5. Slide groove; 6. Slider; 7. Movable plate; 8. Slot; 9. Insert block; 10. Reinforcing groove; 11. Support rod; 12. Spring; 13. Reinforcing plate; 14. Extension plate; 15. Through groove; 16. Guide block; 17. Inclined surface; 18. Inclined plate. Detailed Implementation
[0015] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present utility model.
[0016] Specific implementation examples are given below.
[0017] Please see Figures 1 to 5 As shown, a single crystal furnace crystal stabilizing device includes a window frame 1, a glass plate 2 fixedly connected to the inner side of the window frame 1, a support block 3 fixedly connected to the inner side of the window frame 1, a crystal stabilizing plate 4 rotatably connected to the inner side of the support block 3, a sliding groove 5 formed on the inner side of the crystal stabilizing plate 4, a slider 6 slidably connected to the inner side of the sliding groove 5, and a movable plate 7 rotatably connected to the inner side of the slider 6. The movable plate 7 is slidably connected to the window frame 1. This step, by setting up the support block 3, the crystal stabilizing plate 4, the sliding groove 5, the slider 6, and the movable plate 7, first lifts the seed crystal to a suitable height. The movable plate 7 then pushes the slider 6 to slide and support it within the sliding groove 5, allowing the slider 6 to push the crystal stabilizing plate 4 to rotate to a suitable height. Perpendicular to the window frame 1, the seed crystal is then placed inside the stabilizing plate 4 for limiting its movement, preventing further wobbling. After use, the movable plate 7 is pulled outward, causing the slider 6 to pull the stabilizing plate 4 downward and rotate it closer to the window frame 1. This ensures that the stabilizing plate 4 does not restrict the subsequent straightening and lifting of the seed crystal. When the movable plate 7 is retracted close to the window frame 1, it is not completely perpendicular to the slider 6, but has a certain tilt angle, which reduces the resistance encountered by the slider 6 when it is pushed up. Since the window frame 1 does not need to be opened during use, external impurities are less likely to enter the inner side of the sub-chamber and contaminate the seed crystal, thus improving the stability of the device.
[0018] Furthermore, such as Figure 3 and Figure 4 As shown, the inner side of the crystal stabilizer 4 is provided with a slot 8, and the inner side of the support block 3 is slidably connected with an insert 9. The slot 8 and the insert 9 are used in conjunction. This step, by setting the slot 8 and the insert 9, allows the crystal stabilizer 4 to support the seed crystal or rotate to be stored near the window frame 1. The insert 9 can be inserted into the slot 8 at different positions to further restrict and fix the position of the crystal stabilizer 4, making its storage or support more stable and improving the stability of the device.
[0019] Furthermore, such as Figure 5As shown, the movable plate 7 has a reinforcing groove 10 on its surface. A support rod 11 is fixedly connected to the outside of the window frame 1. A spring 12 is fixedly connected to one end of the support rod 11. A reinforcing plate 13 is fixedly connected to the output end of the spring 12. The reinforcing plate 13 and the reinforcing groove 10 work together. This step, by setting the reinforcing groove 10, support rod 11, spring 12 and reinforcing plate 13, ensures that when the crystal stabilizer 4 supports the seed crystal or rotates to be close to the window frame 1 for storage, the movable plate 7 will move synchronously. After the movable plate 7 moves, the reinforcing groove 10 will align with the protruding part of one end of the reinforcing plate 13. At this time, under the push of the spring 12, the protruding part of one end of the reinforcing plate 13 will insert into the inside of the reinforcing groove 10, thereby further restricting and fixing the position of the movable plate 7. This allows the movable plate 7 to further restrict and fix the positions of the slider 6 and the crystal stabilizer 4, improving the stability of the device.
[0020] Furthermore, such as Figure 4 and Figure 5 As shown, an extension plate 14 is fixedly connected to the upper side of the reinforcing plate 13, and a through groove 15 is provided on the surface of the insertion block 9. The through groove 15 and the extension plate 14 are slidably connected. This step, by setting the extension plate 14 and the through groove 15, allows the insertion block 9 to be inserted into the slot 8, and then the reinforcing plate 13 is inserted into the reinforcing groove 10, thereby driving the extension plate 14 to move downward, so that one end of the extension plate 14 is inserted into the through groove 15, thereby further restricting and fixing the position of the insertion block 9, and further improving the stability of the device.
[0021] Furthermore, such as Figure 5 As shown, a guide block 16 is fixedly connected to the upper side of the crystal stabilizing plate 4, and an inclined surface 17 is provided on one side of the guide block 16. This step, by setting the guide block 16 and the inclined surface 17, allows the inclined surface 17 of the guide block 16 to guide the seed crystal when it is placed on the upper side of the crystal stabilizing plate 4, so that the seed crystal can be aligned with the groove on the surface of the crystal stabilizing plate 4, making the centering and positioning of the seed crystal more convenient and stable, and improving the stability of the device.
[0022] Furthermore, such as Figure 1 As shown, an inclined plate 18 is fixedly connected to the inner side of the window frame 1. The inclined plate 18 is used in conjunction with the crystal stabilizer 4. By setting the inclined plate 18, when the crystal stabilizer 4 is stored close to the window frame 1, it contacts the inclined plate 18, which makes it easier for the inclined plate 18 to support the stored crystal stabilizer 4 at a certain angle. This makes the storage position and angle of the crystal stabilizer 4 more stable and improves the stability of the device.
[0023] The working principle is as follows: First, the seed crystal is hoisted to a suitable height, and the movable plate 7 is moved. The movable plate 7 pushes the slider 6 to slide and support inside the groove 5, so that the slider 6 can push the stabilizing plate 4 to rotate until it is perpendicular to the window frame 1. At this time, the reinforcing groove 10 at the appropriate position on the movable plate 7 is aligned with the reinforcing plate 13. Then, the insert 9 is inserted into the slot 8 at the appropriate position. Then, under the pressure of the spring 12, the reinforcing plate 13 and the extension plate 14 move down, and the protruding part of one end of the reinforcing plate 13 is inserted into the inside of the reinforcing groove 10. One end of the extension plate 14 is inserted into the inside of the through slot 15, thereby further restricting and fixing the position of the insert block 9 and the position of the movable plate 7. At this time, the seed crystal is placed inside the crystal stabilizer 4 for limiting, so that it no longer shakes. After use, the reinforcing plate 13 and the extension plate 14 are pulled into the inside of the reinforcing slot 10 and the through slot 15, and the movable plate 7 is pulled outward, so that the slider 6 pulls the crystal stabilizer 4 downward to rotate close to the window frame 1, so that the crystal stabilizer 4 will not restrict the subsequent straightening and lifting of the seed crystal.
[0024] In the description of this specification, references to terms such as "an embodiment," "example," "specific example," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.
[0025] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed utility model.
Claims
1. A single crystal furnace crystal stabilization device, comprising a window frame (1), characterized in that: A glass plate (2) is fixedly connected to the inside of the window frame (1). A support block (3) is fixedly connected to the inside of the window frame (1). A crystal stabilizer (4) is rotatably connected to the inside of the support block (3). A sliding groove (5) is provided on the inside of the crystal stabilizer (4). A slider (6) is slidably connected to the inside of the sliding groove (5). A movable plate (7) is rotatably connected to the inside of the slider (6). The movable plate (7) and the window frame (1) are slidably connected.
2. The single crystal furnace crystal stabilization device according to claim 1, characterized in that: The inner side of the crystal stabilizer (4) is provided with a slot (8), and the inner side of the support block (3) is slidably connected with a plug (9). The slot (8) and the plug (9) are used together.
3. The single crystal furnace crystal stabilization device according to claim 2, characterized in that: The surface of the movable plate (7) is provided with a reinforcing groove (10). A support rod (11) is fixedly connected to the outside of the window frame (1). A spring (12) is fixedly connected to one end of the support rod (11). A reinforcing plate (13) is fixedly connected to the output end of the spring (12). The reinforcing plate (13) and the reinforcing groove (10) are used together.
4. The single crystal furnace crystal stabilization device according to claim 3, characterized in that: An extension plate (14) is fixedly connected to the upper side of the reinforcing plate (13), and a through groove (15) is opened on the surface of the insert (9). The through groove (15) and the extension plate (14) are slidably connected.
5. A single crystal furnace crystal stabilization device according to claim 4, characterized in that: A guide block (16) is fixedly connected to the upper side of the crystal stabilizer (4), and an inclined surface (17) is provided on one side of the guide block (16).
6. The single crystal furnace crystal stabilization device according to claim 5, characterized in that: An inclined plate (18) is fixedly connected to the inner side of the window frame (1), and the inclined plate (18) and the crystal stabilizer (4) are used together.