A device for improving motor origin limit

Abstract

This utility model belongs to the field of rotary motors, specifically a device for improving the origin limit of a motor. It includes an epitaxy machine, with a base rotatably connected to its bottom. A limit plate is fixedly connected to the lower outer surface of the base, and a limit plate is fixedly connected to one side of the top of the limit plate. A lifting plate is slidably connected to the outside of the epitaxy machine, and a limit component is provided at the bottom of the lifting plate. By using the rotatable limit plate to drive the base to reset its origin, and in conjunction with the clamping block in the limit frame for limiting, the problem of the origin position shifting when the rotary motor of the epitaxy machine loses communication or power and stops abruptly can be effectively avoided. This shift prevents the motor from accurately returning to its initial position, thus causing the equipment base to be unable to properly load and unload wafers, affecting production. By using the limit plate, the base can be driven to find and reposition its effective origin, ensuring that the base resumes normal wafer loading and unloading functions, improving the reliability and stability of the equipment.

Description

Technical Field

[0001] This utility model relates to the field of rotary motors, specifically a device for improving the origin limit of a motor. Background Technology

[0002] The rotary motor of the epitaxial growth machine is a key power component used to drive the rotation of the substrate (the part that supports the wafer) in the epitaxial growth equipment. Its performance directly affects the uniformity of the epitaxial layer, the quality of wafer processing, and the stability of equipment operation.

[0003] Existing rotary motors do not include a home point limiting component. When the rotary motor malfunctions, the home point position shifts. This shift prevents the motor from accurately returning to its initial position, which in turn prevents the equipment base from properly loading and unloading wafers, affecting production.

[0004] Therefore, a device for improving the motor origin limit is proposed to address the above problems. Utility Model Content

[0005] To address the shortcomings of existing technologies, current rotary motors do not include a home point limiting component. When a rotary motor malfunctions, the home point position shifts, causing the motor to fail to accurately return to its initial position. This results in the equipment base being unable to properly perform the up-and-down wafer loading and unloading operations, affecting production. This invention proposes a device to improve the motor home point limiting.

[0006] The technical solution adopted by this utility model to solve its technical problem is as follows: The device for improving the origin limit of a motor according to this utility model includes an epitaxy machine. The bottom of the epitaxy machine is rotatably connected to a base. A limit plate is fixedly connected to the lower outer side of the base. A limit plate is fixedly connected to the top side of the limit plate. A lifting plate is slidably connected to the outside of the epitaxy machine. A limit component is provided at the bottom of the lifting plate. A transmission component is provided inside the epitaxy machine. The limit component includes a limit frame. The limit frame is fixedly connected to the bottom side of the lifting plate. Clamping blocks are slidably connected to both sides inside the limit frame.

[0007] Preferably, the limiting component further includes a limiting rod, and a contact sensor that cooperates with the limiting rod is fixedly connected to one side of the bottom of the lifting plate.

[0008] Preferably, the transmission assembly includes a first bevel gear and a transmission unit. The top of the base extends into the interior of the epitaxy machine and is fixedly connected to the first bevel gear. A second bevel gear is rotatably connected to one side of the inner wall of the epitaxy machine via a rotating shaft. A first motor is fixedly connected to one side of the interior of the epitaxy machine via a mounting block. The output end of the first motor is fixedly connected to the second bevel gear. The first bevel gear and the second bevel gear are meshed together. The clamping block can move in opposite directions via the transmission unit.

[0009] Preferably, the transmission unit includes a bidirectional lead screw, which is rotatably connected to the upper interior of the limiting frame. Both outer sides of the bidirectional lead screw are connected to connecting plates via lead screw nut pairs. The two connecting plates are respectively fixedly connected to corresponding clamping blocks. A second motor is fixedly connected to one outer side of the limiting frame via a mounting plate. The output end of the second motor is fixedly connected to the bidirectional lead screw. An electric push rod is fixedly connected to one outer side of the extension machine via a mounting block. The output end of the electric push rod is fixedly connected to the lifting plate.

[0010] Preferably, a motor body is fixedly connected to the outer side of the epitaxy machine away from the electric push rod, a first gear is fixedly connected to the output end of the motor body, and a second gear is fixedly connected to the outer side of the base, with the first gear and the second gear meshing together.

[0011] Preferably, the epitaxy machine is externally fixedly connected to a support frame, and a base is fixedly connected to the bottom of the support frame. A control panel is installed on the outer side of the base, and the first motor, the second motor, and the electric push rod are all electrically connected to the control panel.

[0012] Preferably, the diameter of the first bevel gear is greater than the diameter of the second bevel gear, and the diameter of the first gear is less than the diameter of the second gear.

[0013] Preferably, anti-slip pads are fixedly connected to the inner sides of both clamping blocks, and both anti-slip pads are made of rubber material.

[0014] 1. This utility model uses a rotatable limiting plate to drive the base to reset its origin, and works in conjunction with the clamping block in the limiting frame to limit the movement. This effectively avoids the problem of the origin position shifting when the rotary motor of the epitaxial machine loses communication or stops suddenly due to power failure. This shift prevents the motor from accurately returning to its initial position, which in turn prevents the equipment base from properly loading and unloading wafers, affecting production. By using the limiting plate, the base can be driven to find and reposition its effective origin, ensuring that the base resumes its normal wafer loading and unloading function, thus improving the reliability and stability of the equipment.

[0015] 2. The anti-slip pad made of rubber material in this utility model can effectively increase the friction between the clamping block and the limiting plate, thereby improving the limiting stability of the base and making it more difficult to be affected by secondary displacement caused by external objects. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 This is a perspective view of the present invention;

[0018] Figure 2 This is a perspective view of the second aspect of the present invention;

[0019] Figure 3 This is a cross-sectional view of the present invention;

[0020] Figure 4 This is a cross-sectional view of the limiting frame in this utility model;

[0021] Figure 5 For the present utility model Figure 2 Enlarged view of point A in the middle.

[0022] In the diagram: 1. Epitaxy machine; 2. Base; 3. Limiting piece; 4. Limiting plate; 5. Lifting plate; 6. Limiting frame; 7. Clamping block; 8. First bevel gear; 9. Second bevel gear; 10. First motor; 11. Limiting rod; 12. Contact sensor; 13. Bidirectional lead screw; 14. Second motor; 15. Connecting plate; 16. Electric push rod; 17. Motor body; 18. First gear; 19. Second gear; 20. Support frame; 21. Base; 22. Control panel; 23. Anti-slip mat. Detailed Implementation

[0023] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0024] Example 1

[0025] Please see Figure 1-5As shown, a device for improving the origin limit of a motor includes an epitaxy machine 1. A base 2 is rotatably connected to the bottom of the epitaxy machine 1. A limit plate 3 is fixedly connected to the lower outer side of the base 2. A limit plate 4 is fixedly connected to one side of the top of the limit plate 3. A lifting plate 5 is slidably connected to the outside of the epitaxy machine 1. A limit assembly is provided at the bottom of the lifting plate 5. A transmission assembly is provided inside the epitaxy machine 1. The limit assembly includes a limit frame 6, which is fixedly connected to one side of the bottom of the lifting plate 5. Clamping blocks 7 are slidably connected to both sides of the inside of the limit frame 6. The limit assembly also includes a limit rod 11. A contact sensor 12 cooperating with the limit rod 11 is fixedly connected to one side of the bottom of the lifting plate 5. The transmission assembly includes a first bevel gear 8 and a transmission unit. The top of the base 2 extends into the inside of the epitaxy machine 1 and is fixedly connected to the first bevel gear 8. One side of the inner wall of the epitaxy machine 1 is connected via... A second bevel gear 9 is rotatably connected to the shaft. A first motor 10 is fixedly connected to one side of the inner side of the epitaxy machine 1 via a mounting block. The output end of the first motor 10 is fixedly connected to the second bevel gear 9. The first bevel gear 8 and the second bevel gear 9 are meshed together. The clamping blocks 7 can move in opposite directions through the transmission unit. The transmission unit includes a bidirectional lead screw 13. The bidirectional lead screw 13 is rotatably connected to the upper part of the inner side of the limit frame 6. Both sides of the bidirectional lead screw 13 are connected to connecting plates 15 via lead screw nut pairs. The two connecting plates 15 are fixedly connected to the corresponding clamping blocks 7 respectively. A second motor 14 is fixedly connected to one side of the outer side of the limit frame 6 via a mounting plate. The output end of the second motor 14 is fixedly connected to the bidirectional lead screw 13. An electric push rod 16 is fixedly connected to one side of the outer side of the epitaxy machine 1 via a mounting block. The output end of the electric push rod 16 is fixedly connected to the lifting plate 5.

[0026] During operation, the origin position of the epitaxy machine 1 is set to the position of the limit plate 4 in the base 2 of the limit frame 6. When the epitaxy machine's rotary motor experiences a communication failure or power failure and stops suddenly, the origin position shifts. First, the electric push rod 16 is activated, driving the lifting plate 5 and the limit frame 6 to move downwards until they are slightly higher than the limit plate 3. Then, the first motor 10 is activated, driving the second bevel gear 9 to rotate. The second bevel gear 9 then drives the first bevel gear 8 to rotate in the base 2 through meshing. When the base 2 drives the limit rod 11 to contact the contact sensor 12, the contact sensor 12 detects a signal and transmits the signal to the first motor 10, controlling the first motor 10 to stop rotating. This allows the limit plate 4 at the top of the limit plate 3 to be inside the limit frame 6, completing the reset of the origin. Then, the second motor 14 is activated, driving the bidirectional lead screw. Rotating the double-acting screw 13, the two clamping blocks 7 move inward through the screw nut pair until they clamp the limiting plate 4. Then, the second motor 14 is turned off to complete the limiting of the base 2, preventing the equipment from shifting again due to interference from external objects when it is not started. This device uses the freely rotatable limiting plate 3 to drive the base 2 to reset its origin, and works with the clamping blocks 7 in the limiting frame 6 to limit it. This can effectively prevent the origin position of the epitaxial machine's rotating motor from shifting when communication is lost or power is lost. This shift prevents the motor from accurately returning to its initial position, which in turn prevents the base 2 from performing normal wafer picking and placing operations, affecting production. By using the limiting plate 3, the base 2 can be driven to find the effective origin and be positioned again, ensuring that the base 2 resumes normal wafer picking and placing functions, improving the reliability and stability of the equipment.

[0027] Among them, a motor body 17 is fixedly connected to the side of the epitaxy machine 1 away from the electric push rod 16. A first gear 18 is fixedly connected to the output end of the motor body 17. A second gear 19 is fixedly connected to the outside of the base 2. The first gear 18 and the second gear 19 are meshed together. A support frame 20 is fixedly connected to the outside of the epitaxy machine 1. A base 21 is fixedly connected to the bottom of the support frame 20. A control panel 22 is installed on the outside of the base 21. The first motor 10, the second motor 14 and the electric push rod 16 are all electrically connected to the control panel 22. The diameter of the first bevel gear 8 is larger than the diameter of the second bevel gear 9, and the diameter of the first gear 18 is smaller than the diameter of the second gear 19.

[0028] Through the above technical solution, the control panel 22 allows staff to quickly control the first motor 10, the second motor 14, and the electric push rod 16.

[0029] Example 2

[0030] Please see Figure 4As shown in the first embodiment, as another implementation of this utility model, anti-slip pads 23 are fixedly connected to the inner sides of the two clamping blocks 7, and both anti-slip pads 23 are made of rubber material.

[0031] During operation, the anti-slip pad 23 made of rubber material can effectively increase the friction between the clamping block 7 and the limiting plate 4, thereby improving the limiting stability of the base 2 and making it more difficult to be affected by secondary displacement caused by external objects.

[0032] Working principle: The origin position of the epitaxy machine 1 is set at the position of the limit plate 4 in the base 2 of the limit frame 6. When the epitaxy machine's rotary motor experiences a communication failure or power failure and stops suddenly, the origin position shifts. First, the electric push rod 16 is activated, driving the lifting plate 5 and the limit frame 6 to move downwards. It stops when it moves slightly above the limit plate 3. Then, the first motor 10 is activated, driving the second bevel gear 9 to rotate. The second bevel gear 9 then drives the first bevel gear 8 to rotate in the base 2 through meshing. When the base 2 rotates... When the limiting rod 11 moves to contact the contact sensor 12, the contact sensor 12 detects a signal and transmits the signal to the first motor 10, controlling the first motor 10 to stop rotating. This allows the limiting plate 4 at the top of the limiting piece 3 to be positioned inside the limiting frame 6, completing the reset of the origin. Then, the second motor 14 is started, driving the bidirectional lead screw 13 to rotate. The bidirectional lead screw 13 then drives the two clamping blocks 7 to move inward through the lead screw nut pair until they clamp the limiting plate 4. Finally, the second motor 14 is turned off to complete the base... The limiting position of base 2 prevents the equipment from shifting again due to interference from external objects when it is not started. This device uses a freely rotatable limiting plate 3 to drive base 2 to reset its origin, and works with the clamping block 7 in the limiting frame 6 to limit the position. This effectively prevents the origin position of the epitaxial machine's rotary motor from shifting when communication is lost or power is lost and the machine stops suddenly. This shift prevents the motor from accurately returning to its initial position, which in turn prevents base 2 from properly loading and unloading wafers, affecting production. By using the limiting plate 3, base 2 can be driven to find and reposition its effective origin, ensuring that base 2 resumes its normal loading and unloading function, improving the reliability and stability of the equipment. The control panel 22 allows operators to quickly control the first motor 10, the second motor 14, and the electric push rod 16. The anti-slip pad 23 made of rubber material effectively increases the friction between the clamping block 7 and the limiting plate 4, thereby improving the limiting stability of base 2 and making it less susceptible to secondary shifting caused by interference from external objects.

[0033] In the description of this specification, references to terms such as "an embodiment," "example," "specific example," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0034] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed utility model.

Claims

1. A device for improving the origin limit of a motor, comprising an epitaxy machine (1), wherein a base (2) is rotatably connected to the bottom of the epitaxy machine (1), a limit plate (3) is fixedly connected to the lower outer side of the base (2), a limit plate (4) is fixedly connected to the top side of the limit plate (3), a lifting plate (5) is slidably connected to the outside of the epitaxy machine (1), a limit component is provided at the bottom of the lifting plate (5), and a transmission component is provided inside the epitaxy machine (1); Its features are: The limiting component includes a limiting frame (6), which is fixedly connected to the bottom side of the lifting plate (5), and clamping blocks (7) are slidably connected to both sides of the inside of the limiting frame (6).

2. The device for improving motor origin limit according to claim 1, characterized in that: The limiting assembly also includes a limiting rod (11), and a contact sensor (12) that cooperates with the limiting rod (11) is fixedly connected to one side of the bottom of the lifting plate (5).

3. The device for improving motor origin limit according to claim 2, characterized in that: The transmission assembly includes a first bevel gear (8) and a transmission unit. The top of the base (2) extends into the interior of the epitaxy machine (1) and is fixedly connected to the first bevel gear (8). The inner wall of the epitaxy machine (1) is rotatably connected to a second bevel gear (9) via a rotating shaft. The interior side of the epitaxy machine (1) is fixedly connected to a first motor (10) via a mounting block. The output end of the first motor (10) is fixedly connected to the second bevel gear (9). The first bevel gear (8) and the second bevel gear (9) are meshed together. The clamping block (7) can move in opposite directions via the transmission unit.

4. The device for improving motor origin limit according to claim 3, characterized in that: The transmission unit includes a bidirectional lead screw (13), which is rotatably connected to the upper part of the limiting frame (6). Both sides of the bidirectional lead screw (13) are connected to connecting plates (15) through lead screw nut pairs. The two connecting plates (15) are respectively fixedly connected to the corresponding clamping blocks (7). A second motor (14) is fixedly connected to the outer side of the limiting frame (6) through a mounting plate. The output end of the second motor (14) is fixedly connected to the bidirectional lead screw (13). An electric push rod (16) is fixedly connected to the outer side of the extension machine (1) through a mounting block. The output end of the electric push rod (16) is fixedly connected to the lifting plate (5).

5. The device for improving motor origin limit according to claim 4, characterized in that: A motor body (17) is fixedly connected to the side of the epitaxy machine (1) away from the electric push rod (16). A first gear (18) is fixedly connected to the output end of the motor body (17). A second gear (19) is fixedly connected to the outside of the base (2). The first gear (18) and the second gear (19) are meshed together.

6. The device for improving motor origin limit according to claim 4, characterized in that: The epitaxy machine (1) is externally fixedly connected to a support frame (20), and a base (21) is fixedly connected to the bottom of the support frame (20). A control panel (22) is installed on the outer side of the base (21), and the first motor (10), the second motor (14) and the electric push rod (16) are all electrically connected to the control panel (22).

7. The device for improving motor origin limit according to claim 5, characterized in that: The diameter of the first bevel gear (8) is greater than the diameter of the second bevel gear (9), and the diameter of the first gear (18) is less than the diameter of the second gear (19).

8. The device for improving motor origin limit according to claim 1, characterized in that: The inner sides of both clamping blocks (7) are fixedly connected with anti-slip pads (23), and both anti-slip pads (23) are made of rubber material.

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