A heater and a single crystal furnace

Abstract

This utility model provides a heater and a single crystal furnace, comprising: a heating body, the heating body including a plurality of heating petals connected end-to-end in sequence, the heating petals extending along the axial direction of the heating body; a slot formed between adjacent heating petals along the circumferential direction of the heating body; wherein, the heating body includes a first end and a second end opposite to each other along its axial direction, the slot disposed near the first end is a first slot, and the slot disposed near the second end is a second slot; the heating body includes a first heating region; along the axial direction of the heating body, the first heating region is located between the end of the first slot and the end of the second slot; along the direction from the first end to the second end, the first heating region includes at least three sub-heating regions, the cross-sectional areas of the at least three sub-heating regions in the direction perpendicular to the axial direction of the heating body increasing sequentially. This allows for low-oxygen, low-consumption, and stable crystal pulling.

Description

Technical Field

[0001] This utility model relates to the field of crystal pulling technology, and in particular to a heater and a single crystal furnace. Background Technology

[0002] In the thermal field of Czochralski growing single crystal silicon, a quartz crucible is placed inside the crucible wall, and the quartz crucible contains molten silicon material. The heater is placed outside the crucible wall.

[0003] The current heater has low hot resistance and high heat generation at the bottom of the heating zone, which affects crystal quality and crystal pulling stability. Therefore, further improvements are needed in reducing oxygen consumption, reducing energy consumption, and improving crystal pulling stability. Utility Model Content

[0004] In view of the above problems, embodiments of the present invention are proposed to provide a heater and a single crystal furnace that overcome or at least partially solve the above problems.

[0005] To address the aforementioned problems, in a first aspect, this utility model discloses a heater, comprising: a heating body, the heating body including a plurality of heating petals connected end-to-end in sequence, the heating petals extending along the axial direction of the heating body; and a slot formed between adjacent heating petals along the circumferential direction of the heating body; wherein,

[0006] The heating body includes a first end and a second end along its axial direction, the slot disposed near the first end is the first slot, and the slot disposed near the second end is the second slot;

[0007] The heating body includes a first heating area; along the axial direction of the heating body, the first heating area is located between the end of the first slot and the end of the second slot.

[0008] Along the direction from the first end to the second end, the first heating zone includes at least three sub-heating zones, and the cross-sectional area of ​​the at least three sub-heating zones increases sequentially in the direction perpendicular to the axial direction of the heating body.

[0009] Secondly, this utility model discloses a single crystal furnace, including a furnace body, a quartz crucible, and a heater as described above;

[0010] The heater and the quartz crucible are disposed inside the furnace body, and the heating body of the heater is arranged around the quartz crucible for heating the silicon material inside the quartz crucible.

[0011] In this embodiment of the invention, the first heating zone includes at least three sub-heating zones along the direction from the first end to the second end, and the cross-sectional area of ​​the at least three sub-heating zones in the direction perpendicular to the axial direction of the heating body increases sequentially. This facilitates a stepwise reduction in the heat radiation of the first heating zone along the direction from the first end to the second end, allowing the heating center of the heater to be biased towards the first end, i.e., the heating center of the heater to move upward, thereby reducing the oxygen content. At the same time, it can reduce the bottom temperature of the heater and reduce the heat radiation loss from the heater to the furnace bottom. Moreover, the number of sub-heating zones includes at least three, which can improve the crystal pulling stability by reducing the temperature gradient along the axial direction of the heating body. Therefore, with the improvement of the heater in this application, low oxygen, low energy consumption, and stable crystal pulling can be achieved. Attached Figure Description

[0012] Figure 1 This is a front view of a heating element of this utility model;

[0013] Figure 2 This is a partial structural schematic diagram of a heating body according to the present invention;

[0014] Figure 3 This is a schematic diagram of the thickness distribution of a heating body according to this utility model;

[0015] Figure 4 This is a front view of another heating element of this utility model.

[0016] Explanation of reference numerals in the attached figures:

[0017] 10. Heating body; 11. Heating petal; 12. Slot; 121. First slot; 122. Second slot; 13. First end; 14. Second end; 15. First heating zone; 151. Sub-heating zone; 152. First sub-heating zone; 153. Second sub-heating zone; 16. Second heating zone; 17. Third heating zone. Detailed Implementation

[0018] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, the utility model will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0019] The terms "first" and "second" in the specification and claims of this application may explicitly or implicitly include one or more of the features. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more. Furthermore, in the specification and claims, "and / or" indicates at least one of the connected objects, and the character " / " generally indicates that the preceding and following objects are in an "or" relationship.

[0020] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0021] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0022] In this embodiment of the invention, the heating body 10 includes a plurality of heating petals 11 connected end to end in sequence, with slots 12 spaced apart between the heating petals 11. In practical applications, current flows in from the heating foot plate on one side of the heating body 10 and flows out from the heating foot plate on the other side. In some existing solutions, the width and thickness of the heating petals are uniform throughout, meaning the cross-sectional area through which the current flows is uniform, resulting in uniform heating of the heating body in the axial direction, with the heating center at the center of the heating body. This solution leads to the heating center being close to the bottom of the crucible, causing severe corrosion at the bottom of the crucible during crystal pulling, resulting in increased oxygen content. In other existing solutions, the upper side of the heating petals is thinned, causing the resistance at the upper end of the heating body to be significantly greater than that at the lower end in the axial direction, resulting in a larger temperature gradient and affecting the stability of crystal pulling.

[0023] Therefore, in this embodiment of the invention, the temperature gradient distribution during the crystal pulling process is achieved by adjusting the resistance distribution in the middle of the heating petal 11. This application provides at least three sub-heating areas 151 in the first heating area 15 located in the middle of the heating body 10 along its axial direction. The cross-sectional areas of the multiple sub-heating areas 151 increasing perpendicularly to the axial direction of the heating body are arranged sequentially, facilitating a gradient distribution of resistance among the multiple sub-heating areas 151. The resistance of the upper sub-heating area 151 is greater than that of the lower sub-heating area 151, thus shifting the heating center of the heater upwards, thereby reducing the oxygen content and lowering the bottom temperature of the heater, reducing heat radiation loss from the heater to the furnace bottom. In this embodiment, the sequential increase in the cross-sectional area of ​​the sub-heating areas 151 perpendicular to the axial direction of the heating body allows for a sequential increase in the cross-sectional area perpendicular to the current direction. In this embodiment, the cross-sectional area of ​​the sub-heating area perpendicular to the current direction refers to the cross-sectional area of ​​the heating part corresponding to the sub-heating area perpendicular to the direction of current flow. The current direction of the heating body 10 is as follows: Figure 2 The arrows shown indicate the direction of flow.

[0024] As one implementation method of this application, such as Figure 1 and Figure 2As shown, the heater includes: a heating body 10, which includes a plurality of heating petals 11 connected end-to-end in sequence, the heating petals 11 extending along the axial direction of the heating body 10; and slots 12 formed between adjacent heating petals 11 along the circumferential direction of the heating body 10. The heating body 10 includes a first end 13 and a second end 14 along its axial direction, the slot 12 near the first end 13 is a first slot 121, and the slot 12 near the second end 14 is a second slot 122. The heating body 10 includes a first heating region 15; along the axial direction of the heating body 10, the first heating region 15 is located between the end of the first slot 121 and the end of the second slot 122; along the direction from the first end 13 to the second end 14, the first heating region 15 includes at least three sub-heating regions 151, the cross-sectional areas of the at least three sub-heating regions 151 increasing sequentially in the direction perpendicular to the axial direction of the heating body 10. The cross-sectional area of ​​the sub-heating region 151 is the cross-sectional area perpendicular to the current flow direction. In this embodiment of the invention, along the direction from the first end 13 to the second end 14, the first heating region 15 includes at least three sub-heating regions 151, and the cross-sectional area of ​​the at least three sub-heating regions 151 in the direction perpendicular to the axial direction of the heating body 10 increases sequentially. This causes the resistance of the multiple sub-heating regions 151 of the first heating region 15 to decrease in a stepwise manner, thereby achieving a stepwise decrease in the amount of heat radiation along the direction from the first end 13 to the second end 14. This allows the heating center of the heater to be shifted towards the first end 13, i.e., the heating center of the heater to move upward, thereby reducing the bottom temperature of the heater and reducing the heat radiation loss from the heater to the furnace bottom. Moreover, the number of sub-heating regions 151 includes at least three, which can improve the crystal pulling stability by reducing the temperature gradient along the axial direction of the heating body 10. Therefore, with the improvement of the heater in this application, low oxygen, low consumption and stable crystal pulling can be achieved. In this embodiment, compared to conventional heaters where the width and thickness of the heating petals 11 are uniform throughout, under the same crystal pulling process conditions, using the heater of this embodiment, after pulling 20 batches of silicon rods, the quality and growth indicators of the crystal growth were statistically analyzed; among them, the oxygen content at the head of the grown silicon rod was reduced by 0.8 ppma, the oxygen content at the tail of the crystal rod was reduced by 0.3 ppma, and the breakage rate was reduced by 8%.

[0025] The heater described in this embodiment of the invention is a device that can convert electrical energy into heat energy to heat an object or space. This embodiment uses the application of the heater in a single crystal furnace as an example; other applications can refer to the same setup. Specifically, the heater can be installed inside the single crystal furnace to heat the silicon material in a quartz crucible, thereby achieving crystal pulling.

[0026] Specifically, the heater may include a heating body 10, which is the main structure of the heater and radiates heat. The heating body 10 includes multiple heating petals 11 connected end to end, and the multiple heating petals 11 are spaced apart along the circumference of the heating body 10, making the heating body 10 have a ring structure. The heating body 10 may specifically be in the shape of a circular ring or a rectangular ring, etc. In this embodiment of the invention, a circular ring shape is used as an example for explanation.

[0027] Optionally, at least two steps are provided on the outer surface of the heating body 10 within the first heating zone 15, with the cross-sectional area changing sequentially to form multiple sub-heating zones 151. As one implementation, by providing steps on the outer surface of the heating body 10, the cross-sectional area is adjusted while maintaining the inner surface in the same vertical direction. During the crystal pulling process, the airflow mainly flows to the bottom of the furnace through the gap between the heater and the crucible side. The consistent vertical direction of the inner surface better ensures the overall airflow passage and provides better consistency in the airflow path.

[0028] Optionally, since multiple heating petals 11 are spaced apart along the circumference of the heating body 10 and are connected end to end in sequence, a slot 12 is formed between adjacent heating petals 11. Both the heating petals 11 and the slot 12 extend along the axial direction of the heating body 10, so that the heating body 10 can have an S-shaped open structure.

[0029] Specifically, along the axial direction of the heating body 10, one end of the slot 12 is closed, and the other end has an opening. Since multiple heating petals 11 are connected end to end in sequence, the adjacent slots 12 are oriented in opposite directions. The slot 12 extends through the thickness direction of the heating body 10, so that adjacent heating petals 11 are connected in series.

[0030] Specifically, the heating body 10 includes a first end 13 and a second end 14 opposite to each other along its axial direction. The slot 12 facing the first end 13 is the first slot 121, and the slot 12 facing the second end 14 is the second slot 122. The openings of the first slot 121 and the second slot 122 along the axial direction of the heating body 10 are opposite.

[0031] In one embodiment of this application, the heating body 10 includes a first heating region 15, which is located between the end of the first slot 121 and the end of the second slot 122 along the axial direction of the heating body 10. The end of the first slot 121 is the bottom end of the first slot 121, i.e., the closed end of the first slot 121; the end of the second slot 122 is the bottom end of the second slot 122, i.e., the closed end of the second slot 122. Figure 2As shown, arrow S0 points in the axial direction of the heating body 10, dashed line S2 indicates the end of the first slot 121, and dashed line S5 indicates the end of the second slot 122. In this embodiment, the end of the first slot 121 is close to the second end 14 along the axial direction of the heating area; the end of the second slot 122 is close to the first end 13 along the axial direction of the heating area.

[0032] Optionally, the first end 13 is the top end of the heating body 10, and the second end 14 is the bottom end of the heating body 10. Along the direction from the first end 13 to the second end 14, the first heating region 15 includes at least three sub-heating regions 151, and the cross-sectional area of ​​the at least three sub-heating regions 151 increases sequentially in the direction perpendicular to the axial direction of the heating body. This facilitates the sequential decrease of the heating power of the at least three sub-heating regions 151 along the direction from the first end 13 to the second end 14. That is, the upper part of the heating body 10 generates more heat, while the bottom generates less heat. This allows the heating center of the heater to be moved upwards, thereby reducing the oxygen content during the crystal pulling process. The heating center of the heater refers to the energy concentration area where the heater outputs more heat and the temperature of the molten silicon and the corresponding area of ​​the quartz crucible is highest.

[0033] The reasons why moving the heating center of the heater upwards can reduce oxygen are as follows: First, it can lower the temperature at the bottom of the quartz crucible, which directly determines the oxygen content in silicon. Lowering the temperature at the bottom of the quartz crucible will reduce the SiO reaction rate at the bottom of the crucible, thereby reducing oxygen production. Second, moving the heating center upwards reduces the reaction area between the heater and molten silicon in the later stages of crystal pulling, thereby reducing the amount of oxygen generated by the reaction between the quartz crucible and molten silicon, thus achieving oxygen reduction.

[0034] Specifically, along the direction from the first end 13 to the second end 14, since the cross-sectional area of ​​at least three sub-heating zones 151 increases sequentially in the direction perpendicular to the axial direction of the heating body, it is convenient to realize that the heating power of at least three sub-heating zones 151 decreases sequentially along the direction from the first end 13 to the second end 14. Therefore, the closer to the bottom end of the heating body 10, the less heat is generated in the first heating zone 15, resulting in a lower temperature at the bottom of the heater. This reduces the temperature at the bottom of the heater, thereby reducing the heat loss from the heater to the furnace bottom and achieving low energy consumption.

[0035] Specifically, the thermal radiation of the first heating zone 15 can be reduced in a stepwise manner along the direction from the first end 13 to the second end 14. By setting more steps, the longitudinal temperature gradient can be reduced, thus ensuring the stability of crystal pulling.

[0036] Specifically, the number of sub-heating zones 151 can be three, four, five, six, seven or more, etc.

[0037] In this embodiment of the invention, adjacent heating petals 11 are connected end-to-end, and can also be connected in series via a transition part, meaning that the current flowing through each heating petal 11 is the same. Under a constant current, the heating power is positively correlated with the resistance-to-height ratio, where the resistance-to-height ratio is the resistance value per unit height along the axial direction of the heating zone, and is the ratio of resistance to height. The heating zone includes multiple sub-heating zones.

[0038] For example, two adjacent sub-heating zones 151 are designated as the first sub-heating zone 152 and the second sub-heating zone 153, respectively. The resistance-to-height ratio of the first sub-heating zone 152 is greater than that of the second sub-heating zone 153. The parameters influencing the resistance-to-height ratio include resistance and height. According to the expression of the resistance law, R = ρ * L / S, where R is the resistance of the conductor, ρ is the resistivity of the conductor, L is the length of the conductor, and S is the cross-sectional area of ​​the conductor, the heating resistance of the heating body 10 can be increased by decreasing the cross-sectional area S and increasing the length L of the conductor. This helps to ensure the heating power of the heater and achieve efficient heating.

[0039] In this embodiment of the invention, to achieve a resistance-to-height ratio greater than that of the second sub-heating region 153, under the condition of equal resistance, the height of the first sub-heating region 152 can be designed to be less than the height of the second sub-heating region 153; or the resistance of the first sub-heating region 152 can be designed to be greater than that of the second sub-heating region 153. Specifically, to achieve a resistance greater than that of the first sub-heating region 152, the cross-sectional area of ​​the heating petal 11 of the first sub-heating region 152 can be designed to be less than that of the heating petal 11 of the second sub-heating region 153. Furthermore, since the cross-sectional area of ​​the heating petal 11 is positively correlated with its petal thickness and width, the petal thickness of the heating petal 11 of the first sub-heating region 152 can be designed to be less than that of the second sub-heating region 153, and / or, the petal width of the heating petal 11 of the first sub-heating region 152 can be less than that of the second sub-heating region 153.

[0040] In some optional embodiments of this utility model, along the direction from the first end 13 to the second end 14, the resistance height ratio of at least three sub-heating areas 151 decreases sequentially, and the difference in resistance height ratio between two adjacent sub-heating areas 151 is a, 0.06≤a≤0.1; wherein, the resistance height ratio is the resistance value corresponding to the unit height of the heating area.

[0041] In this embodiment of the invention, since the resistance height ratio of the sub-heating region 151 is positively correlated with its heating power, by designing that the resistance height ratio of at least three sub-heating regions 151 decreases sequentially along the direction from the first end 13 to the second end 14, the heating power of at least three sub-heating regions 151 can be sequentially reduced along the direction from the first end 13 to the second end 14. Furthermore, the difference in resistance height ratio between two adjacent sub-heating regions 151 is 'a', where 0.06 ≤ a ≤ 0.1, resulting in a step-like uniform decrease in the resistance height ratio of at least three sub-heating regions 151 along the direction from the first end 13 to the second end 14. This leads to a smaller temperature distribution difference between adjacent sections of the first heating region 15, facilitating the reduction of the longitudinal temperature gradient and improving crystal pulling stability.

[0042] For example, the difference in resistance height between two adjacent sub-heating areas 151 is a, where a can be 0.06, 0.07, 0.08, 0.09, or 0.1, etc.

[0043] In this embodiment, the temperature gradient of the first heating zone 15 can be improved by controlling the range of the resistance height ratio between two adjacent sub-heating zones. If the resistance height ratio between two adjacent sub-heating zones is greater than 0.1, the temperature gradient between the sub-heating zones will be too large, which is not conducive to the stability of crystal pulling; if the resistance height ratio between two adjacent sub-heating zones is too small, such as less than 0.06, the first heating zone 15 cannot form the temperature gradient required for stable crystal growth, which is not conducive to reducing the heat generation near the bottom of the heater.

[0044] In some optional embodiments of this utility model, along the direction from the first end 13 to the second end 14, the resistance of at least three sub-heating areas 151 decreases sequentially, and the ratio of the resistance of two adjacent sub-heating areas 151 is b, where 1.18≤b≤1.22.

[0045] In this embodiment of the invention, by designing the resistance of at least three sub-heating regions 151 to decrease sequentially along the direction from the first end 13 to the second end 14, it is convenient to achieve a sequential decrease in the heating power of at least three sub-heating regions 151 along the direction from the first end 13 to the second end 14. Moreover, the resistance ratio of two adjacent sub-heating regions 151 is designed to be b, 1.18≤b≤1.22, so that the resistance height ratio of at least three sub-heating regions 151 decreases uniformly in a step-like manner along the direction from the first end 13 to the second end 14, which is convenient for reducing the longitudinal temperature gradient and improving the stability of crystal pulling.

[0046] For example, the resistance ratio of two adjacent sub-heating areas 151 is b, and b can be 1.18, 1.19, 1.2, 1.21 or 1.22, etc.

[0047] In some optional embodiments of this utility model, at least three sub-heating areas 151 have the same petal width along the circumference of the heating body 10; and at least three sub-heating areas 151 have the same height along the direction from the first end 13 to the second end 14.

[0048] In this embodiment of the utility model, by defining that at least three sub-heating areas 151 have the same petal width along the circumference of the heating body 10 and the same height along the direction from the first end 13 to the second end 14, the design difficulty of the first heating area 15 can be reduced and the convenience and reliability of manufacturing the heating body 10 can be improved.

[0049] In this embodiment of the utility model, at least three sub-heating areas 151 have the same petal width along the circumference of the heating body 10 and the same height along the direction from the first end 13 to the second end 14. In order to ensure that the resistance height ratio of at least three sub-heating areas 151 decreases sequentially along the direction from the first end 13 to the second end 14, the petal thickness of at least three sub-heating areas 151 can be designed to increase sequentially along the direction from the first end 13 to the second end 14. This makes it easy to process, has strong structural stability, and a long service life.

[0050] Furthermore, the thickness of at least three sub-heating zones 151 increases in a stepped manner along the direction from the first end 13 to the second end 14. This is achieved by designing the inner wall of the first heating zone 15 to have a uniform diameter structure. When the number of sub-heating zones 151 is sufficiently large, such as... Figure 4 As shown, the outer wall surface of the first heating zone 15 can be close to a frustum arc surface, which makes the longitudinal temperature gradient transition smooth and easy to stabilize crystal pulling.

[0051] Optionally, along the direction from the first end 13 to the second end 14, the ratio of the petal thickness of two adjacent sub-heating regions 151 is c, where 0.74≤c≤0.82.

[0052] In this embodiment of the application, along the direction from the first end 13 to the second end 14, the ratio of the petal thickness of two adjacent sub-heating regions 151 is c. By controlling c within the floating range of 0.74-0.82, a finer temperature distribution in the longitudinal temperature gradient interval can be achieved, resulting in a relatively small longitudinal temperature gradient and stronger stability.

[0053] Specifically, along the direction from the first end 13 to the second end 14, the ratio of the petal thickness of two adjacent sub-heating regions 151 is c, which can be 0.74, 0.75, 0.76, 0.77, 0.78, 0.79, 0.80, 0.81 or 0.82, etc.

[0054] In some optional embodiments of this utility model, the heating body 10 further includes a second heating region 16; along the axial direction of the heating body 10, the second heating region 16 is located at the first end 13 and connected to the first heating region 15. In this embodiment, the cross-sectional area of ​​the second heating region 16 perpendicular to the circumference of the heating body 10 is the same as the cross-sectional area of ​​the nearest sub-heating region 151 perpendicular to the axial direction of the heating body 10, thereby achieving that the cross-sectional areas of the second heating region 16 and the nearest sub-heating region 151 perpendicular to the current direction are the same.

[0055] In this embodiment of the invention, the second heating zone 16 and its nearest sub-heating zone 151 have the same cross-sectional area perpendicular to the current direction. This facilitates the equalization of heating power between the second heating zone 16 and its nearest sub-heating zone 151, achieving temperature stability between them and ensuring stable crystal pulling. During the crystal pulling process, in stages such as melting, crystal pulling, shoulder formation, and the early stage of equal diameter formation, the second heating zone 16 is closer to the molten surface. The fact that the second heating zone 16 and its nearest sub-heating zone 151 have the same cross-sectional area perpendicular to the current direction ensures that the heat radiated per unit area to the molten silicon is similar, reducing crystal growth defects caused by excessive temperature differences at the crystal growth interface, thereby creating a stable environment for crystal growth.

[0056] In this embodiment of the invention, the cross-sectional area of ​​the second heating zone 16 in the circumferential direction perpendicular to the heating body 10 is the same as the cross-sectional area of ​​the nearest sub-heating zone 151 in the axial direction perpendicular to the heating body 10. This makes the resistance of the second heating zone 16 and the nearest sub-heating zone 151 uniform within a unit length in the direction of current flow, thereby resulting in uniform heating power and improved crystal pulling stability.

[0057] In a specific implementation, the extension length of the second heating region 16 along the circumference of the heating body 10 is L0; the height of the sub-heating region 151 closest to the second heating region 16 along the axial direction of the heating body 10 is H2, where H2 = L0. The second heating region 16 includes a transition portion that extends circumferentially along the heating body 10, and the heating petal 11 extends axially along the heating body 10. Since H2 = L0, and the petal thickness of the second heating region 16 and the nearest sub-heating region 151 is the same, the cross-sectional areas of the second heating region 16 and the nearest sub-heating region 151 perpendicular to the current direction are the same.

[0058] Optionally, the thickness of the heating petal 11 in the second heating zone 16 is D1, where D1 ≥ 12 mm. This avoids the second heating zone 16 from being too thin, which helps to reduce the occurrence of processing deformation in the heating body 10 and ensures the service life of the heater.

[0059] For example, the thickness of the heating petal 11 in the second heating zone 16 is D1, which can be 12mm, 13mm, 15mm, 16mm, 17mm, 18mm or 20mm, etc.

[0060] In some optional embodiments of this utility model, the heating body 10 further includes a third heating zone 17; along the axial direction of the heating body 10, the third heating zone 17 is located at the second end 14 and connected to the first heating zone 15; the cross-sectional area of ​​the third heating zone 17 perpendicular to the circumferential direction of the heating body 10 is greater than or equal to the cross-sectional area of ​​the nearest sub-heating zone 151 perpendicular to the axial direction of the heating body 10.

[0061] In this embodiment of the invention, the third heating zone 17 is located at the second end 14 and connected to the first heating zone 15, making the third heating zone 17 closer to the bottom of the furnace body. The cross-sectional area of ​​the third heating zone 17 perpendicular to the circumferential direction of the heating body 10 is greater than or equal to the cross-sectional area of ​​the nearest sub-heating zone 151 perpendicular to the axial direction of the heating body 10. This facilitates ensuring that the heating power of the third heating zone 17 is less than or equal to the heating power of the nearest sub-heating zone 151, resulting in lower heat radiation from the third heating zone 17 and reducing heat radiation from the third heating zone 17 to the bottom of the furnace chamber, thus achieving low energy consumption.

[0062] Specifically, the cross-sectional area of ​​the third heating zone 17 in the circumferential direction perpendicular to the heating body 10 is greater than or equal to the cross-sectional area of ​​the nearest sub-heating zone 151 in the axial direction perpendicular to the heating body 10, so as to make the resistance of the third heating zone 17 less than or equal to the resistance of the nearest sub-heating zone 151.

[0063] Furthermore, the resistance of the third heating zone 17 can be less than or equal to the resistance of the nearest sub-heating zone 151; this can be achieved by the cross-sectional area of ​​the third heating zone 17 in the circumferential direction perpendicular to the heating body 10 being greater than or equal to the cross-sectional area of ​​the nearest sub-heating zone 151 in the axial direction perpendicular to the heating body 10.

[0064] Optionally, the ratio of the resistance of the third heating zone 17 to the total resistance of the heating body 10 is e, where 0.08 ≤ e ≤ 0.16.

[0065] In this embodiment of the invention, the ratio of the resistance of the third heating zone 17 to the total resistance of the heating body 10 is e. By controlling e within the range of 0.08-0.16, the heat radiation capacity of the third heating zone 17 can be effectively guaranteed to be low, and the bottom temperature of the heater can be kept low, thereby achieving the effect of reducing energy consumption.

[0066] Optionally, along the axial direction of the heating body 10, the height of the third heating zone 17 is H5, the total height of the heating body 10 is H0, and 0.28≤H5 / H0≤0.35.

[0067] In this embodiment of the invention, controlling 0.28≤H5 / H0≤0.35 helps to reduce the design cost of the third heating zone 17 and avoids the risk of deformation of the heating body 10.

[0068] Specifically, if the height of the third heating zone 17 along the axial direction of the heating body 10 is designed to be relatively high, it will be difficult to reduce the temperature at the bottom of the heater and achieve a low-consumption effect; if the height of the third heating zone 17 along the axial direction of the heating body 10 is designed to be relatively low, it will be difficult to ensure the overall structural stability of the heating body 10. Therefore, in this embodiment of the present invention, the height of the third heating zone 17 is controlled to account for 28%-35% of the total height of the heating body 10 along the axial direction of the heating body 10.

[0069] In some optional embodiments of this utility model, the heating body 10 further includes a second heating area 16 and a third heating area 17; along the axial direction of the heating body 10, the second heating area 16 is located at the first end 13 and connected to the first heating area 15, and the third heating area 17 is located at the second end 14 and connected to the first heating area 15; the resistance of the second heating area 16 is greater than the resistance of the nearest sub-heating area 151, and the resistance of the third heating area 17 is less than the resistance of the nearest sub-heating area 151; the ratio of the resistance of the second heating area 16 to the resistance of the third heating area 17 is f, where 2.8 ≤ f ≤ 3.2.

[0070] In this embodiment of the invention, since the resistance of the second heating zone 16 is greater than or equal to the resistance of the nearest sub-heating zone 151, and the resistance of the third heating zone 17 is less than the resistance of the nearest sub-heating zone 151, it is easy to achieve that the heating power of the second heating zone 16 is greater than that of the third heating zone 17. This allows the top of the heater to have a higher temperature and the bottom to have a lower temperature, so that the heating center of the heater is higher, which can reduce oxygen and improve the crystal pulling quality.

[0071] Specifically, the ratio of the resistance of the second heating zone 16 to the resistance of the third heating zone 17 is f, where 2.8 ≤ f ≤ 3.2, which can further ensure that the temperature at the bottom of the heater is low and achieve the effect of reducing energy consumption.

[0072] In this embodiment of the present invention, along the axial direction of the heating body 10, the height of the second heating zone 16 can be less than or equal to the height of the third heating zone 17, that is, the cross-sectional area of ​​the vertical current in the second heating zone 16 is less than the cross-sectional area of ​​the vertical current in the third heating zone 17, which can further ensure that the heating power of the second heating zone 16 is greater than the heating power of the third heating zone 17, and is conducive to ensuring the structural stability of the heating body 10.

[0073] In some embodiments of this utility model, such as Figure 2 and Figure 3As shown, along the axial direction of the heating body 10, the area between the dashed lines S1 and S2 is the second heating area 16, the area between the dashed lines S2 and S3, the area between the dashed lines S3 and S4, and the area between the dashed lines S4 and S5 are the three sub-heating areas 151 of the first heating area 15, and the area between the dashed lines S5 and S6 is the third heating area 17.

[0074] The thickness of the heating petal 11 in the second heating zone 16 is D1, and the height of the second heating zone 16 along the axial direction of the heating body 10 is H1; along the direction from the first end 13 to the second end 14, the thicknesses of the heating petals 11 in the three sub-heating zones 151 of the first heating zone 15 are D2, D3, and D4 respectively, and the heights of the three sub-heating zones 151 along the axial direction of the heating body 10 are H2, H3, and H4 respectively; the thickness of the petal in the third heating zone 17 is D5, and the height of the third heating zone 17 along the axial direction of the heating body 10 is H5.

[0075] Table 1 illustrates the resistance distribution of each heating zone in the double-step heating body:

[0076]

[0077]

[0078] Combination Figure 3 As shown in Table 1, H2 = H3 = H4, H1 > H2, H1 < H5, D1 = D2, D2 < D3 < D4, D4 = D5. The resistance height ratios of the second heating zone 16 and its nearest sub-heating zone 151 are basically close, resulting in a uniform power distribution and enabling stable temperature and crystal pulling. Along the axial direction of the heating body 10, the resistance height ratios of the three sub-heating zones 151 decrease in a stepped manner, resulting in a finer temperature distribution within the first heating zone 15 and a relatively smaller longitudinal temperature gradient, thus achieving stable crystal pulling. Specifically, when the heating power of the heater heating zone is 40 kW, the heating power of the second heating zone 16 is 13.2 kW, the heating power of the first heating zone 15 along the direction from the first end 13 to the second end 14 is 9.3 kW, 7.2 kW, and 5.6 kW respectively, and the heating power of the third heating zone 17 is 1.7 kW. The lower power of the third heating zone 17 results in less heat generation and achieves a low-power effect.

[0079] In some optional embodiments of this utility model, the heater further includes a heating foot plate connected to the second end 14; the ratio of the resistance of the heating body 10 to the resistance of the heating foot plate is g, where g > 12.

[0080] In this embodiment of the invention, the ratio of the resistance of the heating body 10 to the resistance of the heating foot plate is g, where g > 12. This effectively reduces the amount of heat radiation from the heating foot plate, allowing the heating center of the heater to move upward, thereby reducing oxygen and energy consumption.

[0081] For example, the ratio of the resistance of the heating body 10 to the resistance of the heating foot plate is g, and g can be 12.1, 13, 14, 15.5, 17, 18 or 20, etc.

[0082] The heater described in the embodiments of this application has at least the following advantages:

[0083] In this embodiment of the invention, the first heating zone includes at least three sub-heating zones along the direction from the first end to the second end, and the cross-sectional area of ​​the at least three sub-heating zones in the direction perpendicular to the axial direction of the heating body increases sequentially. This facilitates a stepwise reduction in the heat radiation of the first heating zone along the direction from the first end to the second end, allowing the heating center of the heater to be biased towards the first end, i.e., the heating center of the heater to move upward, thereby reducing the oxygen content and lowering the bottom temperature of the heater, reducing the heat radiation loss from the heater to the furnace bottom. Moreover, the number of sub-heating zones includes at least three, which can improve the crystal pulling stability by reducing the temperature gradient along the axial direction of the heating body. Therefore, with the improvement of the heater in this application, low oxygen, low energy consumption, and stable crystal pulling can be achieved.

[0084] Secondly, this utility model also discloses a single crystal furnace, including a furnace body, a quartz crucible, and the aforementioned heater; the heater and the quartz crucible are disposed in the furnace body, and the heating body of the heater is arranged around the quartz crucible for heating the silicon material inside the quartz crucible.

[0085] The single crystal furnace described in this embodiment of the invention can achieve the same beneficial effects as the heater described above, and will not be repeated here.

[0086] Although preferred embodiments of the present invention have been described, those skilled in the art, upon learning the basic inventive concept, can make other changes and modifications to these embodiments. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments as well as all changes and modifications falling within the scope of the present invention.

[0087] Finally, it should be noted that in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or terminal device that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or terminal device. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or terminal device that includes said element.

[0088] The heater and single crystal furnace provided by this utility model have been described in detail above. Specific examples have been used to illustrate the principle and implementation of this utility model. The description of the above embodiments is only for the purpose of helping to understand the method and core idea of ​​this utility model. At the same time, for those skilled in the art, there will be changes in the specific implementation and application scope based on the idea of ​​this utility model. Therefore, the content of this specification should not be construed as a limitation of this utility model.

Claims

1. A heater, characterized in that, include: A heating body (10) includes a plurality of heating petals (11) connected end-to-end in sequence, the heating petals (11) extending along the axial direction of the heating body (10); along the circumferential direction of the heating body (10), a slot (12) is formed between adjacent heating petals (11); wherein, The heating body (10) includes a first end (13) and a second end (14) opposite each other along its axial direction. The slot (12) disposed near the first end (13) is a first slot (121), and the slot (12) disposed near the second end (14) is a second slot (122). The heating body (10) includes a first heating area (15); along the axial direction of the heating body (10), the first heating area (15) is located between the end of the first slot (121) and the end of the second slot (122); Along the direction from the first end (13) to the second end (14), the first heating area (15) includes at least three sub-heating areas (151), and the cross-sectional area of ​​the at least three sub-heating areas (151) increases sequentially in the direction perpendicular to the axial direction of the heating body (10).

2. The heater according to claim 1, characterized in that, Along the direction from the first end (13) to the second end (14), the resistance height ratio of the at least three sub-heating areas (151) decreases sequentially, and the difference in resistance height ratio between two adjacent sub-heating areas (151) is a, 0.06≤a≤0.1; The resistance-to-height ratio is the resistance value per unit height of the heating zone.

3. The heater according to claim 2, characterized in that, Along the direction from the first end (13) to the second end (14), the resistance of the at least three sub-heating areas (151) decreases sequentially, and the ratio of the resistance of two adjacent sub-heating areas (151) is b, 1.18≤b≤1.

22.

4. The heater according to claim 2, characterized in that, Along the circumference of the heating body (10), the at least three sub-heating regions (151) have the same petal width; Along the direction from the first end (13) to the second end (14), the at least three sub-heating zones (151) have the same height.

5. The heater according to claim 4, characterized in that, Along the direction from the first end (13) to the second end (14), the ratio of the petal thickness of two adjacent sub-heating regions (151) is c, 0.74≤c≤0.

82.

6. The heater according to claim 1, characterized in that, The heating body (10) further includes a second heating area (16); along the axial direction of the heating body (10), the second heating area (16) is located at the first end (13) and connected to the first heating area (15); The cross-sectional area of ​​the second heating zone (16) perpendicular to the circumference of the heating body (10) is the same as the cross-sectional area of ​​the nearest sub-heating zone (151) perpendicular to the axial direction of the heating body (10).

7. The heater according to claim 6, characterized in that, The thickness of the heating petal (11) in the second heating zone (16) is D1, where D1 ≥ 12 mm.

8. The heater according to claim 1, characterized in that, The heating body (10) further includes a third heating zone (17); along the axial direction of the heating body (10), the third heating zone (17) is located at the second end (14) and connected to the first heating zone (15); The cross-sectional area of ​​the third heating zone (17) in the circumferential direction perpendicular to the heating body (10) is greater than or equal to the cross-sectional area of ​​the nearest sub-heating zone (151) in the axial direction perpendicular to the heating body (10).

9. The heater according to claim 8, characterized in that, The ratio of the resistance of the third heating zone (17) to the total resistance of the heating body (10) is e, where 0.08 ≤ e ≤ 0.

16.

10. The heater according to claim 8, characterized in that, Along the axial direction of the heating body (10), the height of the third heating zone (17) is H5, the total height of the heating body (10) is H0, and 0.28≤H5 / H0≤0.

35.

11. The heater according to claim 1, characterized in that, The heating body (10) further includes a second heating zone (16) and a third heating zone (17); Along the axial direction of the heating body (10), the second heating area (16) is located at the first end (13) and connected to the first heating area (15), and the third heating area (17) is located at the second end (14) and connected to the first heating area (15); The resistance of the second heating zone (16) is greater than the resistance of the nearest sub-heating zone (151), and the resistance of the third heating zone (17) is less than the resistance of the nearest sub-heating zone (151); The ratio of the resistance of the second heating zone (16) to the resistance of the third heating zone (17) is f, where 2.8 ≤ f ≤ 3.

2.

12. The heater according to claim 1, characterized in that, The heater also includes a heating foot plate, which is connected to the second end (14); The ratio of the resistance of the heating body (10) to the resistance of the heating foot plate is g, where g > 12.

13. The heater according to claim 1, characterized in that, At least two steps are provided on the outer side of the first heating zone (15).

14. A single crystal furnace, characterized in that, Includes a furnace body, a quartz crucible, and a heater as described in any one of claims 1-13; The heater and the quartz crucible are disposed inside the furnace body, and the heating body (10) of the heater is arranged around the quartz crucible for heating the silicon material inside the quartz crucible.

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