A large single crystal rod extraction device

Abstract

This utility model discloses a large single crystal rod extraction device, including a main body. A fixing structure is fixedly assembled on one side wall of the main body, and a clamping structure is fixedly assembled on the outer end of the hydraulic cylinder. Through the fixing structure, the main body is fixed on the upper edge of the single crystal furnace. By adjusting the structure, the hydraulic cylinder can be adjusted along the slide groove to maintain a fixed vertical trajectory displacement on the outer side of the main body, while simultaneously driving the clamping structure to make longitudinal displacement and adjust to a suitable clamping position. At the same time, the horizontal displacement of the clamping structure can be adjusted by the hydraulic cylinder, which is convenient to control and quick to adjust. Through the action of the clamping structure, the arc-shaped clamping block made of high temperature resistant alloy, with multiple layers of buffer material embedded on the inner side of the clamping block (the outer layer is carbon fiber reinforced silicone, and the inner layer is a shape memory alloy elastic element), provides uniform contact force and can compensate for the micro-unevenness of the crystal surface through elastic deformation.

Description

Technical Field

[0001] This utility model relates to the field of single crystal rod extraction technology, specifically to a large single crystal rod extraction device. Background Technology

[0002] After the growth of large single crystals (such as semiconductor-grade single crystal silicon, sapphire, etc.) is completed, they need to be safely and without damage removed from the growth furnace by a special rod removal device. Although traditional devices can complete the basic rod removal task, there are still defects in practical applications. Large single crystals are extremely sensitive to mechanical stress. When traditional rigid clamps (such as metal clamps) directly clamp the side of the rod, if the clamping force is uneven or there are small protrusions / depressions on the crystal surface, it is easy to cause local stress concentration, which can lead to lattice dislocations or even macroscopic cracks. Utility Model Content

[0003] The purpose of this invention is to provide a large single crystal rod extraction device to solve the problems mentioned in the background art.

[0004] To achieve the above objectives, this utility model provides the following technical solution: a large single crystal rod extraction device, comprising a main body, a fixing structure fixedly assembled on one side wall of the main body, an adjusting structure through the inner wall of the main body, a sliding groove formed from top to bottom on the other side wall of the main body, a hydraulic cylinder fixedly assembled at the outer end of the adjusting structure through the sliding groove, and a clamping structure fixedly assembled at the outer end of the hydraulic cylinder.

[0005] Preferably, the fixing structure includes an L-shaped plate, which is fixedly assembled to one side wall of the main body. A nut is fixedly assembled to the outer side wall of the L-shaped plate, and a bolt is screwed to the inner wall of the nut. A top block is fixedly assembled to the inner end of the bolt, and the top block is in contact with the inner side wall of the L-shaped plate.

[0006] Preferably, the adjustment structure includes a motor, which is fixedly mounted on the upper end of the main body. The lower end of the motor shaft passes through the main body and is fixedly mounted with a stud. The lower end of the stud is rotatably connected to the bottom surface of the inner cavity of the main body. A connecting block is screwed to the outer wall of the stud. The outer wall of the connecting block fits against the inner wall of the main body. A slider is fixedly mounted on the outer end of the connecting block. The slider is slidably engaged with a sliding groove. The outer end of the slider is fixedly connected to a hydraulic cylinder.

[0007] Preferably, the clamping structure includes a frame, with cylinders symmetrically fixed to both sides of the frame. The piston rod of the cylinder passes through the frame and is fixedly fitted with a clamping block. The clamping block is disposed on and fits against the inner side wall of the frame. The inner side wall of the clamping block is connected to a clamping plate through an elastic element. The clamping plate is made of carbon fiber reinforced silicone material.

[0008] Compared with the prior art, the beneficial effects of this utility model are as follows: Through the fixed structure, the main body is fixed on the upper edge of the single crystal furnace. Through the action of the adjustment structure, the hydraulic cylinder can be adjusted along the slide groove to maintain a fixed vertical trajectory displacement on the outside of the main body, while driving the clamping structure to make longitudinal displacement and adjust to a suitable clamping position. At the same time, the horizontal displacement of the clamping structure can be adjusted by the hydraulic cylinder, which is convenient to control and quick to adjust. Through the action of the clamping structure, the arc-shaped clamping block made of high temperature resistant alloy, with multiple layers of buffer material embedded on the inner side of the clamping block (the outer layer is carbon fiber reinforced silicone, and the inner layer is shape memory alloy elastic element), provides uniform contact force and can compensate for the micro-unevenness of the crystal surface through elastic deformation. Attached Figure Description

[0009] Figure 1 This is a three-dimensional structural schematic diagram of the present invention;

[0010] Figure 2 This is a side view of the present invention;

[0011] Figure 3 An assembly perspective view of the hydraulic cylinder and clamping structure;

[0012] Figure 4 This is a top view of the fixture structure;

[0013] Figure 5 for Figure 2 Enlarged schematic diagram of the structure at point A in the middle.

[0014] In the diagram: 1-Main body, 2-Fixing structure, 21-L-shaped plate, 22-Nut, 23-Bolt, 24-Top block, 3-Adjusting structure, 31-Motor, 32-Stud, 33-Connecting block, 34-Slider, 4-Slide groove, 5-Hydraulic cylinder, 6-Clamping structure, 61-Frame, 62-Cylinder, 63-Clamping plate, 64-Elastic element, 65-Clamping block. Detailed Implementation

[0015] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0016] Please see Figures 1-5This utility model provides a large single crystal rod extraction device, including a main body 1. A fixing structure 2 is fixedly assembled on one side wall of the main body 1. An adjustment structure 3 is installed through the inner wall of the main body 1. A sliding groove 4 is opened from top to bottom on the other side wall of the main body 1. A hydraulic cylinder 5 is fixedly assembled through the sliding groove 4 at the outer end of the adjustment structure 3. A clamping structure 6 is fixedly assembled at the outer end of the hydraulic cylinder 5.

[0017] By fixing the main body 1 on the upper edge of the single crystal furnace through the fixing structure 2, the hydraulic cylinder 5 can be adjusted along the slide groove 4 to maintain a fixed vertical trajectory displacement on the outside of the main body 1, while driving the clamping structure 6 to make longitudinal displacement and adjust to a suitable clamping position. At the same time, the horizontal displacement of the clamping structure 6 can be adjusted by the hydraulic cylinder 5, which is convenient to control and quick to adjust. Through the action of the clamping structure 6, the arc-shaped clamping block made of high temperature resistant alloy, with multiple layers of buffer material embedded on the inner side of the clamping block (the outer layer is carbon fiber reinforced silicone, and the inner layer is shape memory alloy elastic element), provides uniform contact force and can compensate for the micro-unevenness of the crystal surface through elastic deformation.

[0018] The fixed structure 2 includes an L-shaped plate 21, which is fixedly assembled to one side wall of the main body 1. A nut 22 is fixedly assembled to the outer side wall of the L-shaped plate 21. A bolt 23 is screwed to the inner wall of the nut 22. A top block 24 is fixedly assembled to the inner end of the bolt 23. The top block 24 is in contact with the inner side wall of the L-shaped plate 21.

[0019] When the fixed structure 2 is required, first hang the L-shaped plate 21 on the upper edge of the single crystal furnace, and use a tool or add a throttle to rotate the bolt 23. According to the screwing effect of the bolt 23 and the nut 22, and the fixing effect of the nut 22, the top block 24 on the side end can be moved horizontally, and the top block 24 is adjusted to be close to the outer wall of the single crystal furnace and continues to move until it is clamped and fixed.

[0020] The adjustment structure 3 includes a motor 31, which is fixedly mounted on the upper end of the main body 1. The lower end of the motor shaft of the motor 31 passes through the main body 1 and is fixedly mounted with a stud 32. The lower end of the stud 32 is rotatably connected to the bottom surface of the inner cavity of the main body 1. A connecting block 33 is screwed onto the outer wall of the stud 32. The outer wall of the connecting block 33 is in contact with the inner wall of the main body 1. A slider 34 is fixedly mounted on the outer end of the connecting block 33. The slider 34 is slidably engaged with the slide groove 4. The outer end of the slider 34 is fixedly connected to the hydraulic cylinder 5.

[0021] After the equipment is fixed, the motor 31 is turned on. The motor 31 is a servo motor, which drives the stud 32 to rotate. Based on the function of fixing the rotation position of the stud 32 and the function of the stud 32 being screwed to the connecting block 33, the connecting block 33 moves longitudinally on the outer wall of the stud 32. At the same time, the hydraulic cylinder 5 is moved longitudinally through the slider 34. When the slider 34 moves, it fits the slide groove 4. After the clamping is completed, the motor 31 is reversed to move the clamped large single crystal upward out of the single crystal furnace.

[0022] The clamping structure 6 includes a frame 61, with cylinders 62 symmetrically fixed to both sides of the frame 61. The piston rod of the cylinder 62 passes through the frame 61 and is fixedly fitted with a clamping block 65. The clamping block 65 is located on the inner side wall of the frame 61 and fits against it. The inner side wall of the clamping block 65 is connected to a clamping plate 63 through an elastic element 64. The clamping plate 63 is made of carbon fiber reinforced silicone material.

[0023] When clamping structure 6 is needed, first adjust the longitudinal position to be clamped by adjusting structure 3, and control the horizontal position of clamping structure 6 by hydraulic cylinder 5. After reaching the periphery of the large single crystal, open the cylinders 62 on both sides to drive the clamping block 65 to move towards the outer wall of the large single crystal. First, the clamping plate 63 contacts it and squeezes the elastic element 64 to deform. The stroke of cylinder 62 is set in advance to ensure that the clamping force is just right. At this time, the cooperation between the elastic element 64 and the clamping plate 63 can ensure the clamping effect and avoid damage to the large single crystal, ensuring the practicality of the equipment.

[0024] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A device for extracting large single crystal rods, characterized in that: The system includes a main body (1), a fixing structure (2) is fixedly mounted on one side wall of the main body (1), an adjusting structure (3) is installed through the inner wall of the main body (1), a sliding groove (4) is opened from top to bottom on the other side wall of the main body (1), a hydraulic cylinder (5) is fixedly mounted through the sliding groove (4) at the outer end of the adjusting structure (3), and a clamping structure (6) is fixedly mounted at the outer end of the hydraulic cylinder (5).

2. The large single crystal rod extraction device according to claim 1, characterized in that: The fixing structure (2) includes an L-shaped plate (21), which is fixedly assembled to one side wall of the main body (1). A nut (22) is fixedly assembled to the outer side wall of the L-shaped plate (21), and a bolt (23) is screwed to the inner wall of the nut (22). A top block (24) is fixedly assembled to the inner end of the bolt (23), and the top block (24) is in contact with the inner side wall of the L-shaped plate (21).

3. The large single crystal rod extraction device according to claim 1, characterized in that: The adjustment structure (3) includes a motor (31), which is fixedly mounted on the upper end of the main body (1). The lower end of the motor shaft of the motor (31) passes through the main body (1) and is fixedly mounted with a stud (32). The lower end of the stud (32) is rotatably connected to the bottom surface of the inner cavity of the main body (1). A connecting block (33) is screwed onto the outer wall of the stud (32). The outer wall of the connecting block (33) is in contact with the inner wall of the main body (1). A slider (34) is fixedly mounted on the outer end of the connecting block (33). The slider (34) is slidably engaged with the slide groove (4). The outer end of the slider (34) is fixedly connected to the hydraulic cylinder (5).

4. The large single crystal rod extraction device according to claim 1, characterized in that: The clamping structure (6) includes a frame (61), on which cylinders (62) are symmetrically fixed. The piston rod of the cylinder (62) passes through the frame (61) and is fixedly fitted with a clamping block (65). The clamping block (65) is disposed on the inner side wall of the frame (61) and fits against it. The inner side wall of the clamping block (65) is connected to a clamping plate (63) through an elastic element (64). The clamping plate (63) is made of carbon fiber reinforced silicone material.

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