A gas-cooled vacuum pump detection device

Abstract

The utility model relates to a kind of air-cooled vacuum pump detection devices, it is related to the field of vacuum equipment detection technology, it includes workbench, ventilation mechanism and detection mechanism, ventilation mechanism includes connecting assembly, pressure regulating tank and pressure regulating valve, connecting assembly includes first connecting pipe and second connecting pipe, pressure regulating tank is fixedly installed on workbench, pressure regulating tank is opened in and has pressure regulating chamber, first connecting pipe one end with the air inlet of vacuum pump intercommunication, the other end of first connecting pipe with the pressure regulating chamber of pressure regulating tank intercommunication, the air outlet of vacuum pump with second connecting pipe intercommunication, pressure regulating valve is installed on first connecting pipe;Detection mechanism includes first air pressure sensor and control terminal, first air pressure sensor is installed on second connecting pipe, control terminal is fixedly installed on workbench, and first air pressure sensor is connected with control terminal electric signal connection.The utility model can improve the reliability of vacuum pump detection device detection data.

Description

Technical Field

[0001] This utility model relates to the field of vacuum equipment testing technology, and in particular to a testing device for an air-cooled vacuum pump. Background Technology

[0002] Air-cooled vacuum pumps, typically referring to air-cooled rotary vane vacuum pumps, claw pumps, or screw pumps, are commonly used devices for obtaining rough and medium vacuums. Due to their advantages such as not requiring water cooling, compact structure, and ease of movement, they are widely used in fields with extremely high requirements for cleanliness and convenience, including semiconductors, photovoltaics, lithium batteries, scientific research experiments, and medical equipment. These pumps generate a large amount of heat during operation, which is primarily cooled by built-in or external fans to ensure that critical components such as the motor, rotor, and pump chamber operate within a safe temperature range.

[0003] To ensure the reliable performance and long-term stable operation of air-cooled vacuum pumps, it is necessary to test their key performance parameters during factory inspection, regular maintenance, and fault diagnosis. Traditional testing devices often focus on measuring single or a few parameters such as vacuum level, pumping rate, or motor current.

[0004] Regarding the aforementioned technologies, traditional testing devices have limited functionality and can typically only perform static no-load tests. If gas is suddenly released during the process, they cannot fully assess the pump's response capability and stability. Traditional testing methods are not accurate enough for reliable vacuum pump testing. Utility Model Content

[0005] To improve the reliability of the detection data of the air-cooled vacuum pump testing device, this utility model provides an air-cooled vacuum pump testing device.

[0006] This utility model provides a gas-cooled vacuum pump testing device, which adopts the following technical solution: A gas-cooled vacuum pump testing device includes a workbench, a ventilation mechanism, and a testing mechanism. The ventilation mechanism includes a connecting component, a pressure regulating box, and a pressure regulating valve. The connecting component includes a first connecting pipe and a second connecting pipe. The pressure regulating box is fixedly installed on the workbench and has a pressure regulating chamber inside. One end of the first connecting pipe is connected to the air inlet of the vacuum pump, and the other end of the first connecting pipe is connected to the pressure regulating chamber of the pressure regulating box. The air outlet of the vacuum pump is connected to the second connecting pipe, and the pressure regulating valve is installed on the first connecting pipe. The detection mechanism includes a first air pressure sensor and a control terminal. The first air pressure sensor is installed on the second connecting pipe, and the control terminal is fixedly installed on the workbench. The first air pressure sensor is electrically connected to the control terminal.

[0007] Preferably, the vacuum pump has multiple first temperature sensors disposed on its outer periphery, and the first temperature sensors are electrically connected to the control terminal.

[0008] Preferably, the detection mechanism further includes a detection plate, which is arc-shaped. One end of the detection plate is hinged to the worktable, and the other end is detachably and fixedly connected to the worktable. The detection plate is sleeved on the upper periphery of the vacuum pump body. A plurality of first temperature sensors are fixedly mounted on the detection plate, and the first temperature sensors are evenly distributed along the circumference of the detection plate.

[0009] Preferably, the detection mechanism further includes a contact block and a sliding rod, with multiple sliding rods slidably passing through the detection plate, the inner end of the contact block being arc-shaped, one end of the contact block being fixedly connected to the sliding rod, and the first temperature sensor being fixedly installed on the inner end of the contact block.

[0010] Preferably, the connecting assembly further includes a third connecting pipe, one end of which is connected to the pressure regulating chamber of the pressure regulating box, and the other end of which is connected to a test box. The test box is equipped with a heating wire, and one end of the test box has an air inlet. The heating wire is electrically connected to the control terminal.

[0011] Preferably, a filter core plate is provided at the air inlet end of the pressure regulating chamber.

[0012] Preferably, the connecting assembly further includes a fourth connecting pipe, one end of which is connected to the air inlet of the test box, and a fan is fixedly installed on the fourth connecting pipe, the fan being connected to the fourth connecting pipe.

[0013] Preferably, the pressure regulating box is further provided with a humidifying nozzle, the spraying direction of the humidifying nozzle is towards the pressure regulating chamber, the water inlet end of the humidifying nozzle is connected to a water inlet pipe, and the humidifying nozzle is electrically connected to the control terminal.

[0014] In summary, this utility model has at least one of the following beneficial technical effects: 1. Integrating the testing device onto the workbench avoids the cumbersome process of setting up a temporary testing platform, improving the consistency and repeatability of the tests. Through the pressure regulating box and valve, different pressure conditions at the vacuum pump inlet can be precisely controlled and simulated, enabling the testing of the pump's performance under various loads, not just the ultimate vacuum. A first pressure sensor is installed on the second connecting pipe at the outlet end and connected to the control terminal, allowing for automatic and real-time recording of exhaust pressure data. This is crucial for evaluating the pump's stability and pumping performance, reducing human error in readings, providing a reliable basis for subsequent data analysis and performance judgment, and improving the reliability of the test data.

[0015] 2. By synchronously analyzing temperature and air pressure data at the control terminal, it is possible to study the temperature rise variation of the pump under different loads and achieve a comprehensive assessment of the overall health status of the pump and the cooling system.

[0016] 3. During testing, adjust the position of the sliding rod so that the contact block abuts against the outer end face of the vacuum pump. The first temperature sensor can be replaced with a lower-cost contact temperature sensor without reducing the detection accuracy.

[0017] 4. Verify whether the internal structure, seals, and cooling system of the air-cooled vacuum pump can still operate stably when it draws in high-temperature gas. This is crucial for assessing the pump's reliability in real industrial environments, such as semiconductor and photovoltaic processes. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the overall structure of an embodiment of the present utility model; Figure 2 This is a top view schematic diagram of an embodiment of the present utility model; Figure 3 This is a cross-sectional schematic diagram of an embodiment of the present utility model; Figure 4 This is a partially enlarged schematic diagram of the sliding rod; Figure 5 This is a cross-sectional schematic diagram of the pressure regulating box.

[0019] Explanation of reference numerals in the attached drawings: 100, workbench; 200, ventilation mechanism; 210, connecting assembly; 211, first connecting pipe; 212, second connecting pipe; 213, third connecting pipe; 214, fourth connecting pipe; 220, pressure regulating box; 230, pressure regulating valve; 240, pressure regulating chamber; 300, detection mechanism; 310, first air pressure sensor; 320, control terminal; 330, first temperature sensor; 340, detection plate; 350, sliding rod; 360, contact block; 410, test chamber; 420, heating wire; 430, filter core plate; 440, fan; 450, humidifying nozzle; 500, vacuum pump. Detailed Implementation

[0020] The following is in conjunction with the appendix Figure 1 To be continued Figure 5 The technical solutions in the embodiments of this utility model are clearly and completely described herein. Obviously, the described embodiments are only a part of the embodiments of this utility model, and not all of them. Based on the embodiments of this utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of this utility model.

[0021] It should be noted that all directional indicators (such as up, down, left, right, front, back, etc.) in this utility model embodiment are only used to explain the relative positional relationship and movement of each component in a certain specific posture (as shown in the figure). If the specific posture changes, the directional indicator will also change accordingly.

[0022] Furthermore, in this utility model, the use of terms such as "first," "second," etc., is for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this utility model, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0023] In this utility model, unless otherwise explicitly specified and limited, the terms "connection," "fixing," etc., should be interpreted broadly. For example, "fixing" can mean a fixed connection, a detachable connection, or an integral part; it can mean a mechanical connection or an electrical connection; it can mean a direct connection or an indirect connection through an intermediate medium; it can mean the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0024] Furthermore, the technical solutions of the various embodiments of this utility model can be combined with each other, but only if they are based on the ability of those skilled in the art to implement them. When the combination of technical solutions is contradictory or cannot be implemented, it should be considered that such combination of technical solutions does not exist and is not within the scope of protection claimed by this utility model.

[0025] This utility model discloses a testing device for an air-cooled vacuum pump. (Refer to...) Figures 1 to 5A gas-cooled vacuum pump testing device mainly includes a workbench 100, a ventilation mechanism 200, and a testing mechanism 300. The ventilation mechanism 200 includes a connecting assembly 210, a pressure regulating box 220, and a pressure regulating valve 230. The connecting assembly 210 includes a first connecting pipe 211 and a second connecting pipe 212. The pressure regulating box 220 is fixedly installed on the workbench 100, and a pressure regulating chamber 240 is formed inside the pressure regulating box 220. One end of the first connecting pipe 211 is connected to the air inlet of the vacuum pump 500, and the other end of the first connecting pipe 211 is connected to the pressure regulating chamber 240 of the pressure regulating box 220. The vacuum pump 500's outlet is connected to the second connecting pipe 212, and the pressure regulating valve 230 is installed on the first connecting pipe 211. The detection mechanism 300 includes a first pressure sensor 310 and a control terminal 320. The first pressure sensor 310 is installed on the second connecting pipe 212, and the control terminal 320 is fixedly installed on the workbench 100. At the same time, a second pressure sensor can be installed in the pressure regulating chamber 240 to detect the pressure in the pressure regulating chamber 240. The first pressure sensor 310 and the second pressure sensor are electrically connected to the control terminal 320.

[0026] Integrating the testing device onto the workbench 100 avoids the cumbersome process of setting up a temporary testing platform, improving the consistency and repeatability of the tests. Through the pressure regulating box 220 and the pressure regulating valve 230, different pressure conditions at the inlet of the vacuum pump 500 can be precisely controlled and simulated, enabling the testing of the pump's performance under different loads, not just the ultimate vacuum. A first pressure sensor 310 is installed on the second connecting pipe 212 at the outlet end and connected to the control terminal 320, enabling automatic and real-time recording of exhaust pressure data. This is crucial for evaluating the pump's stability and pumping performance, reducing human error in readings and providing a reliable basis for subsequent data analysis and performance judgment.

[0027] Reference Figure 1 and Figure 2 In some embodiments, multiple first temperature sensors 330 are installed on the periphery of the vacuum pump 500, and the first temperature sensors 330 are electrically connected to the control terminal 320. The cooling effect of the air-cooled pump is directly reflected in the pump body temperature. Multi-point temperature monitoring can comprehensively reflect the heat dissipation of the pump, effectively preventing overheating, performance degradation, or even damage to the pump body due to poor heat dissipation. By synchronously analyzing temperature data and air pressure data at the control terminal 320, the temperature rise variation of the pump under different loads can be studied, enabling a comprehensive assessment of the overall health status of the pump and the cooling system.

[0028] Reference Figure 2In some embodiments, the detection mechanism 300 further includes a detection plate 340, which is arc-shaped. One end of the detection plate 340 is hinged to the worktable 100, and the other end is detachably fixed to the worktable 100. The detection plate 340 is sleeved on the upper periphery of the vacuum pump 500. Multiple first temperature sensors 330 are fixedly mounted on the detection plate 340, and the first temperature sensors 330 are evenly distributed around the circumference of the detection plate 340. The hinged and detachable design allows the detection plate 340 to be opened and closed quickly like a "lid" or "clamp," greatly facilitating the installation and positioning of the vacuum pump 500 and improving detection efficiency. The detection plate 340 ensures that multiple temperature sensors can cover the key temperature measurement area of ​​the pump body in a fixed and evenly distributed manner, avoiding the problem of inconsistent sensor placement during each test and ensuring the comparability and reliability of the test data.

[0029] Reference Figure 3 and Figure 4 In some embodiments, the detection mechanism 300 further includes a contact block 360 and a sliding rod 350. Multiple sliding rods 350 slide along the detection plate 340. The inner end of the contact block 360 is arc-shaped, and one end of the contact block 360 is fixedly connected to the sliding rod 350. The connection between the contact block 360 and the sliding rod 350 can be hinged, allowing for better contact between the contact block 360 and the surface of the vacuum pump 500. A first temperature sensor 330 is fixedly installed at the inner end of the contact block 360. During detection, the position of the sliding rod 350 is adjusted so that the contact block 360 abuts against the outer end face of the vacuum pump 500. The first temperature sensor 330 can be replaced with a lower-cost contact temperature sensor without reducing detection accuracy. The sliding rod 350 design allows the measurement point of the temperature sensor to be adjusted within a certain range, enabling the device to adapt to vacuum pumps 500 of different diameters and models. The 360° arc-shaped contact block design can better fit the curved surface of the pump body, ensuring good contact between the sensor and the pump body surface, reducing measurement errors, and obtaining more accurate temperature data.

[0030] Reference Figure 1 In some embodiments, the connecting assembly 210 further includes a third connecting pipe 213. One end of the third connecting pipe 213 is connected to the pressure regulating chamber 240 of the pressure regulating box 220, and the other end of the third connecting pipe 213 is connected to a test chamber 410. A heating wire 420 is installed inside the test chamber 410, and an air inlet is opened at one end of the test chamber 410. The heating wire 420 is electrically connected to the control terminal 320. The gas being drawn in can be heated by the heating wire 420, thereby simulating the extreme operating conditions of the vacuum pump 500 when handling high-temperature process gases. Verifying whether the internal structure, seals, and cooling system of the gas-cooled vacuum pump 500 can still operate stably when drawing in high-temperature gases is crucial for evaluating the reliability of the pump in real industrial environments, such as semiconductor and photovoltaic processes.

[0031] Reference Figure 3 In some embodiments, a filter plate 430 is detachably installed at the air inlet end of the pressure regulating chamber 240. The filter plate 430 can prevent dust and other impurities in the environment from entering the pressure regulating box 220 and the subsequent vacuum pump 500, avoiding contamination or damage to the precision vacuum equipment. At the same time, a filter of a specific specification can also be installed to test the performance change of the vacuum pump 500 under the condition of drawing in dusty gas and filtering it through the filter, or the effectiveness of the filter.

[0032] Reference Figure 3 In some embodiments, the connecting assembly 210 further includes a fourth connecting pipe 214, one end of which is connected to the air inlet of the test chamber 410. A fan 440 is fixedly installed on the fourth connecting pipe 214 and is connected to the fourth connecting pipe 214. The fan 440 provides active airflow to simulate different inlet air volume conditions or to test the performance of the vacuum pump 500 under forced ventilation.

[0033] Reference Figure 3 In some embodiments, the pressure regulating chamber 220 is also equipped with a humidifying nozzle 450, the spray direction of which is towards the pressure regulating chamber 240. The water inlet of the humidifying nozzle 450 is connected to a water inlet pipe, and the humidifying nozzle 450 is electrically connected to the control terminal 320. This allows for adjustment of the humidity of the intake gas, simulating high-humidity environments or processes containing water vapor. It is of significant value in verifying the corrosion resistance of the internal materials of the vacuum pump 500 and assessing its susceptibility to damage due to internal condensation in humid environments, thus expanding the testing range of the detection device.

[0034] The electrical signal connection between the aforementioned control terminal 320 and multiple devices can be either an existing wire connection or a Bluetooth or other wireless electrical signal connection installed on the motherboard.

[0035] The implementation principle of the air-cooled vacuum pump detection device in this embodiment of the utility model is as follows: By incorporating a pressure regulating valve 230 and pressure sensors at the inlet and outlet, the device can accurately simulate different loads and automatically record pressure data, providing a reliable basis for evaluating the pump's pumping performance and stability. Furthermore, the introduction of multi-point temperature monitoring and simultaneous analysis with pressure data enables a comprehensive diagnosis of the pump's heat dissipation and overall health. In particular, the device, through the addition of a heated and humidified test chamber 410 and a fan 440, can actively simulate harsh operating conditions such as high temperature and high humidity, significantly enhancing the testing device's ability to assess the suitability and reliability of the vacuum pump 500 in real industrial environments, such as semiconductor and photovoltaic processes. In addition, the unique arc-shaped detection plate 340 and sliding contact block 360 design ensure consistent and accurate temperature measurement while enhancing adaptability to different pump models and helping to optimize costs.

[0036] The above are all preferred embodiments of this utility model, and are not intended to limit the scope of protection of this utility model. Therefore, all equivalent changes made to the structure, shape and principle of this utility model should be covered within the scope of protection of this utility model.

Claims

1. A gas-cooled vacuum pump testing device, characterized in that: The device includes a workbench (100), a ventilation mechanism (200), and a testing mechanism (300). The ventilation mechanism (200) includes a connecting assembly (210), a pressure regulating box (220), and a pressure regulating valve (230). The connecting assembly (210) includes a first connecting pipe (211) and a second connecting pipe (212). The pressure regulating box (220) is fixedly installed on the workbench (100). A pressure regulating chamber (240) is opened inside the pressure regulating box (220). One end of the first connecting pipe (211) is connected to the air inlet of a vacuum pump (500), and the other end of the first connecting pipe (211) is connected to the pressure regulating chamber (240) of the pressure regulating box (220). The air outlet of the vacuum pump (500) is connected to the second connecting pipe (212). The pressure regulating valve (230) is installed on the first connecting pipe (211). The detection mechanism (300) includes a first pressure sensor (310) and a control terminal (320). The first pressure sensor (310) is installed on the second connecting pipe (212), and the control terminal (320) is fixedly installed on the workbench (100). The first pressure sensor (310) is electrically connected to the control terminal (320).

2. The air-cooled vacuum pump testing device according to claim 1, characterized in that: The vacuum pump (500) has multiple first temperature sensors (330) on its outer periphery, and the first temperature sensors (330) are electrically connected to the control terminal (320).

3. The air-cooled vacuum pump testing device according to claim 2, characterized in that: The detection mechanism (300) further includes a detection plate (340), which is arc-shaped. One end of the detection plate (340) is hinged to the worktable (100), and the other end is detachably fixed to the worktable (100). The detection plate (340) is sleeved on the upper periphery of the vacuum pump (500). A plurality of first temperature sensors (330) are fixedly installed on the detection plate (340), and the first temperature sensors (330) are evenly distributed along the circumference of the detection plate (340).

4. The air-cooled vacuum pump testing device according to claim 3, characterized in that: The detection mechanism (300) further includes a contact block (360) and a sliding rod (350). Multiple sliding rods (350) are slidably disposed on the detection plate (340). The inner end of the contact block (360) is arc-shaped. One end of the contact block (360) is fixedly connected to the sliding rod (350). The first temperature sensor (330) is fixedly installed on the inner end of the contact block (360).

5. The gas-cooled vacuum pump testing device according to any one of claims 1-4, characterized in that: The connecting assembly (210) further includes a third connecting pipe (213), one end of which is connected to the pressure regulating chamber (240) of the pressure regulating box (220), and the other end of which is connected to a test box (410). A heating wire (420) is provided inside the test box (410), and an air inlet is provided at one end of the test box (410). The heating wire (420) is electrically connected to the control terminal (320).

6. The air-cooled vacuum pump testing device according to claim 5, characterized in that: The pressure regulating chamber (240) is equipped with a filter core plate (430) at the air inlet end.

7. The air-cooled vacuum pump testing device according to claim 6, characterized in that: The connecting assembly (210) further includes a fourth connecting pipe (214), one end of which is connected to the air inlet of the test box (410), and a fan (440) is fixedly installed on the fourth connecting pipe (214), and the fan (440) is connected to the fourth connecting pipe (214).

8. The air-cooled vacuum pump testing device according to claim 5, characterized in that: The pressure regulating box (220) is also equipped with a humidifying nozzle (450). The spraying direction of the humidifying nozzle (450) is towards the pressure regulating chamber (240). The water inlet end of the humidifying nozzle (450) is connected to a water inlet pipe. The humidifying nozzle (450) is electrically connected to the control terminal (320).

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