A melt cycle shortening device
Patent Information
- Application Number
- CN202521747048.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-08-15
- Publication Date
- 2026-09-01
- Estimated Expiration
- 2035-08-15
AI Technical Summary
[0002]在半导体制造中，“熔料”通常与半导体材料制备过程中的高温熔融工艺相关，尤其是在制备单晶硅(如用于制造集成电路和分立器件的基础材料)等关键半导体材料时，在半导体行业中，“熔料”一般指的是将固态的导体原材料(如高纯度的多晶硅)加热至其熔点以上，使其成为液态(熔融状态)的过程或这一过程中的熔融物料本身，现有熔料设备，加热区域单一，熔料周期较长，实用性差
[0008]Compared with existing technologies, the beneficial effects of this utility model are as follows: the base ensures the overall stability of the equipment; the melting cylinder provides a carrier to ensure the melting effect of the material; the zoned heating structure allows for adjustment of one or more heating elements as needed, ensuring the applicability of the equipment; the addition of multiple heating components ensures faster melting of materials; the multi-segment heating structure employs zoned heating (independent temperature control in upper, middle, and lower zones), precisely controlling the temperature of different areas according to the melting characteristics of the material, thus accelerating the overall melting speed; the heating and stirring structure integrates dynamic stirring and heating, with a rotary stirring device integrated in the melting chamber, combined with local heating, to accelerate heat conduction and uniformity, shortening the melting time; the feed inlet facilitates material feeding; and the crushing structure allows for pre-crushing of raw materials, facilitating efficient subsequent melting operations and further shortening the melting cycle. It is convenient to use and highly practical.
Smart Images
Figure CN224707263U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of melting technology, specifically to a device for shortening the melting cycle. Background Technology
[0002] In semiconductor manufacturing, "molten material" is usually associated with the high-temperature melting process in the preparation of semiconductor materials, especially in the preparation of key semiconductor materials such as single-crystal silicon (such as the basic material used to manufacture integrated circuits and discrete devices). In the semiconductor industry, "molten material" generally refers to the process of heating solid conductor raw materials (such as high-purity polycrystalline silicon) above their melting point to make them liquid (molten state) or the molten material itself in this process. Existing molten material equipment has a single heating area, a long molten material cycle, and poor practicality. Utility Model Content
[0003] The purpose of this invention is to provide a device for shortening the melting cycle, so as to solve the problems mentioned in the background art.
[0004] To achieve the above objectives, this utility model provides the following technical solution: a device for shortening the melting cycle, comprising a base, a melting cylinder fixedly mounted on the surface of the base, three partitioned heating structures uniformly sleeved on the outer wall of the melting cylinder, a heating and stirring structure throughly mounted in the middle of the inner wall of the melting cylinder, a feed inlet fixedly connected to one side of the surface of the melting cylinder, and a crushing structure fixedly mounted on the side wall of the melting cylinder, the crushing structure being inserted into the feed inlet and connected to the feed inlet.
[0005] Preferably, each of the partition heating structures includes a sheath and a heating coil. The heating coil is sleeved on the outer wall of the molten material cylinder and is tightly fitted to the outer wall of the molten material cylinder. The outer wall of the heating coil is fixedly sleeved with a sheath, which is a heat insulation material.
[0006] Preferably, the heating and stirring structure includes a first motor, which is fixedly mounted on the middle of the surface of the melting cylinder. The motor shaft of the first motor passes through the melting cylinder and is fixedly mounted with a heat-conducting shaft. A heating plate is sleeved on the outer wall of the heat-conducting shaft. The heat-conducting shaft and the heating plate are clearance-fitted. Heat-conducting stirring blades are symmetrically mounted on both sides of the outer wall of the heat-conducting shaft. Both the heat-conducting shaft and the heat-conducting stirring blades are made of heat-conducting rigid materials.
[0007] Preferably, the crushing structure includes an electric telescopic rod, which is fixedly mounted on the side wall of the melting cylinder. The upper end of the piston rod of the electric telescopic rod is fixedly mounted with a feeding cylinder via a connecting plate. The upper end of the feeding cylinder is fixedly connected to a funnel. The inner wall of the funnel is fixedly connected to a second motor via a support plate. The lower end of the motor shaft of the second motor is fixedly mounted with a cutter.
[0008] Compared with existing technologies, the beneficial effects of this utility model are as follows: the base ensures the overall stability of the equipment; the melting cylinder provides a carrier to ensure the melting effect of the material; the zoned heating structure allows for adjustment of one or more heating elements as needed, ensuring the applicability of the equipment; the addition of multiple heating components ensures faster melting of materials; the multi-segment heating structure employs zoned heating (independent temperature control in upper, middle, and lower zones), precisely controlling the temperature of different areas according to the melting characteristics of the material, thus accelerating the overall melting speed; the heating and stirring structure integrates dynamic stirring and heating, with a rotary stirring device integrated in the melting chamber, combined with local heating, to accelerate heat conduction and uniformity, shortening the melting time; the feed inlet facilitates material feeding; and the crushing structure allows for pre-crushing of raw materials, facilitating efficient subsequent melting operations and further shortening the melting cycle. It is convenient to use and highly practical. Attached Figure Description
[0009] Figure 1 This is a three-dimensional structural schematic diagram of the present invention;
[0010] Figure 2 This is a planar sectional view of the present invention;
[0011] Figure 3 This is a three-dimensional schematic diagram of the fragment structure;
[0012] Figure 4 This is a three-dimensional schematic diagram of the heating and stirring structure.
[0013] In the diagram: 1-base, 2-melting cylinder, 3-zone heating structure, 31-sheath, 32-heating coil, 4-heating and stirring structure, 41-first motor, 42-heat-conducting shaft, 43-heating plate, 44-heat-conducting stirring blade, 5-feed inlet, 6-crushing structure, 61-electric telescopic rod, 62-connecting plate, 63-feeding cylinder, 64-funnel, 65-support plate, 66-second motor, 67-cutter. Detailed Implementation
[0014] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.
[0015] Please see Figure 1-4This utility model provides a device for shortening the melting cycle, including a base 1, a melting cylinder 2 fixedly mounted on the surface of the base 1, three partition heating structures 3 uniformly sleeved on the outer wall of the melting cylinder 2, a heating and stirring structure 4 through the middle of the inner wall of the melting cylinder 2, a feed inlet 5 fixedly connected to one side of the surface of the melting cylinder 2, and a crushing structure 6 fixedly mounted on the side wall of the melting cylinder 2, the crushing structure 6 being inserted into the feed inlet 5 and connected to the feed inlet 5.
[0016] The base 1 ensures the overall stability of the equipment, while the melting cylinder 2 provides a carrier to guarantee the melting effect of the material. The zoned heating structure 3 allows for adjustment of one or more heating elements as needed, ensuring the equipment's applicability. Multiple heating components ensure faster material melting. The multi-segment heating structure employs zoned heating (independent temperature control in upper, middle, and lower zones), precisely controlling the temperature of different areas according to the material's melting characteristics to accelerate the overall melting speed. The heating and stirring structure 4 integrates dynamic stirring and heating, incorporating a rotary stirring device within the melting chamber, while also using localized heating to accelerate heat conduction and uniformity, shortening melting time. The feed inlet 5 facilitates material feeding, and the crushing structure 6 pre-crushes the raw materials, facilitating efficient subsequent melting and further shortening the melting cycle. It is easy to use and highly practical.
[0017] Each zone heating structure 3 includes a sheath 31 and a heating coil 32. The heating coil 32 is sleeved on the outer wall of the molten material cylinder 2 and is tightly fitted to the outer wall of the molten material cylinder 2. The outer wall of the heating coil 32 is fixedly sleeved with the sheath 31, which is a heat insulation material.
[0018] One heating coil 32 can be turned on individually to effectively heat one area, or two or three heating coils 32 can be turned on simultaneously to ensure the heating effect. It can also perform zoned heating. The protective sleeve 31 can prevent staff from being burned.
[0019] The heating and stirring structure 4 includes a first motor 41, which is fixedly mounted on the middle of the surface of the melting cylinder 2. The motor shaft of the first motor 41 passes through the melting cylinder 2 and is fixedly mounted with a heat-conducting shaft 42. A heating plate 43 is sleeved on the outer wall of the heat-conducting shaft 42. The heat-conducting shaft 42 and the heating plate 43 are clearance-fitted. Heat-conducting stirring blades 44 are symmetrically mounted on both sides of the outer wall of the heat-conducting shaft 42. Both the heat-conducting shaft 42 and the heat-conducting stirring blades 44 are made of heat-conducting rigid materials.
[0020] When the melting process is underway, the first motor 41 can be turned on, which drives the heat-conducting shaft 42 to rotate and the heat-conducting stirring blade 44 to stir the raw materials. The heating plate 43 is turned on to transfer heat to the heat-conducting shaft 42 and the heat-conducting stirring blade 44, so that they can better contact the heating area and ensure a faster melting effect.
[0021] The crushing structure 6 includes an electric telescopic rod 61, which is fixedly mounted on the side wall of the melting cylinder 2. The upper end of the piston rod of the electric telescopic rod 61 is fixedly mounted with a feeding cylinder 63 via a connecting plate 62. The upper end of the feeding cylinder 63 is fixedly connected to a funnel 64. The inner wall of the funnel 64 is fixedly connected to a second motor 66 via a support plate 65. The lower end of the motor shaft of the second motor 66 is fixedly mounted with a cutter 67.
[0022] When large pieces of material need to be melted, the electric telescopic rod 61 is activated to retract the piston rod, and the connecting plate 62 drives the feeding cylinder 63 to be inserted into the feeding port 5, so that the large pieces of material are put into the funnel 64. At this time, the second motor 66 is activated to drive the cutter 67 to rotate at high speed, and after the material is chopped, it is put into the melting cylinder 2 through the feeding port 5 for zoned heating and melting.
[0023] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.
Claims
1. A device for shortening the melting cycle, characterized in that: Includes a base (1), on which a melting cylinder (2) is fixedly mounted. Three partitioned heating structures (3) are uniformly fitted on the outer wall of the melting cylinder (2). A heating and stirring structure (4) is installed through the middle of the inner wall of the melting cylinder (2). A feed inlet (5) is fixedly connected to one side of the surface of the melting cylinder (2). A crushing structure (6) is fixedly mounted on the side wall of the melting cylinder (2). The crushing structure (6) is inserted into the feed inlet (5) and connected to the feed inlet (5).
2. The melting cycle shortening device according to claim 1, characterized in that: Each of the partition heating structures (3) includes a sheath (31) and a heating coil (32). The heating coil (32) is sleeved on the outer wall of the molten material cylinder (2) and is tightly fitted to the outer wall of the molten material cylinder (2). The outer wall of the heating coil (32) is fixedly sleeved with a sheath (31), which is a heat insulation material.
3. The melting cycle shortening device according to claim 1, characterized in that: The heating and stirring structure (4) includes a first motor (41), which is fixedly mounted on the middle of the surface of the melting cylinder (2). The motor shaft of the first motor (41) passes through the melting cylinder (2) and is fixedly mounted with a heat-conducting shaft (42). A heating plate (43) is sleeved on the outer wall of the heat-conducting shaft (42). The heat-conducting shaft (42) and the heating plate (43) are in clearance fit. Heat-conducting stirring blades (44) are symmetrically mounted on both sides of the outer wall of the heat-conducting shaft (42). Both the heat-conducting shaft (42) and the heat-conducting stirring blades (44) are made of thermally conductive rigid materials.
4. The melting cycle shortening device according to claim 1, characterized in that: The crushing structure (6) includes an electric telescopic rod (61), which is fixedly mounted on the side wall of the melting cylinder (2). The upper end of the piston rod of the electric telescopic rod (61) is fixedly mounted with a feeding cylinder (63) via a connecting plate (62). The upper end of the feeding cylinder (63) is fixedly connected to a funnel (64). The inner wall of the funnel (64) is fixedly connected to a second motor (66) via a support plate (65). The lower end of the motor shaft of the second motor (66) is fixedly mounted with a cutter (67).