A pneumatic preheating device for a phosphorus testing furnace

Abstract

A pneumatic preheating device for a phosphorus testing furnace, relating to the field of artificial crystal preparation, is disclosed. This invention utilizes a cylinder located outside the furnace chamber to drive a preheating ring pusher to move left and right, which in turn drives the preheating ring to move left and right. To ensure the furnace chamber's airtightness, a sealing ring is installed between the preheating ring pusher and the water-cooling jacket. Cooling water in the cooling water channel on the water-cooling jacket is then used to cool the sealing ring, preventing high-temperature damage. This effectively solves the drawbacks of manual operation. This invention has advantages such as simple structure and ease of use, making it suitable for widespread promotion and application.

Description

Technical Field

[0001] This utility model relates to the field of artificial crystal preparation, specifically to a pneumatic preheating device for a phosphorus detection furnace. Background Technology

[0002] The quality inspection of polycrystalline silicon products is usually carried out by zone melting and pulling into single crystals, commonly known as "phosphorus testing." This phosphorus testing involves pulling polycrystalline silicon rods into single crystal rods using a phosphorus testing furnace through a zone melting process, ensuring a uniform distribution of phosphorus content within the single crystal rod. Resistivity, lifetime, and conductivity are then measured using methods specified by national standards. During this process, any impurities can affect the accuracy of the test and mislead the product quality assessment. Currently, in the process of using a phosphorus testing furnace to pull single crystal silicon rods through a zone melting process, a common preheating method to improve the heating efficiency of the raw material rod is to use a high-frequency coil to heat the raw silicon rod. However, since the raw silicon rod is a semiconductor in its solid state, the high-frequency coil cannot heat it efficiently. To improve the heating efficiency of the high-frequency coil, the applicant applied for a patent on August 17, 2011, entitled "A Zone Melting-Based Phosphorus Testing Device for Crystal Materials," patent number 201120315602.8. This application uses a preheating mechanism to heat the polycrystalline silicon testing rod through radiative heat transfer. However, the preheating mechanism in this patent requires manual operation in actual use and cannot be automated.

[0003] In summary, how to provide a pneumatic preheating device for phosphorus testing furnaces has become a long-term technical demand of those skilled in the art. Summary of the Invention

[0004] To overcome the shortcomings of the prior art, this utility model provides a pneumatic preheating device for a phosphorus testing furnace. This utility model effectively solves the drawbacks of manual operation by using a cylinder installed outside the furnace chamber to drive the preheating ring to move left and right.

[0005] To achieve the above-mentioned objectives, the present invention adopts the following technical solution: A pneumatic preheating device for a phosphorus testing furnace includes a pneumatic preheating mechanism. The pneumatic preheating mechanism includes a water-cooled jacket, a cylinder mounting base, a preheating ring, a cylinder, a preheating ring push rod, and a push plate. The cylinder mounting base is fixed behind the water-cooled jacket mounting base in the furnace chamber. A cylinder is mounted on the cylinder mounting base. The cylinder rod is connected to the rear end of the push plate, and the cylinder rod drives the push plate to move left and right. The front end of the push plate is connected to the right end of the preheating ring push rod. The preheating ring push rod is arranged parallel to the cylinder rod. The left end of the preheating ring push rod passes through the water-cooled jacket mounted on the water-cooled jacket mounting base and is located inside the furnace chamber. The left end of the preheating ring push rod is connected to the preheating ring, which is located above the high-frequency coil inside the furnace chamber. The preheating ring push rod moves left and right with the push plate.

[0006] The pneumatic preheating device for the phosphorus inspection furnace is provided with a position adjustment pad between the push plate and the preheating ring push rod.

[0007] The pneumatic preheating device for the phosphorus inspection furnace is described above. The water-cooled jacket is fixedly installed on the water-cooled jacket mounting base on the side of the furnace chamber 1. A sealing ring mounting hole is provided in the middle of the water-cooled jacket. At least one sealing ring is provided in the sealing ring mounting hole. The outer end face of the sealing ring is fixed in the sealing ring mounting hole by a sealing ring pressure ring. The inner edge of the sealing ring is sleeved on the outer edge surface of the preheating ring push rod.

[0008] The pneumatic preheating device for the phosphorus testing furnace has a gasket between the left end face of the sealing ring pressure ring and the right end face of the sealing ring.

[0009] The pneumatic preheating device for the phosphorus inspection furnace is provided with a cooling water channel inside the water-cooled jacket. The cooling water channel is located outside the sealing ring mounting hole and is connected to the inlet pipe and outlet pipe respectively installed on the water-cooled jacket.

[0010] The pneumatic preheating device for phosphorus inspection furnace is provided with a guide sleeve on the sealing ring pressure ring, and the guide hole in the middle of the guide sleeve is sleeved on the outer edge surface of the preheating ring push rod.

[0011] The pneumatic preheating device for the phosphorus testing furnace, wherein the cylinder is connected to an air source.

[0012] The pneumatic preheating device for the phosphorus inspection furnace, wherein the cylinder can be replaced by a hydraulic cylinder or an electric cylinder.

[0013] The pneumatic preheating device for the phosphorus testing furnace has a racket-shaped preheating ring.

[0014] The pneumatic preheating device for the phosphorus inspection furnace has a preheating ring fixed to the left end of the preheating ring push rod by a connecting clip.

[0015] By adopting the technical solution described above, this utility model has the following beneficial effects: This invention uses a cylinder located outside the furnace chamber to drive a preheating ring pusher to move left and right, which in turn drives the preheating ring to move left and right. To ensure the furnace chamber's airtightness, a sealing ring is installed between the preheating ring pusher and the water-cooling jacket. The sealing ring is then cooled by cooling water in the cooling water channel on the water-cooling jacket to prevent damage from high temperatures. This effectively solves the drawbacks of manual operation. This invention has the advantages of simple structure and ease of use, making it suitable for widespread promotion and application. Attached Figure Description

[0016] Figure 1 This is a three-dimensional structural schematic diagram of the present invention; Figure 2This is a cross-sectional structural schematic diagram of the pneumatic preheating mechanism in this utility model; Figure 3 This is a three-dimensional cross-sectional view of the preheating ring in the present invention when it is not in operation. Figure 4 This is a three-dimensional cross-sectional structural diagram of the preheating ring in the working state of this utility model; In the diagram: 1. Furnace chamber; 2. Upper shaft; 3. Pneumatic preheating mechanism; 301. Water inlet pipe; 302. Water cooling jacket; 303. Cooling water channel; 304. Cylinder mounting base; 305. Preheating ring; 306. Sealing ring; 307. Cylinder; 308. Preheating ring push rod; 309. Push plate; 310. Position adjustment pad; 311. Guide sleeve; 312. Sealing ring pressure ring; 313. Water outlet pipe; 4. Lower shaft; 5. High-frequency coil; 6. Water cooling jacket mounting base. Detailed Implementation

[0017] The present invention can be explained in more detail through the following embodiments. The purpose of disclosing the present invention is to protect all changes and improvements within the scope of the present invention. The present invention is not limited to the following embodiments. In the description of this utility model, it should be understood that the terms "center", "side", "length", "width", "height", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "side", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or component referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0018] In the description of this utility model, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0019] Combined with appendix Figures 1-4 The present invention provides a pneumatic preheating device for a phosphorus testing furnace, comprising a pneumatic preheating mechanism 3, such as... Figure 1 , 2As shown, the pneumatic preheating mechanism 3 includes a water-cooled jacket 302, a cylinder mounting base 304, a preheating ring 305, a cylinder 307, a preheating ring push rod 308, and a push plate 309. The cylinder mounting base 304 is fixed behind the water-cooled jacket mounting base 6 on the furnace chamber 1. The cylinder 307 is mounted on the cylinder mounting base 304. The cylinder rod of the cylinder 307 is connected to the rear end of the push plate 309, and the cylinder rod drives the push plate 309 to move left and right. The front end of the push plate 309 is connected to the right end of the preheating ring push rod 308. The preheating ring push rod 308 is arranged parallel to the cylinder rod of the cylinder 307. The left end passes through the water-cooled jacket 302 set on the water-cooled jacket mounting base 6 and is located inside the furnace chamber 1. The left end of the preheating ring push rod 308 is connected to the preheating ring 305. The preheating ring 305 is located above the high-frequency coil 5 inside the furnace chamber 1 and the preheating ring 305 is always located inside the furnace chamber 1. Above the preheating ring 305, there is an upper shaft 2 that moves up and down. The upper shaft 2 is equipped with a clamping seat. The material bar is located in the clamping seat. Below the high-frequency coil 5, there is a lower shaft 4 that moves up and down. The lower shaft 4 is concentric with the center hole of the high-frequency coil 5 and the upper shaft 2. The preheating ring push rod 308 moves left and right with the push plate 309.

[0020] When implementing, such as Figure 2 As shown, a position adjustment shim 310 is provided between the push plate 309 and the preheating ring push rod 308. The position adjustment shim 310 is used to adjust the coaxiality of the preheating ring push rod 308 and the water cooling jacket 302, ensuring that the preheating ring push rod 308 can slide smoothly left and right within the water cooling jacket 302 and preventing jamming. In specific implementation, as shown... Figure 2 As shown, the right end of the preheating ring push rod 308 is provided with an external thread, and the position adjustment pad 310 is provided with an internal thread. The external thread and the internal thread are connected by a thread. In order to lock the position of the external thread and the internal thread, a locking nut is provided at the left end of the external thread. The position of the external thread and the internal thread is locked by locking the position of the external thread and the internal thread. Then, the connection position between the position adjustment pad 310 and the push plate 309 is adjusted by setting the elongated hole in the push plate 309 to ensure that the preheating ring push rod 308 will not get stuck during left and right movement.

[0021] Furthermore, such as Figure 1 , 2 As shown in Figures 3 and 4, the water-cooled jacket 302 is fixedly mounted on the water-cooled jacket mounting base 6 on the side of the furnace chamber 1. A sealing ring mounting hole is provided in the middle of the water-cooled jacket 302. At least one sealing ring 306 is provided in the sealing ring mounting hole. The outer end face of the sealing ring 306 is fixed in the sealing ring mounting hole by the sealing ring pressure ring 312. The inner edge surface of the sealing ring 306 is sleeved on the outer edge surface of the preheating ring push rod 308.

[0022] Furthermore, such as Figure 2As shown, a gasket is provided between the left end face of the sealing ring pressure ring 312 and the right end face of the sealing ring 306. The gasket ensures that the sealing ring pressure ring 312 presses tightly against the sealing ring 306.

[0023] Furthermore, such as Figure 2 , 3 As shown in Figure 4, the water-cooled jacket 302 is provided with a cooling water channel 303. The cooling water channel 303 is located outside the sealing ring mounting hole to cool the sealing ring 306 and prevent the sealing ring 306 from being damaged by high temperature. The cooling water channel 303 is connected to the water inlet pipe 301 and the water outlet pipe 313 provided on the water-cooled jacket 302. The water inlet pipe 301 and the water outlet pipe 313 are connected to the water inlet pipe and the water outlet pipe outside the furnace room, respectively.

[0024] Furthermore, such as Figure 2 , 3 As shown in Figure 4, the sealing ring pressure ring 312 is provided with a guide sleeve 311. The guide hole in the middle of the guide sleeve 311 is sleeved on the outer edge surface of the preheating ring push rod 308. In practice, an auxiliary ball can be provided in the inner hole of the guide sleeve to improve the smoothness of sliding between the preheating ring push rod 308 and the guide sleeve 311.

[0025] Furthermore, in practice, the cylinder 307 is connected to a gas source. To achieve automated operation during preheating, the cylinder 307 can be centrally controlled through the control system of the phosphorus testing furnace.

[0026] Furthermore, the replacement structure for cylinder 307 in this utility model is a hydraulic cylinder or an electric cylinder. That is to say, cylinder 307 in this utility model can also be replaced by a hydraulic cylinder or an electric cylinder, and this solution is also protected by this utility model.

[0027] Furthermore, such as Figure 1 , 2 As shown in Figures 3 and 4, the preheating ring 305 has a racket-shaped structure.

[0028] Furthermore, such as Figure 1 , 2 As shown in Figures 3 and 4, the preheating ring 305 is fixed to the left end of the preheating ring push rod 308 by a connecting clip.

[0029] In practical application, when the preheating ring 305 is needed to preheat the raw material bar, the cylinder 307 is activated. The cylinder 307 drives the push plate 309 to move to the left, and the push plate 309 drives the preheating ring push rod 308 to move to the left simultaneously. At this time, the preheating ring 305, located at the left end of the preheating ring push rod 308, moves to the left under the drive of the preheating ring push rod 308 until the preheating ring 305 reaches above the high-frequency coil 5. Then the cylinder 307 stops operating. Then the upper shaft 2 is activated and moves downward. When the lower end of the raw material bar fixed on the upper shaft 2 approaches the preheating ring 305, the downward movement of the upper shaft 2 stops. At this time, the position of the preheating ring 305 is as follows: Figure 1 , 4 As shown, the high-frequency power supply is then turned on, and the preheating ring 305 is heated through the high-frequency coil 5. The preheating ring 305 radiates heat onto the raw material bar, at which point the lower end of the raw material bar begins to heat up and turn red until it melts.

[0030] When the preheating ring 305 is no longer needed to heat the raw material bar, the cylinder 307 is restarted. The cylinder 307 drives the push plate 309 to move to the right, and the push plate 309 drives the preheating ring push rod 308 to move to the right simultaneously. At this time, the preheating ring 305, located at the left end of the preheating ring push rod 308, moves to the right under the drive of the preheating ring push rod 308 until the preheating ring 305 leaves the top of the high-frequency coil 5. Then the cylinder 307 stops operating. At this time, the position of the preheating ring 305 is as follows: Figure 3 As shown, the phosphorus testing furnace can then begin the normal drawing process.

[0031] The parts not detailed above are existing technologies and therefore have not been described in detail.

[0032] The embodiments selected herein for the purposes of disclosing this invention are currently considered suitable; however, it should be understood that this invention is intended to include all variations and modifications of the embodiments that fall within the scope of this concept and invention.

Claims

1. A pneumatic preheating device for a phosphorus inspection furnace, comprising a pneumatic preheating mechanism (3), said pneumatic preheating mechanism (3) comprising a water-cooled jacket (302), a cylinder mounting base (304), a preheating ring (305), a cylinder (307), a preheating ring push rod (308), and a push plate (309), characterized in that: The cylinder mounting base (304) is fixed behind the water-cooled jacket mounting base (6) on the furnace chamber (1). A cylinder (307) is set on the cylinder mounting base (304). The cylinder rod of the cylinder (307) is connected to the rear end of the push plate (309) and the cylinder rod drives the push plate (309) to move left and right. The front end of the push plate (309) is connected to the right end of the preheating ring push rod (308). The preheating ring push rod (308) is set parallel to the cylinder rod of the cylinder (307). The left end of the preheating ring push rod (308) passes through the water-cooled jacket (302) set on the water-cooled jacket mounting base (6) and is located inside the furnace chamber (1). The left end of the preheating ring push rod (308) is connected to the preheating ring (305). The preheating ring (305) is located above the high-frequency coil (5) inside the furnace chamber (1). The preheating ring push rod (308) moves left and right with the push plate (309).

2. The pneumatic preheating device for a phosphorus testing furnace according to claim 1, characterized in that: A position adjustment pad (310) is provided between the push plate (309) and the preheating ring push rod (308).

3. The pneumatic preheating device for a phosphorus testing furnace according to claim 1, characterized in that: The water-cooled jacket (302) is fixedly installed on the water-cooled jacket mounting base (6) on the side of the furnace chamber (1). A sealing ring mounting hole is provided in the middle of the water-cooled jacket (302). At least one sealing ring (306) is provided in the sealing ring mounting hole. The outer end face of the sealing ring (306) is fixed in the sealing ring mounting hole by the sealing ring pressure ring (312). The inner edge of the sealing ring (306) is sleeved on the outer edge of the preheating ring push rod (308).

4. The pneumatic preheating device for a phosphorus testing furnace according to claim 3, characterized in that: A gasket is provided between the left end face of the sealing ring pressure ring (312) and the right end face of the sealing ring (306).

5. The pneumatic preheating device for a phosphorus testing furnace according to claim 3, characterized in that: The water cooling jacket (302) is provided with a cooling water channel (303), which is located outside the sealing ring mounting hole. The cooling water channel (303) is connected to the inlet pipe (301) and the outlet pipe (313) provided on the water cooling jacket (302).

6. The pneumatic preheating device for a phosphorus testing furnace according to claim 3, characterized in that: The sealing ring pressure ring (312) is provided with a guide sleeve (311), and the guide hole in the middle of the guide sleeve (311) is sleeved on the outer edge surface of the preheating ring push rod (308).

7. The pneumatic preheating device for a phosphorus testing furnace according to claim 1, characterized in that: The cylinder (307) is connected to an air source.

8. The pneumatic preheating device for a phosphorus testing furnace according to claim 1, characterized in that: The cylinder (307) can be replaced by a hydraulic cylinder or an electric cylinder.

9. The pneumatic preheating device for a phosphorus testing furnace according to claim 1, characterized in that: The preheating ring (305) has a racket-shaped structure.

10. The pneumatic preheating device for a phosphorus testing furnace according to claim 1, characterized in that: The preheating ring (305) is fixed to the left end of the preheating ring push rod (308) by a connecting clip.

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