Temperature-controlled cavity structure

Abstract

The utility model provides a kind of temperature control cavity structure, including temperature control gall and hollow tube assembly.Temperature control gall is equipped with sealed cavity.Hollow tube assembly is located in sealed cavity, and is equipped with at least one fluid inlet and at least one fluid outlet.Each fluid inlet and each fluid outlet are all worn in temperature control gall, and are sealed with temperature control gall cooperation.The hollow tube structure in the application is tubular structure and is located in sealed cavity, so that the heat exchange area between hollow tube assembly and gas in sealed cavity increases, and then the heat exchange rate of hollow tube assembly is improved, the sealed cavity can be heated or cooled rapidly, meet temperature control requirement, improve the practicability of temperature control cavity structure.In addition, hollow tube assembly is installed on temperature control gall by the mode of wearing, the connecting area between hollow tube assembly and temperature control gall reduces, the risk of leakage of sealed cavity also correspondingly reduces, the life and stability of temperature control cavity structure for long-term use are improved, safety performance is enhanced, and manufacturing cost is reduced.

Description

Technical Field

[0001] This utility model relates to the field of temperature control technology, and in particular to a temperature control cavity structure. Background Technology

[0002] Temperature control chambers in high-temperature equipment are core components in high-temperature processes such as industrial heat treatment, material sintering, and semiconductor manufacturing. Their main function is to provide a stable high-temperature environment and achieve precise temperature control. These chambers typically need to operate stably for extended periods within a temperature range of 800-1800℃, while also meeting stringent requirements such as rapid heating and cooling, temperature uniformity, energy efficiency, and environmental friendliness. However, existing high-temperature equipment temperature control chambers suffer from low cooling efficiency, making it difficult to meet these temperature control requirements. Utility Model Content

[0003] Therefore, it is necessary to provide a temperature control cavity structure to address the problem that the existing high-temperature equipment temperature control cavity has low cooling efficiency and is difficult to meet temperature control requirements.

[0004] The technical solution is as follows:

[0005] On the one hand, a temperature-controlled cavity structure is provided, including:

[0006] The temperature-controlled inner tank has a sealed cavity;

[0007] The hollow tube assembly is located inside the sealed cavity and has at least one fluid inlet and at least one fluid outlet. Each of the fluid inlets and each of the fluid outlets passes through the temperature control tank and is sealed to the temperature control tank.

[0008] In the temperature control cavity structure described in the above embodiments, the hollow tube assembly is a tubular structure located within the sealed cavity. This increases the heat exchange area between the hollow tube assembly and the gas within the sealed cavity, thereby improving the heat exchange rate of the hollow tube assembly. This allows the sealed cavity to heat up or cool down rapidly, meeting temperature control requirements and enhancing the practicality of the temperature control cavity structure. Furthermore, the hollow tube assembly is installed on the temperature control chamber via a through-hole method, reducing the connection area between the hollow tube assembly and the temperature control chamber. This correspondingly reduces the risk of leakage from the sealed cavity, improving the long-term lifespan and stability of the temperature control cavity structure, enhancing safety performance, and reducing manufacturing costs.

[0009] The technical solution will be further explained below:

[0010] In one embodiment, the temperature-controlled bladder includes a bladder body and a bladder cap, the bladder cap being disposed on the bladder body and forming the sealed cavity together with the bladder body.

[0011] In one embodiment, the hollow tube assembly includes at least one first hollow tube, one end of each first hollow tube being configured as the fluid inlet and passing through the bladder body, and the other end of each first hollow tube being configured as the fluid outlet and passing through the bladder body.

[0012] In one embodiment, each of the first hollow tubes is arranged within the sealed cavity to form an internal space.

[0013] In one embodiment, the hollow tube assembly includes at least one second hollow tube, each second hollow tube being installed inside the cap, one end of each second hollow tube being configured as the fluid inlet and passing through the cap, and the other end of each second hollow tube being configured as the fluid outlet and passing through the cap.

[0014] In one embodiment, there are two caps, which are respectively placed on both ends of the gallbladder body along its own axis.

[0015] In one embodiment, one of the two caps is fitted with at least one of the second hollow tubes.

[0016] In one embodiment, both of the bladder caps are fitted with at least one of the second hollow tubes.

[0017] In one embodiment, the outer wall of the temperature-controlled tank is provided with at least one fluid inlet / outlet, and each of the fluid inlets / outlets is in communication with the sealed cavity.

[0018] In one embodiment, the temperature-controlled bladder includes a bladder body and a bladder cap, and at least one of the bladder body and the bladder cap is provided with the fluid inlet / outlet. Attached Figure Description

[0019] The accompanying drawings, which form part of this application, are used to provide a further understanding of this application. The illustrative embodiments of this application and their descriptions are used to explain this application and do not constitute an undue limitation of this application.

[0020] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0021] Figure 1 This is a schematic diagram of the temperature control cavity structure of one embodiment.

[0022] Figure 2This is a schematic diagram of the temperature control cavity structure in another embodiment.

[0023] Figure 3 This is a schematic diagram of the temperature control cavity structure in another embodiment.

[0024] Explanation of reference numerals in the attached figures:

[0025] 10. Temperature control cavity structure; 100. Temperature control chamber; 110. Sealed cavity; 120. Chamber body; 130. Chamber cover; 141. Fluid inlet / outlet; 200. Hollow tube assembly; 211. Fluid inlet; 212. Fluid outlet; 220. First hollow tube; 230. Internal space; 240. Second hollow tube. Detailed Implementation

[0026] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0027] To address the problem of low cooling efficiency in existing high-temperature equipment temperature control chambers, which makes it difficult to meet temperature control requirements, the inventors conducted research and analysis and found that the most common high-temperature equipment temperature control chambers on the market currently include the following types:

[0028] 1. Refractory brick or insulation cotton cavity: It relies on traditional insulation materials to achieve heat preservation, but the heat exchange area is small and there is a lack of active cooling structure, resulting in low heat dissipation efficiency. In addition, dust is easy to accumulate inside the cavity, making it difficult to meet the requirements of high cleanliness.

[0029] II. Single-layer metal liner structure: Although the structure is simple, it also suffers from insufficient heat exchange area, which makes it impossible to achieve efficient cooling. Prolonged high-temperature operation can easily lead to metal fatigue and affect service life.

[0030] III. Double-layered liner with gap flow channel: The gap between the two metal liners forms a fluid channel, which improves heat dissipation capacity, but has the following defects: 1. Many splicing points, complex manufacturing process, difficult welding or sealing, easy fluid leakage, and high safety hazards; 2. Low fluid replacement efficiency, unreasonable flow channel design, reliance on high flow rate fluid supply, and high energy consumption; 3. Limited heat exchange area, insufficient effective heat transfer area between the two liner layers, and the cooling efficiency is still not ideal.

[0031] Therefore, it can be seen that the above structures all suffer from low cooling efficiency and difficulty in meeting temperature control requirements. Based on this, the temperature control cavity structure 10 of various embodiments of this application is designed and proposed to solve the above-mentioned technical problems.

[0032] like Figure 1 As shown, in one embodiment, a temperature-controlled cavity structure 10 is provided, including a temperature-controlled inner chamber 100 and a hollow tube assembly 200. The temperature-controlled inner chamber 100 has a sealed cavity 110. The hollow tube assembly 200 is located within the sealed cavity 110 and has at least one fluid inlet 211 and at least one fluid outlet 212. Each fluid inlet 211 and each fluid outlet 212 passes through the temperature-controlled inner chamber 100 and is sealed to it.

[0033] In the temperature control cavity structure 10 described above, the hollow tube assembly 200 is a tubular structure located within the sealed cavity 110. This increases the heat exchange area between the hollow tube assembly 200 and the gas within the sealed cavity 110, thereby improving the heat exchange rate of the hollow tube assembly 200. This allows the sealed cavity 110 to rapidly heat up or cool down, meeting temperature control requirements and enhancing the practicality of the temperature control cavity structure 10. Furthermore, the hollow tube assembly 200 is installed on the temperature control tank 100 via a through-hole method, reducing the connection area between the hollow tube assembly 200 and the temperature control tank 100. This correspondingly reduces the risk of leakage in the sealed cavity 110, improving the long-term lifespan and stability of the temperature control cavity structure 10, enhancing safety performance, and reducing manufacturing costs.

[0034] Specifically, in this embodiment, the number and location of fluid inlets 211 and the number and location of fluid outlets 212 can be flexibly adjusted according to actual usage needs.

[0035] like Figure 1 and Figure 2 As shown, optionally, the temperature-controlled chamber 100 includes a chamber body 120 and a chamber cap 130. The chamber cap 130 is disposed on the chamber body 120 and together with the chamber body 120 forms a sealed cavity 110. In this way, the chamber cap 130 can be opened relative to the chamber body 120 to facilitate placing items to be processed into the sealed cavity 110 or removing processed items from the sealed cavity 110, thereby improving the practicality of the temperature-controlled cavity structure 10.

[0036] like Figure 1 As shown, in one embodiment, the hollow tube assembly 200 includes at least one first hollow tube 220. One end of each first hollow tube 220 is configured as a fluid inlet 211 and passes through the inner body 120, and the other end of each first hollow tube 220 is configured as a fluid outlet 212 and passes through the inner body 120. In this way, the first hollow tube 220 can be stably and reliably fixed on the inner body 120 and exchange heat with the gas in the sealed cavity 110, thereby improving the reliability of the temperature control cavity structure 10.

[0037] The number and shape of the first hollow tubes 220 can be flexibly adjusted according to actual usage needs. The arrangement of the first hollow tubes 220 can also be flexibly adjusted according to actual usage needs. For example, the first hollow tubes 220 can be arranged in a planar manner or in a stacked manner.

[0038] like Figure 1 As shown, optionally, each of the first hollow tubes 220 surrounds the sealed cavity 110 to form an internal space 230. In this way, the first hollow tubes 220 can simultaneously exchange heat with the surrounding area of ​​the internal space 230, ensuring the temperature uniformity of the internal space 230 and improving the practicality of the temperature control cavity structure 10.

[0039] The shape of the internal space 230 can be flexibly adjusted according to actual usage needs. For example, the shape of the internal space 230 can be cylindrical, spherical, rectangular, or other shapes.

[0040] It should be noted that the internal space 230 can be formed by bending and winding a single first hollow tube 220, or it can be formed by two or more first hollow tubes 220 working together. Specifically, in this embodiment, there is one first hollow tube 220, and the middle part of the first hollow tube 220 is bent and extended along a spiral direction to form the internal space 230.

[0041] Specifically, in this embodiment, at least one of the bladder body 120 and the first hollow tube 220 can be deformed to ensure that the first hollow tube 120 can be installed on the bladder body 220.

[0042] like Figure 1 As shown, in one embodiment, the hollow tube assembly 200 includes at least one second hollow tube 240. Each second hollow tube 240 is installed inside the cap 130. One end of each second hollow tube 240 is configured as a fluid inlet 211 and passes through the cap 130, and the other end of each second hollow tube 240 is configured as a fluid outlet 212 and passes through the cap 130. In this way, the second hollow tube 240 can exchange heat with the gas in the sealed cavity 110 to improve the heating and cooling rate of the sealed cavity 110. At the same time, the second hollow tube 240 can also exchange heat with the cap 130 to avoid the risk of burns or fire caused by the cap 130 overheating, thereby improving the safety of the temperature control cavity structure 10.

[0043] The cap 130 can be attached to the bladder body 120 by insertion, snap-fit, screwing, or other means. The number of caps 130 can be flexibly adjusted according to actual needs. Specifically, in this embodiment, there are two caps 130, which are respectively attached to both ends of the bladder body 120 along its own axis. In other embodiments, the two caps 130 can also be assembled to the bladder body 120 in other ways, such as one cap being attached to the bladder body 120 and the other being integrally formed with the bladder body 120.

[0044] The number and shape of the second hollow tubes 240 can be flexibly adjusted according to actual usage needs. The arrangement of the second hollow tubes 240 can also be flexibly adjusted according to actual usage needs. Specifically, in this embodiment, the second hollow tubes 240 are arranged in a planar configuration.

[0045] like Figure 1 As shown, optionally, each of the two caps 130 is fitted with at least one second hollow tube 240.

[0046] like Figure 2 As shown, optionally, neither of the two liner caps 130 is fitted with a second hollow tube 240.

[0047] like Figure 3 As shown, optionally, one of the two caps 130 is fitted with at least one second hollow tube 240. The other of the two caps 130 is not fitted with a second hollow tube 240.

[0048] In other embodiments, a second hollow tube 240 may be installed on the cap 130, and the first hollow tube 220 may not be installed on the body 120.

[0049] like Figure 1 As shown, in one embodiment, the outer wall of the temperature control chamber 100 is provided with at least one fluid inlet / outlet 141. Each fluid inlet / outlet 141 is in communication with the sealed cavity 110. Thus, the fluid inlet / outlet 141 can be used to deliver gas into the sealed cavity 110 and can also be used to collect gas in the sealed cavity 110, improving the practicality of the temperature control chamber structure 10.

[0050] Specifically, in this embodiment, the reaction gas can be delivered into the sealed cavity 110 through the fluid inlet / outlet 141 so that the reaction gas reacts with the processed item in the sealed cavity 110. Alternatively, the gas after reaction in the sealed cavity 110 can be collected through the fluid inlet / outlet 141. Furthermore, the sealed cavity 110 can be purged and cooled by delivering purge gas through a portion of the fluid inlet / outlet 141.

[0051] The number and location of fluid inlets and outlets 141 can be flexibly adjusted according to actual usage needs.

[0052] like Figure 1 As shown, optionally, the temperature-controlled tank 100 includes a tank body 120 and a tank cover 130. At least one of the tank body 120 and the tank cover 130 is provided with a fluid inlet / outlet 141.

[0053] Specifically, in this embodiment, the bladder body 120 is provided with at least one fluid inlet / outlet 141. The bladder cover 130 is provided with at least one fluid inlet / outlet 141.

[0054] In one embodiment, a temperature control device is also provided, including the temperature control cavity structure 10 of any of the above embodiments. Thus, the temperature control device includes the temperature control cavity structure 10 and has the technical effects of the temperature control cavity structure 10, which will not be described in detail here.

[0055] In the description of this application, it should be understood that if terms such as "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" appear, these terms indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0056] Furthermore, where the terms "first" and "second" appear, these terms are for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined with "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, where the term "multiple" appears, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0057] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0058] In this application, unless otherwise expressly specified and limited, the use of descriptions such as "above" or "below" the second feature indicates that the first and second features are in direct contact or indirect contact via an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. Similarly, "below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0059] It should be noted that if an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. If an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. If so, the terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used in this application are for illustrative purposes only and do not represent the only possible implementation.

[0060] It should also be understood that, in interpreting the connection or positional relationships of components, although not explicitly described, connection and positional relationships are interpreted to include a range of error, which should be within the acceptable deviation range of a specific value as determined by a person skilled in the art. For example, "approximately," "about," or "substantially" can mean within one or more standard deviations, without limitation herein.

[0061] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0062] The above embodiments merely illustrate several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. A temperature-controlled cavity structure, characterized in that, include: The temperature-controlled inner tank has a sealed cavity; The hollow tube assembly is located inside the sealed cavity and has at least one fluid inlet and at least one fluid outlet. Each of the fluid inlets and each of the fluid outlets passes through the temperature control tank and is sealed to the temperature control tank.

2. The temperature control cavity structure according to claim 1, characterized in that, The temperature-controlled bladder includes a bladder body and a bladder cap. The bladder cap is placed on the bladder body and together with the bladder body, forms the sealed cavity.

3. The temperature control cavity structure according to claim 2, characterized in that, The hollow tube assembly includes at least one first hollow tube, one end of each first hollow tube is configured as the fluid inlet and passes through the bladder body, and the other end of each first hollow tube is configured as the fluid outlet and passes through the bladder body.

4. The temperature control cavity structure according to claim 3, characterized in that, Each of the first hollow tubes is arranged within the sealed cavity to form an internal space.

5. The temperature control cavity structure according to claim 2, characterized in that, The hollow tube assembly includes at least one second hollow tube, each second hollow tube is installed inside the cap, one end of each second hollow tube is configured as the fluid inlet and passes through the cap, and the other end of each second hollow tube is configured as the fluid outlet and passes through the cap.

6. The temperature control cavity structure according to claim 5, characterized in that, The number of gallbladder caps is two, and the two gallbladder caps are respectively placed on both ends of the gallbladder body along its own axis.

7. The temperature control cavity structure according to claim 6, characterized in that, One of the two caps is fitted with at least one of the second hollow tubes.

8. The temperature control cavity structure according to claim 6, characterized in that, Both of the aforementioned caps are fitted with at least one of the second hollow tubes.

9. The temperature control cavity structure according to any one of claims 1 to 8, characterized in that, The outer wall of the temperature-controlled tank is provided with at least one fluid inlet / outlet, and each fluid inlet / outlet is connected to the sealed cavity.

10. The temperature control cavity structure according to claim 9, characterized in that, The temperature-controlled bladder includes a bladder body and a bladder cap, and at least one of the bladder body and the bladder cap is provided with the fluid inlet / outlet.

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