A magnetron sputtering coating thickness testing device

Abstract

This utility model discloses a magnetron sputtering coating thickness testing device, including a support base. Multiple magnetron tube bodies are evenly distributed in a ring around the outer side of the support base. A film thickness detection device is located at the top of the support base, between the multiple magnetron tube bodies. Multiple detection holes are evenly distributed in a ring around the top of the film thickness detection device. A laser rangefinder aligned with the detection holes is located at the bottom inside the film thickness detection device. A servo motor is located at the bottom center inside the film thickness detection device. A rotating disk is located at the top power end of the servo motor. A through hole matching the detection holes is located at the top of the rotating disk, and a sealing gasket is located between the multiple through holes at the top of the rotating disk. The advantages of this utility model compared to existing technologies are: real-time detection: the film thickness detection device is integrated into the middle of the support base, allowing for real-time acquisition of film thickness data during the coating process via a laser rangefinder, eliminating the need for separate testing before and after coating, simplifying the operation process, and improving experimental efficiency; excellent sealing performance.

Description

Technical Field

[0001] This utility model relates to the field of magnetron sputtering coating technology, specifically to a magnetron sputtering coating thickness testing device. Background Technology

[0002] Magnetron sputtering is a physical vapor deposition technique that uses an electromagnetic field applied in a vacuum environment to bombard the surface of a solid target with argon ions, causing the sputtered target atoms to deposit onto the workpiece to form a thin film. Its core processes include vacuum environment establishment, plasma generation, target atom sputtering, and substrate deposition, offering advantages such as controllable coating thickness and low substrate temperature rise.

[0003] In magnetron sputtering coating experiments, traditional testing methods cannot measure film thickness during coating; the sample thickness must be measured separately before and after coating. This method is not only cumbersome and time-consuming, but also prone to significant errors due to factors such as sample position shifts and environmental interference during coating, making it difficult to accurately reflect real-time changes in film thickness during coating and affecting experimental efficiency and product quality control. Utility Model Content

[0004] The technical problem to be solved by this utility model is to provide a magnetron sputtering coating thickness testing device, addressing the shortcomings mentioned in the background art.

[0005] To solve the above-mentioned technical problems, the technical solution provided by this utility model is: a magnetron sputtering coating film thickness testing device, including a support base, wherein a plurality of magnetron tube bodies are evenly distributed in a ring on the outer side of the support base, characterized in that: a film thickness detection device is provided at the top of the support base in the middle of the plurality of magnetron tube bodies; The support base is provided with a liftable support structure on one side, and the top of the liftable support structure is provided with a product fixing frame with damping rotation. The film thickness detection device has multiple detection holes evenly distributed in a ring at the top. The bottom of the film thickness detection device is equipped with a laser rangefinder aligned with the detection holes. The bottom center of the film thickness detection device is equipped with a servo motor. The top power end of the servo motor is equipped with a rotating disk. The top of the rotating disk is equipped with a through hole that matches the detection holes. A sealing gasket is provided between the multiple through holes on the top of the rotating disk.

[0006] Furthermore, the inner top of the film thickness detection device is provided with limiting sealing ring grooves located inside and outside the detection hole, the top of the rotating disk is provided with limiting ring blocks located inside and outside the through hole, and the inner side of the limiting sealing ring groove is provided with a sealing rubber pad.

[0007] Furthermore, an air quality sensor is provided inside the film thickness detection device.

[0008] Furthermore, the liftable support structure includes a support shell, an electric push rod is provided at the bottom of the support shell, a lifting rod extending to the outside of the support shell is provided at the power end of the electric push rod, a support top block is provided at the top of the lifting rod, and a support rod fixedly connected to the product fixing frame is provided at the top of the support top block with damping rotation.

[0009] Furthermore, the top two sides of the supporting shell are provided with supporting blocks, the top two sides of the supporting blocks are provided with limiting rods that penetrate the supporting blocks, and the supporting blocks are provided with linear bearings that fit the limiting rods.

[0010] The advantages of this utility model compared with the prior art are: real-time detection: the film thickness detection device is integrated in the middle of the support base, and the film thickness data can be collected in real time through the laser rangefinder during the coating process. There is no need for separate testing before and after coating, which simplifies the operation process and improves the experimental efficiency. Excellent sealing performance: The rotating disc is equipped with a sealing gasket, which, together with the limiting sealing ring groove and sealing rubber gasket of the film thickness detection equipment, can effectively isolate external environmental interference, ensure the sealing of the detection chamber, and improve the testing accuracy. Attached Figure Description

[0011] Figure 1 This is a schematic diagram of the first structure of a magnetron sputtering coating thickness testing device.

[0012] Figure 2 This is a schematic diagram of the second structure of a magnetron sputtering coating thickness testing device.

[0013] Figure 3 This is a side cross-sectional view of a magnetron sputtering coating thickness testing device.

[0014] Figure 4 This is a cross-sectional structural diagram of a magnetron sputtering coating thickness testing device.

[0015] Figure 5 This is a top view schematic diagram of the rotating disk structure of a magnetron sputtering coating thickness testing device.

[0016] As shown in the figure: 1. Support base; 2. Magnetron body; 3. Film thickness detection equipment; 4. Liftable support structure; 5. Product fixing frame; 6. Detection hole; 7. Laser rangefinder; 8. Servo motor; 9. Rotating disk; 10. Through hole; 11. Limiting sealing ring groove; 12. Limiting ring block; 13. Support shell; 14. Electric push rod; 15. Lifting rod; 16. Support top block; 17. Support rod; 18. Limiting rod; 19. Support block; 20. Linear bearing; 21. Sealing gasket; 22. Air quality sensor; 23. Sealing rubber gasket. Detailed Implementation

[0017] The present invention will now be described in further detail with reference to the accompanying drawings.

[0018] Combined with appendix Figure 1-5 A magnetron sputtering coating thickness testing device includes a support base 1, with multiple magnetron tube bodies 2 evenly distributed in a ring on the outer side of the support base 1, and a film thickness detection device 3 located at the top of the support base 1 between the multiple magnetron tube bodies 2. Film thickness detection equipment: The film thickness detection equipment 3 has multiple detection holes 6 evenly distributed in a ring at the top. The bottom of the film thickness detection equipment 3 is equipped with a laser rangefinder 7 aligned with the detection holes 6. The bottom center of the film thickness detection equipment 3 is equipped with a servo motor 8. The top power end of the servo motor 8 is equipped with a rotating disk 9. The top of the rotating disk 9 is equipped with a through hole 10 that matches the detection holes 6. That is, the servo motor 8 drives the rotating disk 9 to rotate periodically, so that the through hole 10 and the detection hole 6 are alternately aligned and misaligned: when aligned, laser ranging is completed.

[0019] The rotating disk 9 has a sealing gasket 21 located between multiple through holes 10 at its top. The film thickness detection device 3 has a limiting sealing ring groove 11 located inside and outside the detection hole 6 at its top inner side. The rotating disk 9 has a limiting ring block 12 located inside and outside the through hole 10 at its top. The limiting sealing ring groove 11 has a sealing rubber gasket 23 located inside. When misaligned, the sealing gasket 21, the limiting sealing ring groove 11 and the sealing rubber gasket 23 form a sealing structure, effectively isolating external interference.

[0020] The film thickness detection device 3 is equipped with an air quality sensor 22 inside. The air quality sensor 22 can detect parameters including gas composition and impurity content. Because magnetron sputtering coating will generate fine dust, if the dust level is large, it will affect the accuracy of the laser rangefinder 7. At the same time, if it is not sealed, the coating will enter the film thickness detection device 3 and affect the laser rangefinder 7. Therefore, the air quality sensor 22 is set up to detect the changes in air quality and promptly detect the sealing structure.

[0021] Product auxiliary adjustment structure: The support base 1 is provided with a liftable support structure 4 on one side. The top of the liftable support structure 4 is equipped with a product fixing frame 5 with damping rotation. The liftable support structure 4 includes a support shell 13. The bottom of the support shell 13 is provided with an electric push rod 14. The power end of the electric push rod 14 is provided with a lifting rod 15 extending to the outside of the support shell 13. The top of the lifting rod 15 is provided with a support top block 16. The top of the support top block 16 is equipped with a support rod 17 fixedly connected to the product fixing frame 5 with damping rotation. The top of the support shell 13 is provided with support blocks 19 on both sides. The support top block 16 is provided with a limiting rod 18 penetrating the support block 19 on both sides. The support block 19 is provided with a linear bearing 20 sleeved with the limiting rod 18. In the liftable support structure 4, the electric push rod 14 provides power for the lifting rod 15 to achieve precise adjustment of the height of the product fixing frame 5. The support rod 17 is damped and rotatedly connected to the support top block 16, which can flexibly adjust the placement angle of the product to ensure that products of different specifications and shapes can achieve precise alignment of the detection area and improve the adaptability of the equipment.

[0022] In specific implementation, the steps of this utility model are as follows: Product Fixing and Adjustment: First, fix the product to be coated on the product holder 5. According to the product specifications, shape and coating requirements, start the electric push rod 14 to drive the lifting rod 15 to move up and down along the support shell 13 to adjust the height of the product holder 5. At the same time, adjust the product placement angle by damping the rotating support rod 17 to ensure that the product testing area is accurately aligned with the magnetron body 2 and the testing hole 6 of the film thickness testing equipment 3.

[0023] Initial inspection before coating: Before starting the sputtering coating operation, the laser rangefinder 7 and servo motor 8 in the film thickness detection equipment 3 are started. The servo motor 8 drives the rotating disk 9 to rotate. When a certain through hole 10 on the rotating disk 9 is aligned with the detection hole 6 of the film thickness detection equipment 3, the laser rangefinder 7 emits a laser beam through the detection hole 6 and the through hole 10 to the product surface, and collects and records the initial thickness data of the product before coating.

[0024] Sealing and Coating Operation: After the initial inspection, the servo motor 8 continues to drive the rotating disk 9 to rotate, causing the sealing gasket 21 on the rotating disk 9 to move below the inspection hole 6 and seal the inspection hole 6. At the same time, the limiting ring block 12 on the rotating disk 9 is embedded in the limiting sealing ring groove 11 of the film thickness detection device 3, and is tightly fitted with the sealing rubber gasket 23 to form a multiple seal. After sealing is completed, the magnetron body 2 is started to perform the sputtering coating operation.

[0025] Real-time monitoring of the coating process: After a single coating stage is completed, the servo motor 8 and laser rangefinder 7 are restarted. The rotation of the rotating disk 9 aligns the through hole 10 with the detection hole 6 again, and the laser rangefinder 7 collects the current film thickness data of the product. By comparing it with the initial thickness data, the coating thickness of this stage is obtained. During the coating process, the rotation frequency of the servo motor 8 can be set to achieve multiple film thickness measurements in different areas of the product, and the film thickness change curve can be obtained in real time.

[0026] Environmental monitoring and anomaly handling: Air quality sensor 22 monitors the air quality inside film thickness detection equipment 3 in real time, including parameters such as gas composition and impurity content. If excessive impurities or abnormal gas composition are detected, a prompt signal is promptly sent to the operator, who can then adjust the experimental environment accordingly (such as replenishing vacuum or cleaning impurities) to ensure coating and detection quality.

[0027] End of experiment and product removal: After the coating operation is completed, turn off the magnetron body 2, laser rangefinder 7, servo motor 8 and air quality sensor 22, etc.; lower the product fixing frame 5 by the electric push rod 14 of the liftable support structure 4, release the product from the product fixing frame 5, and remove the product.

[0028] Working principle This invention integrates the film thickness detection device 3 into the middle of multiple magnetron bodies 2 of the support base 1, thereby enabling the simultaneous operation of coating and film thickness detection, fundamentally solving the problems of cumbersome operation and inability to monitor in real time in traditional testing methods.

[0029] Inside the film thickness detection device 3, a servo motor 8 drives a rotating disk 9 to rotate periodically, causing the through hole 10 and the detection hole 6 to alternately align and misalign. When aligned, laser ranging is completed; when misaligned, a sealing structure is formed by the sealing gasket 21, the limiting sealing ring groove 11, and the sealing rubber gasket 23, effectively isolating external interference. The laser rangefinder 7 uses the principle of laser ranging to emit a laser onto the product surface through the detection hole 6 and the through hole 10, accurately measuring the thickness of the product at different stages. The coating thickness can be obtained by combining the difference between two measurement data.

[0030] Air quality sensor 22 monitors environmental parameters within the detection chamber in real time, providing timely warnings of abnormal situations to ensure the accuracy of detection data and coating quality. Limiting rods 18 on both sides of the support block 16 cooperate with linear bearings 20 on the support block 19 to limit the radial offset of the lifting rod 15, ensuring smooth operation of the liftable support structure 4, reducing the impact of equipment vibration on detection accuracy, and further improving the overall stability and reliability of the device.

[0031] The present invention and its embodiments have been described above. This description is not restrictive, and the accompanying drawings are only one embodiment of the present invention; the actual structure is not limited thereto. In conclusion, if those skilled in the art are inspired by this description and design similar structures and embodiments without departing from the inventive spirit of the present invention, such designs should fall within the protection scope of the present invention.

Claims

1. A magnetron sputtering coating thickness testing device, comprising a support base (1), wherein a plurality of magnetron tube bodies (2) are uniformly distributed in a ring on the outer side of the support base (1), characterized in that: The support base (1) has a film thickness detection device (3) located at the top of multiple magnetron bodies (2). The support base (1) is provided with a liftable support structure (4) on one side, and the liftable support structure (4) is provided with a product fixing frame (5) with damping rotation at the top. The film thickness detection device (3) has multiple detection holes (6) evenly distributed in a ring at the top. The film thickness detection device (3) has a laser rangefinder (7) aligned with the detection holes (6) at the bottom. The film thickness detection device (3) has a servo motor (8) at the bottom middle. The servo motor (8) has a rotating disk (9) at the top power end. The rotating disk (9) has a through hole (10) at the top that matches the detection hole (6). The rotating disk (9) has a sealing gasket (21) between the multiple through holes (10) at the top.

2. The magnetron sputtering coating thickness testing device according to claim 1, characterized in that: The film thickness detection device (3) has a limiting sealing ring groove (11) located inside and outside the detection hole (6) at the top of the inner side, and a limiting ring block (12) located inside and outside the through hole (10) at the top of the rotating disk (9), and a sealing rubber pad (23) is provided inside the limiting sealing ring groove (11).

3. The magnetron sputtering coating thickness testing device according to claim 1, characterized in that: The film thickness detection device (3) is equipped with an air quality sensor (22) inside.

4. The magnetron sputtering coating thickness testing device according to claim 1, characterized in that: The liftable support structure (4) includes a support shell (13), an electric push rod (14) is provided at the bottom of the support shell (13), a lifting rod (15) is provided at the power end of the electric push rod (14) extending to the outside of the support shell (13), a support top block (16) is provided at the top of the lifting rod (15), and a support rod (17) is provided at the top of the support top block (16) for damping rotation and fixedly connected to the product fixing frame (5).

5. The magnetron sputtering coating thickness testing device according to claim 4, characterized in that: The support shell (13) is provided with support blocks (19) on both sides of the top, and the support top block (16) is provided with limiting rods (18) that pass through the support blocks (19) on both sides. The support block (19) is provided with linear bearings (20) that fit the limiting rods (18).

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