A multi-mode alarm temperature controller for semiconductor manufacturing pipelines

Abstract

This utility model discloses a temperature controller, belonging to the field of temperature controller technology, specifically relating to a multi-mode alarm temperature controller for semiconductor production pipelines. It includes a control module, a temperature detection module, and various alarm modules (relay alarm module, indicator light alarm module, buzzer alarm module, etc.). By integrating a relay alarm module as the core to meet the alarm requirements of different instruments, it enables flexible triggering of multiple alarm modes. This utility model solves the problem of existing temperature controllers having a single alarm mode and being unable to adapt to the various instruments in semiconductor production pipelines, offering advantages such as high alarm reliability, strong adaptability, and ease of maintenance.

Description

Technical Field

[0001] This utility model relates to the field of temperature controller technology, and in particular to a temperature controller for semiconductor production pipelines. Specifically, it is a temperature controller that integrates multiple alarm modules (such as relays, indicator lights, buzzers, etc.) and can flexibly trigger alarm modes for different instrument types. Background Technology

[0002] In semiconductor manufacturing processes, piping systems are used to transport chemical gases or cooling media, making temperature control crucial. Traditional temperature controllers typically employ a single alarm method (such as a buzzer or indicator light only), which cannot meet the complex needs of various instruments in semiconductor manufacturing pipelines. For example, different instruments such as temperature sensors, pressure sensors, and flow meters may be connected to the pipeline, each with different alarm response requirements: some require immediate circuit disconnection (via relays), some require visual cues (indicator lights), and some require audible warnings (buzzers). Current technology suffers from a single alarm module in temperature controllers, resulting in poor alarm flexibility, susceptibility to false alarms or missed alarms, and impacting the stability and safety of semiconductor production.

[0003] Furthermore, existing temperature controllers are mostly designed for general-purpose scenarios and do not take into account the high-temperature and highly corrosive environment of semiconductor manufacturing pipelines, resulting in insufficient reliability and durability of alarm modules. Therefore, there is an urgent need for a temperature controller that can integrate multiple alarm methods for different instruments to improve alarm accuracy and adaptability. Utility Model Content

[0004] Purpose of the utility model: To provide a multi-mode alarm temperature controller for semiconductor production pipelines, which uses an internally integrated relay alarm module as the core and combines it with various alarm modules (such as indicator lights and buzzers) to achieve flexible alarm for different instruments, thereby improving the reliability and safety of the semiconductor production process.

[0005] Technical solution: A multi-mode alarm temperature controller for semiconductor production pipelines, including a control module, a temperature detection module, and at least two alarm modules;

[0006] The alarm module includes a relay alarm module, an indicator light alarm module, and a buzzer alarm module;

[0007] The control module is connected to the temperature detection module and each alarm module respectively, and is used to selectively trigger the alarm modules according to the signal from the temperature detection module and the type of different instruments.

[0008] In a further embodiment, the relay alarm module includes a relay drive circuit and a relay output terminal, used to output an alarm signal to an external device through relay contacts.

[0009] In a further embodiment, the indicator alarm module includes an LED driving circuit and multiple indicator lights, which are used to indicate the alarm status through different colored lights.

[0010] In a further embodiment, the buzzer alarm module includes an audio drive circuit and a buzzer for emitting an audible alarm signal.

[0011] In a further embodiment, the control module further includes an instrument identification unit, used to identify the type of connected instrument and select the corresponding alarm module to trigger according to preset rules.

[0012] In a further embodiment, the alarm module further includes a communication alarm module, used to send alarm information to the remote monitoring system via wireless or wired means.

[0013] In a further embodiment, the temperature detection module includes a thermocouple or a resistance temperature detector (RTD) sensor, adapted to the high-temperature environment of semiconductor production pipelines.

[0014] In a further embodiment, the indicator alarm module includes: a first controller U1, a first resistor R1, a second resistor R2, a third resistor R3, a first capacitor C1, a second capacitor C2, a third capacitor C3, a first diode D1, a first transistor Q1, and at least one LED D2.

[0015] One end of the third capacitor C3 is used as the input signal, and the other end is connected to one end of the first resistor R1 and the base of the first transistor Q1. Pin 2 of the first controller U1 is connected to the other end of the first resistor R1, one end of the second resistor R2, and the collector of the first transistor Q1. Pins 4 and 8 of the first controller U1 are connected to the other end of the second resistor R2, one end of the third resistor R3, and the positive terminal of the LED D2, and are used to input the operating voltage. Pin 1 of the first controller U1 is grounded. Pins 6 and 7 of the first controller U1 are connected to the other end of the third resistor R3 and one end of the first capacitor C1, respectively. Pin 3 of the first controller U1 is connected to one end of the second capacitor C2. The other end of the first capacitor C1 is connected to the emitter of the first transistor Q1 and the negative terminal of the first diode D1, and is grounded. The other end of the second capacitor C2 is connected to the negative terminal of the first diode D1 and the negative terminal of the LED D2.

[0016] In a further embodiment, the buzzer alarm module includes: a second controller U2, a fourth resistor R4, a fifth resistor R5, a fourth capacitor C4, a fifth capacitor C5, a sixth resistor R6, and a buzzer Z1;

[0017] Pin 4 of the second controller U2 is connected to one end of the fourth resistor R4 and receives a signal. Pin 8 of the second controller U2 is connected to the other end of the fourth resistor R4 and one end of the fifth resistor R5 and outputs a working voltage. Pin 7 of the second controller U2 is connected to one end of the fifth resistor R5 and one end of the sixth resistor R6. Pin 5 of the second controller U2 is connected to one end of the fourth capacitor C4. Pins 6 and 2 of the second controller U2 are connected to one end of the sixth resistor R6 and one end of the fifth capacitor C5. Pin 3 of the second controller U2 is connected to the buzzer Z1. Pin 1 of the second controller U2 is connected to the other end of the fourth capacitor C4, the other end of the fifth capacitor C5, and the buzzer Z1 and is grounded.

[0018] In a further embodiment, the relay driving circuit includes: optocoupler U3, seventh resistor R7, eighth resistor R8, second transistor Q2, relay RL1, and second diode D3;

[0019] The optocoupler U3 has pin 1 for input signal, pin 2 for ground, pin 3 connected to one end of the eighth resistor R8, and pin 4 connected to one end of the seventh resistor R7. The other end of the seventh resistor R7 receives the operating voltage. The base of the second transistor Q2 is connected to the other end of the eighth resistor R8. The emitter of the second transistor Q2 is grounded. The collector of the second transistor Q2 is simultaneously connected to the anode of the second diode D3 and the relay RL1. The cathode of the second diode D3 and the relay RL1 receive the input voltage.

[0020] This utility model has the following beneficial effects:

[0021] High alarm flexibility: By integrating multiple alarm modules, alarms can be flexibly triggered according to the needs of different instruments (such as temperature sensors requiring relay circuit cut-off, and pressure sensors requiring indicator light prompts), reducing false alarms and missed alarms.

[0022] High reliability: The relay alarm module serves as the core, providing high current load capacity and is suitable for emergency control in semiconductor pipelines; the redundant design of multiple alarm modes ensures that other modes can still work when one mode fails.

[0023] High adaptability: Designed for the high-temperature and high-corrosion environment of semiconductor production pipelines, the module is made of high-temperature resistant materials and automatically adapts to various instruments through the instrument identification unit, reducing maintenance costs.

[0024] High practicality: The modular structure facilitates the expansion of other alarm methods (such as communication alarm modules) to meet future upgrade needs, while the circuit design is simple and easy to manufacture and integrate. Attached Figure Description

[0025] Figure 1 This is a schematic diagram of the structure of this utility model.

[0026] Figure 2 This is the circuit diagram of the indicator light alarm module of this utility model.

[0027] Figure 3 This is the circuit diagram of the buzzer alarm module of this utility model.

[0028] Figure 4 This is the circuit diagram of the relay alarm module of this utility model. Detailed Implementation

[0029] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0030] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0031] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances. Furthermore, the technical features involved in the different embodiments of this utility model described below can be combined with each other as long as they do not conflict with each other.

[0032] A multi-mode alarm temperature controller for semiconductor manufacturing pipelines includes a control module, a temperature detection module, and multiple alarm modules. The alarm modules include at least a relay alarm module, an indicator light alarm module, and a buzzer alarm module. The control module is connected to both the temperature detection module and each alarm module, and is used to selectively trigger the alarm modules based on signals from the temperature detection module and the type of different instruments.

[0033] In one embodiment, such as Figure 1 As shown, the relay alarm module outputs an alarm signal through relay contacts, which can be used to control external devices (such as solenoid valves or power supplies); the indicator light alarm module displays the alarm status through an LED driver circuit; and the buzzer alarm module emits an audible warning through an audio driver circuit. Furthermore, the control module may include an instrument identification unit for automatically identifying the type of connected instrument (e.g., identification via communication protocol or resistor) and selecting the corresponding alarm module to trigger according to preset rules (e.g., a mapping table stored in the control module).

[0034] Example 1: Basic Structure and Working Principle

[0035] like Figures 1 to 4 As shown, this temperature controller includes a control module, a temperature detection module, and an alarm module. The control module uses a microcontroller (such as the STM32 series), and the temperature detection module includes a thermocouple sensor adapted to the high-temperature environment of semiconductor pipelines. The alarm module includes a relay alarm module, an indicator light alarm module, and a buzzer alarm module.

[0036] During operation, the temperature detection module monitors the pipeline temperature in real time and sends the signal to the control module. The control module has a built-in instrument identification unit (by reading the instrument ID or signal characteristics) to identify the type of connected instrument (e.g., temperature sensor, pressure sensor). According to preset rules (such as a stored mapping table: temperature sensors trigger relay alarms, pressure sensors trigger indicator light alarms), the control module selectively triggers alarm modules. For example, when the temperature exceeds the limit, the control module first triggers the relay alarm module, cutting off the external power supply through the relay contacts; simultaneously, depending on the instrument type, a buzzer alarm module may be triggered as an auxiliary alarm.

[0037] Example 2: Detailed Implementation of the Relay Alarm Module

[0038] like Figure 4 As shown, the relay alarm module includes a relay drive circuit and a relay output terminal. The relay drive circuit receives signals from the control module, drives the relay coil to engage, actuates the contacts, and outputs an alarm signal to an external device (such as a solenoid valve). In this embodiment, the relay is a high-temperature resistant type with a contact capacity of 10A / 250V, suitable for the high-load environment of semiconductor pipelines. The control module can be set to delay triggering or immediate triggering according to different instruments to improve response accuracy.

[0039] Example 3: Multi-module collaborative alarm example

[0040] In semiconductor manufacturing pipelines, both temperature sensors and flow meters are connected. The control module uses an instrument identification unit to determine which alarms are triggered first: a temperature sensor alarm prioritizes triggering the relay alarm module (for emergency shut-off), while a flow meter alarm prioritizes triggering the indicator light alarm module (for visual alert). Additionally, a buzzer alarm module serves as a universal alarm, triggering under all alarm conditions. This multi-mode collaborative operation ensures comprehensive alarm coverage and avoids single points of failure.

[0041] Example 4: Extended Example

[0042] The alarm module may also include a communication alarm module (such as an RS485 or wireless module) for sending alarm information to a remote monitoring system. The control module can select the alarm method based on the instrument type: for example, critical instruments (such as temperature sensors) trigger relay and communication alarms, while secondary instruments only trigger indicator light alarms. This further enhances the system's adaptability and scalability.

[0043] Obviously, the above embodiments are merely illustrative examples for clear explanation and are not intended to limit the implementation. Those skilled in the art will recognize that other variations or modifications can be made based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. However, obvious variations or modifications derived therefrom are still within the protection scope of this invention.

Claims

1. A multi-mode alarm temperature controller for semiconductor manufacturing pipelines, characterized in that, It includes a control module, a temperature detection module, and at least two alarm modules; The alarm module includes a relay alarm module, an indicator light alarm module, and a buzzer alarm module; The control module is connected to the temperature detection module and each alarm module respectively, and is used to selectively trigger the alarm modules according to the signal from the temperature detection module and the type of different instruments.

2. A multi-mode alarm temperature controller for semiconductor production pipelines according to claim 1, characterized in that, The relay alarm module includes a relay drive circuit and a relay output terminal, which is used to output alarm signals to external devices through relay contacts.

3. A multi-mode alarm temperature controller for semiconductor production pipelines according to claim 1, characterized in that, The indicator alarm module includes an LED driver circuit and multiple indicator lights, which are used to indicate the alarm status through different colored lights.

4. A multi-mode alarm temperature controller for semiconductor manufacturing pipelines according to claim 1, characterized in that, The buzzer alarm module includes an audio driver circuit and a buzzer, which is used to emit an audible alarm signal.

5. A multi-mode alarm temperature controller for semiconductor production pipelines according to claim 1, characterized in that, The control module also includes an instrument identification unit, which is used to identify the type of connected instrument and select the corresponding alarm module to trigger according to preset rules.

6. A multi-mode alarm temperature controller for semiconductor manufacturing pipelines according to claim 1, characterized in that, The alarm module also includes a communication alarm module, which is used to send alarm information to the remote monitoring system via wireless or wired means.

7. A multi-mode alarm temperature controller for semiconductor manufacturing pipelines according to claim 1, characterized in that, The temperature detection module includes a thermocouple or a resistance temperature detector (RTD) sensor, which is adapted to the high-temperature environment of semiconductor production pipelines.

8. A multi-mode alarm temperature controller for semiconductor manufacturing pipelines according to claim 1, characterized in that, The indicator alarm module includes: a first controller U1, a first resistor R1, a second resistor R2, a third resistor R3, a first capacitor C1, a second capacitor C2, a third capacitor C3, a first diode D1, a first transistor Q1, and at least one LED D2; One end of the third capacitor C3 is used as the input signal, and the other end is connected to one end of the first resistor R1 and the base of the first transistor Q1. Pin 2 of the first controller U1 is connected to the other end of the first resistor R1, one end of the second resistor R2, and the collector of the first transistor Q1. Pins 4 and 8 of the first controller U1 are connected to the other end of the second resistor R2, one end of the third resistor R3, and the positive terminal of the LED D2, and are used to input the operating voltage. Pin 1 of the first controller U1 is grounded. Pins 6 and 7 of the first controller U1 are connected to the other end of the third resistor R3 and one end of the first capacitor C1, respectively. Pin 3 of the first controller U1 is connected to one end of the second capacitor C2. The other end of the first capacitor C1 is connected to the emitter of the first transistor Q1 and the negative terminal of the first diode D1, and is grounded. The other end of the second capacitor C2 is connected to the negative terminal of the first diode D1 and the negative terminal of the LED D2.

9. A multi-mode alarm temperature controller for semiconductor manufacturing pipelines according to claim 1, characterized in that, The buzzer alarm module includes: a second controller U2, a fourth resistor R4, a fifth resistor R5, a fourth capacitor C4, a fifth capacitor C5, a sixth resistor R6, and a buzzer Z1; Pin 4 of the second controller U2 is connected to one end of the fourth resistor R4 and receives a signal. Pin 8 of the second controller U2 is connected to the other end of the fourth resistor R4 and one end of the fifth resistor R5 and outputs a working voltage. Pin 7 of the second controller U2 is connected to one end of the fifth resistor R5 and one end of the sixth resistor R6. Pin 5 of the second controller U2 is connected to one end of the fourth capacitor C4. Pins 6 and 2 of the second controller U2 are connected to one end of the sixth resistor R6 and one end of the fifth capacitor C5. Pin 3 of the second controller U2 is connected to the buzzer Z1. Pin 1 of the second controller U2 is connected to the other end of the fourth capacitor C4, the other end of the fifth capacitor C5, and the buzzer Z1 and is grounded.

10. A multi-mode alarm temperature controller for semiconductor manufacturing pipelines according to claim 1, characterized in that, The relay drive circuit includes: optocoupler U3, seventh resistor R7, eighth resistor R8, second transistor Q2, relay RL1, and second diode D3; The optocoupler U3 has pin 1 for input signal, pin 2 for ground, pin 3 connected to one end of the eighth resistor R8, and pin 4 connected to one end of the seventh resistor R7. The other end of the seventh resistor R7 receives the operating voltage. The base of the second transistor Q2 is connected to the other end of the eighth resistor R8. The emitter of the second transistor Q2 is grounded. The collector of the second transistor Q2 is simultaneously connected to the anode of the second diode D3 and the relay RL1. The cathode of the second diode D3 and the relay RL1 receive the input voltage.

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