Multimodal flexible tactile sensing and its array with Lorentz-inspired ampulla structure

Abstract

This invention discloses a multimodal flexible tactile sensor and its array with a Lorentz-inspired ampulla structure. The multimodal flexible tactile sensor includes: a surface ion-selective permeable membrane layer, a first electrode layer, an ampulla-shaped structure layer, a gel electrolyte layer, a pseudocapacitive layer, and a second electrode layer. The ampulla-shaped structure layer has an ampulla-shaped cavity mimicking the Lorentz ampulla, which extends along the thickness direction of the ampulla-shaped structure layer. The gel electrolyte layer fills the ampulla-shaped cavity and is electrically connected to the first and second electrode layers. The second electrode layer covers a supporting substrate layer with micro-protrusions, and the pseudocapacitive layer is distributed at least on the surface containing the micro-protrusions of the second electrode layer. This invention uses the Lorentz ampulla structure as a biomimetic model to construct a multimodal flexible tactile sensor, enabling the device to have multimodal response capabilities to pressure, temperature, and ions.

Description

Technical Field

[0001] This utility model specifically relates to a multimodal flexible tactile sensor and its array with a Lorentz-inspired ampulla structure, belonging to the field of flexible sensor technology. Background Technology

[0002] Currently, biomimetic structural design mainly focuses on single-form structures, primarily pyramidal, columnar, and layered structures. The sensing capabilities of these conventional flexible tactile sensors are limited. Specifically, current designs mainly rely on array devices to respond to pressure, temperature, etc., resulting in complex signal acquisition and processing modes; especially regarding (H... + Na + / K + Cl - Ion-responsive sensors, primarily electrochemical sensors with a three-electrode system, face inherent limitations in their integration with flexible physical quantity sensors that possess temperature and pressure sensing capabilities, particularly in terms of device physical form design. This restricts the current integration of force, temperature, and other physical quantity sensors with ion-sensing electrochemical sensing functions. Utility Model Content

[0003] The main objective of this invention is to provide a multimodal flexible tactile sensor and its array with a Lorentz-like ampulla structure, thereby overcoming the shortcomings of the prior art.

[0004] To achieve the aforementioned objectives, the technical solution adopted by this utility model includes:

[0005] The first aspect of this utility model provides a multimodal flexible tactile sensor with a Lorentz-like ampulla structure, comprising: a surface ion selectively permeable membrane layer, a first electrode layer, an ampulla structure layer, a gel electrolyte layer, a pseudocapacitive layer, a second electrode layer, and a supporting substrate, wherein the surface ion selectively permeable membrane layer, the first electrode layer, the ampulla structure layer, the second electrode layer, and the supporting substrate are stacked sequentially.

[0006] The interior of the pot-shaped structure layer has a pot-shaped cavity that mimics the ampulla of Lorentz. The pot-shaped cavity extends along the thickness direction of the pot-shaped structure layer. The gel electrolyte layer fills the pot-shaped cavity. The surface of the supporting substrate (7) has multiple micro-protrusion structures (71). The second electrode layer (6) continuously covers the outer surface of the multiple micro-protrusion structures (71). The pseudocapacitor layer (5) is at least distributed on the second electrode layer (6) covering the outer surface of the micro-protrusion structures (71).

[0007] The first electrode layer, the pot-shaped cavity, the gel electrolyte layer filled in the pot-shaped cavity, and the second electrode layer are configured to form a capacitive pressure detection structure; the pot-shaped cavity and the gel electrolyte layer filled in the pot-shaped cavity are configured to form a resistive temperature detection structure; and the ion-selective permeable membrane layer, the pot-shaped cavity, the gel electrolyte layer filled in the pot-shaped cavity, the pseudocapacitive layer, and the second electrode layer are configured to form an ion detection structure.

[0008] A second aspect of this utility model provides a multimodal flexible tactile sensor array, comprising: a plurality of multimodal flexible tactile sensors having a Lorentz-like ampulla structure, wherein the plurality of multimodal flexible tactile sensors having a Lorentz-like ampulla structure are arranged in an array and electrically connected.

[0009] A third aspect of this utility model provides a multimodal flexible tactile sensor array with a Lorentz-inspired ampulla structure, comprising:

[0010] The surface ion selectively permeable membrane layer, the first electrode layer, the pot-shaped structure layer, multiple gel electrolyte layers, multiple pseudocapacitor layers, the second electrode layer, and the supporting substrate are stacked sequentially.

[0011] The interior of the pot-shaped structure layer has multiple pot-shaped cavities mimicking the ampulla of Valves of Lorentz. These cavities extend along the thickness direction of the pot-shaped structure layer. Each gel electrolyte layer fills one of the pot-shaped cavities. The surface of the supporting substrate has multiple micro-protrusion structures. The second electrode layer continuously covers the outer surface of the multiple micro-protrusion structures. Each pseudocapacitive layer is disposed between a gel electrolyte layer and the second electrode layer. Furthermore, the pseudocapacitive layers are at least distributed on the second electrode layer covering the outer surface of the micro-protrusion structures. The pot-shaped cavities, the gel electrolyte layer, the pseudocapacitive layer, the surface ion-selective permeable membrane layer, the first electrode layer, and the second electrode layer are configured to form a multimodal flexible tactile sensor that integrates pressure detection, temperature detection, and ion detection.

[0012] In each of the multimodal flexible tactile sensors, the first electrode layer, the pot-shaped cavity, the gel electrolyte layer filled in the pot-shaped cavity, and the second electrode layer are configured to form a capacitive pressure detection structure; the pot-shaped cavity and the gel electrolyte layer filled in the pot-shaped cavity are configured to form a resistive temperature detection structure; and the ion-selective permeable membrane layer, the pot-shaped cavity, the gel electrolyte layer filled in the pot-shaped cavity, the pseudocapacitive layer, and the second electrode layer are configured to form an ion detection structure.

[0013] Compared with the prior art, the advantages of this utility model include:

[0014] This utility model provides a multimodal flexible tactile sensor with a Lorentz ampulla structure. Using the Lorentz ampulla structure as a biomimetic model, a multimodal flexible tactile sensor and its array are constructed. Pressure detection is achieved by using a capacitor structure constructed from upper and lower electrodes, a middle ampulla-shaped cavity, and an electrolyte layer inside the ampulla. Temperature detection is achieved by using the ampulla-shaped cavity and the electrolyte layer inside the ampulla. The response to ion type and concentration is achieved by using a pseudocapacitive layer covering the micro-protrusion structure, the ampulla-shaped cavity and the electrolyte layer inside the ampulla, and a surface ion-selective permeable membrane. This makes the device capable of multimodal response to pressure, temperature, and ions. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0016] Figure 1a This is a schematic diagram of the structure of a multimodal flexible tactile sensor with a Lorentz-like ampulla structure provided in a typical embodiment of this utility model;

[0017] Figure 1b This is a schematic diagram of a multimodal flexible tactile sensor array with a Lorentz-like ampulla structure, provided in a typical embodiment of this utility model.

[0018] Figure 2 This is the pressure response test result of a multimodal flexible tactile sensor with a Lorentz-like ampulla structure provided in Embodiment 1 of this utility model;

[0019] Figure 3 This is the temperature response test result of a multimodal flexible tactile sensor with a Lorentz-like ampulla structure provided in Embodiment 1 of this utility model;

[0020] Figure 4 This is the electrochemical response test result of a multimodal flexible tactile sensor with a Lorentz-like ampulla structure provided in Embodiment 1 of this utility model. Detailed Implementation

[0021] In view of the shortcomings of the prior art, the inventor of this case, through long-term research and extensive practice, has come up with the technical solution of this utility model. The following will further explain the technical solution, its implementation process, and its principles.

[0022] The first aspect of this utility model provides a multimodal flexible tactile sensor with a Lorentz-like ampulla structure, comprising: a surface ion selectively permeable membrane layer, a first electrode layer, an ampulla structure layer, a gel electrolyte layer, a pseudocapacitive layer, a second electrode layer, and a supporting substrate, wherein the surface ion selectively permeable membrane layer, the first electrode layer, the ampulla structure layer, the second electrode layer, and the supporting substrate are stacked sequentially.

[0023] The interior of the pot-shaped structure layer has a pot-shaped cavity that mimics the ampulla of Vater of Lorentz. The pot-shaped cavity extends along the thickness direction of the pot-shaped structure layer. The gel electrolyte layer fills the pot-shaped cavity. The surface of the supporting substrate has multiple micro-protrusion structures. The second electrode layer continuously covers the outer surface of the multiple micro-protrusion structures. The pseudocapacitive layer is at least distributed on the second electrode layer that covers the outer surface of the micro-protrusion structures.

[0024] The first electrode layer, the pot-shaped cavity, the gel electrolyte layer filled in the pot-shaped cavity, and the second electrode layer are configured to form a capacitive pressure detection structure; the pot-shaped cavity and the gel electrolyte layer filled in the pot-shaped cavity are configured to form a resistive temperature detection structure; and the ion-selective permeable membrane layer, the pot-shaped cavity, the gel electrolyte layer filled in the pot-shaped cavity, the pseudocapacitive layer, and the second electrode layer are configured to form an ion detection structure.

[0025] Furthermore, the radial cross-sectional area of ​​the ports at both ends of the pot-shaped cavity is smaller than the radial cross-sectional area of ​​the middle part located at both ends, and the inner wall of the pot-shaped cavity is a continuous curved surface, the radial cross-section of the pot-shaped cavity is circular, and the ratio of the diameter of the port of the pot-shaped cavity, the diameter at the geometric center position, and the axial height is (20~50):(25~55):(20~100).

[0026] Furthermore, the axial cross-section of the pot-shaped cavity has a continuous circular arc structure.

[0027] Furthermore, the diameter of the pot-shaped cavity port is 20μm to 50μm, the diameter at the geometric center is 25μm to 55μm, and the axial height is 20μm to 100μm.

[0028] Furthermore, the jar-shaped structural layer is a polyvinyl alcohol substrate, a polyimide substrate, a polydimethylsiloxane substrate, a polyethylene terephthalate substrate, or a polyethylene substrate.

[0029] Furthermore, the surface of the supporting substrate has multiple micro-bump structures, and the second electrode layer continuously covers the outer surface of the multiple micro-bump structures. The pseudocapacitive layer is a continuous structure, and the continuous pseudocapacitive layer is continuously distributed on the second electrode layer covering the multiple micro-bump structures. Alternatively, the pseudocapacitive layer is a discontinuous structure, and the discontinuous pseudocapacitive layer is only distributed on the second electrode layer covering the outer surface of the micro-bump structures.

[0030] Furthermore, the micro-protrusion structure extends into the interior of the pot-shaped cavity, and the portion of the pseudocapacitive layer and the second electrode layer covering the micro-protrusion structure, together with the micro-protrusion structure, is wrapped by the gel electrolyte layer.

[0031] Furthermore, the portion of the pseudocapacitive layer and the second electrode layer covering the micro-bump structure forms a contoured structure with the same shape as the micro-bump structure.

[0032] Furthermore, the multiple micro-protrusion structures are distributed in an array.

[0033] Furthermore, both the pseudocapacitor layer and the second electrode layer are structural layers with uniform thickness.

[0034] Furthermore, the micro-protrusion structure is a columnar structure.

[0035] Furthermore, the micro-protrusion structure is a cylindrical structure.

[0036] Furthermore, the ratio of the axial height to the diameter of the cylindrical micro-protrusion structure is (0.5–10):(0.5–5).

[0037] Furthermore, the cylindrical micro-protrusion structure has an axial height of 0.5 μm to 10 μm and a diameter of 0.5 μm to 5 μm.

[0038] Furthermore, the thickness of the base portion of the supporting substrate located at the bottom of the micro-bump structure is 0.5 μm to 10 μm.

[0039] Furthermore, the pseudocapacitive layer is a single-layer structure formed by one or more of the following: manganese dioxide layer, cobalt tetroxide layer, iron tetroxide layer, nickel oxide layer, nickel hydroxide layer, cobalt hydroxide layer, platinum oxide layer, ruthenium oxide layer, and palladium oxide layer.

[0040] Furthermore, the thickness of the pseudocapacitive layer is 2μm to 20μm.

[0041] Furthermore, the first electrode layer is a stack formed by one or more of the following: MXene layer, carbon nanotube layer, graphene layer, silver nanowire layer, copper nanowire layer, polypyrrole nanowire layer, and polyaniline nanowire layer.

[0042] Furthermore, the thickness of the first electrode layer is 2μm to 20μm.

[0043] Furthermore, the second electrode layer is a stack formed by one or more of the following: MXene layer, carbon nanotube layer, graphene layer, silver nanowire layer, copper nanowire layer, polypyrrole nanowire layer, and polyaniline nanowire layer.

[0044] Furthermore, the thickness of the second electrode layer is 0.5 μm to 10 μm.

[0045] Furthermore, the ion-selective permeable membrane layer includes a permeable membrane substrate and an additive material doped into the permeable membrane substrate, the additive material allowing H... + Na + / K + Cl - Selective permeation through the permeable membrane substrate.

[0046] Furthermore, the permeable membrane substrate is one of polyvinyl alcohol substrate, polyimide substrate, polydimethylsiloxane substrate, polyethylene terephthalate substrate, and polyethylene substrate, and the additive material is one of hydroxymethyl cellulose nanowires, polypyrrole nanowires, and polyaniline nanowires.

[0047] Furthermore, the thickness of the ion-selective permeable membrane is 2 μm to 20 μm.

[0048] A second aspect of this utility model provides a multimodal flexible tactile sensor array, comprising: a plurality of multimodal flexible tactile sensors having a Lorentz-like ampulla structure, wherein the plurality of multimodal flexible tactile sensors having a Lorentz-like ampulla structure are arranged in an array and electrically connected.

[0049] A third aspect of this utility model provides a multimodal flexible tactile sensor array with a Lorentz-inspired ampulla structure, comprising:

[0050] The surface ion selectively permeable membrane layer, the first electrode layer, the pot-shaped structure layer, multiple gel electrolyte layers, multiple pseudocapacitor layers, the second electrode layer, and the supporting substrate are stacked sequentially.

[0051] The interior of the pot-shaped structure layer has multiple pot-shaped cavities mimicking the ampulla of Valves of Lorentz. These cavities extend along the thickness direction of the pot-shaped structure layer. Each gel electrolyte layer fills one of the pot-shaped cavities. The surface of the supporting substrate has multiple micro-protrusion structures. The second electrode layer continuously covers the outer surface of the multiple micro-protrusion structures. Each pseudocapacitive layer is disposed between a gel electrolyte layer and the second electrode layer. Furthermore, the pseudocapacitive layers are at least distributed on the second electrode layer covering the outer surface of the micro-protrusion structures. The pot-shaped cavities, the gel electrolyte layer, the pseudocapacitive layer, the surface ion-selective permeable membrane layer, the first electrode layer, and the second electrode layer are configured to form a multimodal flexible tactile sensor that integrates pressure detection, temperature detection, and ion detection.

[0052] In each of the multimodal flexible tactile sensors, the first electrode layer, the pot-shaped cavity, the gel electrolyte layer filled in the pot-shaped cavity, and the second electrode layer are configured to form a capacitive pressure detection structure; the pot-shaped cavity and the gel electrolyte layer filled in the pot-shaped cavity are configured to form a resistive temperature detection structure; and the ion-selective permeable membrane layer, the pot-shaped cavity, the gel electrolyte layer filled in the pot-shaped cavity, the pseudocapacitive layer, and the second electrode layer are configured to form an ion detection structure.

[0053] Furthermore, the radial cross-sectional area of ​​the ports at both ends of the pot-shaped cavity is smaller than the radial cross-sectional area of ​​the middle part located at both ends, and the inner wall of the pot-shaped cavity is a continuous curved surface, the radial cross-section of the pot-shaped cavity is circular, and the ratio of the diameter of the port of the pot-shaped cavity, the diameter at the geometric center position, and the axial height is (20~50):(25~55):(20~100).

[0054] Furthermore, the axial cross-section of the pot-shaped cavity has a continuous circular arc structure.

[0055] Furthermore, the diameter of the pot-shaped cavity port is 20μm to 50μm, the diameter at the geometric center is 25μm to 55μm, and the axial height is 20μm to 100μm.

[0056] Furthermore, the jar-shaped structural layer is a polyvinyl alcohol substrate, a polyimide substrate, a polydimethylsiloxane substrate, a polyethylene terephthalate substrate, or a polyethylene substrate.

[0057] Furthermore, the pseudocapacitive layer is a continuous structure, and the continuous pseudocapacitive layer is continuously distributed on the second electrode layer covering multiple micro-bump structures; or, the pseudocapacitive layer is a discontinuous structure, and the discontinuous pseudocapacitive layer is only distributed on the second electrode layer covering the outer surface of the micro-bump structures.

[0058] Furthermore, the micro-protrusion structure extends into the interior of the pot-shaped cavity, and the portion of the pseudocapacitive layer and the second electrode layer covering the micro-protrusion structure, together with the micro-protrusion structure, is wrapped by the gel electrolyte layer.

[0059] Furthermore, the portion of the pseudocapacitive layer and the second electrode layer covering the micro-bump structure forms a contoured structure with the same shape as the micro-bump structure.

[0060] Furthermore, the multiple micro-protrusion structures are distributed in an array.

[0061] Furthermore, both the pseudocapacitor layer and the second electrode layer are structural layers with uniform thickness.

[0062] Furthermore, the micro-protrusion structure is a columnar structure.

[0063] Furthermore, the micro-protrusion structure is a cylindrical structure.

[0064] Furthermore, the ratio of the axial height to the diameter of the cylindrical micro-protrusion structure is (0.5–10):(0.5–5).

[0065] Furthermore, the cylindrical micro-protrusion structure has an axial height of 0.5 μm to 10 μm and a diameter of 0.5 μm to 5 μm.

[0066] Furthermore, the thickness of the base portion of the supporting substrate located at the bottom of the micro-bump structure is 0.5 μm to 10 μm.

[0067] Furthermore, the pseudocapacitive layer is a single-layer structure formed by one or more of the following: manganese dioxide layer, cobalt tetroxide layer, iron tetroxide layer, nickel oxide layer, nickel hydroxide layer, cobalt hydroxide layer, platinum oxide layer, ruthenium oxide layer, and palladium oxide layer.

[0068] Furthermore, the thickness of the pseudocapacitive layer is 2μm to 20μm.

[0069] Furthermore, the ion-selective permeable membrane layer includes a permeable membrane substrate and an additive material doped into the permeable membrane substrate, the additive material allowing H... + Na + / K + Cl - Selective permeation through the permeable membrane substrate.

[0070] Furthermore, the permeable membrane substrate is one of polyvinyl alcohol substrate, polyimide substrate, polydimethylsiloxane substrate, polyethylene terephthalate substrate, and polyethylene substrate, and the additive material is one of hydroxymethyl cellulose nanowires, polypyrrole nanowires, and polyaniline nanowires.

[0071] Furthermore, the thickness of the ion-selective permeable membrane is 2 μm to 20 μm.

[0072] Furthermore, the first electrode layer is a stack formed by one or more of the following: MXene layer, carbon nanotube layer, graphene layer, silver nanowire layer, copper nanowire layer, polypyrrole nanowire layer, and polyaniline nanowire layer.

[0073] Furthermore, the thickness of the first electrode layer is 2μm to 20μm.

[0074] Furthermore, the second electrode layer is a stack formed by one or more of the following: MXene layer, carbon nanotube layer, graphene layer, silver nanowire layer, copper nanowire layer, polypyrrole nanowire layer, and polyaniline nanowire layer.

[0075] Furthermore, the thickness of the second electrode layer is 0.5 μm to 10 μm.

[0076] The following will further explain the technical solution, its implementation process and principle in conjunction with the accompanying drawings and specific implementation examples. Unless otherwise specified, the electrode materials, electrolyte materials, pseudocapacitive materials, permeable membrane materials, ion-selective permeable additives, encapsulation materials, etc. involved in the embodiments of this utility model are all known in the art, and their specific product models are not limited here. In addition, the material processing technology and equipment involved in the embodiments of this utility model are also known in the art. The processing technology is not an improvement of the present utility model, but is only used as an auxiliary explanation to enable those skilled in the art to understand the product manufacturing process of this utility model.

[0077] Sharks possess a unique sixth sense—a weak electric field perception ability. This ability is primarily due to a distinctive organ called the ampulla of Lorenzini. The ampulla of Lorenzini works by using a thin membrane at its base containing numerous weakly sensing cells. Under the influence of an external electric field, these cells exchange ions with colloids within the ampulla, releasing neurotransmitters, with hydrogen ions being the primary medium for this exchange. Utilizing this weakly sensing organ, sharks and other marine organisms can easily perceive bioelectrical signals and ocean current signals, using these subtle electrical signals for hunting and navigation. This invention uses this structure as a biomimetic model to provide a flexible tactile sensor and its array with a multimodal response to temperature, pressure, and ionization, mimicking the structure of the ampulla of Lorenzini.

[0078] In a more typical implementation scheme, please refer to Figure 1aA multimodal flexible tactile sensor with a Lorentz-like ampulla structure includes a surface ion-selective permeable membrane layer 1, a first electrode layer 2, an ampulla structure layer 3, a gel electrolyte layer 4, a pseudocapacitive layer 5, a second electrode layer 6, and a supporting substrate 7.

[0079] The surface ion-selective permeable membrane layer 1, the first electrode layer 2, the pot-shaped structure layer 3, the second electrode layer 6, and the supporting substrate 7 are sequentially stacked. The surface of the supporting substrate 7 has multiple micro-protrusion structures 71. The second electrode layer 6 continuously covers the outer surface of the multiple micro-protrusion structures 71. The pseudocapacitive layer 5 is at least distributed on the second electrode layer 6 covering the outer surface of the micro-protrusion structures 71. The interior of the pot-shaped structure layer 3 has a pot-shaped cavity that mimics the ampulla of Vater of Lorentz. The pot-shaped cavity extends along the thickness direction of the pot-shaped structure layer 3. The gel electrolyte layer 4 fills the pot-shaped cavity. The multiple micro-protrusion structures 71, the second electrode layer 6 covering the outer surface of the micro-protrusion structures 71, and the pseudocapacitive layer 5 also extend into the pot-shaped cavity and are wrapped by the gel electrolyte layer 4.

[0080] The first electrode layer 2, the pot-shaped cavity, the gel electrolyte layer 4 filled in the pot-shaped cavity, and the second electrode layer 6 are configured to form a capacitive pressure detection structure. The pot-shaped cavity and the gel electrolyte layer 4 filled in the pot-shaped cavity are configured to form a resistive temperature detection structure. The ion-selective permeable membrane layer 1, the pot-shaped cavity, the gel electrolyte layer 4 filled in the pot-shaped cavity, the pseudocapacitive layer 5, and the second electrode layer 6 are configured to form an ion detection structure. The capacitive pressure detection structure detects pressure, the resistive temperature detection structure detects temperature, and the ion detection structure responds to and detects ion type and concentration. Based on the biomimetic structure inspired by the Lorentz ampulla, the device achieves multimodal response capability to pressure, temperature, and ions.

[0081] It should be noted that the surface ion selective permeable membrane layer 1, the first electrode layer 2, the pot-shaped structure layer 3, the gel electrolyte layer 4, the pseudocapacitive layer 5, the second electrode layer 6, and the supporting substrate layer 7 are applied / bonded / attached using methods / processes known in the art, and no special limitations or explanations are made here.

[0082] Specifically, the micro-bump structure 71 is a columnar structure, preferably a cylindrical structure. The ratio of the axial height to the diameter of the cylindrical micro-bump structure is (0.5-10):(0.5-5). As a typical embodiment, the axial height of the cylindrical micro-bump structure is 0.5μm-10μm, and the diameter is 0.5μm-5μm. The thickness of the bottom layer structure of the supporting substrate 7 at the bottom of the micro-bump structure 71 is 0.5μm-10μm. Specifically, the supporting substrate layer 7 also serves as an encapsulation structure layer, and it can be made of materials known in the art, which are not limited here.

[0083] Specifically, the thicknesses of the pseudocapacitive layer 5 and the second electrode layer 6 are uniform. The second electrode layer 6 forms a contoured structure similar to or identical to the surface structure of the supporting substrate layer 7, meaning the surface of the second electrode layer 6 also exhibits a non-planar structure (the surface has multiple micro-protrusion structures). Specifically, the pseudocapacitive layer 5 can be a continuous structure, with the continuous pseudocapacitive layer continuously distributed on the second electrode layer 6 covering the multiple micro-protrusion structures 71; or, the pseudocapacitive layer 5 can be a discontinuous structure, with the discontinuous pseudocapacitive layer 5 only distributed on the second electrode layer 6 covering the outer surface of the micro-protrusion structures 71.

[0084] Specifically, the ion-selective permeable membrane layer 1 includes a permeable membrane substrate and an additive material doped into the permeable membrane substrate, the additive material allowing H... + Na + / K + Cl - The membrane substrate is selectively permeable, wherein the permeable membrane substrate is one of polyvinyl alcohol substrate, polyimide substrate, polydimethylsiloxane substrate, polyethylene terephthalate substrate and polyethylene substrate, and the additive material is one of hydroxymethyl cellulose nanowires, polypyrrole nanowires and polyaniline nanowires, and the thickness of the ion-selective permeable membrane layer 1 is 2 μm to 20 μm.

[0085] Specifically, the first electrode layer 2 is a stack formed by one or more of the following: MXene (MXene is a type of two-dimensional layered transition metal carbon / nitride (or carbon nitride) material), carbon nanotube layer, graphene layer, silver nanowire layer, copper nanowire layer, polypyrrole nanowire layer and polyaniline nanowire layer, and the thickness of the first electrode layer 2 is 2μm to 20μm.

[0086] Specifically, the pot-shaped structural layer 3 is a polyvinyl alcohol substrate, a polyimide substrate, a polydimethylsiloxane substrate, a polyethylene terephthalate substrate, or a polyethylene substrate. Specifically, the axial height of the pot-shaped cavity is the same as the thickness of the pot-shaped structural layer 3; that is, the two ends of the pot-shaped cavity are flush with the upper and lower surfaces of the pot-shaped structural layer 3, respectively.

[0087] More specifically, the radial cross-sectional area and contour shape of the ports at both ends of the pot-shaped cavity are the same, and the radial cross-sectional area of ​​the ports at both ends of the pot-shaped cavity is smaller than the radial cross-sectional area of ​​the middle part located at both ends (any position other than the ports at both ends). Furthermore, the inner wall of the pot-shaped cavity is a continuous curved surface, and the radial cross-section of the pot-shaped cavity is circular. It can be understood that the contour of the axial cross-section of the pot-shaped cavity is a continuous arc structure (as a preferred embodiment, the inner wall of the pot-shaped cavity can be a sphere. It can be understood that the inner wall of the pot-shaped cavity is not a complete sphere, but specifically the remaining part of the sphere after removing the two poles). More specifically, the ratio of the diameter of the pot-shaped cavity port, the diameter of the geometric center position, and the axial height is (20-50):(25-55):(20-100). As a typical implementation, the diameter of the pot-shaped cavity port is 20μm-50μm, the diameter of the geometric center position (specifically the axial center position) is 25μm-55μm, and the axial height is 20μm-100μm.

[0088] Specifically, the material system of the gel electrolyte layer 4 is one of polyvinyl alcohol / potassium hydroxide, polyvinyl alcohol / sodium hydroxide, polyvinyl alcohol / potassium sulfate, polyvinyl alcohol / sodium sulfate, polyethylene oxide / potassium hydroxide, polyethylene oxide / sodium hydroxide, polyethylene oxide / potassium sulfate, polyethylene oxide / sodium sulfate, hydroxyethyl cellulose / potassium hydroxide, hydroxyethyl cellulose / sodium hydroxide, hydroxyethyl cellulose / potassium sulfate, and hydroxyethyl cellulose / sodium sulfate. These materials are all known in the art, and their specific material parameters are defined here.

[0089] It should be noted that, as mentioned above, the gel electrolyte layer 4 fills the interior of the pot-shaped structure layer 3. It can be understood that the gel electrolyte layer 4 and the pot-shaped structure layer 3 have the same thickness, and the first electrode layer 2 is continuously stacked / attached to the surface of the overall structure formed by the gel electrolyte layer 4 and the pot-shaped structure layer 3.

[0090] Specifically, the second electrode layer 6 is a stack formed by one or more of the following: MXene layer, carbon nanotube layer, graphene layer, silver nanowire layer, copper nanowire layer, polypyrrole nanowire layer and polyaniline nanowire layer.

[0091] Specifically, the pseudocapacitor layer 5 is a single-layer structure or a stack formed by one or more of the following: manganese dioxide layer, cobalt tetroxide layer, iron tetroxide layer, nickel oxide layer, nickel hydroxide layer, cobalt hydroxide layer, platinum oxide layer, ruthenium oxide layer, and palladium oxide layer. The thickness of the pseudocapacitor layer 5 is 2μm to 20μm.

[0092] For details, please refer to Figure 1a , Figure 1bThe interior of the pot-shaped structure layer 3 can be provided with multiple pot-shaped cavities arranged in an array, mimicking the ampulla of Vater. Each pot-shaped cavity is filled with a gel electrolyte layer 4. Correspondingly, multiple pseudocapacitive layers 5 are provided, each pseudocapacitive layer 5 being disposed in the orthographic projection area formed along the axial direction of a pot-shaped cavity. The multiple pot-shaped cavities, the multiple gel electrolyte layers 4 filled in the multiple pot-shaped cavities, the multiple pseudocapacitive layers 5, and the surface ion selectively permeable membrane layer 1, the first electrode layer 2, and the second electrode layer 6 are configured to form a multimodal flexible tactile sensor array. That is, the multimodal flexible tactile sensor 10 included in the multimodal flexible tactile sensor array shares the surface ion selectively permeable membrane layer 1, the first electrode layer 2, and the second electrode layer 6.

[0093] Example

[0094] A method for fabricating a multimodal flexible tactile sensor array specifically includes the following steps:

[0095] S1. Preparation of surface ion-selective permeable membrane: Mix 6g of polyvinyl alcohol with 60mL of deionized water and stir at 300rpm for 2h at 80℃ until dissolved; continue to add 1g of hydroxymethyl cellulose nanowires until the mixture is uniform and then allow it to cool naturally to room temperature; spin-coat the mixed solution onto the surface of a regular silicon wafer at 600rpm and heat-treat at 80℃ for 1h-2h until dried. After peeling off the film, a surface ion-selective permeable membrane with a thickness of 5μm is formed.

[0096] S2. Mix 1g MXene with 200mL deionized water and ultrasonically disperse at 200W for 2h until the dispersion is uniform to form a dispersion solution. Pour 50mL of the dispersion solution into a polytetrafluoroethylene mold and dry at 80℃ until the water is completely evaporated to form a first electrode layer with a thickness of 5μm.

[0097] S3. Clean the surface of the polyimide film with acetone, isopropanol and deionized water, and punch through holes in it with a microneedle array with a diameter of 20μm to 50μm. Due to the stress self-shrinkage of the polymer material, the formed through holes will form a pot-shaped cavity that imitates the Lorentz ampulla, resulting in a pot-shaped structure layer with a thickness of 50μm.

[0098] S4. Mix 6g of polyvinyl alcohol, 6g of potassium hydroxide and 60mL of deionized water, stir at 300rpm for 2h at 80℃ until dissolved, and let cool naturally to room temperature to form a gel electrolyte.

[0099] S5. Add 1g of carbon nanotubes to 200mL of deionized water and ultrasonically disperse at 200W for 2h until the dispersion is uniform. Pour 50mL of the dispersion solution into a polytetrafluoroethylene mold with a microgroove structure and dry at 80℃ until the water is completely evaporated to form a second electrode layer with a thickness of 1μm and a cylindrical micro-protrusion structure.

[0100] S6. Clean the silicon wafer with acetone, isopropanol and deionized water. Apply a mask with a cylindrical structure pattern to the surface of the silicon wafer. Spin-coat photoresist at 600 rpm for 6 seconds. Then keep it at 80℃ for 1 to 2 hours until it dries. Expose it to ultraviolet lithography for 5 seconds. After development, obtain the corresponding pattern. Use hydrofluoric acid chemical etching (10M / 2h) to obtain a groove silicon template with a cylindrical structure pattern.

[0101] S7. Mix the polydimethylsiloxane prepolymer and curing agent (Sylgard-184, Dow Corning) at a ratio of 7:1 (w / w) for 20 minutes, remove air bubbles by vacuuming, pour it onto the surface of the grooved silicon template obtained in S6 for leveling treatment, and cure at 80°C for 3 hours. After curing and demolding, a support substrate layer with multiple cylindrical micro-protrusion structures is obtained. The height of the micro-protrusion structure is 1.5μm, the diameter is 2μm, and the thickness of the bottom part is 10μm.

[0102] S8. Add 1g of manganese dioxide to 200mL of deionized water and ultrasonically disperse at 200W for 2h until the dispersion is uniform to form a pseudocapacitive material dispersion.

[0103] S9. Apply the second electrode layer 6 obtained in S5 to the surface of the encapsulation layer 7 obtained in S7.

[0104] S10. Spray the pseudocapacitive material dispersion obtained in S8 onto one side surface of the second electrode layer 6 in the structure obtained in S9, which has a cylindrical micro-protrusion structure, and dry it at 80°C for 1 to 2 hours to form a composite structure system with a 5μm pseudocapacitive material layer.

[0105] S11. Apply the pot-shaped structure layer obtained in S3 to the surface of the composite structure system obtained in S10.

[0106] S12. Fill the pot-shaped pores of the pot-shaped structure layer in the system obtained in S11 with the gel electrolyte obtained in S4.

[0107] S13. Attach the first electrode layer obtained in S2 to one side of the pot-shaped structure layer of the system obtained in S12.

[0108] S14. The surface ion-selective permeable membrane layer obtained in S1 is attached and combined with the first electrode layer of the system obtained in S13, and finally assembled to obtain a multimodal flexible tactile sensor and its array with a Lorentz-like ampulla structure.

[0109] A multimodal flexible tactile sensor with a Lorentz-like ampulla structure was tested (the test procedure was carried out according to known specifications in the art; the pressure change range during the test was 0–20 N; the temperature change range was 25℃–50℃, the room temperature was 25℃, therefore the temperature difference was 0–25℃; the K+ ion solubility was 0.5 μM–5 mM). The pressure response performance of this multimodal flexible tactile sensor is as follows: Figure 2 As shown, the temperature response performance test results are as follows: Figure 3 As shown, the test results of the ion electrochemical response performance are as follows: Figure 4 As shown.

[0110] This utility model provides a multimodal flexible tactile sensor with a Lorentz ampulla structure. Using the Lorentz ampulla structure as a biomimetic model, a multimodal flexible tactile sensor and its array are constructed. Pressure detection is achieved by using a capacitor structure constructed from upper and lower electrodes, a middle ampulla-shaped cavity, and an electrolyte layer inside the ampulla. Temperature detection is achieved by using the ampulla-shaped cavity and the electrolyte layer inside the ampulla. The response to ion type and concentration is achieved by using a pseudocapacitive layer covering the micro-protrusion structure, the ampulla-shaped cavity and the electrolyte layer inside the ampulla, and a surface ion-selective permeable membrane. This makes the device capable of multimodal response to pressure, temperature, and ions.

[0111] It should be understood that the above embodiments are merely illustrative of the technical concept and features of this utility model, and are intended to enable those skilled in the art to understand the content of this utility model and implement it accordingly. They should not be construed as limiting the scope of protection of this utility model. All equivalent changes or modifications made in accordance with the spirit and essence of this utility model should be included within the scope of protection of this utility model.

Claims

1. A multimodal flexible tactile sensor with a Lorentz-inspired ampulla structure, characterized in that, include: The surface ion selectively permeable membrane layer (1), the first electrode layer (2), the pot-shaped structure layer (3), the gel electrolyte layer (4), the pseudocapacitive layer (5), the second electrode layer (6), and the supporting substrate (7) are stacked in sequence. The interior of the pot-shaped structure layer (3) has a pot-shaped cavity that mimics the ampulla of Lorentz. The pot-shaped cavity extends along the thickness direction of the pot-shaped structure layer (3). The gel electrolyte layer (4) fills the pot-shaped cavity. The surface of the supporting substrate (7) has multiple micro-protrusion structures (71). The second electrode layer (6) continuously covers the outer surface of the multiple micro-protrusion structures (71). The pseudocapacitor layer (5) is distributed at least on the second electrode layer (6) covering the outer surface of the micro-protrusion structures (71). The first electrode layer (2), the pot-shaped cavity, the gel electrolyte layer (4) filled in the pot-shaped cavity, and the second electrode layer (6) are configured to form a capacitive pressure detection structure. The pot-shaped cavity and the gel electrolyte layer (4) filled in the pot-shaped cavity are configured to form a resistive temperature detection structure. The ion-selective permeable membrane layer (1), the pot-shaped cavity, the gel electrolyte layer (4) filled in the pot-shaped cavity, the pseudocapacitive layer (5), and the second electrode layer (6) are configured to form an ion detection structure.

2. The multimodal flexible tactile sensor with a Lorentz-inspired ampulla structure according to claim 1, characterized in that: The radial cross-sectional area of ​​the ports at both ends of the pot-shaped cavity is smaller than the radial cross-sectional area of ​​the middle part located at both ends. Furthermore, the inner wall of the pot-shaped cavity is a continuous curved surface, the radial cross-section of the pot-shaped cavity is circular, and the ratio of the diameter of the port, the diameter at the geometric center, and the axial height of the pot-shaped cavity is (20-50):(25-55):(20-100). And / or, the axial cross-section of the pot-shaped cavity has a continuous circular arc structure; And / or, the diameter of the pot-shaped cavity port is 20μm to 50μm, the diameter at the geometric center is 25μm to 55μm, and the axial height is 20μm to 100μm; And / or, the pot-shaped structural layer (3) is a polyvinyl alcohol substrate, a polyimide substrate, a polydimethylsiloxane substrate, a polyethylene terephthalate substrate, or a polyethylene substrate.

3. The multimodal flexible tactile sensor with a Lorentz-inspired ampulla structure according to claim 1, characterized in that: The pseudocapacitive layer (5) is a continuous structure, and the continuous pseudocapacitive layer (5) is continuously distributed on the second electrode layer (6) covering multiple micro-protrusion structures (71). Alternatively, the pseudocapacitive layer (5) is a discontinuous structure, and the discontinuous pseudocapacitive layer (5) is only distributed on the second electrode layer (6) covering the outer surface of the micro-protrusion structure (71). Furthermore, the micro-protrusion structure (71) extends into the interior of the pot-shaped cavity, and the portion of the pseudocapacitor layer (5) and the second electrode layer (6) covering the micro-protrusion structure (71), together with the micro-protrusion structure (71), is wrapped by the gel electrolyte layer (4). And / or, the portion of the pseudocapacitive layer (5) and the second electrode layer (6) covering the micro-bump structure (71) forms a contoured structure with the same shape as the micro-bump structure (71); And / or, multiple of the micro-protrusion structures (71) are arranged in an array; And / or, the pseudocapacitor layer (5) and the second electrode layer (6) are both structural layers with uniform thickness; And / or, the micro-protrusion structure is a columnar structure; And / or, the micro-protrusion structure is a cylindrical structure; And / or, the ratio of the axial height to the diameter of the cylindrical micro-protrusion structure is (0.5–10):(0.5–5); And / or, the cylindrical micro-protrusions have an axial height of 0.5 μm to 10 μm and a diameter of 0.5 μm to 5 μm; And / or, the thickness of the base portion of the support substrate (7) located at the bottom of the micro-bump structure (71) is 0.5 μm to 10 μm.

4. The multimodal flexible tactile sensor with a Lorentz-inspired ampulla structure according to claim 1 or 3, characterized in that: The pseudocapacitive layer (5) is a single-layer structure formed by one of the following: manganese dioxide layer, cobalt tetroxide layer, iron tetroxide layer, nickel oxide layer, nickel hydroxide layer, cobalt hydroxide layer, platinum oxide layer, ruthenium oxide layer and palladium oxide layer, or a stack formed by two or more of them. And / or, the thickness of the pseudocapacitive layer (5) is 2μm to 20μm; And / or, the first electrode layer (2) is a stack formed by one or more of the following: MXene layer, carbon nanotube layer, graphene layer, silver nanowire layer, copper nanowire layer, polypyrrole nanowire layer and polyaniline nanowire layer. And / or, the thickness of the first electrode layer (2) is 2 μm to 20 μm; And / or, the second electrode layer (6) is a stack formed by one or more of the following: MXene layer, carbon nanotube layer, graphene layer, silver nanowire layer, copper nanowire layer, polypyrrole nanowire layer and polyaniline nanowire layer. And / or, the thickness of the second electrode layer (6) is 0.5 μm to 10 μm; And / or, the ion-selective permeable membrane layer (1) comprises a permeable membrane substrate and an additive material doped in the permeable membrane substrate, the additive material allowing H... + Na + / K + Cl - Selective permeation through the permeable membrane substrate; And / or, the permeable membrane substrate is one of polyvinyl alcohol substrate, polyimide substrate, polydimethylsiloxane substrate, polyethylene terephthalate substrate and polyethylene substrate, and the additive material is one of hydroxymethyl cellulose nanowires, polypyrrole nanowires and polyaniline nanowires; And / or, the thickness of the ion-selective permeable membrane (1) is 2 μm to 20 μm.

5. A multimodal flexible tactile sensor array, characterized in that, include: A plurality of multimodal flexible tactile sensors having a Lorentz-like ampulla structure as described in any one of claims 1-4, wherein the plurality of multimodal flexible tactile sensors having a Lorentz-like ampulla structure are arranged in an array and electrically connected.

6. A multimodal flexible tactile sensor array with a Lorentz-inspired ampulla structure, characterized in that, include: The surface ion selectively permeable membrane layer (1), the first electrode layer (2), the pot-shaped structure layer (3), multiple gel electrolyte layers (4), multiple pseudocapacitor layers (5), the second electrode layer (6), and the supporting substrate (7) are stacked sequentially. The interior of the pot-shaped structure layer (3) has multiple pot-shaped cavities that mimic the ampulla of Lorentz. The pot-shaped cavities are continuous along the thickness direction of the pot-shaped structure layer (3). Each of the gel electrolyte layers (4) fills one of the pot-shaped cavities. The surface of the supporting substrate (7) has multiple micro-protrusion structures (71). The second electrode layer (6) continuously covers the outer surface of the multiple micro-protrusion structures (71). Each of the pseudocapacitive layers (5) is disposed between a gel electrolyte layer (4) and the second electrode layer (6). Furthermore, the pseudocapacitive layers (5) are at least distributed on the second electrode layer (6) covering the outer surface of the micro-protrusion structures (71). The pot-shaped cavities, the gel electrolyte layer (4), the pseudocapacitive layer (5), the surface ion selective permeable membrane layer (1), the first electrode layer (2), and the second electrode layer (6) are configured to form a multimodal flexible tactile sensor that combines pressure detection, temperature detection, and ion detection. In each of the multimodal flexible tactile sensors, the first electrode layer (2), the pot-shaped cavity, the gel electrolyte layer (4) filled in the pot-shaped cavity, and the second electrode layer (6) are configured to form a capacitive pressure detection structure; the pot-shaped cavity and the gel electrolyte layer (4) filled in the pot-shaped cavity are configured to form a resistive temperature detection structure; and the ion-selective permeable membrane layer (1), the pot-shaped cavity, the gel electrolyte layer (4) filled in the pot-shaped cavity, the pseudocapacitive layer (5), and the second electrode layer (6) are configured to form an ion detection structure.

7. The multimodal flexible tactile sensor array with a Lorentz-inspired ampulla structure according to claim 6, characterized in that: The radial cross-sectional area of ​​the ports at both ends of the pot-shaped cavity is smaller than the radial cross-sectional area of ​​the middle part located at both ends. Furthermore, the inner wall of the pot-shaped cavity is a continuous curved surface, the radial cross-section of the pot-shaped cavity is circular, and the ratio of the diameter of the port, the diameter at the geometric center, and the axial height of the pot-shaped cavity is (20-50):(25-55):(20-100). And / or, the axial cross-section of the pot-shaped cavity has a continuous circular arc structure; And / or, the diameter of the pot-shaped cavity port is 20μm to 50μm, the diameter at the geometric center is 25μm to 55μm, and the axial height is 20μm to 100μm; And / or, the pot-shaped structural layer (3) is a polyvinyl alcohol substrate, a polyimide substrate, a polydimethylsiloxane substrate, a polyethylene terephthalate substrate, or a polyethylene substrate.

8. The multimodal flexible tactile sensor array with a Lorentz-inspired ampulla structure according to claim 6 or 7, characterized in that: The surface of the supporting substrate (7) has a plurality of micro-bump structures (71), and the second electrode layer (6) continuously covers the outer surface of the plurality of micro-bump structures (71). The pseudocapacitor layer (5) is a continuous structure, and the continuous pseudocapacitor layer (5) is continuously distributed on the second electrode layer (6) covering the plurality of micro-bump structures (71). Alternatively, the pseudocapacitor layer (5) is a discontinuous structure, and the discontinuous pseudocapacitor layer (5) is only distributed on the second electrode layer (6) covering the outer surface of the micro-bump structures (71). Furthermore, the micro-protrusion structure (71) extends into the interior of the pot-shaped cavity, and the portion of the pseudocapacitor layer (5) and the second electrode layer (6) covering the micro-protrusion structure (71), together with the micro-protrusion structure (71), is wrapped by the gel electrolyte layer (4). And / or, the portion of the pseudocapacitive layer (5) and the second electrode layer (6) covering the micro-bump structure (71) forms a contoured structure with the same shape as the micro-bump structure (71); And / or, multiple of the micro-protrusion structures (71) are arranged in an array; And / or, the pseudocapacitor layer (5) and the second electrode layer (6) are both structural layers with uniform thickness; And / or, the micro-protrusion structure is a columnar structure; And / or, the micro-protrusion structure is a cylindrical structure; And / or, the ratio of the axial height to the diameter of the cylindrical micro-protrusion structure is (0.5–10):(0.5–5); And / or, the cylindrical micro-protrusions have an axial height of 0.5 μm to 10 μm and a diameter of 0.5 μm to 5 μm; And / or, the thickness of the base portion of the support substrate (7) located at the bottom of the micro-bump structure (71) is 0.5 μm to 10 μm.

9. The multimodal flexible tactile sensor array with a Lorentz-inspired ampulla structure according to claim 6 or 7, characterized in that: The pseudocapacitive layer (5) is a single-layer structure formed by one of the following: manganese dioxide layer, cobalt tetroxide layer, iron tetroxide layer, nickel oxide layer, nickel hydroxide layer, cobalt hydroxide layer, platinum oxide layer, ruthenium oxide layer and palladium oxide layer, or a stack formed by two or more of them. And / or, the thickness of the pseudocapacitive layer (5) is 2μm to 20μm.

10. The multimodal flexible tactile sensor array with a Lorentz-inspired ampulla structure according to claim 6 or 7, characterized in that: The ion-selective permeable membrane layer (1) includes a permeable membrane substrate and an additive material doped in the permeable membrane substrate, the additive material allowing H to pass through. + Na + / K + Cl - Selective permeation through the permeable membrane substrate; And / or, the permeable membrane substrate is one of polyvinyl alcohol substrate, polyimide substrate, polydimethylsiloxane substrate, polyethylene terephthalate substrate and polyethylene substrate, and the additive material is one of hydroxymethyl cellulose nanowires, polypyrrole nanowires and polyaniline nanowires; And / or, the thickness of the ion-selective permeable membrane layer (1) is 2 μm to 20 μm; And / or, the first electrode layer (2) is a stack formed by one or more of the following: MXene layer, carbon nanotube layer, graphene layer, silver nanowire layer, copper nanowire layer, polypyrrole nanowire layer and polyaniline nanowire layer. And / or, the thickness of the first electrode layer (2) is 2 μm to 20 μm; And / or, the second electrode layer (6) is a stack formed by one or more of the following: MXene layer, carbon nanotube layer, graphene layer, silver nanowire layer, copper nanowire layer, polypyrrole nanowire layer and polyaniline nanowire layer. And / or, the thickness of the second electrode layer (6) is 0.5 μm to 10 μm.

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