A Hartmann sensor integrated microscope objective inspection device

Abstract

This invention discloses a Hartmann sensor integrated microscope objective testing device, comprising a base, an optical fiber assembly, an off-axis parabolic mirror assembly, a beam splitter prism assembly, a Hartmann sensor assembly, and a mirror assembly. A light beam emitted from the optical fiber strikes the off-axis parabolic mirror, which collimates the reflected beam into a straight beam. The collimated beam strikes the beam splitter prism, and the beam reflected by the beam splitter prism passes through a side hole on the front plate and strikes a plane mirror. The beam reflected by the plane mirror then strikes the objective lens under test on a coaxial mirror holder. The beam emitted from the objective lens under test is reflected by a spherical mirror and returns along its original path, finally striking the Hartmann sensor, thus completing the testing of the objective lens. This device can be assembled using relatively few optical components and adjustment parts, resulting in a relatively simple structure, low assembly cost, and easy mobility.

Description

Technical Field

[0001] This utility model relates to the field of optical system technology, specifically a Hartmann sensor integrated microscope objective detection device. Background Technology

[0002] A Hartmann sensor is an optical measurement device based on the principle of wavefront detection. Originally proposed by American astronomer Johannes Hartmann in the early 20th century, it is used to detect aberrations and wavefront distortions in optical systems. Its core principle is to divide the incident wavefront into several sub-apertures using a microlens array or aperture array, forming a corresponding array of light spots on the focal plane. By analyzing the positional shifts of these light spots, the phase distribution of the wavefront can be reconstructed, thereby evaluating the performance of the optical system or correcting wavefront distortions in adaptive optics systems.

[0003] Traditional optical inspection methods (such as interferometers) offer high precision, but they are subject to stringent requirements for environmental stability and optical alignment, and are difficult to measure in real time. Hartmann sensors, due to their simple structure, strong anti-interference capabilities, and good real-time performance, are widely used in fields such as astronomical telescopes (e.g., correcting atmospheric turbulence), laser beam quality analysis, ophthalmology (e.g., corneal topography measurement), and industrial optical inspection.

[0004] With technological advancements, modern Hartmann sensors, combined with high-resolution CCD / CMOS detectors and high-performance algorithms (such as Zernike polynomial fitting and neural network reconstruction), have further improved measurement accuracy and dynamic range. However, current equipment for objective lens inspection mainly relies on interferometers due to their relatively complex structure, high cost, and difficulty in movement. Therefore, the need for a Hartmann sensor-based optical inspection system for objective lens inspection is a crucial current research direction. Summary of the Invention

[0005] The technical problem to be solved by this utility model is to provide a Hartmann sensor integrated microscope objective detection device to overcome the shortcomings of the above-mentioned prior art. This device can be built using a Hartmann sensor, fewer optical elements and adjustment parts. The structure is relatively simple, the construction cost is low and it is easy to move.

[0006] To achieve the above-mentioned technical objectives, the technical solution adopted by this utility model is as follows:

[0007] A Hartmann sensor integrated microscope objective detection device includes a device base, an optical fiber assembly, an off-axis parabolic mirror assembly, a beam splitter prism assembly, a Hartmann sensor assembly, and a mirror assembly; the optical fiber assembly, the off-axis parabolic mirror assembly, the beam splitter prism assembly, the Hartmann sensor assembly, and the mirror assembly are all connected to the device base.

[0008] The fiber optic assembly includes an XY-axis displacement platform, a Z-axis displacement platform, a four-dimensional adjustment frame, and a fiber optic interface. The XY-axis displacement platform is connected to the Z-axis displacement platform and is used to drive the Z-axis displacement platform to move along the X-axis and / or Y-axis. The Z-axis displacement platform is connected to the four-dimensional adjustment frame and is used to drive the four-dimensional adjustment frame to move along the Z-axis. The inner hole of the four-dimensional adjustment frame is connected to the fiber optic interface, which is used to connect optical fibers.

[0009] The off-axis parabolic mirror assembly includes a pitch stage, a rotatable mirror frame, and an off-axis parabolic mirror. The rotatable mirror frame is connected to the off-axis mirror mount on the off-axis parabolic mirror and is used to adjust the rotation angle of the off-axis parabolic mirror. The pitch stage is connected to the rotatable mirror frame and is used to adjust the pitch angle of the rotatable mirror frame and the off-axis parabolic mirror on the rotatable mirror frame.

[0010] The beam splitter assembly includes a pitch, yaw, and rotation displacement stage and a beam splitter. The pitch, yaw, and rotation displacement stage is connected to the beam splitter mount of the beam splitter via a beam splitter connecting plate and is used to adjust the pitch angle, yaw angle, and rotation angle of the beam splitter.

[0011] The Hartmann sensor group includes a pitch and yaw rotation displacement stage two and a Hartmann sensor. The pitch and yaw rotation displacement stage two is connected to the Hartmann sensor through a sensor connection plate and is used to adjust the pitch angle, yaw angle and rotation angle of the Hartmann sensor.

[0012] The mirror assembly includes a second pitch stage, a plane mirror, a mirror housing, and a coaxial mirror frame. The second pitch stage is connected to the mirror mount of the plane mirror and is used to adjust the pitch angle of the plane mirror. The second pitch stage is connected to the mirror housing, and the plane mirror is located inside the mirror housing. The mirror housing is connected to the coaxial mirror frame through an external connecting plate. The inner hole of the coaxial mirror frame is connected to the objective lens under test. A spherical mirror is also provided behind the objective lens under test.

[0013] The XY displacement platform, pitch displacement platform one, pitch yaw rotation displacement platform one and pitch yaw rotation displacement platform two are all connected to the upper surface of the device base. The reflector housing is connected to the device base through the front plate. The front plate is provided with a side hole, which communicates with the inside of the reflector housing.

[0014] The off-axis parabolic mirror is located in front of the fiber optic interface, the beam splitter is located in front of the Hartmann sensor, the beam splitter is located to the right of the off-axis parabolic mirror, the plane mirror is located in front of the beam splitter, and the objective lens under test is located to the right of the plane mirror.

[0015] The light beam emitted from the optical fiber strikes an off-axis parabolic mirror, which adjusts the reflected beam into a collimated beam. The collimated beam then strikes a beam splitter prism. The beam reflected by the beam splitter prism passes through a side hole on the front panel and strikes a plane mirror inside the mirror housing. The beam reflected by the plane mirror then strikes the objective lens under test on the coaxial mirror mount. The beam emitted from the objective lens under test is reflected by a spherical mirror and returns along the same path, passing sequentially through the objective lens under test, the plane mirror, and the beam splitter prism before finally striking the Hartmann sensor.

[0016] As a further improvement of this utility model, the XY displacement platform and the Z displacement platform are connected by screws, the Z displacement platform and the four-dimensional adjustment frame are connected by screws, and the inner hole of the four-dimensional adjustment frame is snapped into the optical fiber interface.

[0017] As a further improvement of this utility model, the pitch displacement stage is connected to the upper part of the support plate by screws, and the bottom of the support plate is connected to the upper surface of the device base by screws.

[0018] As a further improvement of this utility model, the rotatable mirror frame is connected to the off-axis reflector seat on the off-axis parabolic reflector by screws, and the pitch displacement stage is connected to the rotatable mirror frame by screws.

[0019] As a further improvement of the present invention, the pitch and yaw rotation displacement stage is connected to the beam splitter connecting plate by screws, and the beam splitter connecting plate is connected to the beam splitter lens mount on the beam splitter prism by screws.

[0020] As a further improvement of this utility model, the pitch and yaw rotation displacement stage II is connected to the sensor connecting plate by screws, and the sensor connecting plate is connected to the Hartmann sensor by screws.

[0021] As a further improvement of this utility model, the second pitch displacement stage is glued to the mirror mount on the plane mirror, the second pitch displacement stage is connected to the mirror housing by screws, the mirror housing is connected to the external connecting plate by screws, the external connecting plate is connected to the coaxial mirror frame by screws, and the inner hole of the coaxial mirror frame is snapped into the objective lens to be tested.

[0022] The beneficial effects of this utility model are as follows:

[0023] This invention relates to a simple integrated device using a Hartmann sensor. The device can be constructed using fewer optical components (such as off-axis parabolic mirrors, beam splitters, and plane mirrors) and adjustment parts (such as XY-axis displacement platforms B1, Z-axis displacement platforms B2, four-dimensional adjustment frame B3, pitch stage C1, rotatable mirror frame C2, pitch and yaw rotational displacement stages D1, E1, and F1). It eliminates the need for additional optical components, reduces the introduction of errors from other optical elements, and allows for the replacement of off-axis parabolic mirrors with different objectives to match the entrance pupil of the objective, thus minimizing light source loss.

[0024] This invention utilizes an off-axis parabolic mirror to focus a parallel beam or collimate a point light source without dispersion. Its off-axis design separates the focal point from the optical path. When the collimated beam is incident perpendicularly to the bottom of the mirror base, the reflected light converges at the focal point. Placing a point light source at the focal point allows for the collimated beam characteristic. The light emitted from the laser source is first collimated by the off-axis parabolic mirror, thus converting divergent light into collimated light without introducing aberrations. The collimated light then passes through a beam splitter and a plane mirror to reach the pupil of the objective lens under test, then through the objective lens to the spherical mirror, and finally returns via the same path.

[0025] This invention proposes to use an off-axis parabolic mirror to change the state of the light beam, transforming it from divergent light to collimated light. This reduces the introduction of other optical systems and light loss. A Hartmann microscope objective holder, also known as a Hartmann sensor integrated microscope objective inspection device, can be built using very few optical components. The structure is relatively simple, the construction cost is reduced, and it is small in size and easy to move.

[0026] The adjustment of this invention requires placing the optical fiber output end at the focal point of an off-axis parabolic mirror. By adjusting the tilt and rotation of the off-axis parabolic mirror and the position of the optical fiber, the collimation of the emitted beam is ensured. A beam splitter is then added to redirect the beam, which is then reflected by a plane mirror and enters the objective lens. The pitch angle of the plane mirror can also be adjusted to ensure that the reflected beam enters from the center of the objective lens. Subsequently, the spherical mirror is adjusted to ensure that the focal point of the objective lens is at the center of the spherical mirror. After being reflected by the spherical mirror, the beam returns along the original path, passing through the objective lens, the plane mirror, and the beam splitter, and finally strikes the Hartmann sensor. At the same time, the Hartmann sensor needs to be adjusted so that the sensor target surface is perpendicular to the beam. Attached Figure Description

[0027] Figure 1 This is a schematic diagram of the structure of this utility model.

[0028] Figure 2A structural diagram showing the structure after concealing the top cover and back panel.

[0029] Figure 3 This is a schematic diagram of the structure after the top cover is hidden.

[0030] Figure 4 This is a schematic diagram of the reflector assembly.

[0031] Figure 5 This is a schematic diagram of the structure of the reflector assembly after the reflector housing and external connecting plate are hidden.

[0032] Figure 6 This is a schematic diagram of the optical path of this utility model. Detailed Implementation

[0033] The specific embodiments of this utility model will be further described below with reference to the accompanying drawings:

[0034] like Figure 1 As shown, a Hartmann sensor integrated microscope objective detection device includes a device base A1, an optical fiber group B, an off-axis parabolic mirror group C, a beam splitter prism group D, a Hartmann sensor group E, and a mirror group F; the optical fiber group B, the off-axis parabolic mirror group C, the beam splitter prism group D, the Hartmann sensor group E, and the mirror group F are all connected to the device base A1.

[0035] like Figures 2-3 As shown, the fiber optic assembly B includes an XY-axis displacement platform B1, a Z-axis displacement platform B2, a four-dimensional adjustment frame B3, and a fiber optic interface B4. The XY-axis displacement platform B1 is connected to the Z-axis displacement platform B2, and the XY-axis displacement platform B1 is used to drive the Z-axis displacement platform B2 to move along the X-axis and / or Y-axis. The Z-axis displacement platform B2 is connected to the four-dimensional adjustment frame B3, and the Z-axis displacement platform B2 is used to drive the four-dimensional adjustment frame B3 to move along the Z-axis. The inner hole of the four-dimensional adjustment frame B3 is connected to the fiber optic interface B4, and the four-dimensional adjustment frame B3 is used to adjust the position of the fiber optic interface B4. The fiber optic interface B4 is used to connect fiber optic B5. The position of fiber optic B5 must be ensured to be at the front focal point of the off-axis parabolic reflector C3.

[0036] like Figures 2-3 As shown, the off-axis parabolic mirror assembly C includes a pitch displacement stage C1, a rotatable mirror frame C2, and an off-axis parabolic mirror C3. The inner hole of the rotatable mirror frame C2 is connected to the off-axis mirror mount on the off-axis parabolic mirror C3, and the rotatable mirror frame C2 is used to adjust the rotation angle of the off-axis parabolic mirror C3. The pitch displacement stage C1 is connected to the rotatable mirror frame C2, and the pitch displacement stage C1 is used to adjust the pitch angle of the rotatable mirror frame C2 and the off-axis parabolic mirror C3 on the rotatable mirror frame C2.

[0037] The off-axis parabolic mirror C3 is a type of surface mirror whose reflecting surface is a portion of the parent paraboloid. Using the off-axis parabolic mirror C3, a parallel beam of light or a collimated point source can be focused without dispersion. Its off-axis design separates the focal point from the light path. When a collimated beam is incident perpendicularly to the bottom of the mirror's base, the reflected light converges at the focal point. Placing a point source at the focal point yields a collimated beam. A spherical mirror allows light to return along its original path.

[0038] like Figures 2-3 As shown, the beam splitter prism group D includes a pitch, yaw, and rotation displacement stage D1 and a beam splitter prism D2. The pitch, yaw, and rotation displacement stage D1 is connected to the beam splitter mount D21 of the beam splitter prism D2 through a beam splitter connecting plate D3, and the pitch, yaw, and rotation displacement stage D1 is used to adjust the pitch angle, yaw angle, and rotation angle of the beam splitter prism D2. The beam splitter connecting plate D3 has a through hole for the beam to pass through.

[0039] like Figures 2-3 As shown, the Hartmann sensor group E includes a pitch, yaw, and rotation displacement stage E1 and a Hartmann sensor E2. The pitch, yaw, and rotation displacement stage E1 is connected to the Hartmann sensor E2 through a sensor connecting plate E3, and the pitch, yaw, and rotation displacement stage E1 is used to adjust the pitch angle, yaw angle, and rotation angle of the Hartmann sensor E2.

[0040] like Figure 2 , Figure 4 and Figure 5 As shown, the reflector assembly F includes a second pitch stage F1, a plane reflector F2, a reflector housing F3, and a coaxial reflector frame F4. The second pitch stage F1 is connected to the reflector mount F21 of the plane reflector F2 and is used to adjust the pitch angle of the plane reflector F2. The second pitch stage F1 is connected to the reflector housing F3, and the reflector housing F3 covers the outside of the plane reflector F2. The reflector housing F3 is also provided with a beam inlet and a beam outlet. The reflector housing F3 is connected to the coaxial reflector frame F4 through an external connecting plate F5. The inner hole of the coaxial reflector frame F4 is connected to the objective lens F6 under test. A spherical reflector is also provided behind the objective lens F6 under test. The fixing method of the spherical reflector adopts existing technology and is not within the protection scope of this utility model.

[0041] The XY displacement platform B1, pitch displacement platform C1, pitch yaw rotation displacement platform D1, and pitch yaw rotation displacement platform E1 are all connected to the upper surface of the device base A1. The reflector housing F3 is connected to the device base A1 through the front plate A2. The front plate A2 is provided with a side hole A21, which communicates with the interior of the reflector housing F3 through the beam inlet of the reflector housing F3.

[0042] Taking the position of the reflector group F as the front, the off-axis parabolic reflector C3 is located in front of the fiber optic interface B4, the beam splitter D2 is located in front of the Hartmann sensor E2, the beam splitter D2 is located to the right of the off-axis parabolic reflector C3, the plane reflector F2 is located in front of the beam splitter D2, and the objective lens under test F6 is located to the right of the plane reflector F2.

[0043] The specific direction of the beam is as follows: Figure 6 As shown, fiber optic cable B5 is connected to the light source. The light emitted from the light source passes through fiber optic cable B5, and then the beam emitted from fiber optic cable B5 strikes off-axis parabolic reflector C3. Off-axis parabolic reflector C3 adjusts the reflected beam into a collimated beam, which strikes beam splitter D2. The beam reflected by beam splitter D2 passes through side hole A21 on front plate A2 and circular beam inlet of reflector housing F3, and then strikes plane reflector F2 inside reflector housing F3. The beam reflected by plane reflector F2 passes through circular beam outlet of reflector housing F3 and enters the objective lens F6 in the middle of coaxial reflector frame F4. The beam emitted from objective lens F6 is reflected by spherical reflector F7 and returns along the original path, that is, it passes through objective lens F6, plane reflector F2, beam splitter D2 in sequence, and finally strikes Hartmann sensor E2. The spherical mirror F7, the objective lens F6, and the plane mirror F2 are on the same straight line; the plane mirror F2, the beam splitter D2, and the Hartmann sensor E2 are on the same straight line; the beam splitter D2 and the off-axis parabolic mirror C3 are on the same straight line, and the off-axis parabolic mirror C3 and the optical fiber B5 are on the same straight line.

[0044] In this embodiment, the XY displacement platform B1 and the Z displacement platform B2 are connected by screws. The X and Y positions of the Z displacement platform B2 can be adjusted by the XY displacement platform B1. The Z displacement platform B2 is connected to the four-dimensional adjustment frame B3 by screws. The Z position of the four-dimensional adjustment frame B3 can be adjusted by the Z displacement platform B2. The inner hole of the four-dimensional adjustment frame B3 is engaged with the optical fiber interface B4. The position and angle of the optical fiber interface B4 can be adjusted by the four-dimensional adjustment frame B3.

[0045] In this embodiment, the pitch displacement stage C1 is connected to the upper part of the support plate C4 by screws, and the bottom of the support plate C4 is connected to the upper surface of the device base A1 by screws.

[0046] In this embodiment, the rotatable mirror frame C2 is connected to the off-axis mirror mount on the off-axis parabolic mirror C3 by screws, and the pitch displacement stage C1 is connected to the rotatable mirror frame C2 by screws.

[0047] In this embodiment, the pitch and yaw rotation displacement stage D1 is connected to the beam splitter connecting plate D3 by screws, and the beam splitter connecting plate D3 is connected to the beam splitter mount D21 on the beam splitter prism D2 by screws.

[0048] In this embodiment, the pitch and yaw rotation displacement stage E1 is connected to the sensor connection plate E3 by screws, and the sensor connection plate E3 is connected to the Hartmann sensor E2 by screws.

[0049] In this embodiment, the pitch displacement stage F1 is glued to the reflector mount F21 on the plane reflector F2, the pitch displacement stage F1 is connected to the reflector housing F3 by screws, the reflector housing F3 is connected to the external connecting plate F5 by screws, the external connecting plate F5 is connected to the coaxial reflector frame F4 by screws, and the inner hole of the coaxial reflector frame F4 is engaged with the objective lens F6 to be tested.

[0050] In this embodiment, the spherical mirror F7 is behind the objective lens F6 to be tested, and the center of the spherical mirror F7 is on the surface of the objective lens F6.

[0051] The XY displacement platform B1, Z displacement platform B2, four-dimensional adjustment frame B3, pitch displacement stage C1, rotatable mirror frame C2, pitch and yaw rotation displacement stage D1, pitch and yaw rotation displacement stage E1, and pitch displacement stage F1 are all manually operated for adjustment, and their specific structures all adopt existing common structures.

[0052] In this embodiment, a Hartmann sensor integrated microscope objective detection device further includes an upper cover A4 and a rear plate A3. The rear plate A3 is connected to the rear side of the device base A1, and the front plate A2 is connected to the front side of the device base A1. The U-shaped upper cover A4 is connected to the device base A1 by screws, covering some optical components between the device base A1 and the upper cover A4. A through hole is provided on the rear plate A3 for the optical fiber B5 to pass through.

[0053] The installation process of this device is as follows: First, install the off-axis parabolic mirror C3 on the rotatable mirror frame C2. Then, adjust the XY-axis displacement platform B1, Z-axis displacement platform B2, and four-dimensional adjustment frame B3 of the fiber optic assembly B to position the fiber optic cable B5 at the focal point of the off-axis parabolic mirror C3. Next, adjust the pitch displacement stage C1 and the rotatable mirror frame C2 to collimate the beam emitted from the off-axis parabolic mirror C3 into a collimated beam. It is essential to ensure that the roundness and size of the beam emitted from the off-axis parabolic mirror assembly C are the same at a distance, and that the beam is perpendicular to the off-axis parabolic mirror assembly C, i.e., perpendicular to the entire assembly. Perpendicularity can be considered as the same as the height and size of the emitted beam at a distance. Finally, install the beam splitter prism assembly D on the device base A1. Adjust the pitch and yaw rotation displacement stage D1 to ensure the beam hits the center of the beam splitter prism D2. The light reflected by the beam splitter D2 should also hit the center of the side hole A21 on the front plate A2. Then, the mirror assembly F is installed. By adjusting the pitch displacement stage F1, the beam is reflected by the plane mirror F2 and hits the objective lens F6 under test in the center of the coaxial mirror frame F4 (the beam emitted from the objective lens F6 will be reflected by the spherical mirror F7 and return along the original path, eventually entering the Hartmann sensor E2). Therefore, the Hartmann sensor assembly E is installed on the device base A1. The position of the Hartmann sensor E2 needs to be adjusted by the pitch and yaw rotation displacement stage E1 according to the actual situation during use. The information collected by the Hartmann sensor E2 is analyzed to determine the test result of the objective lens F6, that is, to determine whether the objective lens F6 is qualified. The detection and processing process of the Hartmann sensor E2 adopts the existing technology, that is, by analyzing the result of the Zernike polynomial, to determine whether the objective lens is qualified.

[0054] The scope of protection of this utility model includes, but is not limited to, the above embodiments. The scope of protection of this utility model is defined by the claims. Any substitutions, modifications, or improvements to this technology that are easily conceived by those skilled in the art shall fall within the scope of protection of this utility model.

Claims

1. A Hartmann sensor integrated microscope objective detection device, characterized in that, The device includes a base (A1), an optical fiber assembly (B), an off-axis parabolic mirror assembly (C), a beam splitter prism assembly (D), a Hartmann sensor assembly (E), and a mirror assembly (F); the optical fiber assembly (B), the off-axis parabolic mirror assembly (C), the beam splitter prism assembly (D), the Hartmann sensor assembly (E), and the mirror assembly (F) are all connected to the base (A1); The fiber optic assembly (B) includes an XY-axis displacement platform (B1), a Z-axis displacement platform (B2), a four-dimensional adjustment frame (B3), and a fiber optic interface (B4). The XY-axis displacement platform (B1) is connected to the Z-axis displacement platform (B2), and the XY-axis displacement platform (B1) is used to drive the Z-axis displacement platform (B2) to move along the X-axis and / or Y-axis. The Z-axis displacement platform (B2) is connected to the four-dimensional adjustment frame (B3), and the Z-axis displacement platform (B2) is used to drive the four-dimensional adjustment frame (B3) to move along the Z-axis. The inner hole of the four-dimensional adjustment frame (B3) is connected to the fiber optic interface (B4), and the fiber optic interface (B4) is used to connect the fiber optic cable (B5). The off-axis parabolic mirror assembly (C) includes a pitch stage (C1), a rotatable mirror frame (C2), and an off-axis parabolic mirror (C3). The rotatable mirror frame (C2) is connected to the off-axis mirror mount on the off-axis parabolic mirror (C3), and the rotatable mirror frame (C2) is used to adjust the rotation angle of the off-axis parabolic mirror (C3). The pitch stage (C1) is connected to the rotatable mirror frame (C2), and the pitch stage (C1) is used to adjust the pitch angle of the rotatable mirror frame (C2) and the off-axis parabolic mirror (C3) on the rotatable mirror frame (C2). The beam splitter assembly (D) includes a pitch and yaw rotation stage (D1) and a beam splitter (D2). The pitch and yaw rotation stage (D1) is connected to the beam splitter mount (D21) of the beam splitter (D2) via a beam splitter connecting plate (D3), and the pitch and yaw rotation stage (D1) is used to adjust the pitch angle, yaw angle and rotation angle of the beam splitter (D2). The Hartmann sensor group (E) includes a pitch and yaw rotation stage 2 (E1) and a Hartmann sensor (E2). The pitch and yaw rotation stage 2 (E1) is connected to the Hartmann sensor (E2) through a sensor connecting plate (E3), and the pitch and yaw rotation stage 2 (E1) is used to adjust the pitch angle, yaw angle and rotation angle of the Hartmann sensor (E2). The mirror assembly (F) includes a second pitch stage (F1), a plane mirror (F2), a mirror housing (F3), and a coaxial mirror frame (F4). The second pitch stage (F1) is connected to the mirror mount (F21) of the plane mirror (F2) and is used to adjust the pitch angle of the plane mirror (F2). The second pitch stage (F1) is connected to the mirror housing (F3), and the plane mirror (F2) is located inside the mirror housing (F3). The mirror housing (F3) is connected to the coaxial mirror frame (F4) through an external connecting plate (F5). The inner hole of the coaxial mirror frame (F4) is connected to the objective lens (F6) under test. A spherical mirror is also provided behind the objective lens (F6). The XY displacement platform (B1), pitch displacement platform one (C1), pitch yaw rotation displacement platform one (D1), and pitch yaw rotation displacement platform two (E1) are all connected to the upper surface of the device base (A1). The reflector housing (F3) is connected to the device base (A1) through the front plate (A2). The front plate (A2) is provided with a side hole (A21), which communicates with the interior of the reflector housing (F3). The off-axis parabolic mirror (C3) is located in front of the fiber optic interface (B4), the beam splitter (D2) is located in front of the Hartmann sensor (E2), the beam splitter (D2) is located to the right of the off-axis parabolic mirror (C3), the plane mirror (F2) is located in front of the beam splitter (D2), and the objective lens under test (F6) is located to the right of the plane mirror (F2). The light beam emitted from the optical fiber (B5) strikes the off-axis parabolic mirror, which adjusts the reflected beam into a collimated beam. The collimated beam strikes the beam splitter (D2), and the beam reflected by the beam splitter (D2) passes through the side hole (A21) on the front plate (A2) and strikes the plane mirror (F2) inside the mirror housing (F3). The beam reflected by the plane mirror (F2) strikes the objective lens (F6) under test on the coaxial mirror holder (F4). The beam emitted from the objective lens (F6) under test is reflected by the spherical mirror and returns along the original path, that is, it passes through the objective lens (F6), the plane mirror (F2), and the beam splitter (D2) in sequence, and finally strikes the Hartmann sensor (E2).

2. The Hartmann sensor integrated microscope objective inspection device according to claim 1, characterized in that, The XY displacement platform (B1) and the Z displacement platform (B2) are connected by screws. The Z displacement platform (B2) and the four-dimensional adjustment frame (B3) are connected by screws. The inner hole of the four-dimensional adjustment frame (B3) is snapped into the optical fiber interface (B4).

3. The Hartmann sensor integrated microscope objective inspection device according to claim 1, characterized in that, The pitch displacement stage (C1) is connected to the upper part of the support plate (C4) by screws, and the bottom of the support plate (C4) is connected to the upper surface of the device base (A1) by screws.

4. The Hartmann sensor integrated microscope objective inspection device according to claim 1, characterized in that, The rotatable mirror frame (C2) is connected to the off-axis reflector mount on the off-axis parabolic reflector (C3) by screws, and the pitch displacement stage (C1) is connected to the rotatable mirror frame (C2) by screws.

5. The Hartmann sensor integrated microscope objective inspection device according to claim 1, characterized in that, The pitch and yaw rotation displacement stage (D1) is connected to the beam splitter connecting plate (D3) by screws, and the beam splitter connecting plate (D3) is connected to the beam splitter mount (D21) on the beam splitter prism (D2) by screws.

6. The Hartmann sensor integrated microscope objective inspection device according to claim 1, characterized in that, The pitch and yaw rotation displacement stage 2 (E1) is connected to the sensor connection plate (E3) by screws, and the sensor connection plate (E3) is connected to the Hartmann sensor (E2) by screws.

7. The Hartmann sensor integrated microscope objective inspection device according to claim 1, characterized in that, The pitch displacement stage 2 (F1) is glued to the reflector mount (F21) on the plane reflector (F2). The pitch displacement stage 2 (F1) is connected to the reflector housing (F3) by screws. The reflector housing (F3) is connected to the external connecting plate (F5) by screws. The external connecting plate (F5) is connected to the coaxial reflector frame (F4) by screws. The inner hole of the coaxial reflector frame (F4) is engaged with the objective lens (F6) to be tested.

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