An automatic testing device for semiconductor devices

Abstract

This utility model relates to the field of semiconductor device testing technology, specifically to an automatic testing device for semiconductor devices. The device continuously transports the device under test to the imaging station via a conveyor track. A camera, in conjunction with an adjustable-angle reflector, simultaneously captures images of the top and sides of the device. This multi-view integrated testing method significantly improves the defect recognition rate and avoids the visual blind spots of traditional single-angle testing. Simultaneously, the reflector angle adjustment mechanism employs a gear and block locking design to ensure optimal reflection for devices of different sizes. The operator only needs to press the release button to unlock the reflector angle, and the angle can be adjusted by simple manual rotation. After releasing the button, the spring mechanism automatically resets and locks the gear. The entire adjustment process requires no tools and has clear mechanical feedback, greatly reducing operational complexity. The guide rod structure ensures the linearity of the button movement, making force control more precise and stable.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor device testing technology, and in particular to an automatic testing device for semiconductor devices. Background Technology

[0002] Semiconductor devices are the core components of modern electronic devices. They are mainly made of semiconductor materials and achieve functions such as switching and amplification by controlling current. They are widely used in fields such as computers and communication equipment. Their performance directly affects the quality and reliability of electronic products. Common semiconductor devices include transistors, diodes, and integrated circuits.

[0003] The manufacturing process of semiconductor devices is very complex, requiring multiple precision steps such as wafer fabrication, photolithography, etching, ion implantation, and thin film deposition. Each step may introduce various microscopic defects, such as scratches, contamination, or structural anomalies. These defects can seriously affect the electrical performance and long-term stability of the devices. Therefore, rigorous testing is necessary to ensure product quality.

[0004] Traditional inspection devices typically employ a unidirectional inspection method, where a single camera can only capture an image of the device surface from a fixed angle, making it impossible to comprehensively identify multi-faceted defects. To achieve multi-angle inspection, multiple camera systems must be installed, which not only increases equipment costs and maintenance difficulty but also results in a bulky inspection system and complex operation procedures. Therefore, developing an efficient and low-cost multi-angle inspection solution is of great significance. Utility Model Content

[0005] The purpose of this invention is to provide an automatic testing device for semiconductor devices, which solves the problem of high testing costs in traditional semiconductor device testing devices.

[0006] To achieve the above objectives, this utility model provides an automatic testing device for semiconductor devices, including a conveyor track. A camera is fixedly mounted on the upper side of the conveyor track, and a base plate is fixedly mounted on the lower end of the conveyor track. Four supports are fixedly mounted on the upper end of the base plate, and a reflector is movably mounted between the supports. A fixing block is fixedly mounted on the right end of the reflector. The angle between the reflector and the conveyor track is adjusted by an adjustment component. The conveyor track is responsible for continuously conveying the semiconductor devices to be tested to the testing station, ensuring the continuity of the testing process. The camera acquires high-definition images of the passing devices and transmits the data to the processing system in real time. The base plate provides a stable foundation support platform for the entire testing device. The supports are vertically mounted on the base plate to fix the reflector assembly. The reflector reflects the side image of the device into the field of view of the camera at a special angle to achieve multi-angle synchronous testing. The fixing block serves as a connecting component between the reflector and the adjustment mechanism to ensure the reliability of force transmission.

[0007] The adjustment component includes a connecting rod, and the right end of the fixed block is fixedly provided with the connecting rod. The right end of the connecting rod is fixedly provided with a gear. The connecting rod transmits the rotational motion of the reflector to the gear assembly to achieve remote control. The gear provides precise angle positioning function through tooth meshing.

[0008] The upper end of the bracket on the right is fixedly equipped with a housing, the gear is movably disposed inside the housing, and a release button is movably disposed on the outer ring of the housing. The housing encloses and protects the internal precision transmission components from external contamination, and the release button serves as a human-machine interface to trigger the angle adjustment mechanism.

[0009] The gear has a rotating arm that is movably mounted on its outer side. A guide rod is fixed between the rotating arm and the release button. The rotating arm converts the downward pressure of the button into a gear unlocking action, and the guide rod constrains the movement trajectory of the button to ensure the linear accuracy of the operation.

[0010] A first spring is fixedly installed between the rotating arm and the release button, and a fixed rotating shaft is fixedly installed between the rotating arm and the inner wall of the housing. The first spring causes the button to automatically return to its initial position after operation, and the fixed rotating shaft provides a stable rotation fulcrum for the rotating arm.

[0011] The rotating arm has a toothed block fixedly installed at the end away from the release button. A second spring is fixedly installed between the toothed block and the inner wall of the housing. The toothed block locks the angle of the reflector by meshing with the gear, and the second spring ensures that the toothed block always tends to mesh with the gear.

[0012] The base plate has several through holes, and the left end of the reflector is connected to the bracket via a pivot. The through holes form an air circulation channel on the base plate for heat dissipation and weight reduction, and the pivot serves as the rotation center of the reflector to ensure its smooth rotation.

[0013] This device enables comprehensive automated inspection of semiconductor devices. The device under test is continuously transported to the imaging station via a conveyor track. A camera, in conjunction with an adjustable-angle reflector, simultaneously captures images of the top and sides of the device. This multi-view integrated inspection method significantly improves defect recognition rates and avoids the blind spots of traditional single-angle inspection. Simultaneously, the reflector angle adjustment mechanism employs a gear and block locking design to ensure optimal reflection for devices of different sizes. The operator simply presses the release button to unlock the reflector angle, and the angle can be adjusted manually by rotation. Releasing the button automatically resets the spring mechanism and locks the gear. The entire adjustment process requires no tools and provides clear mechanical feedback, greatly reducing operational complexity. The guide rod structure ensures the linearity of the button's movement, making force control more precise and stable. Attached Figure Description

[0014] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the accompanying drawings used in the description of the embodiments or the prior art will be briefly introduced below.

[0015] Figure 1 This is a schematic diagram of the overall structure of the automatic detection device for semiconductor devices according to an embodiment of the present invention.

[0016] Figure 2 This is a schematic diagram of the detection device structure according to an embodiment of the present invention.

[0017] Figure 3 This is an exploded view of the detection device according to an embodiment of the present invention.

[0018] Figure 4 This is a schematic cross-sectional view of the adjustment component according to an embodiment of the present invention.

[0019] 1. Conveyor track, 2. Camera, 3. Base plate, 4. Bracket, 5. Reflector, 6. Fixing block, 7. Connecting rod, 8. Gear, 9. Housing, 10. Release button, 11. Rotating arm, 12. Guide rod, 13. First spring, 14. Fixed shaft, 15. Gear block, 16. Second spring, 17. Through hole, 18. Shaft. Detailed Implementation

[0020] The embodiments of the present invention are described in detail below. Examples of the embodiments are shown in the accompanying drawings. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain the present invention, but should not be construed as limiting the present invention.

[0021] Please see Figures 1-4 An automatic inspection device for semiconductor devices includes a conveyor track 1, a camera 2 fixedly mounted on the upper side of the conveyor track 1, a base plate 3 fixedly mounted on the lower end of the conveyor track 1, four supports 4 fixedly mounted on the upper end of the base plate 3, a reflector 5 movably mounted between the supports 4, and a fixing block 6 fixedly mounted on the right end of the reflector 5. The angle between the reflector 5 and the conveyor track 1 is adjusted by an adjustment component. The conveyor track 1 is driven by a motor to continuously transport semiconductor devices to the inspection station. The camera 2 uses a high-resolution lens to acquire images of the passing devices and transmit the data to the processing system. The base plate 3 serves as the basic load-bearing platform of the device to ensure the overall structural stability. The supports 4 are vertically mounted on the base plate 3 to support the reflector 5 components. The reflector 5 reflects the side image of the device to the field of view of the camera 2 at a special angle to achieve multi-angle inspection. The fixing block 6 serves as the connecting component between the reflector 5 and the connecting rod 7 to ensure the reliability of force transmission.

[0022] The adjustment assembly includes a connecting rod 7. The right end of the fixing block 6 is fixedly equipped with the connecting rod 7, and the right end of the connecting rod 7 is fixedly equipped with a gear 8. The upper end of the right support 4 is fixedly equipped with a housing 9. The gear 8 is movably installed inside the housing 9. The outer ring of the housing 9 is movably equipped with a release button 10. The outer side of the gear 8 is movably equipped with a rotating arm 11. A guide rod 12 is fixedly installed between the rotating arm 11 and the release button 10. The connecting rod 7 transmits the rotational motion of the reflector 5 to the gear 8 to achieve remote control. The gear 8 provides a precise angle positioning function through tooth meshing. The housing 9 encloses and protects the internal gear 8 and rotating arm 11 from external contamination. The release button 10 serves as a human-machine interface component to trigger the angle adjustment mechanism. The rotating arm 11 converts the downward pressure of the button 10 into the unlocking action of the gear 8. The guide rod 12 constrains the movement trajectory of the button 10 to ensure the linear accuracy of the operation.

[0023] A first spring 13 is fixedly installed between the rotating arm 11 and the release button 10. A fixed rotating shaft 14 is fixedly installed between the rotating arm 11 and the inner wall of the housing 9. A toothed block 15 is fixedly installed at the end of the rotating arm 11 away from the release button 10. A second spring 16 is fixedly installed between the toothed block 15 and the inner wall of the housing 9. Several through holes 17 are opened on the base plate 3. The left end of the reflector 5 is connected to the bracket 4 through the rotating shaft 18. The first spring 13 causes the button 10 to automatically return to the initial position after operation. The fixed rotating shaft 14 provides a stable rotation fulcrum for the rotating arm 11. The toothed block 15 achieves angle locking of the reflector 5 by meshing with the gear 8. The second spring 16 ensures that the toothed block 15 always has a tendency to mesh with the gear 8. The through holes 17 form an air circulation channel on the base plate 3 for heat dissipation and weight reduction. The rotating shaft 18 serves as the rotation center point of the reflector 5 to ensure its smooth rotation.

[0024] Working principle: The conveyor track 1 continuously transports the semiconductor device to be tested. When the device passes under the camera 2, the camera 2 captures an image of the top of the device and transmits the data to the back-end processing system. At the same time, the reflectors 5 set on both sides of the conveyor track 1 reflect the side image of the device into the field of view of the camera 2, realizing multi-angle synchronous detection. The angle of the reflector 5 can be adjusted by pressing the release button 10 to drive the rotating arm 11 to rotate around the fixed rotating shaft 14, so that the tooth block 15 disengages from the gear 8 and is unlocked. At this time, the reflector 5 can be manually adjusted to the desired angle. After releasing the release button 10, the second spring 16 pushes the tooth block 15 to release the gear 8. Block 15 re-engages with gear 8 to complete the fixation. Guide rod 12 ensures that release button 10 moves in a straight line. Connecting rod 7 transmits the rotational motion of reflector 5 to gear 8. Bracket 4 provides support for reflector 5 and achieves rotation through shaft 18. Through hole 17 on base plate 3 is used for heat dissipation and weight reduction. Fixing block 6 and connecting rod 7 form a rigid connection to ensure the accuracy of angle adjustment. Housing 9 provides a protective shell for gear 8 and rotating arm 11. First spring 13 keeps release button 10 in the initial position. The entire adjustment assembly allows reflector 5 to be flexibly adjusted within a multi-angle range to adapt to the detection needs of devices of different sizes.

[0025] The above-disclosed embodiments are merely one or more preferred embodiments of this application and should not be construed as limiting the scope of this application. Those skilled in the art can understand that all or part of the processes for implementing the above embodiments and equivalent changes made in accordance with the claims of this application still fall within the scope of this application.

Claims

1. An automatic testing device for semiconductor devices, comprising a conveyor track (1), characterized in that, A camera (2) is fixedly installed on the upper side of the conveying track (1), a base plate (3) is fixedly installed at the lower end of the conveying track (1), four supports (4) are fixedly installed at the upper end of the base plate (3), a reflector (5) is movably installed between the supports (4), a fixing block (6) is fixedly installed at the right end of the reflector (5), and the angle between the reflector (5) and the conveying track (1) is adjusted by an adjustment component.

2. The automatic testing device for semiconductor devices as described in claim 1, characterized in that, The adjustment assembly includes a connecting rod (7), the right end of the fixing block (6) is fixedly provided with the connecting rod (7), and the right end of the connecting rod (7) is fixedly provided with a gear (8).

3. The automatic testing device for semiconductor devices as described in claim 2, characterized in that, A housing (9) is fixedly installed at the upper end of the bracket (4) on the right side, and the gear (8) is movably installed inside the housing (9). A release button (10) is movably installed on the outer ring of the housing (9).

4. The automatic testing device for semiconductor devices as described in claim 2, characterized in that, A rotating arm (11) is movably provided on the outer side of the gear (8), and a guide rod (12) is fixedly provided between the rotating arm (11) and the release button (10).

5. The automatic testing device for a semiconductor device as described in claim 4, characterized in that, A first spring (13) is fixedly provided between the rotating arm (11) and the release button (10), and a fixed rotating shaft (14) is fixedly provided between the rotating arm (11) and the inner wall of the housing (9).

6. The automatic testing device for a semiconductor device as described in claim 4, characterized in that, A toothed block (15) is fixedly provided at the end of the rotating arm (11) away from the release button (10), and a second spring (16) is fixedly provided between the toothed block (15) and the inner wall of the housing (9).

7. The automatic testing device for a semiconductor device as described in claim 1, characterized in that, The base plate (3) has several through holes (17), and the left end of the reflector (5) is connected to the bracket (4) via a rotating shaft (18).

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