An atomic force microscope with a plug-in probe switching structure

Abstract

This invention discloses an atomic force microscope with a rod-type probe switching structure in the field of atomic force microscopy. It includes a mounting base on the microscope, a switching mechanism and a positioning mechanism mounted on the mounting base, and several probe assemblies movably disposed within the switching mechanism. The positioning mechanism includes an adsorption base with a first adsorption groove and a second adsorption groove at its bottom that open sequentially. Each probe assembly includes a rod movably connected to the switching mechanism and a probe connecting part at the end of the rod. The first and second adsorption grooves are used to sequentially adsorb the probe connecting part and the rod, respectively, to achieve positioning and fixation. By mounting several probe assemblies on the switching mechanism, different probe assemblies can be aligned with the positioning mechanism by rotating the switching mechanism during switching. The positioning mechanism opens and closes sequentially through two adsorption grooves at different angles, thus fixing the probe assemblies and achieving automatic switching.

Description

Technical Field

[0001] This invention relates to the field of atomic force microscopy, and more specifically to an atomic force microscope with a plug-in probe switching structure. Background Technology

[0002] Atomic force microscopy (AFM) images the sample surface by detecting interatomic forces (such as van der Waals forces, electrostatic forces, and chemical bonds) between the probe tip and the sample surface. The probe is fixed on a microcantilever. When the probe tip approaches the sample surface, the forces cause the cantilever to bend. The deformation of the cantilever is measured by laser reflection and a photodetector, thereby reconstructing the three-dimensional morphology of the sample surface.

[0003] Since different samples may require different probes, it is often necessary to switch probes during use. For example, patent number 201410118223.8 discloses an atomic force microscope probe device, which specifically discloses the fixation method of the atomic force microscope. The probe device is fixed by vacuum adsorption and positioning components. This fixation method lacks an automatic switching function when the probe needs to be replaced, and manual replacement is still required, which is not conducive to improving detection efficiency. Utility Model Content

[0004] The purpose of this invention is to provide an atomic force microscope with a plug-in probe switching structure, which solves the problem that existing probes require manual switching.

[0005] The present invention achieves the above objectives through the following technical solutions: An atomic force microscope with a plug-in probe switching structure includes a mounting base on the microscope, a switching mechanism and a positioning mechanism on the mounting base, and a plurality of probe assemblies movably disposed within the switching mechanism. The positioning mechanism includes an adsorption seat with a first adsorption groove and a second adsorption groove at its bottom. Each probe assembly includes a plug movably connected to the switching mechanism and a probe connecting part disposed at the end of the plug. The first adsorption groove and the second adsorption groove are used to sequentially adsorb the probe connecting part and the plug to complete the positioning and fixation.

[0006] As a preferred embodiment of this utility model, the end of the probe connector is used to connect to the microcantilever, and the end of the microcantilever is provided with a probe. The microcantilever and the probe are existing technologies. The contour of the sample surface is obtained by detecting the changes of the microcantilever through a photoelectric device.

[0007] As a preferred embodiment of this utility model, a transition cavity is also provided between the second adsorption tank and the first adsorption tank. A one-way valve is provided in the transition cavity and the second adsorption tank. An elastic part is also provided in the transition cavity to make the one-way valve tend to close. This embodiment sets adsorption tanks that open and close sequentially. The adsorption component is first picked up by the first adsorption tank and then sucked into the end of the insertion rod by the second adsorption tank. The positioning function is completed by adsorption and fixation at two angles.

[0008] As a preferred embodiment of the present invention, the one-way valve includes a first valve block located in the transition cavity and a second valve block located in the second adsorption tank. The outer peripheral surface of the second valve block is provided with a side groove in a direction parallel to the axis. The one-way valve is opened and closed by setting the side groove, so that the one-way valve is only turned on when it slides to a certain extent and leaks out of the side groove. By setting the position of the side groove, a suitable time for the second adsorption tank to be turned on can be set.

[0009] The second adsorption tank is also provided with an extension, which includes a spring frame and a telescopic tube covering the spring frame. One end of the extension is fixed to the second adsorption tank, and the other end extends to the outside of the second adsorption tank to contact the end of the insertion rod. By providing the extension, it is prevented that when the first adsorption tank adsorbs the probe connection part, the second adsorption tank is too far away from the insertion rod, making it difficult to adsorb.

[0010] As a preferred embodiment of this utility model, the switching mechanism includes a turntable rotatably mounted on the mounting base and a driving part for driving the turntable. The turntable has a plurality of slots radially provided, and a sliding part is provided at one end of the insertion rod that enters the slot. This embodiment completes the switching function of the probe by setting the probe assembly on the surface of the turntable and aligning different probe assemblies with the positioning mechanism by rotating the turntable. Furthermore, by providing a sliding part at the end of the insertion rod, the probe assembly can be extended and retracted within the turntable for easy storage.

[0011] In a preferred embodiment of this utility model, the insertion rod extends and retracts along the slot by changing the air pressure. A negative pressure control valve is provided in the middle of the turntable to generate / eliminate negative pressure in several slots. In this embodiment, the probe assembly is controlled to extend and retract by negative pressure. Since the probe assembly needs to be positioned and fixed with the positioning mechanism during use, it has radial space with the slot when it slides out. Therefore, this embodiment uses negative pressure adsorption to extend and retract the probe assembly, so that the probe assembly also has a small amount of radial space.

[0012] The beneficial effects of this invention are as follows: by setting a switching mechanism equipped with several probe components, different probe components can be aligned with the positioning mechanism by rotating the switching mechanism during switching. The positioning mechanism then opens and closes sequentially through two adsorption grooves at different angles, so that the probe components can be positioned and fixed, thus achieving the purpose of automatic switching. Attached Figure Description

[0013] Figure 1 This is a schematic diagram of the overall structure of this utility model; Figure 2 This utility model Figure 1 Enlarged view of the structure of section A in the middle; Figure 3 This is a side view of the probe assembly of this utility model; In the figure: 1. Mounting base; 2. Positioning mechanism; 21. Adsorption base; 22. First adsorption groove; 23. Second adsorption groove; 24. First valve block; 25. Second valve block; 26. Side groove; 27. Elastic part; 28. Extension part; 3. Switching mechanism; 31. Turntable; 32. Drive part; 33. Slot; 34. Negative pressure control valve; 4. Probe assembly; 41. Insert rod; 42. Probe connection part; 43. Micro cantilever; 44. Probe; 45. Sliding part. Detailed Implementation

[0014] The present application will now be described in further detail with reference to the accompanying drawings. It should be noted that the following specific embodiments are only used to further illustrate the present application and should not be construed as limiting the scope of protection of the present application. Those skilled in the art can make some non-essential improvements and adjustments to the present application based on the above application content.

[0015] Example 1 like Figures 1-3 As shown, an atomic force microscope with a plug-in probe switching structure includes a mounting base 1 on the microscope, a switching mechanism 3 and a positioning mechanism 2 on the mounting base 1, and a plurality of probe assemblies 4 movably disposed within the switching mechanism 3. The positioning mechanism 2 includes an adsorption seat 21, the bottom of which is provided with a first adsorption groove 22 and a second adsorption groove 23 at different angles. The probe assembly 4 includes a plug 41 movably connected to the switching mechanism 3 and a probe connecting part 42 disposed at the end of the plug 41. The first adsorption groove 22 and the second adsorption groove 23 are respectively used to adsorb the probe connecting part 42 and the plug 41 in sequence to complete the positioning and fixation.

[0016] This solution uses a switching mechanism 3 equipped with several probe components 4. During switching, the switching mechanism 3 rotates to align different probe components 4 with the positioning mechanism 2. The positioning mechanism 2 then opens and closes sequentially through two adsorption grooves at different angles, thereby fixing the probe components 4 in place and achieving automatic switching.

[0017] The end of the probe connector 42 is used to connect the microcantilever 43. The end of the microcantilever 43 is provided with a probe 44. The microcantilever 43 and the probe 44 are existing technologies. The contour of the sample surface is obtained by detecting the change of the microcantilever 43 through a photoelectric device.

[0018] A transition cavity is also provided between the second adsorption tank 23 and the first adsorption tank 22. A one-way valve is provided in the transition cavity and the second adsorption tank 23. An elastic part 27 is also provided in the transition cavity to make the one-way valve tend to close. This solution sets adsorption tanks that open and close sequentially. The first adsorption tank 22 first picks up the adsorption component 42, and then the second adsorption tank 23 sucks in the end of the insertion rod 41. The two angles of adsorption fixation complete the positioning function. The purpose of setting the first adsorption tank 22 and the second adsorption tank 23 to open and close sequentially is to first concentrate the negative pressure in the first adsorption tank 22 so that there is enough negative pressure to capture the adsorption component 42. After the adsorption component 42 is firmly attracted, the second adsorption tank 23 is used to attract the end of the insertion rod 41 for positioning.

[0019] The one-way valve includes a first valve block 24 located in the transition cavity and a second valve block 25 located in the second adsorption groove 23. The outer peripheral surface of the second valve block 25 is provided with a side groove 26 in a direction parallel to the axis. The one-way valve is opened and closed by setting the side groove 26, so that the one-way valve is only turned on when it slides to a certain extent and leaks out of the side groove 26. By setting the position of the side groove 26, a suitable opening time can be set for the second adsorption groove 23. Specifically, when the first adsorption groove 22 completely adsorbs the adsorbent 42, the excess negative pressure acts on the one-way valve, causing the one-way valve to slide in the direction of overcoming the elastic part 27. When it slides out of the side groove 26, the second adsorption groove 23 generates negative pressure to adsorb and position the end of the insertion rod 41. A lubricating layer can be provided on the contact surface between the first adsorption groove 22 and the probe connection part 42 to reduce the friction of the contact surface, so that after the first adsorption groove 22 adsorbs the probe connection part 42, the second adsorption groove 23 can still attract the insertion rod 41 to move and position it.

[0020] The second adsorption groove 23 is also provided with an extension 28. The extension 28 includes a spring frame and a telescopic tube covering the spring frame. One end of the extension 28 is fixed to the second adsorption groove 23, and the other end extends to the outside of the second adsorption groove 23 to contact the end of the insertion rod 33. By providing the extension 28, it is prevented that after the first adsorption groove 22 adsorbs the probe connection part 42, the second adsorption groove 23 is too far away from the insertion rod, making it difficult to adsorb.

[0021] The switching mechanism 3 includes a turntable 31 rotatably mounted on the mounting base 1 and a driving part 32 for driving the turntable 31. The turntable 31 has a plurality of slots 33 radially opened. The end of the insertion rod 41 that enters the slot 33 is provided with a sliding part 45. In this solution, the probe assembly 4 is placed on the surface of the turntable 31. By rotating the turntable 31, different probe assemblies 4 are aligned with the positioning mechanism 2 to complete the switching function of the probe 44. Furthermore, by providing a sliding part 45 at the end of the insertion rod 41, the probe assembly 4 can be telescopically mounted in the turntable 31 for easy storage. The sliding part 45 and the insertion rod 41 can not only slide axially in the slot 33, but also have a small amount of radial movement space to facilitate the positioning mechanism 2 in positioning the probe assembly 4.

[0022] The insertion rod 41 extends and retracts along the slot 33 by changing the air pressure. A negative pressure control valve 34 is provided in the middle of the turntable 31 to generate / eliminate negative pressure in several slots 33. In this solution, the probe assembly 4 is controlled to extend and retract by negative pressure. Since the probe assembly 4 needs to be positioned and fixed with the positioning mechanism 2 during use, it has radial space with the slot 33 when it slides out. Therefore, this solution uses negative pressure adsorption to extend and retract the probe assembly 4, so that the probe assembly 4 also has a small amount of radial space. The negative pressure control valve 34 can be a multi-way valve that connects multiple slots 33. The multi-way valve is connected to an external negative pressure device. When the negative pressure in a certain slot 33 is eliminated, the probe assembly 4 naturally slides down to the bottom of the positioning mechanism 2.

[0023] Detailed implementation: The drive unit 32 rotates the appropriate probe assembly 4 to the position of the positioning mechanism 2 by rotating the drive turntable 31. Then, the negative pressure control valve 34 eliminates the negative pressure in the slot 33 corresponding to the probe assembly 4, causing the probe assembly 4 to slide down. The first adsorption groove 22 generates negative pressure through the external device to pick up the adsorption element 42, and the second adsorption groove 23 attracts and positions the end of the insertion rod 41, thus completing the positioning and fixing of the probe assembly 4. The entire mounting base 1 moves on the sample surface, so that the probe 44 interacts with the sample surface. The change of the microcantilever 43 is detected by the photoelectric device, thereby obtaining the sample surface contour.

[0024] The embodiments described above are merely examples of several implementations of the present invention, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the present invention. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of the present invention, and these modifications and improvements all fall within the scope of protection of the present invention.

Claims

1. An atomic force microscope with a plug-in probe switching structure, characterized in that, The microscope includes a mounting base (1) on the microscope, a switching mechanism (3) and a positioning mechanism (2) on the mounting base (1), and several probe assemblies (4) movably disposed in the switching mechanism (3). The positioning mechanism (2) includes an adsorption seat (21), and the bottom of the adsorption seat (21) is provided with a first adsorption groove (22) and a second adsorption groove (23). The probe assembly (4) includes a rod (41) movably connected to the switching mechanism (3) and a probe connecting part (42) disposed at the end of the rod (41). The first adsorption groove (22) and the second adsorption groove (23) are used to adsorb the probe connecting part (42) and the rod (41) respectively to complete the positioning and fixing.

2. An atomic force microscope with a plug-in probe switching structure according to claim 1, characterized in that, The end of the probe connection part (42) is used to connect the microcantilever (43), and the end of the microcantilever (43) is provided with a probe (44).

3. An atomic force microscope with a plug-in probe switching structure according to claim 1, characterized in that, A transition cavity is provided between the second adsorption tank (23) and the first adsorption tank (22). A one-way valve is provided in the transition cavity and the second adsorption tank (23). An elastic part (27) is also provided in the transition cavity to make the one-way valve tend to close.

4. An atomic force microscope with a plug-in probe switching structure according to claim 3, characterized in that, The one-way valve includes a first valve block (24) located in the transition cavity and a second valve block (25) located in the second adsorption groove (23). The outer peripheral surface of the second valve block (25) is provided with a side groove (26) in a direction parallel to the axis.

5. An atomic force microscope with a plug-in probe switching structure according to claim 4, characterized in that, The second adsorption groove (23) is also provided with an extension (28), which includes a spring frame and a telescopic tube covering the spring frame. One end of the extension (28) is fixed to the second adsorption groove (23), and the other end extends to the outside of the second adsorption groove (23) to contact the end of the insertion rod (41).

6. An atomic force microscope with a plug-in probe switching structure according to claim 1, characterized in that, The switching mechanism (3) includes a turntable (31) rotatably mounted on the mounting base (1) and a drive unit (32) for driving the turntable (31). The turntable (31) has a plurality of slots (33) radially provided, and the end of the insert rod (41) that enters the slot (33) is provided with a sliding part (45).

7. An atomic force microscope with a plug-in probe switching structure according to claim 6, characterized in that, The insertion rod (41) extends and retracts along the slot (33) by changing the air pressure, wherein a negative pressure control valve (34) is provided in the middle of the turntable (31) to generate / eliminate negative pressure in several slots (33).

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