A magnetic detection device

Abstract

This invention provides a magnetic detection device, including a stage, a magnetic field generating device, and a magneto-optical effect detection component. The stage includes a fixed structure and a movable structure. The fixed structure is configured to at least fix the object to be measured, and the movable structure is configured to at least move the object to be measured. The inner ring of the magnetic field generating coil is configured to be usable in the optical path of the detection light. By using a poleless head or magnetic core magnetic field generating coil to generate a magnetic field, and ensuring that the inner ring of the magnetic field generating coil is usable in the optical path of the detection light, the problem of electromagnets affecting the configuration of the detection optical path is eliminated. The fixed and movable structures of the stage allow for adjustment of the position of the object to be measured, enabling rapid switching of the measured position and achieving rapid detection of the object.

Description

Technical Field

[0001] This utility model belongs to the field of magnetic variable measurement technology, and relates to measurement using the magneto-optical effect. Specifically, it relates to a magnetic detection device. Background Technology

[0002] The magneto-optical effect refers to the change in polarization state of polarized light due to the magnetization state of the medium it passes through. Therefore, the magnetism of an object can be obtained by detecting the polarized light passing through it. Based on this, magneto-optical Kerr detection equipment measures the magnetism of the object's surface by emitting polarized light into it and measuring the polarization state of the reflected light; magneto-optical Faraday detection equipment measures the magnetism of the object's surface by emitting polarized light into it and measuring the polarization state of the transmitted light.

[0003] In some cases, it is necessary to place the object under test in a magnetic field environment so that its magnetism changes under the influence of the magnetic field. Magneto-optical detection equipment, such as magneto-optical Kerr detection equipment or magneto-optical Faraday detection equipment, is used to detect these changes in magnetism, thereby analyzing the magnetic properties of the object. In existing technologies, an electromagnet is typically used to generate the magnetic field, and the object is placed in a controllable magnetic field environment by bringing the electromagnet's poles close to it. However, the placement of the electromagnet's poles can interfere with or obstruct the object under test, thus limiting the optical path setup and making optical path configuration and adjustment difficult.

[0004] Therefore, in existing technologies, there is a problem that electromagnets can affect the configuration of the detection optical path.

[0005] The information disclosed in the background section is only intended to enhance the understanding of the background of this utility model, and therefore may contain information that does not constitute prior art known to those skilled in the art. Utility Model Content

[0006] To address the aforementioned problems, this utility model provides a magnetic detection device, comprising: a stage including a fixed structure and a movable structure, wherein the fixed structure is configured to at least fix the object to be measured, and the movable structure is configured to at least move the object to be measured; a magnetic field generating device including a magnetic field generating coil, the magnetic field generating coil comprising a hollow inner ring; and a magneto-optical effect detection component including a light source and a detector, wherein the detection light emitted by the light source is polarized light at least at a preset position incident on the object to be measured, and the detector detects the magneto-optical effect at the preset position based on the received detection light; the inner ring of the magnetic field generating coil is configured to provide an optical path for the detection light.

[0007] According to one embodiment of the present invention, the fixing structure is configured to at least adsorb or release the analyte.

[0008] According to one embodiment of the present invention, the fixed structure is rotatably mounted on the movable structure.

[0009] According to one embodiment of the present invention, the moving structure is configured to move the object under test between positions inside and outside the inner ring.

[0010] According to one embodiment of the present invention, the fixed structure is disposed at the moving end of the movable structure, and the moving end of the movable structure is at least capable of moving in an axial direction parallel to the inner ring.

[0011] According to one embodiment of this utility model, the direction of movement of the object being measured is perpendicular to the surface of the object being measured.

[0012] According to one embodiment of the present invention, the magnetic detection device further includes a transfer unit, which includes a robotic arm for picking up and placing the object to be tested.

[0013] According to one embodiment of the present invention, the magnetic detection device further includes a test object receiving box, which is configured to accommodate at least one test object.

[0014] According to one embodiment of the present invention, the magnetic detection device further includes a second displacement component, the movable end of which is configured to at least drive the object to be tested in the object to be tested container to move.

[0015] According to one embodiment of the present invention, the magnetic field generating device further includes a pulse power supply device for providing current to the magnetic field generating coil.

[0016] According to one embodiment of this utility model, the pulse power supply device is a capacitor pulse power supply device.

[0017] According to one embodiment of this utility model, the two magneto-optical effect detection components are respectively disposed on both sides of the object being tested.

[0018] According to one embodiment of this utility model, the detection light passes through the inner ring of the magnetic field generating coil and is incident on the object being tested.

[0019] According to one embodiment of this utility model, the light source and the detector are located on the same side of the object being tested, and the detection light is reflected by the object being tested to enter the detector.

[0020] According to one embodiment of this utility model, the light source and the detector are located on both sides of the object being tested, and the detection light is transmitted through the object being tested and enters the detector.

[0021] According to one embodiment of this utility model, the light source includes a light-emitting device and a polarizer, and the light emitted by the light-emitting device is used as the detection light after passing through the polarizer.

[0022] According to one embodiment of this utility model, the detector includes an analyzer and a photodetector. The detection light from the object being tested passes through the analyzer and then enters the photodetector.

[0023] According to one embodiment of this utility model, the detector includes a Wollaston prism and two photodetectors. The detection light reflected by the object being tested passes through the Wollaston prism and then enters the two photodetectors respectively.

[0024] According to one embodiment of this utility model, the axis of the magnetic field generating coil is perpendicular to the surface of the object being measured.

[0025] According to one embodiment of this utility model, the detection light is incident on the preset position in a direction perpendicular to the object being measured.

[0026] According to one embodiment of this utility model, the magnetic detection device further includes a beam splitter. The detection light emitted by the light source is incident on the preset position through the beam splitter, and the detection light reflected by the object being tested is incident on the detector through the beam splitter.

[0027] According to one embodiment of this utility model, the detection light is incident obliquely on the preset position.

[0028] This invention has at least the following beneficial effects: It provides a magnetic detection device that uses a magnetic field generating coil with a poleless head or magnetic core to generate a magnetic field, and makes the inner ring of the magnetic field generating coil usable for the optical path of the detection light, thus eliminating the problem of electromagnets affecting the configuration of the detection optical path; by using the fixed and movable structure of the stage to adjust the position of the object under test, the measured position of the object can be quickly switched, realizing rapid detection of the object; it can avoid the influence of hysteresis and remanence of the pole or magnetic core on the speed of magnetic field change, greatly improving the speed of magnetic field change to meet the testing requirements in a high-speed changing magnetic field environment. Attached Figure Description

[0029] Figure 1 This is a schematic diagram of the overall structure of one embodiment of the magnetic detection device.

[0030] Figure 2This is a schematic diagram of the overall structure of one embodiment of the magnetic detection device.

[0031] Figure 3 This is a schematic diagram of the overall structure of one embodiment of the magnetic detection device.

[0032] Figure 4 This is a schematic diagram of the overall structure of one embodiment of the magnetic detection device.

[0033] Figure 5 This is a schematic diagram showing the relationship between the preset position and the magnetic field generating coil involved in the magnetic detection device.

[0034] Figure 6 This is a schematic diagram of the overall structure of one embodiment of the magnetic detection device.

[0035] Figure 7 This is a schematic diagram of the overall structure of one embodiment of the magnetic detection device.

[0036] Figure 8 This is a schematic diagram of the overall structure of one embodiment of the magnetic detection device.

[0037] Figure 9 for Figure 8 A schematic diagram of the overall structure of the object under test in another position according to the embodiment shown.

[0038] Figure 10 This is a schematic diagram of the overall structure of one embodiment of the magnetic detection device. Detailed Implementation

[0039] To make the objectives and features of this utility model clearer and easier to understand, the specific embodiments of this utility model will be further described below with reference to the accompanying drawings. It should be noted that the drawings are all in a very simplified form and use non-precise ratios, and are only used to facilitate and clearly assist in illustrating the embodiments of this utility model.

[0040] This utility model provides a magnetic detection device, including: a stage 500, including a fixed structure 510 and a movable structure 520. The fixed structure 510 is configured to at least fix the object 400 to be tested, and the movable structure 520 is configured to at least drive the object 400 to be tested to move.

[0041] The magnetic field generating device 300 includes a magnetic field generating coil 310, which contains a hollow inner ring 311. The magnetic field generating coil 310 can form a magnetic field environment at a corresponding position. In some cases, the preset position F of the object under test 400 can be placed in the magnetic field environment formed by the magnetic field generating coil 310.

[0042] The magneto-optical effect detection component includes a light source 100 and a detector 200.

[0043] The light source 100 is configured to emit detection light L, which is polarized at least at a preset position F incident on the object under test 400. Specifically, polarizers or polarizers can be inserted into the path of the light emitted by the light source, or polarized light can be obtained by reflection or refraction. Alternatively, birefringent crystals or lenses or dichroic mirrors can be inserted into the path of the light emitted by the light source, etc., to obtain polarized light. Those skilled in the art can choose the specific method for obtaining polarized light according to actual needs, and will not be elaborated further here.

[0044] For the detection light L, it needs to be polarized light when it is incident on the object under test 400 at a preset position F. The exact location within the optical path where the detection light L satisfies the polarization requirement is not specified here; for example, it can be polarized within the light source 100 or during the propagation of the detection light L. More specifically, the corresponding lens or optical device that gives the detection light L polarized light characteristics only needs to be placed in the optical path before the detection light L is incident on the object under test 400 at the preset position F.

[0045] As a more feasible solution, please refer to Figures 1 to 4 The light source 100 includes a light-emitting device 110 and a polarizer 120. The light emitted by the light-emitting device 110 has a corresponding polarization state after passing through the polarizer 120, and can be used as detection light L to be incident on a preset position F of the object under test 400. For the light-emitting device 110, a laser light source, a light-emitting diode light source, or other devices capable of generating light can be selected as the light-emitting device 110.

[0046] The detection light L is polarized light, which means that the detection light L can be roughly regarded as linearly polarized light in order to obtain a better magneto-optical effect detection effect.

[0047] Detector 200 is configured to receive at least the detection light L passing through the object under test 400. Detector 200 detects the magneto-optical effect at a preset position F based on the received detection light L. Detector 200 can output corresponding data or signals depending on the needs and actual configuration. Detector 200 is at least capable of detecting the polarization state or polarization direction of the detection light L. Detector 200 can be configured to receive the detection light L reflected by the object under test 400 to detect the magnetism of the object under test 400 through the magneto-optical Kerr effect, or it can be configured to receive the detection light L transmitted through the object under test 400 to detect the magnetism of the object under test 400 through the magneto-optical Faraday effect.

[0048] Specifically, the light source 100 and detector 200 can be located on the same side of the object under test 400. The detection light L is reflected by the object under test 400 and enters the detector 200 to detect the magnetism of the object under test 400 through the magneto-optical Kerr effect. Alternatively, the light source 100 and detector 200 can be located on opposite sides of the object under test 400. The detection light L is transmitted through the object under test 400 and enters the detector 200 to detect the magnetism of the object under test 400 through the magneto-optical Faraday effect.

[0049] As a more common form, please refer to Figure 1 , 3 4.10. Detector 200 may include an analyzer 210 and a photodetector 220. The analyzer 210 converts the polarization direction of the detection light L into light intensity information, and then the photodetector 220 analyzes the light intensity information to analyze the magneto-optical effect at a preset position F. Alternatively, a combination of a Wollaston prism 230 and two photodetectors 221 and 222 can be used. The Wollaston prism 230 splits the detection light L reflected from the object 400 into two orthogonally polarized beams, which enter the photodetectors 221 and 222 respectively. By jointly analyzing the signals from the two photodetectors 221 and 222, the magneto-optical effect at the preset position F can be analyzed.

[0050] The magnetic field generating device 300 includes a magnetic field generating coil 310 and a pulse power supply device 320 for supplying current to the magnetic field generating coil 310. The magnetic field generating coil 310 is configured to form a magnetic field environment at least at a preset position F. The pulse power supply device 320 supplies current to the magnetic field generating coil 310 for generating the magnetic field environment.

[0051] As an optional implementation, the pulse power supply device 320 can be selected as needed, for example, it can be a capacitor pulse power supply device, an inductive pulse power supply device, or a mechanical energy pulse power supply device. As a preferred implementation, a capacitor pulse power supply device can be used.

[0052] To further improve the rate of change of the magnetic field generated by the magnetic field generating coil 310, the pulse power supply device 320 can be either single pulse or multi pulse, and the specific output waveform is not limited here.

[0053] The inner ring 311 of the magnetic field generating coil 310 is configured to be used as the optical path for the detection light L. Specifically, the detection light L can either pass through the inner ring 311 of the magnetic field generating coil 310 and illuminate a preset position F of the object under test 400, for example, by placing the light source 100 and the object under test 400 on different sides of the magnetic field generating coil 310; or it can partially pass through the inner ring 311 of the magnetic field generating coil 310 and illuminate the preset position F of the object under test 400, for example, by placing the object under test 400 in the inner ring 311 of the magnetic field generating coil 310; thereby enabling the inner ring 311 to be used as the optical path for the detection light L.

[0054] With the aforementioned setup, a magnetic field is generated using a poleless or magnetic core magnetic field generating coil 310. The inner ring of the magnetic field generating coil 310 is made available for the optical path of the detection light L. This eliminates the need for poles, allowing the preset position F of the object under test 400 to be placed in the magnetic field environment and detected. There is no issue of electromagnets affecting the configuration of the detection optical path. The position of the object under test 400 can be adjusted using the fixed structure 510 and the moving structure 520 of the stage 500, enabling rapid switching of the measured position and rapid detection of the object. Using a poleless or magnetic core magnetic field generating coil 310 avoids the influence of hysteresis and remanence of poles or magnetic cores on the rate of magnetic field change, significantly increasing the rate of magnetic field change. This ensures that the preset position F of the object under test 400 is located within the magnetic field environment of the magnetic field generating coil 310, meeting the testing requirements in high-speed changing magnetic field environments. Using this solution, a large, rapidly changing magnetic field can be obtained, meeting the detection requirements of high-speed, large magnetic fields.

[0055] As a feasible implementation, the fixing structure 510 can at least fix or release the object 400 being measured, and the moving structure 520 can at least move the object 400 being measured. More specifically, the fixing structure 510 can be disposed on the moving structure 520. The fixing structure 510 can fix the object 400 being measured, fixing the relative position between the object 400 being measured and the fixing structure 510, and allowing the object 400 to move its position as the fixing structure 510 moves. The fixing structure 510 can also release the object 400 being measured, allowing the object 400 to separate from the fixing structure 510. The moving structure 520 can move or rotate the fixing structure 510, so that at least when the relative position between the fixing structure 510 and the object 400 is fixed, the object 400 can be moved or rotated by moving or rotating the fixing structure 510.

[0056] In some cases, the fixing structure 510 is configured to at least fix or release the test object. Specifically, the fixing structure 510 can be an adsorption device, and the fixation or release of the test object 400 can be achieved by controlling the adsorption or release state of the fixing structure 510. In some cases, the fixing structure 510 can also be configured to fix or release the test object by mechanical clamping.

[0057] In some cases, the moving structure 520 can be configured to move the object under test 400 between positions inside and outside the inner ring 311. See also... Figure 8 , Figure 9 This illustrates a configuration where a moving structure 520 moves the object 400 to positions outside and inside the inner ring 311, respectively. The moving structure 520 is capable of moving the object 400 in... Figure 8 , Figure 9 Switch between the scenarios shown.

[0058] In some cases, the moving structure 520 can be configured to drive the object under test 400 to move, thereby meeting the position change requirements of the object under test 400. In some cases, the fixed structure 510 is disposed at the moving end of the moving structure 520, and the position change mode of the fixed structure 510 or the object under test 400 can be configured by configuring the position change mode of the moving end of the moving structure 520.

[0059] In some cases, to enable the measured object 400 to move between the inner and outer sides of the inner ring 311, the moving structure 520 can be configured such that its moving end is at least able to move in an axial direction parallel to the inner ring 311. This allows the moving structure 520 to move the measured object 400, generating displacement in the axial direction of the inner ring 311, thus achieving movement within the axial direction of the inner ring 311. As a feasible implementation, the moving structure 520 can be configured to move the fixed structure 510 in a direction perpendicular to the surface 410 of the measured object 400, such that the direction of movement of the measured object 400 is perpendicular to its surface.

[0060] Please see Figure 8-10In some cases, the object under test 400 is smaller than the inner ring 311, allowing the object under test 400 to be located within the inner ring 311. In this case, the projection range S1 is larger than the surface 410 of the object under test 400, and the preset position F can be set as needed at a corresponding position on the surface 410 of the object under test 400. Accordingly, a moving structure 520 can be configured to move the object under test 400 between positions within and outside the inner ring 311. Specifically, the moving structure 520 can move the object under test 400 at least along the axial direction of the inner ring 311, so that the object under test 400 can be located within or outside the inner ring 311. Please refer to [link to relevant documentation]. Figure 8 , Figure 9 This illustrates a feasible implementation, wherein a fixed structure 510 is disposed at the moving end of a movable structure 520, the moving end of the movable structure 520 drives the fixed structure 510 to move, thereby driving the object 400 fixed on the fixed structure 510 to move, and the movable structure 520 drives the fixed structure 510 to move along the axial direction of the inner ring 311, such as... Figure 8 This causes the object being tested, 400, to be located outside the inner ring 311, such as... Figure 9 This ensures that the object under test 400 is located within the inner ring 311. In some cases, the moving structure 520 can be configured so that the direction of movement of the object under test 400 is perpendicular to its surface. When the surface of the object under test 400 is perpendicular to the axis of the inner ring 311 or the magnetic field generating coil 310, the direction of its surface 410 is always perpendicular to the axis of the inner ring 311 before and after movement.

[0061] In some cases, the movable structure 520 can be a movable rod, a telescopic rod, a linear displacement device, a displacement table, or other form that enables the part of the movable structure 520 with the fixed structure 510 to move along a preset direction. The fixed structure 510 can be set at the movable end of the movable structure 520, thereby enabling the fixed structure 510 and the object 400 to move at least along the preset direction.

[0062] In some cases, a stage 500 can also be configured so that the stage 500 can also move the object 400 in a plane parallel to the surface 401 of the object. As a feasible approach, the stage 500 can rotate the object 400 so that the relative position of the magnetic field generating coil 310 and the object 400 moves in a plane parallel to the surface 401 of the object. Specifically, the moving structure 520 can drive the fixed structure 510 to rotate axially in a preset direction, for example, by setting a motor or transmission device at the end of the moving structure 520 where the fixed structure 510 is located, or by setting other forms that enable the fixed structure 510 to rotate.

[0063] For the measured position of the object 400, i.e., the preset position F, the relative position of the preset position F and the magnetic field generating coil 310 can be set to determine the magnetic field at the preset position F of the object 400 and ensure that the magnetic field at the preset position F meets the detection requirements. Specifically, the preset position F is set within the range of the projection S1 of the inner ring 311 of the magnetic field generating coil 310. Please refer to... Figure 5 The diagram illustrates the specific positioning method, wherein the magnetic field generating coil 310 can be annular, containing a hollow inner ring. The inner ring of the magnetic field generating coil 310 forms a projection range S1 on the surface 410 of the object being measured 400, and the preset position F is located within this projection range S1.

[0064] The preset position F is located within the projection range S1. Within the projection range S1, any corresponding preset position F can be selected as the detection position.

[0065] Furthermore, since the preset position F is located within the projection S1 of the inner ring 311 of the magnetic field generating coil 310, the magnetic field uniformity within this range is relatively good. This ensures that the magnetic field environment at the preset position F meets the detection requirements and facilitates adjustment of the magnetic field at the preset position F, greatly simplifying magnetic field control and the use of the detection equipment. In addition, the inner ring of the magnetic field generating coil 310 can be used for the optical path of the detection light L, simplifying the optical path structure of the equipment and reducing equipment costs.

[0066] It should be noted that the cross-section of the magnetic field generating coil 310 can be circular, square, or any other arbitrary shape, which can determine the range of the projection S1. For example, the range of the projection S1 can be determined by the minimum cross-section of the inner ring 311.

[0067] The position setting of the magnetic field generating coil 310 can be adjusted according to the detection requirements of the object being measured 400. Please refer to [link / reference]. Figure 5 As a preferred implementation, the axis of the magnetic field generating coil 310 is perpendicular to the surface 410 of the object under test 400, so as to form a magnetic field that is substantially perpendicular to the surface 410 of the object under test 400 in at least a portion of the surface 410. In this case, a relatively uniform magnetic field that is substantially perpendicular to the surface 410 of the object under test 400 can be formed within the projection S1 of the inner ring 311 of the magnetic field generating coil 310.

[0068] In some cases, a signal acquisition device can be further provided based on the technical solution provided by this utility model. The signal acquisition device is communicatively connected to the magnetic field generating device and the detector. The signal acquisition device is configured to simultaneously acquire the current of the magnetic field generating coil 310 and the signal of the detector 200. Based on the current of the magnetic field generating coil 310, the magnetic field of the magnetic field generating coil 310 can be calculated, and thus the magnetic field at the preset position F of the object under test 400 can be obtained. Based on the signal of the detector 200, the intensity of the magneto-optical effect at the preset position F can be obtained, and thus the magnetism at the preset position F can be obtained. Based on the data of the magnetic field and magnetism at the preset position F, the magnetic properties of the object under test can be analyzed.

[0069] In some cases, magnetic detection is required on both sides of the object under test 400. Accordingly, the light source 100 and detector 200 can be used as magneto-optical effect detection components, and at least one magneto-optical effect detection component can be set on each of the two sides of the object under test 400 where detection is required, to achieve double-sided detection of the object under test 400. Please refer to [link / reference]. Figure 6 The illustration shows a specific embodiment with two magneto-optical effect detection components. The first light source 100 and the first detector 200 serve as the first magneto-optical effect detection component and are located on the left side of the object under test 400. The second light source 100' and the second detector 200' serve as the second magneto-optical effect detection component and are located on the right side of the object under test 400. The two magneto-optical effect detection components can detect the magnetism on both sides of the object under test, respectively.

[0070] When detecting the magnetism on both sides of the object under test 400, in some cases, one magnetic field generating coil 310 is sufficient to ensure that the magnetic field environment at the preset positions F on both sides of the object under test 400 meets the detection requirements; in other cases, one magnetic field generating coil 310 is insufficient to ensure that the magnetic field environment at the preset positions F on both sides of the object under test 400 meets the detection requirements. At least one magnetic field generating coil 310 can be provided on each side of the object under test 400 as needed. Alternatively, a required number of magnetic field generating coils 310 can be provided on both sides of the object under test 400 as needed. Please refer to... Figure 6 The illustration shows a specific implementation in which a magnetic field generating coil 310 is disposed on the left side of the object under test 400, and a magnetic field generating coil 310' is disposed on the right side of the object under test 400.

[0071] In some cases, in order to make the magnetic field environment of the preset positions F on both sides of the object under test 400 the same, two magnetic field generating coils 310 and 310' can be symmetrically arranged on both sides of the object under test 400.

[0072] In some cases, the magnetic field generating coils 310 and 310' have the same performance or structure; they can also have different performance or structure. The positional relationship between the coils 310 and 310' and the object under test 400 can be configured according to the detection requirements to configure the magnetic field environment of the object under test 400.

[0073] When two magnetic field generating coils 310 and 310' are provided, in some cases, it is necessary for both coils 310 and 310' to generate magnetic fields approximately simultaneously. Accordingly, please refer to [reference needed]. Figure 6 The magnetic field generating coils 310 and 310' located on both sides of the object under test 400 can be connected to the same pulse power supply device 320. Please refer to [link / reference]. Figure 7 Alternatively, the magnetic field generating coils 310 and 310' located on both sides of the object under test 400 can be connected to different pulse power supply devices 320 and 320' and the pulse power supply devices 320 and 320' can be controlled synchronously so that the currents of the two magnetic field generating coils 310 and 310' are roughly synchronized.

[0074] Please see Figure 1 , 2 The detection light L can be incident on a preset position F in a direction perpendicular to the object under test 400, and can at least be used to detect the poloidal magneto-optical Kerr effect at the preset position F. In this case, when it is necessary to collect the detection light L reflected by the object under test 400, a beam splitter 600 can also be set in the optical path. The detection light L emitted by the light source 100 is incident on the preset position F through the beam splitter 600, and the detection light L reflected by the object under test 400 is incident on the detector 200 through the beam splitter 600. As one possible method, please refer to [link / reference needed]. Figure 5 The specific path of the detection light L1 in the detector. In this case, the magnetism in the perpendicular direction of the object 400 can be detected at least by the detector 200.

[0075] Please see Figure 3 , Figure 4 The detection light L can also be incident at a preset position F at an angle. Specifically, the detection light L can pass through the inner ring 311 of the magnetic field generating coil 310, and the direction of the detection light L can form an angle with the vertical direction of the surface 401 of the object being measured 400. As one possible method, please refer to [reference needed]. Figure 5 The specific path of the detection light L2 is described. In this case, the in-plane and perpendicular magnetic properties of the object 400 can be detected by adjusting the angle at which the detection light L is incident on the object 400. Generally, a smaller incident angle can be used to mainly analyze the perpendicular magnetic properties at the preset position F of the object 400, while a larger incident angle can be used to mainly analyze the perpendicular and in-plane magnetic properties at the preset position F of the object 400.

[0076] In some cases, the magnetic detection device may also include a transfer unit for transferring the object 400 to the stage 500, or transferring the object 400 on the stage 500 to the outside of the stage 500. As a feasible implementation, the transfer unit may take the form of a robotic arm, which picks up and places the object 400. The specific form of the robotic arm can be selected as needed.

[0077] In some cases, the magnetic detection device may further include a test object receiving box, which is configured to accommodate at least one test object. Based on this, the test object 400 can be removed from the test object receiving box and moved to the stage 500. The stage 500 then adjusts the positional relationship between the test object 400 and the magnetic field generating coil 310, ensuring that a preset position F is in a corresponding magnetic field environment. The preset position F of the test object 400 is then detected by the magneto-optical effect detection component. Alternatively, the tested test object 400 can be transferred from the stage 500 to the test object receiving box for storage. In some cases, the test object receiving box can be configured to accommodate multiple test objects 400, allowing for the removal of test objects 400 from the box for testing and the return of the tested test objects 400 to the box, thus sequentially testing the test objects 400 in the receiving box to meet the needs of batch testing.

[0078] In some cases, the magnetic detection device may also include a second displacement component, the movable end of which is configured to at least move the object in the object receiving box, thereby enabling at least partial movement of the object 400 in the object receiving box so as to remove the object 400 from the object receiving box.

[0079] The basic principles, main features, and advantages of this utility model have been shown and described above. Therefore, the above description is only an embodiment of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are only the principles of this utility model. Without departing from the spirit and scope of this utility model, this utility model also includes various equivalent changes and modifications, all of which will fall within the scope of this utility model as claimed.

Claims

1. A magnetic detection device, characterized in that, include: A stage includes a fixed structure and a movable structure. The fixed structure is configured to at least fix the object to be measured, and the movable structure is configured to at least move the object to be measured. A magnetic field generating device includes a magnetic field generating coil, wherein the magnetic field generating coil comprises a hollow inner ring; A magneto-optical effect detection component includes a light source and a detector. The detection light emitted by the light source is polarized light at least at a preset position incident on the test object. The detector detects the magneto-optical effect at the preset position based on the received detection light. The inner ring of the magnetic field generating coil is configured to provide an optical path for the detection light.

2. The magnetic detection device as described in claim 1, characterized in that: The fixing structure is configured to at least fix or release the object being tested.

3. The magnetic detection device as described in claim 1, characterized in that: The fixed structure is rotatably mounted on the movable structure.

4. The magnetic detection device as described in claim 1, characterized in that: The moving structure is configured to move the object under test between positions inside and outside the inner ring.

5. A magnetic detection device as described in claim 4, characterized in that: The fixed structure is disposed at the moving end of the movable structure, and the moving end of the movable structure is capable of moving at least in an axial direction parallel to the inner ring.

6. The magnetic detection device as described in claim 1, characterized in that: The direction of movement of the object being tested is perpendicular to the surface of the object being tested.

7. A magnetic detection device as described in claim 1, characterized in that: The magnetic detection device also includes a transfer unit, which includes a robotic arm for picking up and placing the object to be tested.

8. A magnetic detection device as described in claim 1, characterized in that: The magnetic detection device also includes a test object container, which is configured to accommodate at least one test object.

9. A magnetic detection device as described in claim 8, characterized in that: The magnetic detection device further includes a second displacement component, the movable end of which is configured to at least move the object to be tested in the object-containing container.

10. A magnetic detection device as described in claim 1, characterized in that: The magnetic field generating device also includes a pulse power supply device for providing current to the magnetic field generating coil.

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