Fault diagnosis device for hardware circuit of exposure machine and exposure machine

Abstract

This application provides a fault diagnosis device for the hardware circuit of an exposure machine and an exposure machine itself, relating to the field of exposure machine technology. The fault diagnosis device includes a host computer, a controller, and multiple power supply detection units. These multiple power supply detection units are respectively installed on multiple unit power supply circuits within the exposure machine, and these circuits are power supply circuits for multiple unit modules within the exposure machine. The multiple power supply detection units are connected to the controller, which is also communicatively connected to the host computer. This fault diagnosis device for the hardware circuit of the exposure machine, by setting power supply detection units on multiple unit power supply circuits within the exposure machine, enables the acquisition of the detection status of the power supply detection units through the connection between the controller and the power supply detection units. When the detection status of a power supply detection unit is abnormal, the device promptly reports the abnormal information to the host computer, thereby expanding the scope of fault diagnosis and alarm for the exposure machine and improving the timeliness, accuracy, and efficiency of fault diagnosis and alarm.

Description

Technical Field

[0001] This utility model relates to the field of exposure machine technology, and in particular to a fault diagnosis device for the hardware circuit of an exposure machine and an exposure machine. Background Technology

[0002] LDI (Laser Direct Imaging) exposure machines are key equipment in PCB (Printed Circuit Board) manufacturing, replacing traditional film contact exposure. This equipment uses a computer-controlled ultraviolet laser beam to directly image the substrate coated with photoresist, achieving micron-level precision. This equipment has advantages such as eliminating the need for film, reducing manual intervention, and improving alignment accuracy. It is suitable for the production of mid-to-high-end PCBs such as rigid boards, HDI (High Density Interconnector) boards, and flexible substrates.

[0003] Current LDI exposure machines primarily achieve fault diagnosis and alarm functions by collecting and monitoring process parameters and error parameters during the exposure process.

[0004] However, current fault diagnosis and alarm solutions for LDI exposure machines only monitor process parameters and measure error parameters to achieve fault diagnosis and alarms. They do not directly monitor and diagnose hardware circuits and require manual troubleshooting after a fault occurs. This results in limited fault diagnosis and alarm coverage for LDI exposure machines, insufficient timeliness and accuracy of fault diagnosis and alarms, and low efficiency. Utility Model Content

[0005] The main purpose of this invention is to propose a fault diagnosis device for the hardware circuit of an exposure machine and an exposure machine, so as to expand the fault diagnosis and alarm range of the exposure machine and improve the timeliness, accuracy and efficiency of fault diagnosis and alarm.

[0006] In a first aspect, this utility model provides a fault diagnosis device for the hardware circuit of an exposure machine, the fault diagnosis device comprising: a host computer, a controller, and multiple power supply detection units; The plurality of power supply detection units are respectively used to be installed on the power supply circuits of the plurality of units in the exposure machine, and the plurality of power supply circuits are the power supply circuits of the plurality of unit modules in the exposure machine; The plurality of power supply detection units are connected to the controller, and the controller is also connected to the host computer.

[0007] In an optional implementation, the plurality of power supply detection units are respectively a plurality of current sensors, the plurality of current sensors are respectively disposed on the power supply circuit of the plurality of units, and the signal output terminals of the plurality of current sensors are respectively connected to the plurality of analog input ports of the controller.

[0008] In an optional implementation, the plurality of current sensors are respectively a plurality of current transformers; The power supply lines of the multiple unit power supply circuits are arranged to pass through the coils of the multiple current transformers.

[0009] In an optional implementation, the neutral wire in the power supply line of the plurality of unit power supply circuits passes through the coils of the plurality of current transformers.

[0010] In an optional implementation, the controller's multiple input / output ports are also connected to the alarm output ports of multiple target hardware components in the exposure machine.

[0011] In an optional embodiment, the fault diagnosis device further includes a display unit, and the host computer is connected to the display unit.

[0012] In an optional implementation, the power supply circuits of the plurality of unit modules include at least: a power supply circuit for the blower unit, a power supply circuit for the water chiller unit, a power supply circuit for the server unit, a power supply circuit for the laser light source unit, a power supply circuit for the digital laser processing (DLP) unit, and a power supply circuit for the motion control unit.

[0013] In an optional implementation, the plurality of target hardware components include at least: a switching power supply module and a servo driver.

[0014] In an optional embodiment, the fault diagnosis device further includes: a plurality of alarm units disposed on the power supply circuit of the plurality of unit modules, wherein the plurality of alarm units are all connected to the controller.

[0015] Secondly, this utility model provides an exposure machine, which includes at least: a fault diagnosis device for the hardware circuit of the exposure machine as described in any of the foregoing embodiments.

[0016] The beneficial effects of this utility model are: The fault diagnosis device for the hardware circuit of an exposure machine provided in this application includes: a host computer, a controller, and multiple power supply detection units. The multiple power supply detection units are respectively installed on multiple unit power supply circuits in the exposure machine, and these circuits are power supply circuits for multiple unit modules in the exposure machine. The multiple power supply detection units are connected to the controller, and the controller is also communicatively connected to the host computer. This fault diagnosis device for the hardware circuit of the exposure machine, by setting power supply detection units on multiple unit power supply circuits in the exposure machine, realizes the acquisition of the detection status of multiple unit power supply circuits by the power supply detection units through the connection between the controller and the power supply detection units. When the detection status of the power supply detection units is abnormal, the abnormal information is promptly reported to the host computer through the connection with the host computer, so that the host computer can issue an alert. This expands the scope of fault diagnosis and alarm for the exposure machine and improves the timeliness, accuracy, and efficiency of fault diagnosis and alarm for the exposure machine. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the structures shown in these drawings without creative effort.

[0018] Figure 1 A schematic diagram of the structure of a fault diagnosis device for the hardware circuit of an exposure machine provided in an embodiment of this application; Figure 2 A schematic diagram of the circuit structure of a fault diagnosis device for the hardware circuit of an exposure machine provided in an embodiment of this application.

[0019] Figure reference numerals: 01-Host computer; 02-Controller; 021-Analog input port; 022-Input / output port; 03-Power supply detection unit; 04-Unit power supply circuit; 041-Neutral wire; 05-Unit module; 06-Target hardware component; 061-Alarm output port; 07-Display unit; 08-Switching power supply module; 09-Servo driver. Detailed Implementation

[0020] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0021] Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely to illustrate selected embodiments of the application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.

[0022] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0023] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0024] In the description of this application, it should be noted that the terms "upper", "lower", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship that the product of this application is usually placed in. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0025] In the description of this application, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set" and "connection" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0026] The following detailed description of some embodiments of this application is provided in conjunction with the accompanying drawings. Unless otherwise specified, the following embodiments and features can be combined with each other.

[0027] Current fault diagnosis and alarm solutions for LDI exposure machines mainly involve collecting and monitoring process parameters and error parameters during the exposure process. When these parameters exceed preset thresholds, a fault indication or alarm is issued. However, this indication or alarm only serves to indicate the occurrence of a fault and cannot accurately locate the hardware fault or diagnose the cause. In other words, the fault diagnosis and alarm solutions do not directly monitor or diagnose the hardware circuitry and require manual troubleshooting after a fault occurs.

[0028] To address the aforementioned issues, the main objective of this application is to propose a fault diagnosis device for the hardware circuitry of an exposure machine and an exposure machine itself, thereby expanding the scope of fault diagnosis and alarm for the exposure machine and improving the timeliness, accuracy, and efficiency of fault diagnosis and alarm for the exposure machine.

[0029] Figure 1 For a schematic diagram of the fault diagnosis device for the hardware circuit of the exposure machine provided in an embodiment of this application, please refer to... Figure 1 The fault diagnosis device includes: host computer 01, controller 02 and multiple power supply detection units 03.

[0030] The aforementioned multiple power supply detection units 03 are respectively installed on multiple unit power supply circuits 04 in the exposure machine, and the aforementioned multiple unit power supply circuits 04 are power supply circuits for multiple unit modules 05 in the exposure machine.

[0031] The aforementioned multiple power supply detection units 03 are connected to the aforementioned controller 02, and the aforementioned controller 02 is also connected to the aforementioned host computer 01.

[0032] For example, the host computer 01 may be a device with computing capabilities, including but not limited to a computer; the controller 02 may be a controller, including but not limited to a PLC (Programmable Logic Controller); and the power supply detection unit 03 may be a device with current data acquisition function, such as a current sensor or ammeter.

[0033] The aforementioned multiple power supply detection units 03 are respectively used to be installed on multiple unit power supply circuits 04 in the exposure machine. For example, it can be that each unit power supply circuit 04 is provided with a corresponding power supply detection unit 03. However, the specific number of power supply detection units 03 and the correspondence between power supply detection units 03 and unit power supply circuits 04 are not limited here. It can be understood that the aforementioned multiple unit power supply circuits 04 can be power supply circuits with the same or different performance parameters. Correspondingly, the aforementioned multiple power supply detection units 03 can also be power supply detection units 03 of the same or different types and performance parameters.

[0034] The aforementioned multiple power supply detection units 03 are connected to the aforementioned controller 02. For example, the aforementioned multiple power supply detection units 03 can be connected to the analog input module of the aforementioned controller 02 through wired or wireless communication connections. The aforementioned controller 02 can, for example, obtain the current data collected by each power supply detection unit 03 through the communication connection with the aforementioned multiple power supply detection units 03. When an abnormality is detected in these current data, the controller 02 can, for example, send the abnormality judgment result to the aforementioned host computer 01 through the communication connection with the aforementioned host computer 01.

[0035] The connection between the controller 02 and the host computer 01 may refer to a communication connection implemented via a Modbus bus, but is not limited thereto.

[0036] It is understandable that after receiving the abnormal judgment result issued by the controller 02, the host computer 01 may issue an alarm in the form of alarms, including but not limited to audible and visual alarms and SMS alarms, to indicate the occurrence of the fault and the location and type of the fault.

[0037] The fault diagnosis device for the hardware circuit of the exposure machine provided in this application includes: a host computer 01, a controller 02, and multiple power supply detection units 03. The multiple power supply detection units 03 are respectively installed on multiple unit power supply circuits 04 in the exposure machine, and the multiple unit power supply circuits 04 are power supply circuits for multiple unit modules 05 in the exposure machine. The multiple power supply detection units 03 are connected to the controller 02, and the controller 02 is also communicatively connected to the host computer 01. This fault diagnosis device for the hardware circuit of the exposure machine, by setting power supply detection units 03 on multiple unit power supply circuits 04 in the exposure machine, realizes the acquisition of the detection status of the power supply detection units 03 on multiple unit power supply circuits 04 through the connection between the controller 02 and the power supply detection units 03. When the detection status of the power supply detection units 03 is abnormal, the abnormal information is promptly reported to the host computer 01 through the connection with the host computer 01, so that the host computer 01 can issue an alert, thereby expanding the scope of fault diagnosis and alarm for the exposure machine and improving the timeliness, accuracy, and efficiency of fault diagnosis and alarm for the exposure machine.

[0038] Optionally, in the above Figure 1 Based on the embodiment, the multiple power supply detection units 03 are each multiple current sensors, and the multiple current sensors are respectively installed on the power supply circuits 04 of the multiple units. The signal output terminals of the multiple current sensors are respectively connected to the multiple analog input ports 021 of the controller 02.

[0039] For example, the multiple analog input ports 021 of the controller 02 may belong to the analog input module of the controller 02. The multiple current sensors are respectively set on the multiple unit power supply circuits 04. For example, each unit power supply circuit 04 may be provided with a corresponding current sensor. However, the specific number of current sensors and the correspondence between the current sensors and the unit power supply circuits 04 are not limited here. It can be understood that the multiple unit power supply circuits 04 may be power supply circuits with the same or different performance parameters. Correspondingly, the multiple current sensors may also be current sensors of the same or different types and performance parameters.

[0040] The signal output terminals of the aforementioned multiple current sensors are respectively connected to the multiple analog input ports 021 of the aforementioned controller 02. For example, the aforementioned current sensors can output the current data of the corresponding unit power supply circuit 04 in the form of signals and send it to the corresponding analog input port 021 of the controller 02. It should be noted that the types of signal output terminals of the aforementioned current sensors, the types of analog input ports 021 of the aforementioned controller 02, and the types of communication protocols between the aforementioned current sensors and the aforementioned controller 02 can all be selected and determined according to the actual situation, and are not restricted here.

[0041] Furthermore, based on the above embodiments, the aforementioned multiple current sensors are respectively multiple current transformers.

[0042] The power supply lines of the aforementioned multiple unit power supply circuits 04 pass through the coils of the aforementioned multiple current transformers.

[0043] For example, the current transformer described above has electromagnetic isolation characteristics, strong anti-interference ability, and high measurement accuracy. Using a current transformer as a current sensor is more suitable for the complex electromagnetic environment inside the exposure machine.

[0044] Figure 2 For a schematic diagram of the circuit structure of the fault diagnosis device for the hardware circuit of the exposure machine provided in an embodiment of this application, please refer to... Figure 2 Optionally, based on the foregoing embodiments, the neutral wire 041 in the power supply line of the plurality of unit power supply circuits 04 passes through the coils of the plurality of current transformers.

[0045] For example, the coil mentioned above may refer to a mutual inductance coil. The unit power supply circuit 04 may include two lines, a live wire and a neutral wire 041. The coil of the current transformer is sleeved on the neutral wire 041, that is, the neutral wire 041 passes through the coils of the multiple current transformers. When there is current flowing through the neutral wire 041, the coil of the current transformer can detect the current value through mutual inductance, for example, so that the controller 02 can detect whether the current in the unit power supply circuit 04 is flowing normally.

[0046] Additionally, please continue to refer to Figure 2 In the aforementioned Figure 1 Based on the embodiment, the multiple input / output ports 022 of the controller 02 are also connected to the alarm output ports 061 of the multiple target hardware components 06 in the exposure machine. Figure 2 Taking only the alarm output port 061 of one target hardware component 06 as an example, the connection method between the alarm output ports 061 of the other target hardware components 06 and the input / output ports 022 of the controller 02 is the same as... Figure 2 The connection method between the alarm output port 061 of the target hardware component 06 and the input / output port 022 of the controller 02 is the same.

[0047] For example, the target hardware component 06 mentioned above may refer to the hardware component in the unit module 05 mentioned above. These hardware components may have fault self-detection function and fault signal output pin, which may serve as the alarm output port 061 of the target hardware component 06 mentioned above. The input / output port 022 of the controller 02 mentioned above may refer to the I / O interface, but is not limited thereto. The input / output port 022 of the controller 02 mentioned above is also connected to the alarm output port 061 of the target hardware component 06 in the exposure machine. For example, when the hardware component detects an internal fault, it can generate a fault signal and send it to the corresponding input / output port 022 of the controller 02 via the fault signal output pin. When the controller 02 receives the fault signal, it may process the fault signal and forward it to the host computer 01, or it may not process the fault signal and forward it directly to the host computer 01. The specific method can be adjusted and determined according to the actual situation, and is not limited here.

[0048] Additionally, please refer to Figure 1 In the aforementioned Figure 1 Based on the embodiments, the above-mentioned fault diagnosis device further includes: a display unit 07, and the host computer 01 is connected to the display unit 07.

[0049] For example, the host computer 01 is connected to the display unit 07. For example, the host computer 01 and the display unit 07 are connected in communication. The display unit 07 can be a display screen, monitor or other device with display function. After receiving the abnormal judgment result or the forwarded fault signal from the controller 02, the host computer 01 can issue an alarm in the form of audible and visual alarm, SMS alarm or other alarm forms. For example, it can also send the alarm information to the display unit 07 through the communication connection with the display unit 07 and display it on the display unit 07.

[0050] Optionally, in the foregoing Figure 1Based on the embodiments, the power supply circuits of the above-mentioned multiple unit modules 05 include at least: the power supply circuit of the blower unit, the power supply circuit of the water chiller unit, the power supply circuit of the server unit, the power supply circuit of the laser light source unit, the power supply circuit of the digital laser processing (DLP) unit, and the power supply circuit of the motion control unit.

[0051] For example, corresponding to the power supply circuit of the above-mentioned multiple unit modules 05, the above-mentioned multiple unit modules 05 include at least: a blower unit, a water chiller unit, a server unit, a laser light source unit, a digital laser processing (DLP) unit, and a motion control unit. The blower in the blower unit and the water chiller in the water chiller unit can be, for example, hardware components in the above-mentioned unit modules 05, but are not limited thereto.

[0052] In addition, based on the aforementioned embodiments, the plurality of target hardware components 06 include at least: a switching power supply module 08 and a servo driver 09.

[0053] It is understood that the switching power supply module 08 can refer to multiple switching power supply modules 08 with the same or different parameters. In addition to the switching power supply module 08 and the servo driver 09, the target hardware components 06 can also include the blower in the blower unit, the water chiller in the water chiller unit, etc. These target hardware components 06 can all have fault self-detection functions and fault signal output pins, but the specific types, models, pin forms, etc. can be determined according to the actual situation and are not limited here.

[0054] Optionally, in the foregoing Figure 1 Based on the embodiments, the above-mentioned fault diagnosis device may further include: multiple alarm units disposed on the power supply circuit of the multiple unit modules 05. Figure 1 , Figure 2 (Not shown in the image), all of the above alarm units are connected to the above controller 02.

[0055] For example, the alarm unit may include one or more of the following: alarm lights, alarm bells, etc., which have audible and visual alarm functions. All of the above alarm units are connected to the controller 02. For example, it may mean that all alarm units are communicatively connected to the controller 02. After receiving the abnormal judgment result or the forwarded fault signal from the controller 02, the host computer 01 may send an alarm signal to the controller 02, and the controller 02 may forward the alarm signal to the alarm unit near the abnormal power supply circuit or the faulty hardware component, so as to indicate the occurrence of the fault and the location of the fault through the audible and visual alarm of the specific alarm unit. However, the specific type, number, and installation location of the alarm unit can be selected and determined according to actual needs, and are not limited here.

[0056] In addition, this application embodiment also provides an exposure machine, which includes at least: a fault diagnosis device for the hardware circuit of the exposure machine as described in any of the foregoing embodiments. It is understood that the above description is only a preferred embodiment of the present utility model and does not limit the patent scope of the present utility model. All equivalent structural transformations made under the inventive concept of the present utility model using the contents of the present utility model specification and drawings, or direct / indirect applications in other related technical fields, are included within the patent protection scope of the present utility model.

Claims

1. A fault diagnosis device for the hardware circuitry of an exposure machine, characterized in that, The fault diagnosis device includes: a host computer, a controller, and multiple power supply detection units; The plurality of power supply detection units are respectively used to be installed on the power supply circuits of the plurality of units in the exposure machine, and the plurality of power supply circuits are the power supply circuits of the plurality of unit modules in the exposure machine; The plurality of power supply detection units are connected to the controller, and the controller is also connected to the host computer.

2. The fault diagnosis device for the hardware circuit of the exposure machine according to claim 1, characterized in that, The plurality of power supply detection units are each a plurality of current sensors, which are respectively installed on the power supply circuits of the plurality of units, and the signal output terminals of the plurality of current sensors are respectively connected to the plurality of analog input ports of the controller.

3. The fault diagnosis device for the hardware circuit of the exposure machine according to claim 2, characterized in that, The plurality of current sensors are respectively multiple current transformers; The power supply lines of the multiple unit power supply circuits are arranged to pass through the coils of the multiple current transformers.

4. The fault diagnosis device for the hardware circuit of the exposure machine according to claim 3, characterized in that, The neutral wire in the power supply line of the multiple unit power supply circuits passes through the coils of the multiple current transformers.

5. The fault diagnosis device for the hardware circuit of the exposure machine according to claim 1, characterized in that, The controller's multiple input / output ports are also connected to the alarm output ports of multiple target hardware components in the exposure machine.

6. The fault diagnosis device for the hardware circuit of the exposure machine according to claim 1, characterized in that, The fault diagnosis device further includes a display unit, and the host computer is connected to the display unit.

7. The fault diagnosis device for the hardware circuit of the exposure machine according to claim 1, characterized in that, The power supply circuits of the multiple unit modules include at least: the power supply circuit of the blower unit, the power supply circuit of the water chiller unit, the power supply circuit of the server unit, the power supply circuit of the laser light source unit, the power supply circuit of the digital laser processing (DLP) unit, and the power supply circuit of the motion control unit.

8. The fault diagnosis device for the hardware circuit of the exposure machine according to claim 5, characterized in that, The plurality of target hardware components include at least: a switching power supply module and a servo driver.

9. The fault diagnosis device for the hardware circuit of the exposure machine according to claim 1, characterized in that, The fault diagnosis device further includes: multiple alarm units installed on the power supply circuit of the multiple unit modules, and all of the multiple alarm units are connected to the controller.

10. An exposure machine, characterized in that, At least including: The fault diagnosis device for the hardware circuit of the exposure machine according to any one of claims 1-9.

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