A mask adjustment device

Abstract

This utility model relates to the technical field of photomasks, and in particular to a photomask adjustment device, including a substrate, a rotating cylinder, a gear ring, a movable plate, and a clamping plate. A second motor is started to rotate in the reverse direction, driving the movable plate to move. The movable plate slides on a square rod, and simultaneously, the movable plate drives the clamping plate to move, thus releasing the clamping plate from locking the rotating cylinder. Then, a first motor is started, driving a gear to rotate, which in turn drives the gear ring to rotate, which in turn drives the rotating cylinder to rotate. The rotating cylinder, through a support frame, rotates the photomask itself. After adjusting its direction, the first motor stops working. Then, a second motor is started to rotate in the forward direction, driving the movable plate to move through a lead screw. The movable plate then drives the clamping plate to move, locking the rotating cylinder in place. Anti-slip pads increase the friction between the clamping plate and the rotating cylinder, preventing the rotating cylinder from sliding horizontally. Locking the sleeve improves stability after rotation.

Description

Technical Field

[0001] This utility model relates to the technical field of mask adjustment, and in particular to a mask adjustment device. Background Technology

[0002] With the continuous development of the semiconductor industry, more and more small and medium-sized enterprises are investing in semiconductor research and development. A key step in semiconductor research and development is the processing of silicon wafers. In the field of silicon wafer processing, processing silicon wafers using photomasks is a common method. Photomasks have a wide range of applications and are required in any field involving photolithography. The photomask to be processed consists of a glass / quartz substrate, a chromium layer, and a photoresist layer. A search revealed Chinese Patent Publication No. CN220626859U, which discloses a mask angle adjustment device for secondary exposure of silicon wafers. This device facilitates adjustment of the mask's directional and horizontal angles, ensuring the mask is parallel to the silicon wafer and improving exposure accuracy. It includes a substrate, a rotating cylinder, a mask, a support assembly, a rotating assembly, and an angle adjustment assembly. The rotating cylinder is rotatably mounted at the center of the bottom of the substrate. The mask is installed within the support assembly. The bottom of the rotating cylinder is movably connected to the top of the support assembly via the angle adjustment assembly. The angle adjustment assembly includes four small motors, four precision lead screws, and four threaded sleeves. The rotating assembly includes a servo motor, a drive gear, and a gear ring. The rotating assembly is mounted at the bottom of the substrate and connected to the rotating cylinder.

[0003] Regarding the aforementioned technologies, the inventors discovered the following defects: after adjusting its rotation direction, the device does not have an effective locking mechanism for the rotating drum, relying solely on the meshing of gears and gear rings to maintain the position of the rotating drum. This structure cannot adequately guarantee the stability of the rotating drum after rotation. Once the position of the rotating drum changes, it will directly cause a change in the relative position of the mask and the silicon wafer. Summary of the Invention

[0004] The purpose of this invention is to provide a mask adjustment device to solve the problems mentioned in the background art.

[0005] The technical solution adopted in this utility model is: A mask adjusting device includes a substrate, a rotating cylinder, a gear ring, a movable plate, and a clamping plate. The rotating cylinder is rotatably connected to the bottom of the substrate, and the gear ring is fixedly connected to the rotating cylinder. A groove is formed at the bottom of the substrate, and a first motor is fixedly connected to the inner top wall of the groove. A gear is fixedly connected to the output shaft of the first motor, and the gear meshes with the gear ring. A cavity is formed on the substrate, and lead screws are rotatably connected to the inner walls of both sides of the cavity. A movable plate is threaded onto the lead screws, and a clamping plate is fixedly connected to one side of the movable plate. The top of the rotating cylinder extends into the cavity, and the two clamping plates are in movable contact with the rotating cylinder. An anti-slip pad is provided on one side of each clamping plate. A mounting groove is formed on the front side of the substrate, and a second motor is fixedly connected to the inner rear wall of the mounting groove. The end of one of the lead screws extends into the mounting groove and is fixedly connected to the output shaft of the second motor. A support frame is provided below the rotating cylinder, and a sliding groove is formed on the support frame. The mask body is mounted on the support frame through the sliding groove.

[0006] Optionally, the ends of the two lead screws that are close to each other are fixedly connected, and the threads of the two lead screws are turned in opposite directions.

[0007] Optionally, a square rod is fixedly connected between the inner walls of the two sides of the cavity, and the square rod is slidably connected to the movable plate.

[0008] Optionally, the bottom of the rotating drum is provided with multiple circular grooves in an annular shape, and a small motor is fixedly connected to the inner top wall of the circular grooves.

[0009] Optionally, the output shaft of the small motor is fixedly connected to a screw, and a threaded sleeve is threadedly connected to the screw.

[0010] Optionally, a universal joint is fixedly connected to the bottom end of the threaded sleeve, and the bottom of the universal joint is fixedly connected to the top of the support frame.

[0011] Optionally, circular holes are provided on both the top and bottom inner walls of the cavity.

[0012] Optionally, the movable plate is provided with a threaded hole, and the movable plate is threadedly connected to the lead screw through the threaded hole.

[0013] Compared with the prior art, the beneficial effects of this utility model are: The second motor is started in reverse rotation, driving a movable plate to move. The movable plate slides on the square rod, and simultaneously, it drives the clamping plate to move. Due to the opposite direction of the screw threads, the two clamping plates move away from each other, and the clamping plates no longer lock the rotating drum. The first motor is then started, driving a gear to rotate, which in turn drives a gear ring to rotate, which in turn drives the rotating drum. The rotating drum, through the support frame, drives the mask body to rotate. After adjusting its direction, the first motor is stopped. The second motor is then started in forward rotation, driving a movable plate to move through a lead screw. The movable plate then drives the clamping plate to move, locking the rotating drum in place. Anti-slip pads increase the friction between the clamping plates and the rotating drum, preventing the drum from sliding horizontally. Locking the sleeve improves stability after rotation. Attached Figure Description

[0014] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0015] Figure 1 This is a three-dimensional structural diagram of the present application; Figure 2 This is a schematic diagram of the inclined three-dimensional structure of this application; Figure 3 This is a schematic diagram of the three-dimensional structure of the support frame after it has been hidden in this application; Figure 4 This is a schematic diagram of the three-dimensional structure of the substrate cut in this application; Figure 5 This is a partial three-dimensional structural diagram of this application.

[0016] Figure label: 1. Base plate; 2. Rotary drum; 3. Gear ring; 4. Groove; 5. First motor; 6. Gear; 7. Cavity; 8. Lead screw; 9. Moving plate; 10. Clamping plate; 11. Anti-slip pad; 12. Mounting groove; 13. Second motor; 14. Support frame; 15. Slide groove; 16. Mask version body; 17. Square rod; 18. Circular groove; 19. Small motor; 20. Screw; 21. Threaded sleeve; 22. Universal head. Detailed Implementation

[0017] In the description of this utility model, it should be understood that the terms "center," "longitudinal," "transverse," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this utility model is in use, or the orientation or positional relationship commonly understood by those skilled in the art. They are only used to facilitate the description of this utility model and to simplify the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0018] Given that in the current technology, after adjusting its rotation direction, there is no effective locking measure for the rotating drum, and the position of the rotating drum is maintained only by the meshing of gears and gear rings, this structure cannot fully guarantee the stability of the rotating drum after rotation.

[0019] like Figure 1-5 As shown, this embodiment of the present invention provides a mask adjustment device, including a base plate 1, a rotating cylinder 2, a gear ring 3, a movable plate 9, and a clamping plate 10; the rotating cylinder 2 is rotatably connected to the bottom of the base plate 1, and the gear ring 3 is fixedly connected to the rotating cylinder 2; a groove 4 is formed at the bottom of the base plate 1, and a first motor 5 is fixedly connected to the inner wall of the top of the groove 4; a gear 6 is fixedly connected to the output shaft of the first motor 5, and the gear 6 meshes with the gear ring 3; a cavity 7 is formed on the base plate 1, and lead screws 8 are rotatably connected to the inner walls of both sides of the cavity 7; a movable plate 9 is threadedly connected to the lead screw 8; the movable plate... A clamping plate 10 is fixedly connected to one side of the 9. The top of the rotating drum 2 extends into the cavity 7. The two clamping plates 10 are in movable contact with the rotating drum 2. An anti-slip pad 11 is provided on one side of the clamping plate 10. An installation groove 12 is opened on the front side of the base plate 1. A second motor 13 is fixedly connected to the inner wall of the rear side of the installation groove 12. The end of one of the two lead screws 8 extends into the installation groove 12 and is fixedly connected to the output shaft of the second motor 13. A support frame 14 is provided below the rotating drum 2. A sliding groove 15 is opened on the support frame 14. A mask version body 16 is provided on the support frame 14 through the sliding groove 15.

[0020] In use, the second motor 13 is started to rotate in the reverse direction. The second motor 13 drives the moving plate 9 to move. The moving plate 9 slides on the square rod 17. At the same time, the moving plate 9 drives the clamping plate 10 to move. Under the action of the opposite screw rotation, the two clamping plates 10 move away from each other, and the clamping plates 10 no longer lock the rotating drum 2. Then the first motor 5 is started. The first motor 5 drives the gear 6 to rotate. The gear 6 drives the gear ring 3 to rotate. The gear ring 3 drives the rotating drum 2 to rotate. The rotating drum 2 drives the mask version body 16 to rotate through the support frame 14. After adjusting its direction, the first motor 5 is stopped. Then the second motor 13 is started to rotate in the forward direction. The second motor 13 drives the moving plate 9 to move through the lead screw 8. The moving plate 9 drives the clamping plate 10 to move, so that the two clamping plates 10 lock the rotating drum 2. At the same time, the anti-slip pad 11 can increase the friction between the clamping plate 10 and the rotating drum 2 to prevent the rotating drum 2 from sliding in the horizontal direction. By locking the sleeve 2, the stability after rotation is improved.

[0021] Furthermore, the movable plate 9 has a threaded hole, and the movable plate 9 is threadedly connected to the lead screw 8 through the threaded hole. Under the biting force of the threaded hole and the lead screw 8, the movable plate 9 can be fixed after moving to a suitable position.

[0022] Furthermore, circular holes are provided on both the top and bottom inner walls of cavity 7.

[0023] Furthermore, the ends of the two lead screws 8 that are close to each other are fixedly connected, and the threads of the two lead screws 8 are turned in opposite directions. Under the action of the opposite threads, the two clamping plates 10 can move in a direction away from or close to each other.

[0024] Furthermore, a square rod 17 is fixedly connected between the inner walls of both sides of the cavity 7. The square rod 17 is slidably connected to the movable plate 9. The square rod 17 limits the movable plate 9 so that the movable plate 9 will not be displaced when it moves.

[0025] Furthermore, the bottom of the rotating drum 2 is provided with multiple circular grooves 18 in an annular shape. A small motor 19 is fixedly connected to the inner wall of the top of the circular groove 18. The output shaft of the small motor 19 is fixedly connected to a screw 20. A threaded sleeve 21 is threadedly connected to the screw 20. A universal head 22 is fixedly connected to the bottom end of the threaded sleeve 21. The bottom of the universal head 22 is fixedly connected to the top of the support frame 14, which controls the four small motors 19 respectively. The small motors 19 drive the screw 20 to rotate. The rotation of the screw 20 can adjust the extension length of the threaded sleeve 21. When the threaded sleeve 21 extends, it drives the universal head 22 to move. The universal head 22 can drive the support frame 14 to adjust the horizontal angle, thereby adjusting the angle of the mask version body 16.

[0026] Finally, it should be noted that the above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A mask adjustment device, characterized in that, It includes a base plate (1), a rotating cylinder (2), a gear ring (3), a moving plate (9), and a clamping plate (10). A rotating cylinder (2) is rotatably connected to the bottom of the substrate (1). A gear ring (3) is fixedly connected to the rotating cylinder (2). A groove (4) is formed at the bottom of the substrate (1). A first motor (5) is fixedly connected to the inner wall of the top of the groove (4). A gear (6) is fixedly connected to the output shaft of the first motor (5). The gear (6) meshes with the gear ring (3). A cavity (7) is formed on the substrate (1). A lead screw (8) is rotatably connected to the inner walls of both sides of the cavity (7). A moving plate (9) is threaded onto the lead screw (8). A clamping plate (10) is fixedly connected to one side of the moving plate (9). The top of the rotating cylinder (2) Extending into the cavity (7), the two clamping plates (10) are in contact with the rotating drum (2). One side of the clamping plate (10) is provided with an anti-slip pad (11). The front side of the base plate (1) is provided with an installation groove (12). The rear inner wall of the installation groove (12) is fixedly connected to a second motor (13). The end of one of the two lead screws (8) extends into the installation groove (12) and is fixedly connected to the output shaft of the second motor (13). A support frame (14) is provided below the rotating drum (2). A sliding groove (15) is provided on the support frame (14). The support frame (14) is provided with a mask version body (16) through the sliding groove (15).

2. The mask adjustment device according to claim 1, characterized in that, The ends of the two lead screws (8) are fixedly connected to each other, and the threads of the two lead screws (8) are opposite.

3. The mask adjustment device according to claim 2, characterized in that, The same square rod (17) is fixedly connected between the inner walls of the two sides of the cavity (7), and the square rod (17) is slidably connected to the moving plate (9).

4. The mask adjustment device according to claim 3, characterized in that, The bottom of the rotating drum (2) is provided with a plurality of circular grooves (18) in an annular shape, and a small motor (19) is fixedly connected to the inner wall of the top of the circular grooves (18).

5. A mask adjustment device according to claim 4, characterized in that, The output shaft of the small motor (19) is fixedly connected to a screw (20), and a threaded sleeve (21) is threadedly connected to the screw (20).

6. A mask adjustment device according to claim 5, characterized in that, The bottom end of the threaded sleeve (21) is fixedly connected to a universal head (22), and the bottom of the universal head (22) is fixedly connected to the top of the support frame (14).

7. A mask adjustment device according to claim 6, characterized in that, The cavity (7) has circular holes on its top inner wall and bottom inner wall.

8. A mask adjustment device according to claim 7, characterized in that, The movable plate (9) has a threaded hole, and the movable plate (9) is threadedly connected to the lead screw (8) through the threaded hole.

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