Lens protection device and laser imaging solder mask exposure machine

Abstract

The utility model provides a lens protection device and laser imaging solder mask exposure machine relates to the field of photoetching, this lens protection device includes protection lens barrel and air inlet spare, protection lens barrel includes first end face and second end face who sets up oppositely, the light outlet end of lens is connected with the one end of protection lens barrel close to second end face, air inlet spare is in the lateral wall of protection lens barrel angle inlay, the distance of air inlet spare and first end face is 1 / 3 to 1 / 2 of protection lens barrel total length, and air inlet spare is used for to protection lens barrel inside passes in protection gas. This lens protection device can guide protection gas even, effectively distribute in the high sensitive area close to the light outlet end of lens, avoid the impurity particle deposition on the surface of lens, improve the light flux and imaging precision of lens or laser imaging solder mask exposure machine.

Description

Technical Field

[0001] This utility model relates to the field of photolithography, and more specifically, to a lens protection device and a laser imaging solder resist exposure machine. Background Technology

[0002] As a core component of electronic products, the manufacturing process of printed circuit boards (PCBs) directly affects the performance and reliability of electronic devices. In PCB manufacturing, laser direct imaging (LDI) technology, due to its high precision and efficiency, has become a key process for patterning and exposing solder resist layers. LDI equipment uses a computer-controlled laser beam to selectively expose the PCB board coated with photosensitive solder resist ink, forming the desired circuit protection pattern.

[0003] Traditional LDI equipment uses a high-power ultraviolet laser as the light source, focusing the laser beam to a micrometer-scale spot using a precision optical system. During exposure, the high-energy laser beam interacts with the solder resist ink, triggering not only photochemical reactions but also significant thermal effects. This thermal effect causes the organic solvents and low-molecular-weight components in the solder resist ink to volatilize, forming gaseous volatiles containing organic compounds such as benzene series compounds and aldehydes, along with submicron-sized ink particles. These contaminants, under the influence of airflow within the equipment, easily deposit on the surface of critical lithography lenses in the exposure system, forming a contamination layer. This leads to reduced light throughput, decreased imaging accuracy, and even exposure defects, severely impacting the circuit accuracy and yield of PCBs. Utility Model Content

[0004] This invention provides a lens protection device and a laser imaging solder resist exposure machine, which can prevent impurity particles from depositing on the lens surface by introducing protective gas, thereby improving light throughput and imaging accuracy.

[0005] The embodiments of this utility model can be implemented as follows: In a first aspect, this utility model provides a lens protection device applied to a lens. The device includes a protective lens barrel and an air inlet. The protective lens barrel includes a first end face and a second end face disposed opposite to each other. The end of the protective lens barrel near the second end face is used to connect to the light-emitting end of the lens. The air inlet is angled and embedded in the side wall of the protective lens barrel. The distance between the air inlet and the first end face is 1 / 3 to 1 / 2 of the total length of the protective lens barrel. The air inlet is used to introduce protective gas into the protective lens barrel.

[0006] Optionally, the protective lens barrel further includes a clamp, which is sleeved on the outer surface of the end of the protective lens barrel away from the first end face, for fixing the protective lens barrel to the lens.

[0007] Optionally, the end of the protective lens barrel away from the first end face is used to engage with the light-emitting end.

[0008] Optionally, the air intake component includes an interconnected and communicating mounting portion and an air intake portion. The air intake portion is provided with an air intake groove that penetrates the air intake portion. The side wall of the protective lens barrel is provided with a mounting hole, and the mounting portion is embedded in the mounting hole.

[0009] Optionally, the mounting part is cylindrical, and the air intake part is arc-shaped.

[0010] Optionally, the air intake slot is square.

[0011] Optionally, the mounting section and the air intake section are integrally formed.

[0012] Optionally, the protective lens barrel further includes a stop, which is disposed on the second end face and connected to the second end face.

[0013] Optionally, the stop member has a light-emitting part, which is square.

[0014] Secondly, this utility model provides a laser imaging resist exposure machine, including a lens and the lens protection device described in any of the above claims, wherein the light-emitting end of the lens is connected to the end of the protective lens barrel near the second end face.

[0015] The beneficial effects of the lens protection device and laser imaging solder resist exposure machine of this utility model include, for example: The air inlet is embedded at an inclined angle in the side wall of the protective lens barrel, and the distance between it and the first end face is 1 / 3 to 1 / 2 of the total length of the protective lens barrel. On the one hand, it can guide the protective gas to flow in a spiral or oblique direction along the inner wall of the lens barrel, avoiding turbulence or local dead corners caused by direct blowing, improving the uniformity of gas coverage, and effectively removing contaminants such as moisture and dust inside the lens barrel. On the other hand, this setting can ensure that the contaminant medium entering the protective lens barrel is driven away in time, and can also make the protective gas fully fill the highly sensitive area near the light output end of the lens, significantly improving the gas replacement efficiency and protection continuity, thereby preventing impurity particles from depositing on the surface of the lens, and improving the light throughput and imaging accuracy of the lens or laser imaging resist exposure machine. Attached Figure Description

[0016] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 This is a schematic diagram of the lens protection device provided in this embodiment from a first-view perspective; Figure 2 This is a schematic diagram of the lens protection device provided in this embodiment from a second perspective; Figure 3 This is a schematic diagram of the lens protection device provided in this embodiment from a third-person perspective.

[0018] Icons: 1-Lens protection device; 2-Lens; 2a-Light emission end; 10-Protective lens barrel; 10a-First end face; 10b-Second end face; 11-Mounting hole; 13-Block; 131-Light emission part; 20-Air inlet; 21-Mounting part; 23-Air inlet; 231-Air inlet groove; 30-Clamping part; 50-Air inlet pipe. Detailed Implementation

[0019] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0020] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0021] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0022] In the description of this utility model, it should be noted that if terms such as "upper," "lower," "inner," or "outer" are used to indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship in which the utility model product is usually placed during use, they are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0023] Furthermore, the terms "first," "second," etc., are used only for distinguishing descriptions and should not be construed as indicating or implying relative importance. Also, in the description of this application, unless otherwise stated, "a plurality of" means two or more.

[0024] It should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to mechanical connections, electrical connections, or connections that allow for communication; they can refer to direct connections or indirect connections through an intermediate medium; they can refer to the internal communication between two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0025] It should also be noted that, where there is no conflict, the features in the embodiments of this utility model can be combined with each other.

[0026] As described in the background section, during the exposure process, thermal effects can lead to the generation of gaseous volatile impurities. These impurities are easily deposited on the surface of the photolithography lens, forming a contamination layer, which results in a decrease in light throughput and a reduction in imaging accuracy.

[0027] Please refer to Figures 1 to 3 This application provides a lens protection device 1 and a laser imaging resist exposure machine, which can solve the above-mentioned technical problems.

[0028] The first aspect of this embodiment provides a lens protection device 1, applied to a lens 2. The device includes a protective lens barrel 10 and an air inlet 20. The protective lens barrel 10 includes a first end face 10a and a second end face 10b disposed opposite to each other. The end of the protective lens barrel 10 near the second end face 10b is used to connect to the light-emitting end 2a of the lens 2. The air inlet 20 is angled and embedded in the side wall of the protective lens barrel 10. The distance between the air inlet 20 and the first end face 10a is 1 / 3 to 1 / 2 of the total length of the protective lens barrel 10. The air inlet 20 is used to introduce protective gas into the protective lens barrel 10.

[0029] The air inlet 20 is embedded at an inclined angle in the side wall of the protective lens barrel 10 and the distance between it and the first end face 10a is 1 / 3 to 1 / 2 of the total length of the protective lens barrel 10. On the one hand, it can guide the protective gas to flow in a spiral or oblique direction along the inner wall of the lens barrel, avoid turbulence or local dead corners caused by direct blowing, improve the uniformity of gas coverage, and effectively remove pollutants such as moisture and dust inside the lens barrel. On the other hand, this setting can ensure that the polluting medium entering the protective lens barrel 10 is driven away in time, and can also make the protective gas fully fill the highly sensitive area near the light-emitting end 2a of the lens 2 (specifically the area near the surface of the lithography lens 2), which significantly improves the gas replacement efficiency and protection continuity.

[0030] To achieve a stable fit and good seal between the protective lens barrel 10 and the lens 2, the connection method between the two can be selected according to actual needs. In this embodiment, please refer to... Figure 1 The protective lens barrel 10 also includes a clamp 30, which is fitted onto the outer surface of the end of the protective lens barrel away from the first end face 10a, for fixing the protective lens barrel 10 to the lens 2. The clamp 30, fitted onto the outer surface of the end of the protective lens barrel 10 near the first end face 10a, can firmly fix the protective lens barrel 10 to the lens 2, ensuring that it will not loosen or fall off due to vibration, impact, or other reasons during use, and also making the installation and removal of the protective lens barrel 10 more convenient and quick. It is easy to understand that the end of the protective lens barrel 10 near the second end face 10b is the end of the protective lens barrel 10 away from the first end face 10a.

[0031] In other embodiments, the end of the protective lens barrel 10 furthest from the first end face 10a is used to snap onto the light-emitting end 2a. The snap-on design makes the connection between the protective lens barrel 10 and the lens 2 simpler and faster, without the need for additional fasteners or tools, thus reducing assembly difficulty and time costs.

[0032] It is worth noting that the protective lens barrel 10 can also be fixedly connected to the lens 2 body in an integral molding manner, wherein the lens 2 body refers to the housing or lens barrel of the photolithography lens 2. This article does not limit the specific connection method between the protective lens barrel 10 and the lens 2, as long as the protective lens barrel 10 and the lens 2 are connected, the protective gas can be fully filled into the highly sensitive area near the light-emitting end 2a of the lens 2 through the air inlet 20.

[0033] Further, please refer to Figure 2 and Figure 3 The air intake component 20 includes an installation part 21 and an air intake part 23 that are connected and communicate with each other. An air intake groove 231 is provided on the air intake part 23 and the air intake groove 231 penetrates the air intake part 23. An installation hole 11 is provided on the side wall of the protective lens barrel 10, and the installation part 21 is embedded in the installation hole 11.

[0034] The separate design of the mounting section 21 and the air intake section 23 makes the installation of the air intake component 20 more flexible and also facilitates the subsequent separate processing of the specific shape of the air intake groove 231. The mounting section 21 facilitates the connection between the air intake component 20 and the external air intake pipe 50, ensuring that the gas enters the protective lens barrel 10 smoothly, reducing the resistance to gas flow, and improving the efficiency and uniformity of gas flow.

[0035] In this embodiment, the mounting portion 21 is generally cylindrical, the air inlet portion 23 is arc-shaped, and the air inlet groove 231 is square. The cylindrical mounting portion 21 has a higher matching degree with the mounting hole 11 of the protective lens barrel 10, and can form a wraparound fit during installation, reducing gaps and improving the overall stability after connection. The arc-shaped air inlet portion 23 and the square groove can avoid the generation of turbulence in the air inlet, and guide the protective gas into the cavity in a smoother and more uniform manner, reducing the airflow impact on the highly sensitive area of ​​the lens 2.

[0036] In order to improve the overall structural strength and long-term reliability of the air intake component 20, in this embodiment, the mounting part 21 and the air intake part 23 are integrally formed. The mounting part 21 and the air intake part 23 are given different names here for ease of understanding.

[0037] Furthermore, the protective lens barrel 10 also includes a baffle 13, which is disposed on and connected to the second end face 10b. The baffle 13 can effectively prevent some impurities from approaching the surface of the lens 2 and adhering to the lens 2. On the other hand, the baffle 13 can help to evenly distribute the protective gas introduced into the protective lens barrel 10.

[0038] Furthermore, the stop 13 has a light-emitting part 131, which is square. The square light-emitting part 131 makes it easier to align with the lens 2 or other optical elements during installation, reducing adjustment time and errors during assembly, and improving assembly accuracy and consistency.

[0039] Secondly, this utility model provides a laser imaging resist exposure machine, including a lens 2 and a lens protection device 1 of any of the above embodiments, wherein the light-emitting end 2a of the lens 2 is connected to the end of the protective lens barrel 10 near the second end face 10b.

[0040] By connecting the light-emitting end 2a of the lens 2 to the end of the protective lens barrel 10 near the second end face 10b, the light can be better protected during transmission, reducing the impact of impurities and dust on image quality, thereby improving the clarity and accuracy of laser imaging.

[0041] In summary, this utility model provides a lens protection device 1 and a laser imaging solder resist exposure machine. The air inlet 20 is embedded at an inclined angle in the side wall of the protective lens barrel 10 and the distance between it and the first end face 10a is 1 / 3 to 1 / 2 of the total length of the protective lens barrel 10. This can guide the protective gas to be evenly and effectively distributed in the highly sensitive area near the light-emitting end 2a of the lens 2, avoid impurity particles from being deposited on the surface of the lens 2, and improve the light throughput and imaging accuracy of the lens 2 or the laser imaging solder resist exposure machine.

[0042] The above description is only a specific embodiment of this utility model, but the protection scope of this utility model is not limited thereto. Any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this utility model should be included within the protection scope of this utility model.

Claims

1. A lens protection device, applied to a lens (2), characterized in that, include: A protective lens barrel (10) includes a first end face (10a) and a second end face (10b) disposed opposite to each other. The end of the protective lens barrel (10) near the second end face (10b) is used to connect to the light-emitting end (2a) of the lens (2). An air inlet (20) is angled and embedded in the side wall of the protective lens barrel (10). The distance between the air inlet (20) and the first end face (10a) is 1 / 3 to 1 / 2 of the total length of the protective lens barrel (10). The air inlet (20) is used to introduce protective gas into the protective lens barrel (10).

2. The lens protection device according to claim 1, characterized in that, The protective lens barrel (10) also includes a clamp (30), which is sleeved on the outer surface of the end of the protective lens barrel (10) away from the first end face (10a) and is used to fix the protective lens barrel (10) to the lens (2).

3. The lens protection device according to claim 1, characterized in that, The end of the protective lens tube (10) away from the first end face (10a) is used to engage with the light-emitting end (2a).

4. The lens protection device according to claim 1, characterized in that, The air intake component (20) includes an installation part (21) and an air intake part (23) that are connected and communicate with each other. An air intake groove (231) is provided on the air intake part (23), and the air intake groove (231) penetrates the air intake part (23). An installation hole (11) is provided on the side wall of the protective lens barrel (10), and the installation part (21) is embedded in the installation hole (11).

5. The lens protection device according to claim 4, characterized in that, The mounting part (21) is cylindrical, and the air intake part (23) is arc-shaped.

6. The lens protection device according to claim 4, characterized in that, The air intake slot (231) is square.

7. The lens protection device according to claim 4, characterized in that, The mounting part (21) and the air intake part (23) are integrally formed.

8. The lens protection device according to claim 1, characterized in that, The protective lens tube (10) also includes a stop (13), which is connected to the second end face (10b).

9. The lens protection device according to claim 8, characterized in that, The baffle (13) has a light-emitting part (131) which is square.

10. A laser imaging resist exposure machine, characterized in that, Includes a lens (2) and a lens protection device (1) according to any one of claims 1-9, wherein the light-emitting end (2a) of the lens (2) is connected to the end of the protective lens barrel (10) near the second end face (10b).

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