A mask positioning calibration platform

Abstract

This utility model relates to the field of mask processing auxiliary equipment, specifically to a mask positioning and calibration platform, including a base. An air path frame is fixedly connected to the top of the base, and a suction cup for adsorbing and fixing the workpiece is fixedly connected to the top of the air path frame. An air pipe communicating with the suction cup is fixedly connected to the left side of the air path frame. A calibration mechanism is provided on the surface of the base. The calibration mechanism includes a stepper motor, a rotating plate, and clamping blocks. The stepper motor is fixedly installed at the bottom of the base, and a cavity is formed inside the base. The rotating plate is rotatably connected to the cavity and coaxially arranged. Preliminary positioning and calibration are achieved through mechanical transmission, followed by final fixation by the vacuum suction cup. This method reduces the risk of damage to the mask caused by continuously applying excessive clamping force, and all clamping blocks can move towards the center or outward at the same speed, ensuring high repeatability and positioning accuracy.

Description

Technical Field

[0001] This utility model relates to the field of auxiliary equipment for mask processing, and specifically to a mask positioning and calibration platform. Background Technology

[0002] In semiconductor manufacturing, display panel production and other fields, photomasks are key photolithography tools, and their positioning accuracy directly affects the quality of the final product. In the semiconductor chip manufacturing process, photomasks are used to accurately transfer circuit patterns onto silicon wafers. Therefore, whether in the photomask processing stage or in its subsequent use, it is necessary to ensure that the photomask can be accurately fixed and positioned, and to perform precise positioning and calibration to ensure that the photomask can work precisely with the relevant equipment. Currently, most existing mask positioning devices suffer from problems such as complex structure, cumbersome operation, and low positioning accuracy. Some positioning devices use multiple independent drive mechanisms to control the positioning components separately, which not only increases the complexity of the system and the maintenance cost, but also makes it difficult to achieve synchronous movement of the positioning components, resulting in low positioning efficiency. At the same time, when fixing the mask, the existing positioning devices often use a pneumatic gripper structure for clamping. If the clamping force is not properly controlled, it can easily damage the fragile mask. Furthermore, the mask is prone to displacement due to vibration or external force before clamping, affecting the overall clamping accuracy.

[0003] Therefore, it is necessary to invent a mask positioning and calibration platform to solve the above problems. Utility Model Content

[0004] The purpose of this invention is to provide a mask positioning and calibration platform. By incorporating a calibration mechanism, it can solve the problems in the prior art where multiple independent drive mechanisms increase system complexity and result in poor positioning efficiency.

[0005] To achieve the above objectives, the present invention provides the following technical solution: a mask positioning and calibration platform, including a base, an air circuit frame fixedly connected to the top of the base, a suction cup for adsorbing and fixing workpieces fixedly connected to the top of the air circuit frame, an air pipe communicating with the suction cup fixedly connected to the left side of the air circuit frame, and a calibration mechanism provided on the surface of the base. The calibration mechanism includes a stepper motor, a rotating plate, and clamping blocks. The stepper motor is fixedly installed at the bottom of the base, which has an internal cavity. The rotating plate is rotatably connected to the cavity and coaxially arranged. A coaxial rotating shaft is fixedly connected to the top of the output shaft of the stepper motor. The rotating shaft is rotatably connected to the inner wall of the base via a shaft seat. The top of the rotating shaft is fixedly connected to the center of the bottom of the rotating plate. Multiple clamping blocks are arranged in a circular array on the top of the base. Each clamping block has a positioning groove on its top for adapting to the edge shape of the workpiece. The clamping blocks are drivenly connected to the rotating plate. Multiple evenly distributed displacement sensors are fixedly connected to the top of the base.

[0006] Preferably, the number of suction cups is no less than four.

[0007] Preferably, the calibration mechanism further includes a protrusion, and the inner wall of the base is provided with a groove along the radial direction. The protrusion is slidably fitted in the groove. The protrusion has a dovetail-shaped structure, and the groove is a matching dovetail groove.

[0008] Preferably, the calibration mechanism further includes a vertical rod, the lower end of which is fixedly connected to a protrusion, the upper end of which passes through a through hole at the top of the base and is fixedly connected to the bottom of the clamping block, and the upper surface of the rotating plate is provided with multiple inclined grooves along the circumferential direction.

[0009] Preferably, the plurality of inclined grooves are arranged radially and inclined from the center of the rotating plate, and the lower end of the vertical rod extends into the interior of the inclined groove and slides in contact with the inner wall of the inclined groove.

[0010] Preferably, mounting ears are fixedly connected to the left and right sides of the base, and mounting holes are formed on the surface of the mounting ears.

[0011] The technical effects and advantages provided by this utility model in the above technical solution are as follows: This invention is equipped with a calibration mechanism, which achieves preliminary positioning calibration through mechanical transmission, and then completes the final fixation by vacuum suction cup adsorption. This method reduces the risk of damage to the mask plate caused by continuously applying excessive clamping force. Furthermore, by using the rotation of the rotating plate to drive the inclined groove to push the vertical rod, all clamping blocks can move towards the center or the outside at the same speed, avoiding positioning deviations caused by errors between different drive units and ensuring high repeatability positioning accuracy. Attached Figure Description

[0012] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this invention. For those skilled in the art, other drawings can be obtained based on these drawings.

[0013] Figure 1 This is a three-dimensional structural diagram of the overall device in this utility model; Figure 2 This is a three-dimensional split cross-sectional view of the base and calibration mechanism in this utility model; Figure 3 This is a three-dimensional structural diagram of the calibration mechanism in this utility model; Figure 4 This is a three-dimensional structural diagram of the entire invention from another perspective.

[0014] Legend: 10. Base; 12. Air path frame; 13. Suction cup; 14. Air tube; 20. Calibration mechanism; 21. Stepper motor; 211. Rotating shaft; 22. Rotating plate; 23. Cavity; 24. Protrusion; 25. Groove; 26. Vertical rod; 27. Clamping block; 271. Positioning groove; 28. Inclined groove; 30. Mounting ear; 31. Mounting hole; 4. Displacement sensor. Detailed Implementation

[0015] To enable those skilled in the art to better understand the technical solution of this utility model, the present utility model will be further described in detail below with reference to the accompanying drawings.

[0016] This utility model provides, for example Figures 1-3 The mask positioning and calibration platform shown includes a base 10, an air path frame 12 fixedly connected to the top of the base 10, and a suction cup 13 for adsorbing and fixing workpieces fixedly connected to the top of the air path frame 12. The number of suction cups 13 is not less than four, forming a stable four-point support adsorption layout. The diameter of the suction cup 13 is 50-80mm, and the distance between adjacent suction cups 13 is 100-150mm. An air pipe 14 communicating with the suction cup 13 is fixedly connected to the left side of the air path frame 12. A calibration mechanism 20 is provided on the surface of the base 10. The calibration mechanism 20 includes a stepper motor 21, a rotating plate 22, and a clamping block 27. The stepper motor 21 is fixedly mounted on the bottom of the base 10. A cavity 23 is provided inside the base 10. The rotating plate 22 is rotatably connected to the cavity 23 and is coaxially arranged. A coaxial rotating shaft 211 is fixedly connected to the top of the output shaft of the stepper motor 21. The rotating shaft 211 is rotatably connected to the inner wall of the base 10 through a shaft seat. The top of the rotating shaft 211 is fixedly connected to the center of the bottom of the rotating plate 22. The stepper motor 21 is a 42cm04 model, which can precisely control the rotation angle of its output shaft and facilitate the adjustment of its rotation speed and rotation angle. It can be adjusted to suit different needs. This improves control precision. Multiple clamping blocks 27 are arranged in a ring array on the top of the base 10. Each clamping block 27 has a positioning groove 271 on its top for adapting to the shape of the workpiece edge. The clamping blocks 27 are connected to the rotating plate 22 for transmission, so that when the rotating plate 22 rotates, it drives all the clamping blocks 27 to move radially synchronously, thereby achieving accurate clamping of the mask. Multiple evenly distributed displacement sensors 4 are fixedly connected to the top of the base 10. The displacement sensors 4 are of model SD-C1050, ton, and are used to detect the real-time position of the mask. A controller is also set on the top of the base 10. The controller can accurately control the rotation angle of the stepper motor 21 based on the feedback signal received from the displacement sensors 4.

[0017] like Figure 2 and Figure 3 As shown, the calibration mechanism 20 also includes a protrusion 24. A groove 25 is radially formed on the inner wall of the base 10. The protrusion 24 slides within the groove 25, and its sliding direction is consistent with the radial direction of the base 10. The protrusion 24 has a dovetail-shaped structure, and the groove 25 is a matching dovetail groove, achieving a guide sliding fit that resists lateral forces and prevents dislodgement. The calibration mechanism 20 also includes a vertical rod 26. The lower end of the vertical rod 26 is fixedly connected to the protrusion 24, and the upper end of the vertical rod 26 passes through a through hole at the top of the base 10 and connects with the clamping block 27. The bottom is fixedly connected to transmit radial movement. The upper surface of the rotating plate 22 is provided with multiple inclined grooves 28 along the circumferential direction. The multiple inclined grooves 28 are arranged radially and inclinedly with the center of the rotating plate 22 as the starting point. The lower end of the vertical rod 26 extends into the interior of the inclined groove 28 and slides in contact with the inner wall of the inclined groove 28. When the stepper motor 21 drives the rotating plate 22 to rotate, the side wall of the inclined groove 28 pushes the vertical rod 26 to move radially along the groove 25, thereby driving the clamping block 27 to move synchronously towards the center or the outside, realizing the clamping or releasing action.

[0018] like Figure 1 and Figure 4 As shown, mounting ears 30 are fixedly connected to the left and right sides of the base 10 to fix the entire platform to the equipment. Mounting ears 30 have mounting holes 31 on their surfaces for mounting bolts to pass through, enabling quick assembly and disassembly as well as rigid connection.

[0019] The working principle of this utility model is as follows: First, the entire platform is fixed to the worktable of the photolithography equipment's inspection device using bolts through the mounting ears 30 and mounting holes 31 on both sides of the base 10. This ensures the platform's stability and reliability during operation, preventing positioning deviations due to vibration. The air pipe 14 is then connected to a negative pressure source. Next, the mask workpiece to be positioned is placed above the air path frame 12, aligning its bottom surface with multiple suction cups 13. Then, the stepper motor 21 mounted at the bottom of the base 10 is started, and the motor's output shaft drives the rotating plate 22 to rotate around its vertical central axis. The upper surface of the rotating plate 22 has multiple radially inclined grooves 28, and the lower end of the vertical rod 26 is embedded in the inclined grooves 28 and slides in contact with its sidewall. When the rotating plate 22 rotates, the side wall of the inclined groove 28 applies a thrust to the vertical rod 26, forcing the vertical rod 26 to move radially inward. Since the lower end of the vertical rod 26 is connected to the dovetail protrusion 24, the protrusion 24 slides in the dovetail groove 25 opened in the inner wall of the base 10. This structure restricts the protrusion 24 to slide only in the radial direction, which plays a role in precise guidance and resistance to lateral forces, preventing shaking or dislodging during the movement. The radial movement of the vertical rod 26 directly drives the clamping block 27 to move synchronously towards the center. Multiple clamping blocks 27 achieve synchronous radial feeding under the rotation drive of the rotating plate 22. The positioning groove 271 at the top of the clamping block 27 gradually fits the outer edge contour of the mask, thereby achieving uniform and symmetrical clamping action, improving repeatability and ensuring accurate initial positioning.

[0020] Meanwhile, multiple displacement sensors 4 installed on the top of the base 10 monitor the position of the mask edge in real time and feed the detected displacement signals back to the controller. The controller can dynamically adjust the rotation angle and speed of the stepper motor 21 to achieve high-precision automatic calibration and accurate positioning. When the displacement sensor 4 detects that the workpiece is in place, the controller sends a signal to stop the stepper motor 21. Then, the negative pressure source works to generate a vacuum suction force through the air pipe 14 to pre-stabilize the mask on the upper surface of the air path frame 12. This four-point support layout has good support stability and can effectively prevent the workpiece from shifting due to slight vibration or airflow disturbance after the positioning process. At the same time, it reduces the risk of damage to the mask caused by continuously applying excessive clamping force.

[0021] When the mask needs to be released, the stepper motor 21 rotates in the opposite direction, the rotating plate 22 drives the inclined groove 28 to move in the opposite direction, pushing the vertical rod 26 to move outward, thereby causing the clamping block 27 to exit synchronously, releasing the clamping state, and then the vacuum adsorption is turned off, so that the mask can be safely removed.

[0022] The above description only illustrates certain exemplary embodiments of the present invention. Undoubtedly, those skilled in the art can modify the described embodiments in various ways without departing from the spirit and scope of the present invention. Therefore, the above drawings and descriptions are illustrative in nature and should not be construed as limiting the scope of protection of the claims of the present invention.

Claims

1. A mask positioning and calibration platform, comprising a base (10), characterized in that: An air path frame (12) is fixedly connected to the top of the base (10), and a suction cup (13) for adsorbing and fixing workpieces is fixedly connected to the top of the air path frame (12). An air pipe (14) communicating with the suction cup (13) is fixedly connected to the left side of the air path frame (12). A calibration mechanism (20) is provided on the surface of the base (10). The calibration mechanism (20) includes a stepper motor (21), a rotating plate (22), and clamping blocks (27). The stepper motor (21) is fixedly installed at the bottom of the base (10). A cavity (23) is provided inside the base (10). The rotating plate (22) is rotatably connected to the cavity (23) and coaxially arranged. A rotating shaft (211) is fixedly connected to the top of the output shaft of the stepper motor (21). The rotating shaft (211) is rotatably connected to the inner wall of the base (10) through a shaft seat. The top of the rotating shaft (211) is fixedly connected to the center of the bottom of the rotating plate (22). Multiple clamping blocks (27) are arranged in a ring array on the top of the base (10). Each clamping block (27) has a positioning groove (271) on its top for adapting to the edge shape of the workpiece. The clamping blocks (27) are connected to the rotating plate (22) in a transmission connection. Multiple uniformly arranged displacement sensors (4) are fixedly connected to the top of the base (10).

2. The mask positioning and calibration platform according to claim 1, characterized in that: The number of suction cups (13) is no less than four.

3. The mask positioning and calibration platform according to claim 1, characterized in that: The calibration mechanism (20) also includes a protrusion (24), and the inner wall of the base (10) is provided with a groove (25) along the radial direction. The protrusion (24) is slidably fitted in the groove (25). The protrusion (24) has a dovetail structure, and the groove (25) is a matching dovetail groove.

4. The mask positioning and calibration platform according to claim 1, characterized in that: The calibration mechanism (20) also includes a vertical rod (26), the lower end of which is fixedly connected to the protrusion (24), the upper end of which passes through the through hole at the top of the base (10) and is fixedly connected to the bottom of the clamping block (27), and the upper surface of the rotating plate (22) is uniformly provided with multiple inclined grooves (28) along the circumferential direction.

5. A mask positioning and calibration platform according to claim 4, characterized in that: Multiple inclined grooves (28) are arranged radially and inclined from the center of the rotating plate (22). The lower end of the vertical rod (26) extends into the interior of the inclined groove (28), and the vertical rod (26) slides in contact with the inner wall of the inclined groove (28).

6. The mask positioning and calibration platform according to claim 1, characterized in that: The base (10) is fixedly connected to the left and right sides with mounting ears (30), and the mounting ears (30) have mounting holes (31) on their surfaces.

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