A magnetic field generation and control device for a magnetic force microscope

Abstract

This invention provides a magnetic field generation and control device for a magnetic force microscope, including a primary displacement component, a secondary displacement component, a sample stage, an excitation component, and an excitation device support component. By moving the excitation component closer to the sample stage from the side furthest from the sample, the excitation component and the sample displacement component are integrated together, eliminating the need for an additional electromagnet component and significantly reducing the size of the device providing the magnetic field to the sample. On the other hand, by moving the excitation component closer to the sample to provide a magnetic field that meets the detection requirements, the magnetic field range is small and will not interfere with other devices. By configuring the connection relationship between the primary displacement component, the secondary displacement component, and the excitation component, a continuous magnetic field environment can be provided even when the sample is moved rapidly or with high precision to meet the detection requirements of atomic force microscopy.

Description

Technical Field

[0001] This utility model belongs to the field of sample testing technology, and relates to sample carrying devices, specifically to a magnetic field generation and control device for a magnetic microscope. Background Technology

[0002] Atomic force microscopy (AFM) examines the microscopic properties of a sample by scanning a probe across its surface and using optical levers to detect the interaction forces between the probe and the sample. Magnetic force microscopy (MFM) further analyzes the magnetic properties of a sample by using a magnetic probe and detecting the interaction forces between the probe and the sample. In some cases, it is necessary to expose the sample to a magnetic field to detect its magnetic characteristics under the influence of the magnetic field, thereby exploring the sample's magnetic properties.

[0003] In existing technologies, the aforementioned requirements are mainly achieved by setting up electromagnets to generate a magnetic field at the location of the object being measured. However, existing electromagnets are usually quite large, which is not conducive to the miniaturization of atomic force microscopes. At the same time, large electromagnets can interfere with the adjustment and placement of the sample, affecting the efficiency of use.

[0004] The information disclosed in the background section is only intended to enhance the understanding of the background of this utility model, and therefore may contain information that does not constitute prior art known to those skilled in the art. Utility Model Content

[0005] To improve the detection efficiency of atomic force microscopy in situations requiring a magnetic field, this invention provides a magnetic field generation and control device for magnetic force microscopy, comprising a primary displacement component, a secondary displacement component, a sample stage, an excitation component, and an excitation device support component. The fixed side of the secondary displacement component is connected to the movable side of the primary displacement component. The secondary displacement component is provided with a movable platform, and the movable platform is provided with a receiving hole. The sample stage is mounted on the movable platform and located outside the receiving hole. The excitation component is mounted on the excitation device support component, and the excitation device support component is mounted on the primary displacement component. The excitation device support component is at least partially located inside the secondary displacement component. The excitation component approaches the sample stage through the receiving hole. The moving accuracy of the movable platform of the secondary displacement component is not less than the moving accuracy of the movable side of the primary displacement component.

[0006] According to one embodiment of the present invention, the excitation device support assembly is provided with a lifting platform, the excitation assembly is disposed on the lifting platform, and the lifting platform is configured to move the excitation assembly closer to or further away from the sample stage.

[0007] According to one embodiment of this utility model, the excitation device bearing assembly is provided with a threaded screw mechanism, a transmission mechanism, and a drive mechanism. The lifting platform moves under the drive of the threaded screw mechanism, and the threaded screw mechanism is connected to the drive mechanism through the transmission mechanism.

[0008] According to one embodiment of the present invention, the driving mechanism is disposed outside the magnetic field displacement stage.

[0009] According to one embodiment of the present invention, the excitation device includes at least one of an excitation coil and a permanent magnet.

[0010] According to one embodiment of the present invention, the excitation device includes an excitation coil and a permanent magnet, wherein the excitation coil is disposed on the side of the permanent magnet close to the sample stage.

[0011] According to one embodiment of the present invention, the excitation device includes an excitation coil, which is electrically connected to an external power source.

[0012] According to one embodiment of this utility model, the secondary displacement stage is a piezoelectric displacement stage.

[0013] According to one embodiment of the present invention, the excitation device bearing assembly further includes a connecting plate, the connecting plate being connected to the moving side of the primary displacement assembly, and the secondary displacement assembly being connected to the connecting plate.

[0014] According to one embodiment of the present invention, the sample stage is provided with a groove, the opening of the groove is disposed toward the excitation assembly, the groove extends toward the sample bearing position of the sample stage, and the groove is configured to accommodate the excitation assembly and leave a gap.

[0015] The present invention has at least the following beneficial effects: The magnetic field generation and control device for a magnetic force microscope provided in this application integrates the excitation component and the sample displacement component together, eliminating the need for an additional electromagnet component, thus significantly reducing the size of the device for providing a magnetic field to the sample. On the other hand, by bringing the excitation component close to the sample to provide a magnetic field that meets the detection requirements, the magnetic field range is small and will not interfere with other devices. By configuring the connection relationship between the primary displacement component, the secondary displacement component and the excitation component, a magnetic field environment can still be continuously provided when the sample is moved rapidly or with high precision, so as to meet the detection requirements of atomic force microscopy. Attached Figure Description

[0016] Figure 1This is a schematic diagram of the overall structure of one embodiment of a magnetic field generation and control device for a magnetic microscope provided by this utility model.

[0017] Figure 2 for Figure 1 The cross-sectional view of the schematic diagram shown.

[0018] In the diagram: 1, primary displacement assembly; 11, fixed side of primary displacement assembly; 111, first translation stage; 112, first translation knob; 12, moving side; 121, second translation stage; 122, second translation knob; 2, secondary displacement assembly; 21, moving platform; 211, receiving hole; 22, fixed side of secondary displacement assembly; 3, sample stage; 31, sample bearing surface; 32, mounting plate; 33, groove; 4, excitation assembly; 41, excitation coil; 42, permanent magnet; 5, excitation device bearing assembly; 51, lifting platform; 511, limit pin; 521, screw; 531, driven wheel; 532, transmission belt; 533, driving wheel; 541, height adjustment knob; 542, extension plate; 55, guide sleeve; 551, guide groove; 552, bearing. Detailed Implementation

[0019] To make the objectives and features of this utility model clearer and easier to understand, the specific embodiments of this utility model will be further described below with reference to the accompanying drawings. It should be noted that the drawings are all in a very simplified form and use non-precise ratios, and are only used to facilitate and clearly assist in illustrating the embodiments of this utility model.

[0020] This invention provides a magnetic field generation and control device for a magnetic force microscope, comprising a primary displacement component 1, a secondary displacement component 2, a sample stage 3, an excitation component 4, and an excitation device support component 5. The primary displacement component 1 positions the sample on the sample stage 3 within a first movement range, and the secondary displacement component 2 positions the sample on the sample stage 3 within a second movement range. More specifically, the movement range of the primary displacement component 1 can be greater than that of the secondary displacement component 2, and the movement accuracy of the secondary displacement component 2 can be greater than that of the primary displacement component, thereby simultaneously achieving a larger movement range and higher movement accuracy. Specifically, the fixed side 22 of the secondary displacement component 2 is connected to the moving side 12 of the primary displacement component 1. The secondary displacement component 2 is provided with a moving platform 21, and the sample stage 3 is mounted on the moving platform 21. The movement accuracy of the moving platform 21 of the secondary displacement component 2 is not less than the movement accuracy of the moving side 12 of the primary displacement component 1. More specifically, the primary displacement component 1 can be an electric or manual displacement stage, and the secondary displacement component 2 can be a piezoelectric displacement stage.

[0021] The primary displacement component 1 can be a single-axis displacement stage or a multi-axis displacement stage to meet different movement requirements. Please refer to [link / reference]. Figure 1 This paper illustrates a biaxial displacement stage, wherein a primary displacement assembly 1 is formed by connecting two single-axis displacement stages. Specifically, the fixed side 11 of the primary displacement assembly is used to connect to external equipment, thereby fixing the entire magnetic field displacement stage. A first translation stage 111 is connected to the fixed side 11 of the first displacement assembly and can move in the direction of the first axis. A second translation stage 121 is connected to the first translation stage 111, and a moving side 12 is connected to the second translation stage 121 and can move in the direction of the second axis. The directions of the first and second axes form an angle. In this way, the moving side 12 can move relative to the fixed side 11 of the primary displacement assembly in the directions of the first and second axes, thereby allowing the fixed elements on the moving side 12 to move in the directions of the first and second axes, and thus causing the sample stage 3 and the excitation assembly 4 to move accordingly.

[0022] The driving method for the primary displacement component 1 can be electric, pneumatic, hydraulic, manual, etc. Please refer to [link / reference]. Figure 1 This illustrates a driving method for a manually controlled primary displacement assembly 1. Specifically, a first translation knob 112 is mounted on either the fixed side 11 of the primary displacement assembly or the first translation stage 111, and can control the relative position of the first translation stage 111 and the fixed side 11 of the primary displacement assembly on the first axis; a second translation knob 122 is mounted on either the second translation stage 121 or the moving side 12 of the primary displacement assembly, and can control the relative position of the second translation stage 121 and the moving side 12 of the primary displacement assembly on the second axis.

[0023] A receiving hole 211 is provided on the moving platform 21 of the second displacement component 2, which is used to at least partially accommodate at least a portion of the excitation component 4. In some cases, the internal position of the second displacement component 2 corresponding to the moving platform 21 can be provided with a corresponding accommodating space as needed to at least partially accommodate at least a portion of the excitation component 4, so as to make the overall structure compact. The sample stage 3 is mounted on the moving platform 21 and is located outside the receiving hole 211, which allows the sample to be placed on the sample stage 3 facing outwards from the second displacement component 2, and allows the excitation component 4 to approach the sample stage 3 from the other side of the sample stage 3, thereby providing a magnetic field environment for the sample. The sample stage 3 is provided with a sample bearing surface 31 for bearing the sample. In some cases, the sample stage 3 can be connected to the moving platform 21 through a mounting plate 32.

[0024] The excitation assembly 4 is installed on the excitation device support assembly 5, which is installed on the first-stage displacement assembly 1. The excitation device support assembly 5 is at least partially located inside the second-stage displacement assembly 2, and the excitation assembly 4 is close to the sample stage 3 through the receiving hole 211.

[0025] Based on this, the excitation component 4 provides a magnetic field environment to the sample-bearing side of the sample stage 3, thereby ensuring the sample is within this magnetic field environment. When a large-scale adjustment of the sample's position is required, the first displacement component 1 performs a rapid and low-precision adjustment of the sample's position. The excitation component 4 and the sample stage 3 move synchronously under the drive of the first displacement component 1, ensuring that the relative positions of the sample on the sample stage 3 and the excitation component 4 remain unchanged, thus maintaining a constant magnetic field environment for the sample. When a small-scale, high-precision adjustment of the sample's position is required, the first displacement component 1 and the excitation component 4 remain stationary, while the moving platform 21 of the second displacement component 2 moves the sample on the sample stage 3 with high precision within a small range. During this process, due to the high precision and small range of sample movement, even if the excitation device 4 does not move with the sample, the sample remains within the magnetic field environment generated by the excitation device 4. As can be seen from the foregoing, the solution provided in this application ensures that the magnetic field environment of the sample remains unchanged during rapid, large-scale movement and high-precision, small-scale movement, making it suitable for providing a magnetic field environment to the sample during high-precision scanning and detection.

[0026] The magnetic field generation and control device for magnetic force microscopy provided in this application integrates the excitation component 4 with the sample displacement component, eliminating the need for an additional electromagnet component and significantly reducing the size of the device providing the magnetic field to the sample. Furthermore, by bringing the excitation component 4 close to the sample to provide a magnetic field sufficient for detection, the magnetic field range is small and will not interfere with other devices, making it particularly suitable for sample scanning and detection processes in atomic force microscopy. Specifically, when it is necessary to adjust the area to be detected on the sample, the primary displacement component 1 quickly and extensively adjusts the sample position, bringing the area to be detected closer to the probe. During sample scanning and detection, the position of the primary displacement component 1 is fixed, thus fixing the position of the excitation component 4. The moving platform 21 of the secondary displacement component 2 moves the sample with high precision and a small range, ensuring that the sample remains within the magnetic field environment generated by the excitation component 4 throughout the movement. During sample movement, the probe is used to detect various properties of the sample within the magnetic field environment. Multiple movements of the moving platform 21 are controlled to scan and detect the sample within the magnetic field environment.

[0027] Please see Figure 2In some cases, the excitation device support assembly 5 is equipped with a lifting platform 51, and the excitation assembly 4 is disposed on the lifting platform 51. The lifting platform 51 is configured to move the excitation assembly 4 closer to or further away from the sample stage 3, thereby making the distance between the excitation assembly 4 and the sample stage 3 and the sample adjustable, thus controlling the magnetic field generated by the excitation assembly 4 at the sample. Specifically, the lifting platform 51 can at least control the magnitude of the magnetic field at the sample.

[0028] The lifting drive method for the lifting platform 51 can be configured as needed, for example, it can be driven by pneumatic, electric, hydraulic, or mechanical means. As a feasible implementation, a mechanical drive method can be used to lift the platform 51. Please refer to... Figure 2 As a feasible implementation, the excitation device bearing assembly 5 is provided with a threaded screw mechanism 52, a transmission mechanism 53, and a drive mechanism 54. The lifting platform 51 moves under the drive of the threaded screw mechanism 52, and the threaded screw mechanism 52 is connected to the drive mechanism through the transmission mechanism.

[0029] Specifically, an internal thread is provided on the inner side of the lifting platform 51, and the internal thread of the lifting platform 51 is engaged with the external thread of the screw 521. The lifting platform 51 is limited in the rotational direction by the limiting pin 511, so that when the screw 521 rotates, the lifting platform 51 can move up and down under the combined action of the thread and the limiting pin 511. Furthermore, for the screw 521, the end near the lifting platform 51 can be provided with an external thread, and the end away from the lifting platform 51 can be connected to a transmission device or a drive device to drive the screw 521 to rotate through the corresponding device. In some cases, the excitation device bearing assembly 5 can be provided with a guide sleeve 55, and the screw 521 and the lifting platform 51 can be provided inside the guide sleeve 55. A guide groove 551 for accommodating the limiting pin 511 is opened on the side wall of the guide sleeve 55. The guide groove 551 is arranged along the moving direction of the lifting platform 51, so that the limiting pin 511 and the lifting platform 51 can move under the limitation of the guide groove 551 and the guide sleeve 55. In some cases, a bearing 552 can be installed inside the guide sleeve 55. The screw 521 is axially fixed and circumferentially rotatable inside the guide sleeve 55 through the bearing 552, thereby making the lifting structure of the lifting platform 51 stable and easy to transmit power.

[0030] Regarding the driving method of screw 521, a driven wheel 531 can be connected to the side of screw 521 away from lifting platform 51, and a driving wheel 533 can be connected to the output end of the drive mechanism. A transmission belt 532 connects the driving wheel 533 and the driven wheel 531, allowing the output end of the drive mechanism to rotate the driving wheel 533, which in turn drives the driven wheel 531 via the transmission belt 532, ultimately rotating the screw 521 and causing the lifting platform 51 to rise and fall. In some cases, to improve the movement accuracy of the lifting platform 51, the driving wheel 533 and driven wheel 531 can be gears, and the transmission belt 532 can be a toothed belt, with the transmission belt 532 engaging with the driving wheel 533 and driven wheel 531. Of course, in some cases, the transmission structure consisting of the driving wheel 533, transmission belt 532, and driven wheel 531 can be replaced with other transmission structures, which will not be elaborated here.

[0031] In some cases, the drive mechanism can be located outside the magnetic field displacement stage to facilitate control and equipment maintenance. Specifically, based on the transmission structure consisting of the aforementioned drive wheel 533, transmission belt 532, and driven wheel 531, the drive wheel 533 can be located outside the magnetic field displacement stage, and the motion output end of the drive mechanism can be connected to the drive wheel 533. Correspondingly, an extension plate 542 extending outward can be provided outside the excitation device bearing assembly 5, and the drive wheel 533 can be rotatably mounted on the extension plate 542, thereby facilitating the connection of the motion output end of the drive mechanism to the drive wheel 533 from outside the magnetic field displacement stage. In some cases, the drive mechanism can be selected as needed, and can be electric, pneumatic, hydraulic, or manually driven. Please refer to [link to relevant documentation]. Figure 1 , Figure 2 When using manual drive, the height adjustment knob 541 can be connected to the drive wheel 533 for transmission. By manually rotating the height adjustment knob 541, the lifting platform 51 can be raised or lowered.

[0032] In some cases, the excitation device 4 may include at least one of an excitation coil 41 and a permanent magnet 42. Specifically, the excitation device 4 may use an excitation coil 41 alone, a permanent magnet 42 alone, or both an excitation coil 41 and a permanent magnet 42 simultaneously.

[0033] For more details, please refer to Figure 2 When the excitation device 4 is equipped with both an excitation coil 41 and a permanent magnet 42, the excitation coil 41 can be positioned on the side of the permanent magnet 42 closer to the sample stage 3. This allows the excitation coil 41 to significantly influence the magnetic field environment at the sample location when the excitation coil 41 and the permanent magnet 42 work together to generate a magnetic field.

[0034] In some cases, the excitation device 4 may only be equipped with an excitation coil 41, which is electrically connected to an external power source. By controlling the current supplied by the external power source to the excitation coil 41, the magnetic field environment provided by the excitation coil 41 can be adjusted, thereby adjusting the magnetic field environment at the sample.

[0035] In some cases, please refer to Figure 1 , Figure 2 The excitation device support assembly 5 also includes a connecting plate, which connects the connecting plate to the moving side 12 of the first-stage displacement assembly 1 and connects the second-stage displacement assembly 2 to the connecting plate, thereby realizing a reliable connection between the second-stage displacement assembly 2, the excitation device support assembly 5 and the first-stage displacement assembly 1, while avoiding changes in the relative position between the second-stage displacement assembly 2 and the excitation device support assembly 5, and improving the controllability of sample movement.

[0036] In some cases, the excitation assembly 4 can be positioned closer to the sample by configuring the structure of the sample stage 3. For details, please refer to [link to relevant documentation]. Figure 1 , Figure 2 The sample stage 3 may be provided with a groove 33, the opening of which is directed toward the excitation component 4. The groove 33 extends toward the sample bearing position, i.e., the sample bearing surface 31, of the sample stage 3. The groove 33 is configured to accommodate the excitation component 4 with a gap, so that the excitation component 4 can extend into the groove 33 and approach the sample bearing surface 31, thereby bringing the excitation component 4 closer to the sample.

[0037] The basic principles, main features, and advantages of this utility model have been shown and described above. Therefore, the above description is only an embodiment of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are only the principles of this utility model. Without departing from the spirit and scope of this utility model, this utility model also includes various equivalent changes and modifications, all of which will fall within the scope of this utility model as claimed.

Claims

1. A magnetic field generating and controlling device for a magnetic force microscope, characterized by: The device includes a primary displacement component, a secondary displacement component, a sample stage, an excitation component, and an excitation device support component. The fixed side of the secondary displacement component is connected to the movable side of the primary displacement component. The secondary displacement component is provided with a movable platform, and the movable platform is provided with a receiving hole. The sample stage is installed on the movable platform and is located outside the receiving hole. The excitation component is installed on the excitation device support component, and the excitation device support component is installed on the primary displacement component. The excitation device support component is at least partially located inside the secondary displacement component. The excitation component approaches the sample stage through the receiving hole. The moving accuracy of the movable platform of the secondary displacement component is not less than the moving accuracy of the movable side of the primary displacement component.

2. A magnetic field generating and controlling device for a magnetic force microscope as claimed in claim 1, characterized in that: The excitation device support component is provided with a lifting platform, and the excitation component is disposed on the lifting platform. The lifting platform is configured to move the excitation component closer to or further away from the sample stage.

3. A magnetic field generating and controlling device for a magnetic force microscope as claimed in claim 2, characterized in that: The excitation device bearing assembly is equipped with a threaded screw mechanism, a transmission mechanism, and a drive mechanism. The lifting platform moves under the drive of the threaded screw mechanism, and the threaded screw mechanism is connected to the drive mechanism through the transmission mechanism.

4. A magnetic field generating and controlling device for a magnetic force microscope as claimed in claim 3, characterized in that: The drive mechanism is located outside the magnetic field displacement stage.

5. A magnetic field generating and controlling device for a magnetic force microscope as defined in claim 1, wherein: The excitation device includes at least one of an excitation coil and a permanent magnet.

6. A magnetic field generating and controlling device for a magnetic force microscope as claimed in claim 5, characterized in that: The excitation device includes an excitation coil and a permanent magnet, with the excitation coil disposed on the side of the permanent magnet closer to the sample stage.

7. A magnetic field generating and controlling device for a magnetic force microscope as defined in claim 5, characterized in that: The excitation device includes an excitation coil, which is electrically connected to an external power source.

8. A magnetic field generating and controlling device for a magnetic force microscope as defined in claim 1, characterized in that: The secondary displacement stage is a piezoelectric displacement stage.

9. A magnetic field generating and controlling device for a magnetic force microscope as defined in claim 1, characterized in that: The excitation device bearing assembly further includes a connecting plate, which is connected to the moving side of the primary displacement assembly, and the secondary displacement assembly is connected to the connecting plate.

10. A magnetic field generating and controlling device for a magnetic force microscope as defined in claim 1, characterized in that: The sample stage is provided with a groove, the opening of which faces the excitation component and extends toward the sample bearing position of the sample stage. The groove is configured to accommodate the excitation component and leave a gap.

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