A magnetic levitation molecular pump motor and sealing device
Patent Information
- Application Number
- CN202522106846.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-09-30
- Publication Date
- 2026-09-01
- Estimated Expiration
- 2035-09-30
AI Technical Summary
[0004]本实用新型的目的在于提供一种磁悬浮分子泵电机及罐封装置，解决现有电机定子铁芯的磁场与磁轴承的磁场存在干扰的问题，提高驱动电机轴转动的稳定性，满足磁悬浮分子泵的高精度要求
1、在交流电机中，定子绕组通入交流电后产生旋转磁场，为转子提供磁场环境，驱动转子运动，带动电机轴在壳体上转动，在电机轴转动的过程中，通过磁轴承与位移传感器的组合，磁轴承的无摩擦特性，可避免机械轴承因高速磨损导致的寿命缩短，位移传感器则实时修正转子偏差，保证主轴运转精度，从而实现无接触悬浮、低摩擦、高精度控制，提高电机轴运作的稳定性，实现电机高速转动，保证磁悬浮分子泵稳定的运行，满足磁悬浮分子泵的高精度要求；
Smart Images
Figure CN224709468U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the technical field of magnetic levitation molecular pumps, specifically a magnetic levitation molecular pump motor and a can sealing device. Background Technology
[0002] As a vacuum device, the magnetic levitation molecular pump's motor part includes a housing and a motor shaft rotatably mounted on the housing. Several rotors are mounted on the motor shaft, and a stator that cooperates with the rotors is mounted on the housing. In an AC motor, when AC current is applied to the stator windings, a rotating magnetic field is generated, providing a magnetic field environment for the rotors and driving them to move. This, in turn, causes the motor shaft to rotate on the housing. In addition, magnetic bearings that cooperate with the motor shaft are located at both ends of the housing. These bearings guide the rotation of the motor shaft on the housing, preventing it from deviating from its track, and also reduce the friction between the motor shaft and the housing, ensuring the stability of the overall structure.
[0003] However, during the operation of the motor, the magnetic field of the stator core interferes with the magnetic field of the magnetic bearing, which will lead to eddy current loss and magnetic field distortion, interfering with the effect of the magnetic bearing in stabilizing and controlling the motor shaft suspension, making it difficult to meet the high precision requirements of the magnetic levitation molecular pump. Utility Model Content
[0004] The purpose of this invention is to provide a magnetic levitation molecular pump motor and a sealing device to solve the problem of interference between the magnetic field of the stator core of the existing motor and the magnetic field of the magnetic bearing, improve the stability of the drive motor shaft rotation, and meet the high precision requirements of the magnetic levitation molecular pump.
[0005] To achieve the above objectives, the utility model employs the following technical solution: A magnetic levitation molecular pump motor includes a housing and a motor shaft rotatably mounted on the housing. The motor shaft has a plurality of rotors. A stator that cooperates with the rotors is located in the middle of the housing. Magnetic bearings that cooperate with the motor shaft and displacement sensors that cooperate with the magnetic bearings are respectively located at both ends of the housing. A potting layer is evenly distributed in the gap between the stator and two of the magnetic bearings. The potting layer encapsulates the stator and the two magnetic bearings. Through holes extending to the outer sides are respectively provided on both sides of the potting layer.
[0006] Furthermore, the inner diameter of the potting layer is consistent with the inner diameter of the stator.
[0007] Furthermore, the potting layer can be made of epoxy-based thermally conductive structural adhesive.
[0008] Furthermore, the housing is provided with heat dissipation channels for use with the stator and magnetic bearing, and the bottom of the heat dissipation channels is provided with an inlet and an outlet respectively.
[0009] Furthermore, the heat dissipation channel is provided with several horizontal and vertical plates, which divide the heat dissipation channel into several heat dissipation chambers. The horizontal plates are provided with notches that connect adjacent heat dissipation chambers.
[0010] Furthermore, the top of the heat dissipation channel is detachably equipped with a cover plate.
[0011] A sealing device for a magnetic levitation molecular pump motor includes a positioning cylinder slidably disposed inside a housing, the outer diameter of the positioning cylinder being equal to the inner diameter of the stator.
[0012] Furthermore, the positioning cylinder is provided with glue inlets at both ends, and also includes a glue dispensing pipe connected to the glue inlets.
[0013] Compared with the prior art, the beneficial effects of this utility model are as follows: 1. In an AC motor, when AC current is applied to the stator winding, a rotating magnetic field is generated, providing a magnetic field environment for the rotor, driving the rotor to move, and causing the motor shaft to rotate on the housing. During the rotation of the motor shaft, through the combination of magnetic bearings and displacement sensors, the frictionless characteristics of the magnetic bearings can avoid the shortened life of mechanical bearings due to high-speed wear, while the displacement sensors correct rotor deviations in real time to ensure the operating accuracy of the main shaft. This achieves contactless suspension, low friction, and high-precision control, improves the stability of the motor shaft operation, enables high-speed rotation of the motor, ensures the stable operation of the magnetic levitation molecular pump, and meets the high-precision requirements of the magnetic levitation molecular pump. 2. By encapsulating the stator and two magnetic bearings with a potting layer, electromagnetic noise radiation is reduced, and the magnetic field generated by the stator core during operation is shielded to avoid interference with the magnetic field generated by the magnetic bearings during operation. This improves the stability of the motor shaft suspension and shields the magnetic bearing signal from external magnetic fields. At the same time, the potting layer can suppress high-frequency vibration of the windings to avoid affecting the signal acquisition of the displacement sensor, thereby improving the accuracy of the displacement sensor signal acquisition. 3. The potting layer can be made of epoxy-based thermally conductive structural adhesive, with epoxy resin as the matrix and thermally conductive fillers such as alumina and aluminum nitride added. After curing, it has high hardness (Shore D hardness is usually above 50), strong bonding strength, and excellent thermal conductivity (thermal conductivity is generally 0.8-5W / (m•K)). It can simultaneously fix the components and dissipate heat efficiently, thus forming a uniform heat conduction path, quickly dissipating the heat from the windings, and avoiding local overheating that could affect the stability of the magnetic bearing. After curing, the material completely encapsulates the wires, increasing the withstand voltage to the kV level and eliminating the risk of high-voltage breakdown. This allows the potting layer to suppress high-frequency vibration of the windings, reduce electromagnetic noise radiation, and shield the magnetic bearing signal from external interference. The cured material enhances the overall mechanical strength, reduces winding deformation caused by high-speed centrifugal force, and extends the motor life. Attached Figure Description
[0014] AppendixFigure 1 This is a schematic diagram of the structure of the stator and motor shaft of this utility model.
[0015] Appendix Figure 2 This is a schematic diagram of the structure of the potting layer of this utility model.
[0016] Appendix Figure 3 This is a schematic diagram of the positioning cylinder of this utility model.
[0017] Appendix Figure 4 This is a schematic diagram of the structure of the magnetic bearing of this utility model.
[0018] Appendix Figure 5 This is a schematic diagram of the through hole structure of this utility model.
[0019] Appendix Figure 6 This is a schematic diagram of the structure of this utility model, showing the combination of horizontal and vertical plates.
[0020] The labels shown in the attached diagram: 1. Housing; 2. Motor shaft; 3. Rotor; 4. Stator; 5. Magnetic bearing; 6. Displacement sensor; 7. Encapsulation layer; 8. Through hole; 9. Heat dissipation channel; 10. Inlet; 11. Outlet; 12. Horizontal plate; 13. Cover plate; 14. Positioning cylinder; 15. Glue inlet; 16. Glue filling pipe; 17. Vertical plate; 18. Notch. Detailed Implementation
[0021] The present invention will be further illustrated below with reference to specific embodiments. It should be understood that these embodiments are for illustrative purposes only and are not intended to limit the scope of the present invention. Furthermore, it should be understood that after reading the teachings of this invention, those skilled in the art can make various alterations or modifications to the present invention, and these equivalent forms also fall within the scope defined in this application.
[0022] This utility model provides a magnetic levitation molecular pump motor, such as Figure 1 and Figure 2 As shown, the device includes a housing 1 and a motor shaft 2 rotatably mounted on the housing 1. The motor shaft 2 has several rotors 3. The middle part of the housing 1 has a stator 4 that cooperates with the rotors 3. The two ends of the housing 1 are respectively provided with magnetic bearings 5 that cooperate with the motor shaft 2 and displacement sensors 6 that cooperate with the magnetic bearings 5. Through the combination of magnetic bearings 5 and displacement sensors 6, the frictionless characteristics of magnetic bearings 5 can avoid the shortening of the life of mechanical bearings due to high-speed wear. The displacement sensors 6 correct the deviation of rotors 3 in real time to ensure the operating accuracy of the main shaft, thereby realizing contactless suspension, low friction, and high-precision control, improving the stability of the operation of the motor shaft 2, realizing high-speed rotation of the motor, ensuring the stable operation of the magnetic levitation molecular pump, and meeting the high-precision requirements of the magnetic levitation molecular pump. A potting layer 7 is evenly distributed in the gap between the stator 4 and the two magnetic bearings 5. The potting layer 7 encapsulates the stator 4 and the two magnetic bearings 5. The potting layer 7 has through holes 8 extending to the outside on both sides. By encapsulating the stator 4 and the two magnetic bearings 5 with the potting layer 7, electromagnetic noise radiation is reduced, and the magnetic field generated by the stator 4 core during operation is shielded to avoid interference with the magnetic field generated by the magnetic bearings 5 during operation. This improves the stability of the control motor shaft 2 suspension. At the same time, it shields the external magnetic field from interfering with the signal of the magnetic bearings 5. In addition, the potting layer 7 can suppress high-frequency vibration of the winding to avoid affecting the signal acquisition of the displacement sensor 6, thereby improving the accuracy of the signal acquisition of the displacement sensor 6 and meeting the high precision requirements of the magnetic levitation molecular pump.
[0023] Preferred, such as Figure 1 and Figure 2 As shown, the inner diameter of the potting layer 7 is the same as the inner diameter of the stator 4, which avoids the potting layer 7 from contacting the motor shaft 2 and affecting the normal rotation of the motor shaft 2, thus meeting the high precision requirements of the magnetic levitation molecular pump.
[0024] Preferably, the potting layer 7 can be made of epoxy-based thermally conductive structural adhesive, with epoxy resin as the matrix and thermally conductive fillers such as alumina and aluminum nitride added. After curing, it has high hardness (Shore D hardness is usually above 50), high bonding strength, and excellent thermal conductivity (thermal conductivity is generally 0.8-5W / (m•K)). It can simultaneously achieve component fixation and efficient heat dissipation, thereby forming a uniform heat conduction path, quickly dissipating the heat of the winding, and avoiding local overheating that affects the stability of the magnetic bearing 5. After curing, the material completely wraps the wire, increasing the withstand voltage level to kV level and eliminating the risk of high voltage breakdown. This allows the potting layer 7 to suppress high-frequency vibration of the winding, reduce electromagnetic noise radiation, and shield the signal of the magnetic bearing 5 from external interference. The cured material enhances the overall mechanical strength, reduces winding deformation caused by high-speed centrifugal force, and extends the motor life.
[0025] Preferred, such as Figure 1 and Figure 3 As shown, the housing 1 is provided with a heat dissipation channel 9 for use with the stator 4 and the magnetic bearing 5. The bottom of the heat dissipation channel 9 is provided with an inlet 10 and an outlet 11. A low-temperature medium (specifically, water) is input through the inlet 10, allowing it to enter the heat dissipation channel 9 and come into contact with the housing 1. At the same time, the heat generated by the operation of the stator 4 core is transferred to the housing 1 to exchange heat with the low-temperature medium, and finally discharged to the outside through the outlet 11, thereby achieving the cooling of the motor, ensuring the stability of the motor operation, and meeting the high precision requirements of the magnetic levitation molecular pump.
[0026] Preferred, such as Figure 1 and Figure 6As shown, the heat dissipation channel 9 is provided with several horizontal plates 12 and vertical plates 17. The horizontal plates 12 and vertical plates 17 divide the heat dissipation channel 9 into several heat dissipation chambers. The horizontal plates 12 are provided with notches 18 that connect adjacent heat dissipation chambers. The low-temperature medium entering the heat dissipation channel is guided by the horizontal plates 12 and vertical plates 17, so that the low-temperature medium first spirals upward through the notches 18 and passes through several heat dissipation chambers in sequence, then spirals downward through the spiral chamber on the other side, and is discharged from the outlet 11. This avoids the low-temperature medium being directly discharged to the outside from the outlet 11, prolongs the residence time of the low-temperature medium, improves the heat exchange efficiency between the low-temperature medium and the shell 1, and at the same time, the low-temperature medium forms turbulence during movement, which will further improve the heat transfer efficiency, improve the cooling effect of the motor, ensure the stability of the motor operation, and meet the high precision requirements of the magnetic levitation molecular pump.
[0027] Preferred, such as Figure 1 As shown, the top of the heat dissipation channel 9 is detachably equipped with a cover plate 13. The cover plate 13 prevents external debris from entering the heat dissipation channel 9 and affecting the heat dissipation effect, thereby improving the cooling effect of the motor. At the same time, the cover plate 13 is detachably connected to the housing 1, which facilitates subsequent maintenance of the horizontal plate 12.
[0028] A sealing device for a magnetic levitation molecular pump motor, such as Figure 3 , Figure 4 and Figure 5 As shown, it includes a positioning cylinder 14 that is slidably disposed inside the housing 1. The outer diameter of the positioning cylinder 14 is equal to the inner diameter of the stator 4. The positioning cylinder 14 restricts the shape of the colloid, ensuring that the inner diameter of the potting layer 7 is consistent with the inner diameter of the stator 4, avoiding contact between the potting layer 7 and the motor shaft 2, which would affect the normal rotation of the motor shaft 2, and improving the efficiency and effect of the canning process.
[0029] Preferred, such as Figure 3 , Figure 4 and Figure 5 As shown, the positioning cylinder 14 is provided with glue inlets 15 at both ends, and also includes a glue filling pipe 16 connected to the glue inlets 15. The glue filling pipe 16 and the glue inlets 15 guide the flow of the glue, so that the glue can flow smoothly into the corresponding chamber, thereby improving the efficiency and effect of can sealing.
[0030] Example 1 This utility model provides a magnetic levitation molecular pump motor, such as Figure 1 and Figure 2As shown, in the AC motor, after AC current is applied to the stator 4 winding, a rotating magnetic field is generated, which provides a magnetic field environment for the rotor 3, drives the rotor 3 to move, and drives the motor shaft 2 to rotate on the housing 1. During the rotation of the motor shaft 2, through the combination of magnetic bearing 5 and displacement sensor 6, the frictionless characteristics of magnetic bearing 5 can avoid the shortening of the life of mechanical bearing due to high-speed wear. The displacement sensor 6 corrects the deviation of rotor 3 in real time to ensure the operating accuracy of the main shaft, thereby realizing contactless suspension, low friction, and high-precision control, improving the stability of the operation of motor shaft 2, realizing high-speed rotation of the motor, ensuring the stable operation of the magnetic levitation molecular pump, and meeting the high precision requirements of the magnetic levitation molecular pump. In addition, by encapsulating the stator 4 and the two magnetic bearings 5 with the potting layer 7, electromagnetic noise radiation is reduced, the magnetic field generated by the stator 4 core during operation is shielded, and the magnetic field generated by the stator 4 core during operation is prevented from interfering with the magnetic field generated by the magnetic bearings 5 during operation. This improves the stability of the control motor shaft 2 suspension. At the same time, it shields the external magnetic field from interfering with the signal of the magnetic bearings 5. Meanwhile, the potting layer 7 can suppress high-frequency vibration of the winding, prevent it from affecting the signal acquisition of the displacement sensor 6, and thus improve the accuracy of the signal acquisition of the displacement sensor 6, meeting the high precision requirements of the magnetic levitation molecular pump.
[0031] Example 2 Based on Example 1, such as Figure 1 and Figure 2 As shown, the inner diameter of the potting layer 7 is consistent with the inner diameter of the stator 4, avoiding contact between the potting layer 7 and the motor shaft 2, which would affect the normal rotation of the motor shaft 2. In addition, the material of the potting layer 7 can be epoxy-based thermally conductive structural adhesive, with epoxy resin as the matrix and thermally conductive fillers such as alumina and aluminum nitride added. After curing, it has high hardness (Shore D hardness is usually above 50), high bonding strength, and excellent thermal conductivity (thermal conductivity is generally 0.8-5W / (m•K)). It can simultaneously achieve component fixation and efficient heat dissipation, thereby forming a uniform heat conduction path, quickly dissipating the heat of the winding, and avoiding local overheating that affects the stability of the magnetic bearing 5. After curing, the material completely wraps the wire, and the withstand voltage level is increased to kV level, eliminating the risk of high voltage breakdown. This allows the potting layer 7 to suppress high-frequency vibration of the winding, reduce electromagnetic noise radiation, and shield the signal of the magnetic bearing 5 from external interference. The cured material enhances the overall mechanical strength, reduces winding deformation caused by high-speed centrifugal force, and extends the motor life.
[0032] Example 3 Based on Example 2, such as Figure 1 and Figure 6 As shown, a low-temperature medium is input through inlet 10, which enters the heat dissipation channel 9 and comes into contact with the housing 1. At the same time, the heat generated by the operation of the stator 4 core is transferred to the housing 1 to exchange heat with the low-temperature medium, and finally discharged to the outside through outlet 11, thereby cooling the motor and ensuring the stability of the motor operation. In addition, the low-temperature medium entering the heat dissipation pipe is guided by the horizontal plate 12 and the vertical plate 17, so that the low-temperature medium first spirals upward through the notch 18 and passes through several heat dissipation chambers in sequence, then spirals downward through the spiral chamber on the other side, and is discharged from the outlet 11. This avoids the low-temperature medium being directly discharged to the outside from the outlet 11, prolongs the residence time of the low-temperature medium, improves the heat exchange efficiency between the low-temperature medium and the shell 1, and at the same time, the low-temperature medium forms turbulence during movement, which will further improve the heat transfer efficiency, improve the cooling effect of the motor, ensure the stability of the motor operation, and meet the high precision requirements of the magnetic levitation molecular pump. In addition, a cover plate 13 is detachably provided on the top of the heat dissipation channel 9. The cover plate 13 prevents external debris from entering the heat dissipation channel 9 and affecting the heat dissipation effect, thereby improving the cooling effect of the motor. At the same time, the cover plate 13 is detachably connected to the housing 1, which facilitates subsequent maintenance of the horizontal plate 12.
[0033] Example 4 Based on Example 1, this utility model provides a sealing device for a magnetic levitation molecular pump motor, such as... Figures 3-5 As shown, after the stator 4 and magnetic bearing 5 are installed, the positioning cylinder 14 is slid to the corresponding position of the housing 1. The positioning cylinder 14 restricts the shape of the colloid, ensuring that the inner diameter of the potting layer 7 is consistent with the inner diameter of the stator 4, thus preventing the potting layer 7 from contacting the motor shaft 2 and affecting the normal rotation of the motor shaft 2. Then, the flow of the colloid is guided by the colloid filling pipe 16 and the colloid inlet 15, so that the colloid can flow smoothly into the corresponding chamber, thereby improving the efficiency and effect of the sealing.
Claims
1. A magnetic levitation molecular pump motor, comprising a housing (1) and a motor shaft (2) rotatably mounted on the housing (1), wherein a plurality of rotors (3) are provided on the motor shaft (2), and a stator (4) cooperating with the rotors (3) is provided in the middle of the housing (1), characterized in that: The housing (1) is provided with magnetic bearings (5) for use with motor shaft (2) and displacement sensors (6) for use with magnetic bearings (5) at both ends; a potting layer (7) is evenly distributed between the stator (4) and the two magnetic bearings (5), the potting layer (7) encapsulates the stator (4) and the two magnetic bearings (5), and through holes (8) extending to the outside are provided on both sides of the potting layer (7).
2. The magnetic levitation molecular pump motor according to claim 1, characterized in that: The inner diameter of the potting layer (7) is the same as the inner diameter of the stator (4).
3. The magnetic levitation molecular pump motor according to claim 2, characterized in that: The potting layer (7) can be made of epoxy thermally conductive structural adhesive.
4. The magnetic levitation molecular pump motor according to claim 1, characterized in that: The housing (1) is provided with a heat dissipation channel (9) for use with the stator (4) and the magnetic bearing (5), and the bottom of the heat dissipation channel (9) is provided with an inlet (10) and an outlet (11).
5. A magnetically levitated molecular pump motor according to claim 4, characterized in that: The heat dissipation channel (9) is provided with several horizontal plates (12) and vertical plates (17). The horizontal plates (12) and vertical plates (17) divide the heat dissipation channel (9) into several heat dissipation chambers. The horizontal plates (12) are provided with notches (18) that connect adjacent heat dissipation chambers.
6. A magnetically levitated molecular pump motor according to claim 4, characterized in that: The top of the heat dissipation channel (9) is detachably covered with a cover plate (13).
7. A sealing device for a magnetic levitation molecular pump motor, characterized in that: It includes a positioning cylinder (14) that is slidably disposed inside the housing (1), the outer diameter of the positioning cylinder (14) being equal to the inner diameter of the stator (4).
8. The sealing device for a magnetic levitation molecular pump motor according to claim 7, characterized in that: The positioning cylinder (14) is provided with glue inlets (15) at both ends, and also includes a glue dispensing pipe (16) connected to the glue inlets (15).