A floating compensation device and a planar motor

Abstract

This utility model relates to the field of planar motor technology, and provides a floating compensation device and a planar motor. The floating compensation device includes a compensation unit and an adapter. The compensation unit is provided with a compensation component and a fixing component. One end of the adapter is connected to the compensation component, and the other end of the adapter extends to connect with the unit to be compensated. When the unit to be compensated is subjected to a force, the compensation component can drive the unit to be compensated to move through the adapter to compensate for the positional displacement of the unit to be compensated caused by the force. The fixing component can move up and down to abut against the adapter or release the adapter.

Description

Technical Field

[0001] This utility model belongs to the field of planar motor technology, and particularly relates to a floating compensation device and a planar motor. Background Technology

[0002] Currently, planar motors are direct-drive motors capable of free movement within a two-dimensional plane. They integrate two independent linear motor systems found in traditional XY motion platforms into a single plane, eliminating the need for intermediate mechanical guides, couplings, lead screws, and other transmission mechanisms. In magnetic levitation planar motors, the electromagnetic levitation force is directly related to factors such as coil current and magnetic field strength. Significantly increasing the load-bearing capacity would require a drastic increase in coil current and magnet volume, leading to an exponential increase in power consumption, heat generation, cost, and system complexity, making it impractical in engineering.

[0003] Existing technology proposes to set up a support structure, independent of the stator and fixed to the base, at a specific location in the working area of ​​the planar motor to solve the problem of the position of the moving part that carries the workpiece shifting during workpiece processing. However, this support structure is a static, rigid connection, which leads to problems of misalignment with the workstation and poor docking stability during processing, adversely affecting the processing accuracy and stability of the system.

[0004] To solve the above-mentioned technical problems, this utility model designs a floating compensation device and a planar motor. Utility Model Content

[0005] This invention provides a floating compensation device and a planar motor, which aim to solve the problems of inaccurate alignment with the workstation and poor docking stability.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a floating compensation device, comprising a compensation unit and an adapter, wherein the compensation unit is provided with a compensation component and a fixing component, one end of the adapter is connected to the compensation component, and the other end of the adapter extends to be connected to the unit to be compensated, wherein when the unit to be compensated is subjected to a force, the compensation component can drive the unit to be compensated to move through the adapter to compensate for the positional displacement of the unit to be compensated caused by the force, and the fixing component can move up and down to abut against the adapter or release the adapter.

[0007] Based on the above technical solution, the floating compensation device further includes a housing and a floating plate disposed above the housing. The housing has at least three first inner cavities and a first cavity air passage communicating with the first inner cavities. The compensation component is disposed in the first inner cavity. The compensation component includes a floating rod assembly and a first elastic member. The top of the floating rod assembly extends out of the first inner cavity and connects to one side of the floating plate. The other side of the floating plate is connected to the adapter. The side wall of the first inner cavity is provided with a first limiting part. The floating rod assembly is provided with a first limiting mating part. The first elastic member is sleeved on the floating rod assembly. The top end of the first elastic member abuts against the first limiting part, and the bottom end of the first elastic member abuts against the first limiting mating part. Under the action of the airflow in the first cavity air passage, the first elastic member extends and retracts vertically, so that the floating rod assembly drives the floating plate to move.

[0008] Furthermore, the floating rod assembly includes a piston extension rod, a floating shaft, a piston ring adapter rod, and a connector arranged sequentially along the axial direction of the first inner cavity. The top of the piston extension rod is connected to the floating plate. A piston ring bushing is sleeved on the outer periphery of the piston ring adapter rod. The first elastic element is sleeved on the piston ring bushing. A piston ring and a first sealing ring are also sleeved circumferentially on the piston ring bushing. A retaining ring is engaged on the side wall of the first inner cavity, and the retaining ring abuts against the piston ring bushing.

[0009] Furthermore, the piston ring bushing includes a first section and a second section arranged vertically, the first section and the second section are connected, the first elastic element is sleeved on the first section, and the piston ring and the first sealing ring are sleeved on the second section and abut against the inner wall of the first cavity.

[0010] Based on the above technical solution, the housing is provided with at least three second inner cavities and a second cavity air passage communicating with the second inner cavities. The fixing assembly is provided in the second inner cavity. The fixing assembly includes a top post, a second elastic element, and a bushing. The side wall of the second inner cavity is provided with a second limiting part. The top post is provided with a second limiting mating part. The second elastic element is sleeved on the top post. The top end of the second elastic element abuts against the second limiting part, and the bottom end of the second elastic element abuts against the second limiting mating part. The bushing is sleeved on the bottom of the top post and abuts against the side wall of the second inner cavity. Under the action of the airflow in the second cavity air passage, the second elastic element retracts upward, so that the top post moves upward to abut against the floating plate.

[0011] Furthermore, the top column includes an upper section and a lower section. The second elastic element is sleeved on the upper section. The upper section is also sleeved with a top column outlet sealing ring and a composite bearing arranged sequentially along the axial direction. The bushing is sleeved on the lower section. The lower section is also sleeved with a second sealing ring. The second sealing ring is disposed on both sides of the bushing and abuts against the side wall of the second inner cavity. The side wall of the second inner cavity is secured with a retaining spring, which abuts against the bottom of the top column.

[0012] Optionally, the mover is provided with an adapter housing, the adapter is provided with a fixing member, the adapter housing is provided with a fixing fitting member, and the fixing member cooperates with the fixing fitting member to fix the mover and the adapter.

[0013] Optionally, the adapter is provided with a groove, and the moving part is embedded in the groove.

[0014] Based on the above technical solution, the stator is provided with a moving track in the circumferential direction, and the bottom of the housing is provided with a slider, which can move relative to the stator along the moving track.

[0015] Furthermore, the stator is provided with a moving track in the circumferential direction, and the bottom of the housing is provided with a slider, which can move relative to the moving track and relative to the stator.

[0016] Secondly, this utility model provides a planar motor, including a mover, a stator, and a floating compensation device as described in any of the above embodiments. The mover is suspended above the stator, a workpiece is carried on the mover and it is located below the actuator. The compensation unit is disposed on one side of the stator. One end of the adapter is connected to the compensation unit, and the other end of the adapter extends to connect with the bottom wall of the mover and has a gap with the stator.

[0017] Compared with related technologies, the beneficial effects of this utility model are as follows: In this invention, when the unit to be compensated is subjected to processing force, the compensation component floats up and down, providing floating support for the unit to be compensated through the adapter. This compensates for the positional changes caused by the force applied to the unit, making the surface of the unit to be compensated horizontal and stable. After compensation is completed, the fixing component moves upward to fix the adapter, maintaining the position of the unit to be compensated. After all processing actions are completed, the fixing component moves downward to retract. This floating compensation device not only compensates for the positional changes of the unit to be compensated through the compensation component, achieving a precise self-centering effect, but also fixes the position of the compensated unit to be compensated through the fixing component, improving processing accuracy and stability. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only one embodiment of this utility model. For those skilled in the art, other embodiments can be derived from the provided drawings without creative effort.

[0019] Figure 1 This is a top view of the floating compensation device provided by this utility model; Figure 2 This is a side view of the floating compensation device provided by this utility model; Figure 3 This is an exploded structural diagram of the floating compensation device, the mover, and the workpiece provided by this utility model; Figure 4 This is a schematic diagram of the compensation unit provided by this utility model; Figure 5 This utility model provides Figure 4 The diagram shows a cross-sectional structure along the AA direction; Figure 6 This is a schematic diagram of the internal structure of the compensation unit provided by this utility model; Figure 7 This is another side view of the floating compensation device provided by this utility model; Figure 8 This is a schematic diagram of the real-time pose of the floating plate provided by this utility model, including its Z-axis height, Rx pitch angle, and Ry roll angle.

[0020] In the diagram: 1. Mover; 11. Adapter housing; 2. Stator; 3. Workpiece; 4. Actuator; 5. Adapter; 51. Fixing component; 6. Compensation assembly; 61. Floating rod assembly; 611. Piston extension rod; 612. Floating shaft; 613. Piston ring adapter rod; 614. Connecting component; 615. Piston ring bushing; 6151. First section; 6152. Second section; 616. Piston ring; 617. First sealing ring; 618. Snap ring; 62. First elastic element; 7. Fixing assembly; 71. Top column; 711. Upper section; 712. Lower section; 72, Second elastic element; 73, Bushing; 74, Top column outlet seal ring; 75, Composite bearing; 76, Second seal ring; 77, Snap ring; 8, Housing; 81, First inner cavity; 811, First limiting part; 812, First limiting mating part; 82, First cavity air passage; 83, Second inner cavity; 831, Second limiting part; 832, Second limiting mating part; 84, Second cavity air passage; 85, Inlet air port; 9, Floating plate; 91, Reference plane; 92, Rx pitch angle; 93, Ry roll angle; 94, Z-axis height. Detailed Implementation

[0021] The present invention will be further described below with reference to the accompanying drawings and examples: The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0022] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0023] In the description of this utility model, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0024] Example 1 Combination Figures 1-5 As shown, this embodiment of the present disclosure provides a floating compensation device, including a compensation unit and an adapter 5. The compensation unit is provided with a compensation component 6 and a fixing component 7. One end of the adapter 5 is connected to the compensation component 6, and the other end of the adapter 5 extends to be connected to the unit to be compensated. When the unit to be compensated is subjected to a force, the compensation component 6 can drive the unit to be compensated to move through the adapter 5 to compensate for the positional displacement of the unit to be compensated caused by the force. The fixing component 7 can move up and down to abut against the adapter 5 or release the adapter 5.

[0025] When the unit to be compensated is subjected to processing force, the compensation component 6 floats up and down, providing floating support for the unit to be compensated through the adapter 5. This compensates for the positional changes caused by the force applied to the unit, making the surface of the unit to be compensated horizontal and stable. After the compensation is completed, the fixing component 7 moves upward to fix the adapter and maintain the position of the unit to be compensated. After all processing actions are completed, the fixing component 7 moves downward to retract. This floating compensation device can not only compensate for the positional changes of the unit to be compensated through the compensation component 6 to achieve a precise self-centering effect, but also fix the position of the compensated unit to be compensated through the fixing component 7, thereby improving processing accuracy and stability.

[0026] Based on the above technical solutions, such as Figure 5 and Figure 6 As shown, the floating compensation device also includes a housing 8 and a floating plate 9 disposed above the housing 8. The housing 8 has at least three first inner cavities 81 and a first cavity air passage 82 communicating with the first inner cavities 81. The compensation component 6 is disposed in the first inner cavity 81. The compensation component 6 includes a floating rod assembly 61 and a first elastic member 62. The top of the floating rod assembly 61 extends out of the first inner cavity 81 and is connected to one side of the floating plate 9. The other side of the floating plate 9 is connected to the adapter 5. The side wall of the first inner cavity 81 is provided with a first limiting part 811. The floating rod assembly 61 is provided with a first limiting fitting part 812. The first elastic member 62 is sleeved on the floating rod assembly 61. The top end of the first elastic member 62 abuts against the first limiting part 811, and the bottom end of the first elastic member 62 abuts against the first limiting fitting part 812. Under the action of the airflow in the first cavity air passage 82, the first elastic member 62 extends and retracts up and down, so that the floating rod assembly 61 drives the floating plate 9 to move.

[0027] In this embodiment, the compensation unit is a planar motor as an example. The planar motor includes a mover 1 and a stator 2. The mover 1 is suspended above the stator 2. The mover 1 carries a workpiece 3 and is located below the actuator 4. The compensation unit is located on one side of the stator 2. One end of the adapter 5 is connected to the compensation unit, and the other end of the adapter 5 extends to connect with the bottom wall of the mover 1 and has a gap with the stator 2.

[0028] When workpiece 3 is subjected to the force of actuator 4, it is transmitted to mover 1. Airflow enters the first inner cavity 81 through the first cavity air passage 82, pushing the floating rod assembly 61 upward. The first elastic element 62 is compressed, and the floating rod assembly 61 drives the top floating plate 9 to move, thereby driving the adapter 5 to move. Specifically, at least three independent compensation components are non-collinearly configured, for example, distributed in an equilateral triangle below the floating plate. Each compensation component can independently generate controllable lifting and lowering displacement in the Z-direction, i.e., the vertical direction. Based on the calculated target pose of the floating plate 9 (Z-direction height, pitch angle Rx, roll angle Ry), the controller decomposes the overall three-dimensional target pose adjustment requirements into independent Z-direction displacement commands required by each compensation component through precise calculation. For example, to increase the overall height of the floating plate 9, the controller will instruct the three compensation components to move upwards simultaneously and equally. To make the floating plate 9 pitch (Rx) around the X-axis, the controller will instruct the compensation components on different sides of the X-axis to produce relative Z-direction displacements, for example, one compensation component moves upwards and the other moves downwards. To make the floating plate 9 roll (Ry) around the Y-axis, the controller will instruct the compensation components on different sides of the Y-axis or other positions to produce relative Z-direction displacements. By coordinating and independently extending and retracting the Z-direction displacements of at least three compensation components, the height adjustment of the floating plate 9 in the Z-direction and the pitch and roll movements around the X and Y axes can be precisely achieved, thereby reaching the preset target pose. These precise pose adjustments ultimately enable the adapter 5 to follow the floating plate 9 to reach the corresponding target pose.

[0029] The floating rod assembly 61 drives the top floating plate 9 to move, which in turn drives the adapter 5 to move, causing the mover 1 to rotate along the X-axis, rotate along the Y-axis, or move slightly along the Z-axis to compensate for the positional change of the mover 1 after being subjected to force. The three compensation components 6 are arranged in a regular manner to jointly compensate the mover 1 for the positional change caused by the force, so that the workpiece 3 reaches the coaxial position with the actuator 4 above, and the surface of the workpiece 3 is in a horizontal state, realizing the self-centering floating compensation process.

[0030] To improve compensation accuracy, the number of compensation components 6 can be four, five, or more. The housing 8 includes a main body and a bottom shell, with a sealing ring provided between the main body and the bottom shell.

[0031] Furthermore, such as Figure 5 and Figure 6As shown, the floating rod assembly 61 includes a piston extension rod 611, a floating shaft 612, a piston ring adapter rod 613, and a connector 614 arranged sequentially along the axial direction of the first inner cavity 81. The top of the piston extension rod 611 is fixedly connected to the floating plate 9. A piston ring bushing 615 is sleeved on the outer periphery of the piston ring adapter rod 613. The first elastic member 62 is sleeved on the piston ring bushing 615. A piston ring 616 and a first sealing ring 617 are also sleeved on the circumference of the piston ring bushing 615. A retaining ring 618 is clamped on the side wall of the first inner cavity 81, and the retaining ring 618 abuts against the piston ring bushing 615.

[0032] Specifically, the piston extension rod 611 extends out of the first inner cavity 81 through the through hole in the top wall of the first inner cavity 81 and extends to connect with the floating plate 9. The top end of the floating shaft 612 is inserted into the bottom of the piston extension rod 611, and the top end of the piston ring adapter rod 613 is inserted into the bottom of the floating shaft 612. A piston ring bushing 615 is fitted on the outer periphery of the piston ring adapter rod 613. A sealing ring is provided between the piston ring bushing 615 and the piston ring adapter rod 613. The top end of the connecting piece 614 is inserted into the piston ring adapter rod 611. At the bottom of 3, the connecting member 614 fixes the piston ring bushing 615 to the piston ring adapter rod 613 and the floating shaft 612, forming an air chamber between the piston ring bushing 615 and the bottom wall of the first cavity. The first sealing ring 617 ensures the air chamber is sealed relative to the upper part of the first inner cavity 81. The first cavity air passage 82 communicates with the air chamber. The retaining ring 618 provides reliable mechanical limiting for the floating rod assembly 61, achieving stroke limitation and overload protection. Figure 6 As shown, the piston ring bushing 615 includes a first section 6151 and a second section 6152 arranged vertically. The first section 6151 is connected to the second section 6152. The first elastic member 62 is sleeved on the first section 6151. The piston ring 616 and the first sealing ring 617 are sleeved on the second section 6152 and abut against the inner wall of the first cavity.

[0033] When the workpiece 3 is subjected to the force of the actuator 4, it is transmitted to the mover 1. The airflow enters the air chamber through the first cavity air passage 82, pushing the piston ring bushing 615 to move upward. The first elastic element 62 is compressed, causing the floating shaft 612 and the piston extension rod 611 to move upward at the same time, driving the floating plate 9 to drive the adapter 5 to move and act on the mover 1 to compensate for the force on the mover 1, so that the workpiece 3 reaches the coaxial position with the actuator 4 above, and the surface of the workpiece 3 is in a horizontal state, realizing the self-centering floating compensation process.

[0034] Optionally, a universal ball joint is provided between the piston extension rod 611 and the floating shaft 612. The top of the piston extension rod 611 is fixedly connected to the floating plate 9 by a threaded bolt. The piston extension rod 611 can drive the floating plate 9 to rotate omnidirectionally relative to the floating shaft 612. The floating plate 9 can freely adjust the required angle. In this way, through the connection of the universal ball joint, the linear thrust of the piston extension rod 611 and the omnidirectional rotation required by the floating plate 9 are separated, realizing structural decoupling. The piston extension rod 611 provides axial power, while the universal ball joint absorbs and eliminates the lateral force and bending moment generated by the rotation due to self-centering compensation. This allows the power component and the execution component to work together without interfering with each other, thereby greatly improving the system's motion flexibility, accuracy and durability.

[0035] Based on the above technical solutions, such as Figure 5 and Figure 6 As shown, the housing 8 has at least three second inner cavities 83 and a second cavity air passage 84 communicating with the second inner cavities 83. The fixing assembly 7 is disposed in the second inner cavity 83. The fixing assembly 7 includes a top post 71, a second elastic member 72 and a bushing 73. The side wall of the second inner cavity 83 is provided with a second limiting part 831. The top post 71 is provided with a second limiting fitting part 832. The second elastic member 72 is sleeved on the top post 71. The top end of the second elastic member 72 abuts against the second limiting part 831 and the bottom end of the second elastic member 72 abuts against the second limiting fitting part 832. The bushing 73 is sleeved on the bottom of the top post 71 and abuts against the side wall of the second inner cavity 83. Under the action of the airflow in the second cavity air passage 84, the second elastic member 72 retracts upward, so that the top post 71 moves upward to abut against the floating plate 9.

[0036] Specifically, such as Figure 5 As shown, the top post 71 includes an upper section 711 and a lower section 712. The second elastic element 72 is sleeved on the upper section 711. The upper section 711 is also sleeved with a top post outlet sealing ring 74 and a composite bearing 75 arranged sequentially along the axial direction. The bushing 73 is sleeved on the lower section 712. The lower section 712 is also sleeved with a second sealing ring 76. The second sealing ring 76 is disposed on both sides of the bushing 73 and abuts against the side wall of the second inner cavity 83. A retaining spring 77 is engaged with the side wall of the second inner cavity 83 and abuts against the bottom of the top post 71. The retaining spring 77 is disposed in the groove at the end of the stroke of the top post 71. Its function is to cooperate with the groove or limiting structure of the side wall of the second inner cavity 83 when the top post 71 is in the lowest retracted position, providing a slight elastic holding force or resistance, preventing the top post 71 from accidentally popping out due to its own weight or minor external vibrations, thereby ensuring the reliability and stability of the top post 71 when not in use.

[0037] In order to drive the compensation component 6 and the fixing component 7 to move, the housing 8 is provided with an input air hole 85, which is connected to the first cavity air passage 82 and the second cavity air passage 84, and is used to allow air to pass from the outside to the first inner cavity 81 and the second inner cavity 83 through the first cavity air passage 82 and the second cavity air passage 84 respectively.

[0038] After the compensation component 6 completes the self-centering floating compensation process of the mover 1 and the workpiece 3, the workpiece 3 reaches the standard position. The airflow enters the second inner cavity 83 through the second cavity air passage 84, pushing the top column 71 upward. The second elastic element 72 is compressed, and the top of the top column 71 extends out of the top wall of the second inner cavity 83. The floating plate 9 is provided with a limiting groove, which corresponds to the top column 71. The top column 71 extends out to be inserted into the limiting groove, so that the position of the floating plate 9 is fixed. Multiple top columns 71 are inserted into the floating plate 9 at the same time, which improves the stability of the fixation. Among them, the top of the top column 71 has a conical head structure. The size of the limiting groove is slightly larger than the size of the conical head of the top column 71. Even if the floating plate 9 is in a slightly tilted state, the conical head design can guide the top of the top column 71 to be smoothly aligned and inserted into the limiting groove. The conical surface of the conical head of the top column 71 makes line contact or multi-point contact with the wall surface of the limiting groove, realizing the insertion and fixation of the top of the top column 71 with the limiting groove. The support of the three top columns 71 limits the degree of freedom of the floating plate. The movement of the top columns 71 is driven by the air pressure in the second inner cavity 83. The second cavity air passages 84 of the three second inner cavities 83 are relatively independent to control the three top columns 71 to achieve the required positioning height respectively.

[0039] Optionally, such as Figure 3 As shown, the mover 1 is provided with a transition housing 11, the transition component 5 is provided with a fixing component 51, the transition housing 11 is provided with a fixing fitting component, and the fixing component 51 cooperates with the fixing fitting component to fix the mover 1 and the transition component 5.

[0040] Specifically, the fixing member 51 and the fixing mating member can be a pin and pin hole mating form, or a protrusion and groove mating form, as long as it can achieve the fixing between the moving part 1 housing and the adapter 5, it is not limited here. When the moving part 1 moves to a preset position above the adapter 5, the compensation component 6 rises to drive the adapter 5 to rise. Through the fixing member 51, the adapter housing 11 is lifted, positioned and fixed. The pin is inserted into the pin hole or the protrusion is inserted into the groove to achieve a fixed connection between the adapter housing 11 and the adapter 5.

[0041] In other embodiments, the movement 1 and the adapter 5 can also be configured such that the adapter 5 has a groove in which the movement 1 can be embedded. This reduces the influence of the adapter 5 on the levitation force exerted by the stator 2 on the movement 1, reduces the distance between the movement 1 and the stator 2, and ensures stable levitation and precise movement of the movement 1.

[0042] Furthermore, the stator 2 is provided with a moving track in the circumference, and the bottom of the housing 8 is provided with a slider, which can move relative to the stator 2 along the moving track.

[0043] When multiple actuators 4 are arranged around the stator 2, the floating compensation device can move according to the position of the actuators 4, thereby improving the flexibility of the floating compensation device.

[0044] Example 2 This disclosure provides a planar motor, including a mover 1, a stator 2, and a floating compensation device as described in any of the above embodiments. The mover 1 is suspended above the stator 2, and a workpiece 3 is carried on the mover 1 and located below an actuator 4. The compensation unit is disposed on one side of the stator 2. One end of the adapter 5 is connected to the compensation unit, and the other end of the adapter 5 extends to connect with the bottom wall of the mover 1 and has a gap with the stator 2.

[0045] Using the floating compensation device provided in this embodiment, when the actuator 4 applies a force to the workpiece 3, it is transmitted to the mover 1. The compensation component 6 floats up and down, and the mover 1 is supported by the adapter 5. The device compensates for the positional changes of the mover 1 caused by the applied force, so that the surface of the workpiece 3 is horizontal and the central axis of the workpiece 3 and the actuator 4 coincide to complete the self-centering compensation. After the compensation is completed, the fixing component 7 moves upward to fix the adapter 5 and maintain the position of the mover 1 and the workpiece 3. The actuator 4 then performs subsequent processing actions. After the actuator 4 completes all processing actions, the fixing component 7 moves downward to retract. This floating compensation device can not only perform positional compensation of the mover 1 through the compensation component 6 to achieve a precise self-centering effect, but also fix the position of the compensated mover 1 and the workpiece 3 through the fixing component 7, thereby improving the processing accuracy and stability.

[0046] This disclosure also provides a control method for a floating compensation device for a planar motor, applied to the floating compensation device described in Embodiment 1 above, wherein the compensation component 6 is provided with a first position sensor, and the control method includes the following steps: S1, the actuator 4 applies a force to the workpiece 3, which is transmitted to the mover 1. The compensation component 6 floats up and down, and provides floating support for the mover 1 through the adapter 5. Multiple compensation components 6 work together to self-center the positional deviation caused by the force on the mover 1, so that the mover 1 and the workpiece 3 return to their initial position before the force is applied, and the workpiece 3 remains concentric with the position of the actuator under the force, and the force is balanced. S2, the first position sensor is used to detect whether the compensation component 6 has completed compensation. If the compensation is completed, the fixing component 7 moves upward to fix the adapter 5, maintain the position of the mover 1 and the workpiece 3, and the actuator 4 performs subsequent processing actions. S3, after the actuator 4 has completed all its actions, the fixed component 7 moves downward and retracts, and the processing of the workpiece 3 is completed.

[0047] The control method provided in this embodiment enables passive compensation of the pose of the mover 1 and the workpiece 3. It is applicable to scenarios where the workpiece 3 is subjected to clamping forces or other forces before processing or assembly, or during processing and assembly when the workpiece 3 is subjected to processing forces. Through the compensation component 6, the pose offset of the mover 1 caused by the applied forces is compensated, ensuring that the surface of the workpiece 3 is horizontal and the central axis of the workpiece 3 coincides with that of the actuator 4 to achieve self-centering compensation. After compensation, the fixing component 7 moves upward to fix the adapter 5, maintaining the pose of the mover 1 and the workpiece 3. The actuator 4 then performs subsequent processing actions. After the actuator 4 completes all processing actions, the fixing component 7 moves downward to retract. This method not only compensates for the pose of the mover 1 and the workpiece 3, achieving precise self-centering, but also fixes the compensated positions of the mover 1 and the workpiece 3, improving the accuracy and stability of subsequent processing.

[0048] Specifically, for example, during the assembly of workpiece 3, actuator 4 clamps an assembly part that needs to be inserted into the assembly hole of workpiece 3. When actuator 4 clamps the assembly part and moves it downward to contact workpiece 3, it drives the assembly part to move downward and insert it into the assembly hole. During the insertion process, compensation component 6 performs self-centering floating compensation on floating plate 9, which makes it easier for the assembly part to be inserted into the assembly hole more smoothly, so as to avoid excessive interference of the edge of the assembly hole to the assembly part, thereby improving assembly accuracy and efficiency.

[0049] Based on the above technical solution, the stator 2 is provided with a second position sensor. Before step S1, the mover 1 floats and moves above the stator 2. The second position sensor is used to locate the position of the mover 1, and the mover 1 carrying the workpiece 3 is moved to a preset position below the actuator 4 and connected to the adapter 5 so that the workpiece 3 and the actuator 4 are aligned at their respective working positions. During the process of connecting the mover 1 carrying the workpiece 3 to the adapter 5, the compensation component 6 floats up and down to provide floating support for the adapter 5.

[0050] Based on the above technical solution, step S1 includes the following steps: S1.1, the actuator 4 applies a force to the workpiece 3 and transmits it to the mover 1. The airflow enters the first inner cavity 81 through the first cavity air passage 82, pushing the piston ring bushing 615 to move upward. The first elastic element 62 is compressed, causing the floating shaft 612 and the piston extension rod 611 to move upward at the same time, driving the floating plate 9 to drive the adapter 5 to move and act on the mover 1. S1.2, the adapter 5 drives the mover 1 to rotate around the X-axis, or rotate around the Y-axis, or move slightly along the Z-axis, to compensate for the positional deviation of the mover 1 caused by the force, so that the mover 1 and the workpiece 3 are restored to their initial positions before the force is applied, and the workpiece 3 is kept concentric with the actuator's position under the force, and the force is balanced.

[0051] Specifically, in step S1.1, the internal air pressure of the three first inner cavities 81 is consistent. When subjected to external process actions, the floating plate 9 experiences uneven force, and the air pressure of the first inner cavity 81 passively compensates and adjusts the angle according to the force. Before the workpiece 3 is subjected to force, the air pressure in the first inner cavity 81 is stable. When the workpiece 3 is subjected to force, the air pressure in the first inner cavity 81 increases. The air pressure of the airflow entering the multiple first inner cavities 81 changes in real time with the degree of air pressure increase, that is, changes in real time with the pose shift of the corresponding position of the mover 1, that is, changes with the pose shift of the workpiece 3, that is, changes with the magnitude of the force applied to the workpiece 3, so as to tend to restore the mover 1 and the workpiece 3 to their initial pose before being subjected to force. In step S1.2, due to the real-time and high-speed operation of the closed-loop control loop, the compensation force generated by the multiple compensation components 6 can dynamically and accurately offset the force and torque generated by the external force on the mover 1, and finally actively maintain or restore the position of the mover 1 and the workpiece 3 to the initial position before the force was applied, so that the workpiece 3 can still remain concentric with the actuator 4 and be in force balance during the force processing.

[0052] In this embodiment, the first position sensor is disposed on the floating plate 9, and the number of the first position sensors is at least three. Preferably, the three first position sensors are distributed in an equilateral triangle. The first position sensor can be an eddy current sensor, a laser displacement sensor, or a capacitive displacement sensor, and is not limited thereto, that is, it can detect the position and orientation of the floating plate 9. The working principle is not limited to optical, electrical, eddy current, inductive, magnetic, resistive, or a combination of two or more of these physical principles.

[0053] Based on the above technical solution, step S2 includes the following steps: S2.1, The real-time Z-direction displacement of at least three different positions on the floating plate 9 relative to the initial pose is detected by the first position sensor; S2.2, calculate the real-time pose of the floating plate 9 in space by the Z-direction displacement of three different positions. The real-time pose includes Z-direction height 94, Rx pitch angle 92 and Ry roll angle 93. S2.3, determine the relationship between the pose error between the real-time pose and the initial pose and the preset threshold. If one of the absolute values ​​of the three pose errors is greater than the corresponding preset threshold, it indicates that the compensation has not been completed and proceed to S2.1. If the absolute values ​​of the three pose errors are all less than the corresponding preset threshold within a certain period of time, it indicates that the compensation has been completed and proceed to S2.4. S2.4, the fixed component 7 moves upward to fix the adapter 5, maintain the position of the mover 1 and the workpiece 3, and the actuator 4 performs subsequent processing actions.

[0054] Specifically, in step S2.2, the Z-direction displacements of the three different locations are respectively The coordinates of three different points are (x1, y1), (x2, y2), and (x3, y3). The Z-axis height of the floating plate is the real-time pose. Rx pitch angle Ry roll angle for:

[0055] The initial pose of the floating plate is based on the bottom surface of the initial pose of the mover before it is subjected to any force, with the reference surface 91 as the coordinate system for the X and Y axes. The origin of the coordinate system can be the center point of the position triangle of three different positions. Figure 8 As shown, the Z-axis height 94 in the real-time pose is the real-time height of the center point of three different positions relative to the origin of the reference plane 91 along the Z-axis, and the Rx pitch angle 92 is the real-time angle of rotation of the floating plate 9 relative to the reference plane 91 around the X-axis. Figure 8 The pitch angle Rx shown is 92°, and the roll angle Ry is the real-time angle of rotation of the floating plate 9 relative to the reference plane 91 around the Y-axis. Figure 8 The angle formed by the two straight lines indicated by 93 in the diagram is the Ry roll angle. Figure 8 The Ry roll angle is 93°, which is 0°. The pose error is the difference between the real-time pose and the initial pose. For example... Figure 2 As shown, the Rx pitch angle 92 is the real-time angle of rotation of the floating plate 9 relative to the reference plane 91 along the X-axis in the direction of the arrow. Figure 7 As shown, the Ry roll angle is the real-time angle at which the floating plate 9 rotates about the Y-axis in the direction of the arrow relative to the reference plane 91.

[0056] Furthermore, in step S2, after the self-centering compensation is completed, the airflow enters the second inner cavity 83 through the second cavity air passage 84, pushing the top column 71 to move upward, the second elastic element 72 is compressed, and the top of the multiple top columns 71 extends out of the top wall of the second inner cavity 83 and extends to engage with the limiting groove of the floating plate 9 to fix the floating plate 9, maintain the position of the mover 1 and the workpiece 3, and the actuator 4 performs subsequent actions.

[0057] The present invention has been described above by way of example, but the present invention is not limited to the specific embodiments described above. Any modifications or variations made based on the present invention shall fall within the scope of protection claimed by the present invention.

Claims

1. A floating compensation device, characterized in that, The device includes a compensation unit and a connector (5). The compensation unit is provided with a compensation component (6) and a fixing component (7). One end of the connector (5) is connected to the compensation component (6), and the other end of the connector (5) extends to be connected to the unit to be compensated. When the unit to be compensated is subjected to a force, the compensation component (6) can drive the unit to be compensated to move through the connector (5) to compensate for the positional displacement of the unit to be compensated caused by the force. The fixing component (7) can move up and down to abut against the connector (5) or release the connector (5).

2. The floating compensation device according to claim 1, characterized in that, It also includes a housing (8) and a floating plate (9) disposed above the housing (8). The housing (8) has at least three first inner cavities (81) and a first cavity air passage (82) communicating with the first inner cavities (81). The compensation component (6) is disposed in the first inner cavity (81). The compensation component (6) includes a floating rod assembly (61) and a first elastic element (62). The top of the floating rod assembly (61) extends out of the first inner cavity (81) and is connected to one side of the floating plate (9). The other side of the floating plate (9) is connected to the adapter (5). The inner cavity (81) has a first limiting part (811) on its side wall, and the floating rod assembly (61) has a first limiting mating part (812). The first elastic member (62) is sleeved on the floating rod assembly (61). The top end of the first elastic member (62) abuts against the first limiting part (811), and the bottom end of the first elastic member (62) abuts against the first limiting mating part (812). Under the action of the airflow in the first cavity air passage (82), the first elastic member (62) extends and retracts up and down, so that the floating rod assembly (61) drives the floating plate (9) to move.

3. The floating compensation device according to claim 2, characterized in that, The floating rod assembly (61) includes a piston extension rod (611), a floating shaft (612), a piston ring adapter rod (613), and a connector (614) arranged sequentially along the axial direction of the first inner cavity (81). The top of the piston extension rod (611) is connected to the floating plate (9). A piston ring bushing (615) is sleeved on the outer periphery of the piston ring adapter rod (613). The first elastic element (62) is sleeved on the piston ring bushing (615). A piston ring (616) and a first sealing ring (617) are also sleeved on the piston ring bushing (615) in the circumferential direction. A retaining ring (618) is clamped on the side wall of the first inner cavity (81). The retaining ring (618) abuts against the piston ring bushing (615).

4. The floating compensation device according to claim 3, characterized in that, The piston ring bushing (615) includes a first section (6151) and a second section (6152) arranged vertically. The first section (6151) is connected to the second section (6152). The first elastic element (62) is sleeved on the first section (6151). The piston ring (616) and the first sealing ring (617) are sleeved on the second section (6152) and abut against the inner wall of the first cavity.

5. The floating compensation device according to claim 2, characterized in that, The housing (8) has at least three second inner cavities (83) and a second cavity air passage (84) communicating with the second inner cavities (83). The fixing assembly (7) is disposed in the second inner cavity (83). The fixing assembly (7) includes a top post (71), a second elastic element (72), and a bushing (73). The side wall of the second inner cavity (83) is provided with a second limiting part (831). The top post (71) is provided with a second limiting mating part (832). The second elastic element (72) is sleeved on the second inner cavity (83). The top of the top column (71) and the top of the second elastic member (72) abut against the second limiting part (831), and the bottom of the second elastic member (72) abuts against the second limiting mating part (832). The bushing (73) is sleeved on the bottom of the top column (71) and abuts against the side wall of the second inner cavity (83). Under the action of the airflow in the second cavity air passage (84), the second elastic member (72) retracts upward so that the top column (71) moves upward to abut against the floating plate (9).

6. The floating compensation device according to claim 5, characterized in that, The top column (71) includes an upper section (711) and a lower section (712). The second elastic element (72) is sleeved on the upper section (711). The upper section (711) is also sleeved with a top column outlet sealing ring (74) and a composite bearing (75) arranged sequentially along the axial direction. The bushing (73) is sleeved on the lower section (712). The lower section (712) is also sleeved with a second sealing ring (76). The second sealing ring (76) is disposed on both sides of the bushing (73) and abuts against the side wall of the second inner cavity (83). The side wall of the second inner cavity (83) is fitted with a retaining spring (77), which abuts against the bottom of the top column (71).

7. The floating compensation device according to claim 1, characterized in that, The mover (1) is provided with a transfer housing (11), the adapter (5) is provided with a fixing member (51), the transfer housing (11) is provided with a fixing fitting member, and the fixing member (51) cooperates with the fixing fitting member to fix the mover (1) and the adapter (5).

8. The floating compensation device according to claim 1, characterized in that, The adapter (5) is provided with a groove, and the moving part (1) is embedded in the groove.

9. The floating compensation device according to claim 2, characterized in that, The stator (2) is provided with a moving track in the circumference, and the bottom of the housing (8) is provided with a slider, which can move relative to the stator (2) along the moving track.

10. A planar motor, characterized in that, The device includes a mover (1), a stator (2), and a floating compensation device as described in any one of claims 1 to 9. The mover (1) is suspended above the stator (2). The mover (1) carries a workpiece (3) and is located below the actuator (4). The compensation unit is located on one side of the stator (2). One end of the adapter (5) is connected to the compensation unit, and the other end of the adapter (5) extends to connect with the bottom wall of the mover (1) and has a gap with the stator (2).

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