Process equipment

Abstract

This application discloses a process apparatus, which includes a vacuum chamber, multiple transfer mechanisms, and two lifting mechanisms. The vacuum chamber has an inlet and an outlet. The multiple transfer mechanisms are spaced apart within the vacuum chamber along a plumb line. One of the two lifting mechanisms is configured to transfer a substrate-carrying carrier plate entering from the inlet to any one of the multiple transfer mechanisms, and the other of the two lifting mechanisms is configured to transfer a carrier plate carried by any one of the multiple transfer mechanisms to the outlet. The multiple transfer mechanisms are arranged along the plumb line, increasing the amount of carrier plates that the vacuum chamber can hold, thereby increasing the number of substrates that can be processed simultaneously within the vacuum chamber, which is beneficial for improving the substrate processing efficiency.

Description

Technical Field

[0001] This application relates to manufacturing technology for perovskite substrates, and more particularly to a process equipment. Background Technology

[0002] Perovskite solar cells possess significant industrialization potential due to their advantages such as high photoelectric conversion efficiency, simple structure, low cost, and diverse applications. VCD (Vacuum Flash Drying) technology is one of the core pieces of equipment for the industrialization of perovskite solar cells. Through VCD technology, the evaporation rate and deposition thickness of perovskite materials can be precisely controlled, thereby producing high-quality perovskite thin films.

[0003] Currently, the common equipment used in manufacturing perovskite solar cells is arranged in a linear fashion. For example, in the flash evaporation equipment for mass production of perovskite, the carrier plates carrying the perovskite solar cell substrate are arranged in a single layer and enter the chambers of the flash evaporation equipment in sequence. This type of flash evaporation equipment for mass production of perovskite occupies a large area. Utility Model Content

[0004] Therefore, it is necessary to provide a process equipment with a small footprint.

[0005] Some embodiments of this application provide a process apparatus including a vacuum chamber, multiple transfer mechanisms, and two lifting mechanisms. The vacuum chamber has an inlet and an outlet. The multiple transfer mechanisms are spaced apart within the vacuum chamber along a plumb line. One of the two lifting mechanisms is configured to transfer a substrate-carrying carrier plate entering from the inlet to any one of the multiple transfer mechanisms, and the other of the two lifting mechanisms is configured to transfer the carrier plate carried by any one of the multiple transfer mechanisms to the outlet.

[0006] Multiple conveyor mechanisms are arranged along the direction of the plumb bob, which increases the amount of carrier plates that the vacuum chamber can hold, thereby increasing the number of substrates that can be processed simultaneously in the vacuum chamber and improving the processing efficiency of the substrates.

[0007] According to some embodiments of this application, the lifting mechanism includes a conveying assembly, a lifting assembly, a driving assembly, and a first transmission assembly. The lifting assembly is connected to the vacuum chamber and the conveying assembly, and is configured to drive the conveying assembly to rise or fall, such that the conveying assembly is opposite to an inlet / outlet and any of a plurality of transmission mechanisms. The driving assembly includes a first driving member connected to the vacuum chamber. The first transmission assembly is movably disposed within the vacuum chamber, with one end connected to the first driving member and the other end connected to the conveying assembly. The first transmission assembly is configured to move within the vacuum chamber when the lifting assembly drives the conveying assembly to rise or fall, and to maintain transmission between the first driving member and the conveying assembly to realize the conveying assembly carrier plate.

[0008] In the above embodiments, the first transmission component moves within the vacuum cavity as the conveying component is raised and lowered by the lifting component, thereby maintaining the transmission between the first driving component and the conveying component, and thus enabling the first driving component to indirectly drive the conveying component to convey the carrier plate.

[0009] According to some embodiments of this application, a first transmission assembly includes a plurality of connecting rods, a plurality of first transmission wheels, and a plurality of first transmission belts. The plurality of connecting rods are rotatably connected in sequence, with one end of each connecting rod rotatably connected to a first driving member and the other end rotatably connected to a transmission assembly. At least two of the plurality of first transmission wheels are rotatably disposed on the same connecting rod. One of the plurality of first transmission wheels is connected to the first driving member and located at the end of the connecting rod rotatably connected to the first driving member closer to the first driving member. Each first transmission belt cooperates with at least two first transmission wheels disposed on the same connecting rod.

[0010] In the above embodiments, when the lifting assembly drives the conveying assembly to rise or fall along the plumb line, the connecting rod rotates relative to the first driving member, rotates between two adjacent connecting rods, and rotates relative to the conveying assembly. This enables the connecting rod to move relative to the vacuum cavity, so as to adapt to the movement of the conveying assembly relative to the first driving member. At the same time, the conveying assembly conveys the carrier plate through the cooperation of the first transmission belt and the first transmission wheel on the connecting rod.

[0011] According to some embodiments of this application, the lifting mechanism further includes a first guide rail, a plurality of second guide rails, and a plurality of sliders. The first guide rail is disposed in the vacuum cavity. The plurality of second guide rails are arranged sequentially at intervals along the plumb line, the extension direction of each second guide rail intersects the extension direction of the first guide rail, and is slidably disposed on the first guide rail. The plurality of sliders are slidably connected to the second guide rails one-to-one, and rotatably connected to the rotatable connection of two adjacent connecting rods.

[0012] In the above embodiments, when multiple links are driven by the transmission component, two links rotate relative to each other, or the links rotate relative to the first driving member and the transmission component, the links slide along the second guide rail with the slider, and the links move along a set path, which reduces the unrestrained movement of the links and improves the transmission stability of the first transmission component.

[0013] According to some embodiments of this application, the drive assembly further includes a second drive member connected to the vacuum chamber. The lifting assembly includes a screw and a nut. The screw extends along the plumb line and is connected to the second drive member, which is configured to drive the screw to rotate. The nut is connected to the transmission assembly and cooperates with the screw, and drives the transmission assembly to move along the plumb line when the screw rotates.

[0014] In the above embodiments, the second driving component, screw, and nut cooperate to enable the lifting component to drive the transmission component to rise or fall along the plumb line.

[0015] According to some embodiments of this application, the first driving member and the second driving member are respectively located outside the vacuum chamber. The vacuum chamber has two through holes corresponding to each lifting mechanism. A portion of the first driving member passes through one of the two through holes to cooperate with the first transmission assembly, and a portion of the second driving member passes through the other of the two through holes to cooperate with the first transmission assembly. The driving assembly also includes two first magnetofluids, one of which is connected to the first driving member and seals the corresponding through hole. The other of the two first magnetofluids is connected to the second driving member and seals the corresponding through hole.

[0016] In the above embodiments, the first driving member and the second driving member are located outside the vacuum chamber, which reduces the pressure resistance requirements of the first driving member and the second driving member. The through hole allows the driving transmission of the first driving member and the second driving member to the vacuum chamber. The first magnetic fluid seals the through hole, which improves the sealing performance of the vacuum chamber and helps to ensure the process effect.

[0017] According to some embodiments of this application, the transmission mechanism includes a plurality of third driving members, two conveying assemblies, and a plurality of connecting members. The plurality of third driving members are spaced apart outside the vacuum chamber along a plumb line. The two sets of conveying assemblies are positioned on opposite sides of the vacuum chamber. Each conveying assembly includes a plurality of second transmission assemblies located outside the vacuum chamber and arranged along a plumb line, and a plurality of rollers located inside the vacuum chamber. Each second transmission assembly includes a plurality of second transmission wheels and a plurality of second transmission belts, with each roller connected to a second transmission wheel. The plurality of second transmission wheels are spaced apart along the inlet-to-outlet direction. Each pair of adjacent second transmission wheels engages with a second transmission belt. A connecting member connects the two conveying assemblies to enable synchronous movement of the two conveying assemblies, and the second transmission wheel of one of the two conveying assemblies is connected to a third driving member.

[0018] In the above embodiments, every two second transmission wheels and one second transmission belt form a belt drive structure, and every two adjacent second transmission belts are connected to the same second transmission wheel, so that multiple second transmission wheels in the second transmission assembly rotate synchronously under the drive of a third driving member, while the rollers located in the vacuum cavity rotate synchronously under the drive of the corresponding second transmission wheel, and the rollers located on both sides of the vacuum cavity rotate synchronously under the transmission of the connecting member, thereby realizing the transfer of the carrier plate on the rollers on both sides of the spaced vacuum cavity.

[0019] According to some embodiments of this application, the transmission mechanism further includes multiple adapters disposed on both sides of the vacuum chamber, with each adapter corresponding to a multiple second transmission assembly of the two conveying components. Each adapter includes a third transmission wheel and a third transmission belt. The third transmission wheel is located below one end of a second transmission assembly along the plumb line, and the third transmission belt engages with the third transmission wheel and a second transmission wheel located at the end of one of the second transmission assemblies. Connectors connect the third transmission wheels of the two adapters on opposite sides. The third transmission wheel located on one side of the vacuum chamber is connected to a third drive component.

[0020] In the above embodiments, the third drive component can be disposed below the second transmission component via an adapter, utilizing the space between the second transmission components spaced apart along the plumb line, which helps to reduce the distance between the vacuum chamber inlet and outlet, thereby reducing the area occupied by the process equipment.

[0021] According to some embodiments of this application, the transmission mechanism further includes multiple adjustment components, each corresponding to adjust one second transmission belt. Each adjustment component includes an adjustment member and a pressure roller. The adjustment member is adjustablely connected to the vacuum chamber along the plumb line, and the pressure roller is rotatably connected to the adjustment member and presses against the outer periphery of the second transmission belt away from the second transmission wheel, and is located between the two second transmission wheels that cooperate with the second transmission belt.

[0022] In the above embodiments, the adjusting member can adjust the tension of the second transmission belt, which helps to ensure the stable operation of the second transmission assembly.

[0023] According to some embodiments of this application, the process equipment further includes multiple first chambers, multiple second chambers, and multiple gate valves. Along the inlet-to-outlet direction, the multiple first chambers, vacuum chamber, and multiple second chambers are configured as relatively independent sealed chambers, allowing a substrate-carrying carrier plate to enter sequentially. Each of the multiple first chambers is evacuated, and the vacuum pressure of the first chamber adjacent to the vacuum chamber is the same as the vacuum pressure of the vacuum chamber. Each of the multiple second chambers is evacuated, and the vacuum pressure of the second chamber adjacent to the vacuum chamber is the same as the vacuum pressure of the vacuum chamber. Adjacent first chambers are connected via gate valves, and adjacent first and second chambers are connected to the vacuum chamber via gate valves. Adjacent second chambers are connected via gate valves.

[0024] In the above embodiments, when the first and second cavities are connected to the external environment, the gas pressure is affected by the external environment. Multiple first cavities, through which the substrate enters sequentially, each evacuate a vacuum within an independent cavity. This improves the efficiency of the vacuum pressure before the substrate enters the vacuum cavity reaching the pressure value within the vacuum cavity, thereby improving process efficiency. Multiple second cavities are present; the second cavity closest to the vacuum cavity maintains the same pressure as the vacuum cavity, while the remaining second cavities are connected to the external environment, which helps ensure the pressure stability of the vacuum cavity.

[0025] According to some embodiments of this application, the process equipment further includes a loading unit, an unloading unit, and a conveyor. The loading unit is configured to transport a carrier plate exiting from the outlet to the substrate unloading point, and then continue transporting the carrier plate to the conveyor. The conveyor is configured to transport the carrier plate to the substrate loading point. The loading unit is configured to transport the carrier plate carrying the substrate into the inlet.

[0026] In the above embodiments, the conveyor enables the carrier plate to transport the empty carrier plate, after the substrate has been cut at the unloading point, to the loading point in the external environment, which helps to improve the efficiency of the process. Attached Figure Description

[0027] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings in the embodiments will be briefly described below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation on the scope.

[0028] Figure 1 This is a simplified schematic diagram of a process apparatus according to an embodiment of this application.

[0029] Figure 2 for Figure 1 The diagram shows the structural assembly of the vacuum chamber, transmission mechanism, and lifting mechanism in the process equipment shown.

[0030] Figure 3 for Figure 2 The diagram shows the structure of the lifting mechanism in the process equipment.

[0031] Figure 4 for Figure 2 The diagram shows a cross-sectional view of the process equipment along line BB.

[0032] Figure 5 for Figure 2 The diagram shows a partial enlarged view of the process equipment at point S.

[0033] Figure 6 for Figure 2 The diagram shows a cross-sectional view of the process equipment along line AA.

[0034] Key component symbols: 100, Process equipment; 10, Vacuum chamber; 101, Inlet; 20, Transmission mechanism; 21, Third drive component; 22, Conveying assembly; 221, Second transmission assembly; 2211, Second transmission wheel; 2212, Second transmission belt; 223, Roller; 23, Connector; 24, Adapter; 241, Third transmission wheel; 242, Third transmission belt; 25, Adjustment assembly; 251, Adjustment component; 252, Pressure roller; 30, Lifting mechanism; 31, Conveying assembly; 311, Main body; 312 31. Belt drive assembly; 32. Lifting assembly; 321. Screw; 322. Nut; 33. Drive assembly; 331. First drive component; 332. Second drive component; 333. First magnetohydrodynamic fluid; 34. First transmission assembly; 341. Connecting rod; 342. First transmission wheel; 343. First transmission belt; 35. First guide rail; 36. Second guide rail; 37. Slider; 38. Guide rod; 40. First cavity; 50. Second cavity; 60. Valve; 70. Loading component; 80. Unloading component; 90. Conveying component; 200. Carrier plate. Detailed Implementation

[0035] The implementation of this application will now be described with reference to the accompanying drawings in the embodiments of this application. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments.

[0036] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application.

[0037] The following detailed description of some embodiments of this application is provided in conjunction with the accompanying drawings. Unless otherwise specified, the following embodiments and features can be combined with each other.

[0038] Please see Figure 1 One embodiment of this application provides a process apparatus 100 for implementing manufacturing processes of a perovskite substrate 300, such as vacuum flash drying (VCD), hereinafter referred to as flash drying. The process apparatus 100 includes a vacuum chamber 10, multiple transfer mechanisms 20, and two lifting mechanisms 30. The substrate 300 undergoes processing operations within the vacuum chamber 10, such as flash drying, annealing, and chemical deposition. The vacuum chamber 10 is provided with an inlet 101 (e.g., ...). Figure 2(As shown in the figure) and outlet (not shown). Multiple substrates 300 can be carried on the same carrier plate 200. The carrier plate 200 enters the vacuum chamber through the inlet 101 and exits from the vacuum chamber 10 through the outlet. The process equipment can be a flash evaporation equipment, an annealing equipment, a CATCVD (catalytic chemical vapor deposition or hot filament CVD, HWCVD) equipment, etc.

[0039] Multiple transfer mechanisms 20 are spaced apart along the plumb line within the vacuum chamber 10. Each transfer mechanism 20 can carry a carrier plate 200 entering from the inlet 101 and transport the carrier plate 200 towards the outlet. Each transfer mechanism 20 can carry at least one carrier plate 200. In one embodiment, each transfer mechanism 20 can carry two carrier plates 200, and the distance between the two carrier plates 200 can be adjusted, for example, by the time difference between the successive passage of the two carrier plates 200 through the inlet 101. There are three transfer mechanisms 20, which are arranged spaced apart along the plumb line. The substrate 300 on the spaced-apart transfer mechanisms 20 undergoes processing within the vacuum chamber 10.

[0040] It is understood that in other embodiments, the number of transmission mechanisms 20 may also be two, four, five or other numbers, and each transmission mechanism 20 may also carry one, three, four, five or other numbers of carrier boards 200.

[0041] This application does not limit the number of transmission mechanisms 20 or the number of carrier plates 200 for each transmission mechanism 20.

[0042] Two lifting mechanisms 30 are positioned on opposite sides of the plurality of transfer mechanisms 20 along the direction from the inlet 101 toward the outlet. The lifting mechanism 30 closer to the inlet 101 can receive the carrier plate 200 entering from the inlet 101 and drive the carrier plate 200 up or down, so that the carrier plate 200 is opposite to any of the plurality of transfer mechanisms 20. The lifting mechanism 30 transfers the carrier plate 200 onto the transfer mechanism 20. The transfer mechanism 20 moves the carrier plate 200 toward the outlet to the lifting mechanism 30 closer to the outlet. The lifting mechanism 30 closer to the outlet drives the carrier plate 200 up or down until it is opposite to the outlet, and then transfers the carrier plate 200 through the outlet to be removed from the vacuum chamber 10.

[0043] Multiple transmission mechanisms 20 are arranged along the plumb line, which increases the amount of carrier plate 200 that the vacuum chamber 10 can accommodate, thereby increasing the number of substrates 300 that can be processed simultaneously in the vacuum chamber 10, which is beneficial to improving the processing efficiency of the substrates 300.

[0044] The process equipment 100 also includes a plurality of first chambers 40, a plurality of second chambers 50, and a plurality of valves 60. In one embodiment, the number of first chambers 40 is three and the number of second chambers 50 is two, but this is not a limitation. For example, in other embodiments, the number of first chambers 40 may be two, four, five, or other numbers; the number of second chambers 50 may also be three, four, or other numbers. Along the direction from the inlet 101 toward the outlet, the three first chambers 40, the vacuum chamber 10, and the two second chambers 50 are configured as relatively independent and sealed chambers, allowing the carrier plate 200 carrying the substrate 300 to enter sequentially.

[0045] The substrate 300, along with the carrier plate 200, sequentially enters multiple first cavities 40. Vacuuming is performed in these first cavities 40, causing the solvent and other organic matter dissolving the perovskite in the substrate 300 to evaporate, thus removing the organic matter from the substrate 300. Along the direction from the inlet 101 towards the outlet, the vacuum pressure in each of the multiple first cavities 40 increases sequentially until the vacuum pressure of the first cavity 40 closest to the vacuum chamber 10 equals the vacuum pressure of the vacuum chamber 10. When the inlet 101 of the vacuum chamber 10 is opened, the first cavity 40 is connected to the vacuum chamber 10 without any pressure difference, which helps improve the pressure stability within the vacuum chamber 10.

[0046] Multiple second cavities 50 are evacuated, and the vacuum pressure of the second cavity 50 adjacent to the vacuum cavity 10 is the same as that of the vacuum cavity 10. When the substrate 300 in the vacuum cavity 10 needs to be removed after the process is completed, the outlet is opened to connect the vacuum cavity 10 with the adjacent second cavity 50. The second cavity 50 is connected to the vacuum cavity 10 and there is no pressure difference, which helps to improve the pressure stability in the vacuum cavity 10.

[0047] Two adjacent first cavities 40 are connected via valve 60. Adjacent first cavities 40 and second cavities 50 are connected to the vacuum chamber 10 via valve 60, and adjacent second cavities 50 are connected to each other via valve 60. The first cavity 40 furthest from the vacuum chamber 10 is connected to the external environment via valve 60. Similarly, the second cavity 50 furthest from the vacuum chamber 10 is connected to the external environment via valve 60. When valve 60 of the first cavity 40 furthest from the vacuum chamber 10 is opened, the substrate 300, along with the carrier plate 200, enters the first cavity 40 from the external environment. When valve 60 of the second cavity 50 furthest from the vacuum chamber 10 is opened, the completed substrate 300, along with the carrier plate 200, is removed from the second cavity 50 to the external environment. When the first cavity 40 and the second cavity 50 are connected to the external environment, the air pressure is affected by the external environment. Multiple first cavities 40, which enter sequentially through the substrate 300, each evacuate a vacuum within its own independent chamber. This improves the efficiency of achieving the required vacuum pressure within the vacuum chamber 10 before the substrate 300 enters, thereby increasing process efficiency. Multiple second cavities 50 are present. The second cavity 50 closest to the vacuum chamber 10 maintains the same pressure as the vacuum chamber 10, while the remaining second cavities 50 are connected to the external environment, which helps ensure pressure stability within the vacuum chamber 10.

[0048] The first cavity 40 and the second cavity 50 are respectively provided with a structure for conveying the carrier plate 200 in the direction from the inlet 101 toward the outlet. For example, this structure can be a transmission mechanism 20 in the vacuum cavity 10.

[0049] In one embodiment, the process equipment 100 further includes a loading component 70, a unloading component 80, and a conveying component 90. The loading component 70 is configured to transport the carrier plate 200 exiting from the outlet to the unloading point of the substrate 300, and then continue to transport the carrier plate 200 to the conveying component 90. The conveying component 90 is configured to transport the carrier plate 200 to the loading point of the substrate 300. The loading component 70 is configured to transport the carrier plate 200 carrying the substrate 300 to the inlet 101. The substrate 300 that has completed the process at the unloading point can be removed from the process equipment 100 mechanically or manually. The unprocessed substrate 300 can be transported to the empty carrier plate 200 mechanically or manually at the loading point. The loading component 70 then loads the carrier plate 200 to the inlet 101. The lifting mechanism 30 receives the carrier plate 200 and conveys it to the transmission mechanism 20.

[0050] It is understood that in other embodiments, the loading component 70, unloading component 80 and conveying component 90 may also be omitted. The loading and unloading of the carrier plate 200 can be completed by connecting the first cavity 40, which is farthest from the vacuum cavity 10, to a loading device, and the second cavity 50, which is farthest from the vacuum cavity 10, to a unloading device, or by manual loading or unloading.

[0051] The conveyor 90 enables the carrier plate 200 to transport the empty carrier plate 200, after the substrate 300 has been cut from the unloading part 80, to the loading part in the external environment, which helps to improve the efficiency of the process.

[0052] In one embodiment, please refer to Figure 3 and Figure 4 The lifting mechanism 30 includes a conveying assembly 31, a lifting assembly 32, a drive assembly 33, and a first transmission assembly 34. The lifting assembly 32 is disposed within the vacuum chamber 10 and connected to the conveying assembly 31. The lifting assembly 32 is configured to drive the conveying assembly 31 to rise or fall, such that the conveying assembly 31 is opposite to the inlet 101 or the outlet, or any of the plurality of conveying mechanisms 20. The conveying assembly 31, driven by the drive assembly 33, conveys the carrier plate 200 along the inlet 101 toward the outlet.

[0053] In the lifting mechanism 30 near the inlet 101, the lifting component 32 drives the conveying component 31 to rise or fall along the plumb line, so that the conveying component 31 is opposite to the inlet 101. The loading component 70 or other loading structure, manual labor, etc., convey the carrier plate 200 to the conveying component 31. The lifting component 32 drives the conveying component 31 to rise or fall, so that the conveying component 31 is opposite to a transmission mechanism 20, and conveys the carrier plate 200 to the transmission mechanism 20. The transmission mechanism 20 conveys the carrier plate 200 toward the outlet, and the substrate 300 on the carrier plate 200 is processed in the vacuum chamber 10.

[0054] The substrate 300 on the carrier plate 200 enters the vacuum chamber 10 and undergoes processing on both the lifting assembly 32 and the transfer mechanism 20. Multiple carrier plates 200 enter the vacuum chamber 10 sequentially. The substrate 300 on the carrier plate 200 that spends a longer time in the vacuum chamber 10 completes its processing first and can be removed from the vacuum chamber 10 first. If the substrate 300 can complete its processing while the transfer mechanism 20 is transferring the carrier plate 200 without stopping, the substrate 300 can complete its processing without stopping on the transfer mechanism 20. It is understood that the substrate 300 can also stay on the transfer mechanism 20 for a certain period of time and then be removed from the vacuum chamber 10 after completing its processing. The transfer speed of the transfer mechanism 20, the number of transfer mechanisms 20, and the number of carrier plates 200 carried by the transfer mechanism 20 can all affect the length of time the substrate 300 on the carrier plate 200 is in the vacuum chamber 10, and thus affect the degree of processing completion of the substrate 300. This application does not impose any limitations on these aspects and they can be set according to actual requirements.

[0055] After the substrate 300 process is completed, the lifting component 32 near the exit drives the corresponding conveying component 31 to be opposite to the conveying mechanism 20 where the substrate 300 is located. The conveying mechanism 20 conveys the carrier plate 200 to the conveying component 31. The lifting component 32 drives the conveying component 31 to rise or fall, so that the selected part is opposite to the exit. The conveying component 31 conveys the carrier plate 200 through the exit and moves it to the unloading part 80 or other unloading structure.

[0056] The drive assembly 33 includes a first drive member 331. The first drive member 331 is connected to the outside of the vacuum chamber 10. A first transmission assembly 34 is movably disposed within the vacuum chamber 10. One end of a first movable member is connected to the first drive member 331, and the other end is connected to the transmission assembly 31. The first transmission assembly 34 is configured to move within the vacuum chamber 10 when the lifting assembly 32 drives the transmission assembly 31 to rise and fall, and to maintain the transmission between the first drive member 331 and the transmission assembly 31, so as to realize the transmission assembly 31 to transmit the carrier plate 200.

[0057] It is understood that in other embodiments, when the structure of the first driving member 331 is a pressure-resistant mechanism, the first driving member 331 can also be disposed inside the vacuum chamber 10. The first driving member 331 is directly connected to the transmission assembly 31, and the first transmission assembly 34 is omitted.

[0058] The first driving component 331 is disposed outside the vacuum chamber 10, which reduces the pressure resistance requirement of the first driving component 331. The first transmission component 34 moves inside the vacuum chamber 10 when the transmission component 31 is raised and lowered by the lifting component 32, thereby realizing the transmission between the first driving component 331 and the transmission component 31, and thus realizing the first driving component 331 indirectly driving the transmission component 31 to transmit the carrier plate 200.

[0059] Please continue reading. Figure 3 The first transmission assembly 34 includes a plurality of connecting rods 341, a plurality of first transmission wheels 342, and a plurality of first transmission belts 343. The plurality of connecting rods 341 are rotatably connected in sequence. One end of each connecting rod 341 is rotatably connected to the first driving member 331, and the other end is rotatably connected to the transmission assembly 31. At least two of the plurality of first transmission wheels 342 are rotatably disposed on the same connecting rod 341. One of the plurality of first transmission wheels 342 is connected to the first driving member 331 and is located at the end of the connecting rod 341 rotatably connected to the first driving member 331 near the first driving member 331. Each first transmission belt 343 engages with at least two of the transmission wheels disposed on the same connecting rod 341.

[0060] In one embodiment, there are three connecting rods 341 and three first transmission belts 343, and four first transmission pulleys 342, but this is not limited to these. The three connecting rods 341 are rotatably connected in sequence, and every two first transmission pulleys 342 are rotatably mounted on the connecting rods 341. Two adjacent first transmission belts 343 share one first transmission pulley 342 at the junction of the corresponding two connecting rods 341.

[0061] For clarity, the links 341 are sequentially designated as first, second, and third. The first link 341 is rotatably connected to the first drive member 331, and the third link 341 is rotatably connected to the transmission assembly 31. The first drive member 331 drives the first transmission wheel 342 mounted on the first link 341 to rotate, which in turn drives the corresponding first transmission belt 343 to rotate. This causes the first transmission wheel 342, which is mounted on both the first and second links 341, to rotate, which in turn drives the first transmission belt 343, which is mounted on both the second and third links 341, to rotate. The rotation of the first transmission belt 343 on the third link 341 causes another first transmission wheel 342 mounted on the third link 341 to rotate. This first transmission wheel 342 is connected to the transmission assembly 31, thereby driving the transmission assembly 31 to operate.

[0062] When the lifting assembly 32 drives the conveying assembly 31 to rise or fall along the plumb line, the connecting rod 341 rotates relative to the first driving member 331, rotates between two adjacent connecting rods 341, and rotates relative to the conveying assembly 31. This enables the connecting rod 341 to move relative to the vacuum cavity 10 to accommodate the movement of the conveying assembly 31 relative to the first driving member 331. At the same time, through the cooperation of the first transmission belt 343 and the first transmission wheel 342 on the connecting rod 341, the conveying assembly 31 conveys the carrier plate 200.

[0063] In one embodiment, the shaft of the first transmission wheel 342 is coaxial with the shaft of the connecting rod 341, wherein the shaft of the connecting rod 341 is either the shaft of the connecting rod 341 rotatably connected to the shaft of the first driving member 331, the shaft of the two connecting rods 341 rotatably connected, or the shaft of the connecting rod 341 rotatably connected to the shaft of the transmission assembly 31. It is understood that in other embodiments, even when the shaft of the first transmission wheel 342 is not coaxial with the shaft of the connecting rod 341, the first transmission assembly 34 can still maintain the transmission between the first driving member 331 and the transmission assembly 31.

[0064] It is understood that the number of connecting rods 341, first transmission wheels 342 and first transmission belts 343 can also be other numbers. For example, three first transmission wheels 342 are provided on the connecting rod 341 connected to the first driving member 331, of which two first transmission wheels 342 are coaxially rotatably connected to the connecting rod 341; four first transmission belts 343 are provided on the connecting rod 341 connecting the two connecting rods 341.

[0065] In one embodiment, the lifting mechanism 30 further includes a first guide rail 35, a plurality of second guide rails 36 arranged sequentially at intervals along the plumb line, and a plurality of sliders 37. The first guide rail 35 is disposed on the inner wall of the vacuum chamber 10. The extending direction of each second guide rail 36 intersects the extending direction of the first guide rail 35, for example, perpendicularly. Each second guide rail 36 is slidably disposed on the first guide rail 35. The plurality of sliders 37 are slidably connected to the second guide rails 36 one-to-one and rotatably connected to the rotatable connection points of two adjacent connecting rods 341.

[0066] In one embodiment, there are two first guide rails 35, but this is not a limitation. Each guide rail is slidably connected to two first guide rails 35. It is understood that in other embodiments, the number of first guide rails 35 and second guide rails 36 can be set to other numbers as needed.

[0067] When multiple links 341 are driven by the transmission assembly 31, two links 341 rotate relative to each other, or links 341 rotate relative to the first drive member 331 and the transmission assembly 31, the links 341 slide along the second guide rail 36 with the slider 37, and the movement of the links 341 moves along a set route, reducing the unrestrained movement of the links 341 and improving the transmission stability of the first transmission assembly 34.

[0068] Please see Figure 3 and Figure 4 In one embodiment, the drive assembly 33 further includes a second drive member 332. The second drive member 332 is connected to the vacuum chamber 10. The lifting assembly 32 includes a screw 321 and a nut 322. The screw 321 extends in the plumb direction and is connected to the second drive member 332, which is configured to drive the screw 321 to rotate. The nut 322 is connected to the conveying assembly 31 and cooperates with the screw 321, and drives the conveying assembly 31 to move in the plumb direction when the screw 321 rotates.

[0069] The second driving component 332 drives the screw 321 to rotate, causing the nut 322 to drive the transmission component 31 to rise or fall, thus realizing the lifting component 32 driving the transmission component 31 to rise and fall to dock with the transmission mechanism 20.

[0070] To ensure stable movement, the lifting mechanism 30 also includes a plurality of guide rods 38 spaced apart. The transmission assembly 31 is slidably mounted on each guide rod 38.

[0071] In one embodiment, the first driving member 331 and the second driving member 332 are respectively located outside the vacuum chamber 10. The vacuum chamber 10 is provided with two through holes (not shown) corresponding to each lifting mechanism 30. A portion of the first driving member 331 passes through one of the two through holes to cooperate with the first transmission assembly 34, and a portion of the second driving member 332 passes through the other of the two through holes to cooperate with the first transmission assembly 34. The driving assembly 33 also includes two first magnetofluids 333, one of which is connected to the first driving member 331 and seals the corresponding through hole. The other of the two first magnetofluids 333 is connected to the second driving member 332 and seals the corresponding through hole.

[0072] The first driving element 331 and the second driving element 332 are located outside the vacuum chamber 10, which reduces the pressure resistance requirements of the first driving element 331 and the second driving element 332. The through hole allows the driving transmission of the first driving element 331 and the second driving element 332 to the vacuum chamber 10. The first magnetic fluid 333 seals the through hole, which improves the sealing performance of the vacuum chamber 10 and helps to ensure the process effect.

[0073] like Figure 3 As shown, the conveying assembly 31 includes a main body 311 and at least one set of belt drive assemblies 312. The belt drive assemblies 312 are disposed on the main body 311, and the main body 311 is connected to the lifting assembly 32. Specifically, the main body 311 is connected to a nut 322. In one embodiment, there are two belt drive assemblies 312. The two belt drive assemblies 312 are connected to each other, one of which is connected to the first transmission assembly 34, and the other is used to carry the carrier plate 200. The first transmission wheel 342 of the first transmission assembly 34 rotates, thereby driving the two belt drive assemblies 312 to rotate in sequence, thus realizing the conveying of the carrier plate 200.

[0074] Please see Figure 2 and Figure 5 and Figure 6 In one embodiment, the transmission mechanism 20 includes a plurality of third driving members 21, two conveying assemblies 22, and a plurality of connecting members 23. The plurality of third driving members 21 are spaced apart outside the vacuum chamber along a plumb line. The two conveying assemblies 22 are positioned on opposite sides of the vacuum chamber 10. Each conveying assembly 22 includes a plurality of second transmission assemblies 221 and a plurality of rollers 223. The second transmission assemblies 221 are located outside the vacuum chamber 10 and arranged along a plumb line. The plurality of rollers 223 are located inside the vacuum chamber 10.

[0075] The second transmission assembly 221 includes a plurality of second transmission wheels 2211 and a plurality of second transmission belts 2212, with a plurality of rollers 223 connected one-to-one to the second transmission wheels 2211. The plurality of second transmission wheels 2211 are arranged at intervals along the direction from the inlet 101 toward the outlet. Every two adjacent second transmission wheels 2211 engage with one second transmission belt 2212. A connecting member 23 connects between two conveying assemblies 22 to enable the two conveying assemblies 22 to move synchronously, and the second transmission wheel 2211 of one of the two conveying assemblies 22 is connected to a third drive member 21.

[0076] The first drive member 331, the second drive member 332, and the third drive member 21 may employ a motor, or a combination of a motor and a belt drive, but are not limited thereto. For example, in other embodiments, the first drive member 331, the second drive member 332, and the third drive member 21 may also be hydraulic or pneumatic drive structures.

[0077] Two second transmission wheels 2211 and one second transmission belt 2212 form a belt drive structure, and each pair of adjacent second transmission belts 2212 are connected to the same second transmission wheel 2211, so that multiple second transmission wheels 2211 in the second transmission assembly 221 rotate synchronously under the drive of a third driving member 21, and the rollers 223 located in the vacuum chamber 10 rotate synchronously under the drive of the corresponding second transmission wheel 2211. The rollers 223 located on both sides of the vacuum chamber 10 rotate synchronously under the drive of the connecting member 23, thereby realizing the transmission of the carrier plate 200 on the rollers 223 on both sides of the spaced vacuum chamber 10.

[0078] In one embodiment, please refer to Figure 5 The transmission mechanism 20 also includes multiple adapters 24 disposed on both sides of the vacuum chamber 10. Each adapter 24 is connected to a corresponding second transmission assembly 221 of the two conveying assemblies 22. Each adapter 24 includes a third transmission wheel 241 and a third transmission belt 242. The third transmission wheel 241 is located below one end of the second transmission assembly 221 along the plumb line, and the third transmission belt 242 engages with the third transmission wheel 241 and a second transmission wheel 2211 located at the end of one of the second transmission assemblies 221. A connecting member 23 connects to the third transmission wheels 241 of the two adapters 24 on opposite sides. The third transmission wheel 241 located on one side of the vacuum chamber 10 is connected to a third drive member 21.

[0079] The third drive component 21 can be positioned below the second transmission component 221 via the adapter 24, utilizing the space between the second transmission components 221 spaced apart along the plumb line. This helps to reduce the distance between the inlet 101 and outlet of the vacuum chamber 10, thereby reducing the area occupied by the process equipment 100.

[0080] In one embodiment, please refer to Figure 5The transmission mechanism 20 also includes multiple adjustment components 25, each adjustment component 25 corresponding to an adjustment of a second transmission belt 2212. The adjustment component 25 includes an adjustment member 251 and a pressure roller 252. The adjustment member 251 is adjustablely connected to the vacuum chamber 10 along the plumb line, and the pressure roller 252 is rotatably connected to the adjustment member 251 and presses against the outer periphery of the second transmission belt 2212 away from the second transmission wheel 2211, and is located between the two second transmission wheels 2211 that cooperate with the second transmission belt 2212.

[0081] The adjusting component 251 can adjust the tension of the second transmission belt 2212, which helps to ensure the stable operation of the second transmission assembly 221.

[0082] It is understood that in other embodiments, the adjustment component 25 may also be omitted.

[0083] The aforementioned process equipment 100 uses a lifting mechanism 30 to deliver the carrier plate 200 to a transmission mechanism 20 at different heights along the plumb line. The transmission mechanism 20 can carry multiple carrier plates 200, thereby increasing the number of flash-evaporated substrates 300 that can be accommodated in the space between the inlet 101 and the outlet of the vacuum chamber 10. This solves the problem of the large footprint of the process equipment 100 when the number of substrates 300 in a single-layer linearly arranged chamber is simultaneously processed in the prior art.

[0084] The above embodiments are only used to illustrate the technical solutions of this application and are not intended to limit it. Although this application has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solutions of this application without departing from the spirit and substance of the technical solutions of this application.

Claims

1. A process apparatus for processing a substrate, comprising: A vacuum chamber, having an inlet and an outlet; characterized in that the process equipment further includes: Multiple transmission mechanisms are spaced apart within the vacuum cavity along the direction of the plumb bob; and Two lifting mechanisms, one of which is configured to convey a carrier plate carrying the substrate entering from the inlet to any one of the plurality of transmission mechanisms, and the other of which is configured to convey the carrier plate carried by any one of the plurality of transmission mechanisms to the outlet.

2. The process equipment as described in claim 1, characterized in that, The lifting mechanism includes: Transmission component; A lifting assembly is connected to the vacuum chamber and the conveying assembly, and is configured to drive the conveying assembly to rise or fall so that the conveying assembly docks with the inlet, the outlet and any one of the plurality of the conveying mechanisms; The drive assembly includes a first drive element, which is connected to the vacuum chamber; The first transmission component is movably disposed within the vacuum cavity, with one end connected to the first driving member and the other end connected to the transmission component; The first transmission component is configured to move within the vacuum cavity when the lifting component drives the conveying component to move up and down, and to maintain the transmission between the first drive component and the conveying component to realize the carrier plate of the conveying component.

3. The process equipment as described in claim 2, characterized in that, The first transmission assembly includes: Multiple links are rotatably connected to each other in sequence, and one end of each link is rotatably connected to the first drive member, and the other end is rotatably connected to the transmission assembly; A plurality of first transmission wheels, at least two of which are rotatably mounted on the same connecting rod; one of the plurality of first transmission wheels is connected to the first driving member and is located at the end of the connecting rod rotatably connected to the first driving member near the first driving member; and A plurality of first drive belts, each of the first drive belts engaging with at least two first drive pulleys disposed on the same connecting rod.

4. The process equipment as described in claim 3, characterized in that, The lifting mechanism also includes: A first guide rail is disposed in the vacuum cavity; A plurality of second guide rails are arranged at intervals along the direction of the plumb bob, each second guide rail extending in a direction intersecting the extension direction of the first guide rail, and slidably disposed on the first guide rail; and Multiple sliders are slidably connected to the second guide rail in a one-to-one correspondence, and are rotatably connected to the rotatable connection points of two adjacent connecting rods.

5. The process equipment as described in any one of claims 2 to 4, characterized in that, The drive assembly further includes a second drive element, which is connected to the vacuum cavity; The lifting assembly includes: A screw, extending along the direction of the plumb bob, and connected to the second drive member, the second drive member being configured to drive the screw to rotate; and The nut is connected to the conveying assembly and cooperates with the screw, and drives the conveying assembly to move along the direction of the plumb bob when the screw rotates.

6. The process equipment as described in claim 5, characterized in that, The first driving member and the second driving member are respectively located outside the vacuum chamber; The vacuum chamber is provided with two through holes corresponding to each of the lifting mechanisms. A portion of the first driving member passes through one of the two through holes to cooperate with the first transmission assembly, and a portion of the second driving member passes through the other of the two through holes to cooperate with the first transmission assembly. The drive assembly further includes two first magnetic fluids, one of which is connected to the first drive member and seals the corresponding through hole; the other of the two first magnetic fluids is connected to the second drive member and seals the corresponding through hole.

7. The process equipment as described in any one of claims 2 to 4, characterized in that, The transmission mechanism includes multiple third driving elements, two conveying assemblies, and multiple connecting elements. The multiple third driving elements are connected to the outside of the vacuum cavity at intervals along the direction of the plumb bob. The two sets of conveying assemblies are respectively placed on opposite sides of the vacuum cavity. The conveying assembly includes multiple second transmission assemblies located outside the vacuum chamber and arranged along the direction of the plumb bob, and multiple rollers located inside the vacuum chamber; The second transmission assembly includes a plurality of second transmission wheels and a plurality of second transmission belts, with each of the rollers connected to a second transmission wheel; the plurality of second transmission wheels are spaced apart along the direction from the inlet to the outlet; each pair of adjacent second transmission wheels is engaged with a second transmission belt; The connector is connected between the two conveying components to enable the two conveying components to move synchronously, and the second drive wheel of one of the two conveying components is connected to the third drive component.

8. The process equipment as described in claim 7, characterized in that: The transmission mechanism also includes multiple adapters disposed on both sides of the vacuum cavity, and the multiple adapters are connected one-to-one to the multiple second transmission components of the two conveying components; The adapter includes a third drive wheel and a third drive belt. The third drive wheel is located below one end of the second transmission assembly along the direction of the plumb bob. The third drive belt cooperates with the third drive wheel and a second drive wheel located at one end of the second transmission assembly. The connector connects the third drive wheels of the two adapters on opposite sides. The third drive wheel located on one side of the vacuum chamber is connected to the third drive member.

9. The process equipment as described in claim 8, characterized in that: The transmission mechanism further includes multiple adjustment components, each of which adjusts one of the second transmission belts. The adjustment assembly includes an adjustment member and a pressure roller. The adjustment member is adjustablely connected to the vacuum cavity along the direction of the plumb bob. The pressure roller is rotatably connected to the adjustment member and presses against the outer periphery of the second transmission belt away from the second transmission wheel, and is located between the two second transmission wheels that cooperate with the second transmission belt.

10. The process equipment as described in any one of claims 2 to 4, characterized in that: The process equipment also includes multiple first cavities, multiple second cavities, and multiple valves; along the direction from the inlet to the outlet, the multiple first cavities, the vacuum cavity, and the multiple second cavities are configured as relatively independent sealed cavities, allowing the carrier plate carrying the substrate to enter sequentially; The plurality of first cavities are evacuated, and the vacuum pressure of the first cavity adjacent to the vacuum cavity is the same as the vacuum pressure of the vacuum cavity; the plurality of second cavities are evacuated, and the vacuum pressure of the second cavity adjacent to the vacuum cavity is the same as the vacuum pressure of the vacuum cavity. The two adjacent first cavities are connected to each other via the gate valve, and the adjacent first cavities and second cavities are connected to the vacuum cavity via the gate valve; the adjacent second cavities are connected to each other via the gate valve.

11. The process equipment as described in any one of claims 2 to 4, used for a flash evaporation process, characterized in that, The process equipment also includes a loading component, a unloading component, and a conveying component; The loading component is configured to transport the carrier plate exiting from the outlet to the unloading point of the substrate, and continue to transport the carrier plate to the conveyor. The conveyor is configured to transport the carrier plate to the loading point of the substrate; The loading component is configured to transport the carrier plate carrying the substrate into the inlet.

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