A wet processing machine

Abstract

This application discloses a wet process apparatus, comprising: a chemical reaction assembly, the chemical reaction assembly including: a chemical tank, used as a reaction vessel for the wet process; a dispensing tank, which is communicatively connected to the chemical tank and is used to prepare the chemical solution for the wet process; a valve unit, which controls the communication state between the dispensing tank and the chemical tank, so that when the chemical tank needs the chemical solution, the chemical solution in the dispensing tank can be delivered to the chemical tank; a feed supply assembly, which is connected to the chemical tank and the dispensing tank and is used to provide chemical solution feed to the chemical tank and the dispensing tank respectively; and a control unit, which is communicatively connected to the chemical tank, the valve unit and the feed supply assembly, and is used to control the operating state of the wet process apparatus. The wet process apparatus of this application can shorten the time required for changing chemical solutions during the process.

Description

Technical Field

[0001] This application relates to the field of semiconductor manufacturing, and more particularly to a wet processing machine. Background Technology

[0002] In the wet process, impurities can become introduced into the chemical solution as the process progresses. The accumulation of these impurities can affect the stability of the process and the quality of the product. Therefore, it is necessary to replace the chemical solution in the wet process regularly to maintain its purity and ensure the reliability of the production process and the yield of the product.

[0003] When changing the chemical solution, the chemical solution tank must be emptied first, and then the chemical solution is prepared in the emptied reaction tank. For example, a common chemical solution preparation procedure is as follows: First, add about 3 / 4 of hot water to the reaction tank; then, add the chemical to the reaction tank; finally, add the remaining 1 / 4 of hot water to the reaction tank and turn on the circulating stirring system to fully mix the chemical solution.

[0004] During the preparation of the medicine solution, the output of hot water is affected due to the limited power of the instant hot water machine. Therefore, it takes a long time to add enough hot water, prepare the medicine solution, and replace the medicine solution, which seriously affects the overall efficiency of the production line. Utility Model Content

[0005] This application discloses a wet processing machine that can shorten the downtime required to change the chemical solution during the wet processing, thereby improving the equipment uptime and the overall efficiency of the production line.

[0006] To achieve the above objectives, in a first aspect, embodiments of this application disclose a wet processing machine, the wet processing machine comprising:

[0007] Drug reaction assembly, the drug reaction assembly comprising:

[0008] A chemical solution tank is used as a reaction vessel in wet processes.

[0009] A solution preparation tank, which can be connected to the drug solution tank, is used to prepare the drug solution for the wet process;

[0010] A valve unit is provided to control the connection between the dispensing tank and the medicine tank, so that when the medicine tank needs the medicine, the medicine in the dispensing tank can be delivered to the medicine tank.

[0011] A dispensing supply assembly, connected to the drug solution tank and the dispensing tank, for supplying drug solution ingredients to the drug solution tank and the dispensing tank respectively; and

[0012] The control unit is communicatively connected to the liquid tank, the valve unit, and the ingredient supply assembly, and is used to control the operating status of the wet processing machine.

[0013] Optionally, the height of the solution preparation tank is higher than the height of the drug solution tank.

[0014] Optionally, the drug reaction assembly further includes a drive pump, which is disposed in the valve unit and is used to drive the drug solution to flow from the dispensing tank to the drug tank. The drive pump is communicatively connected to the control unit.

[0015] Optionally, the drug reaction assembly further includes a circulation device.

[0016] The circulation device includes:

[0017] A circulation pipeline, the two ends of which are respectively connected to different positions within the liquid preparation tank;

[0018] A circulation pump, disposed in the circulation pipeline, is used to drive the liquid to flow along the circulation pipeline to accelerate the movement of the liquid in the liquid distribution tank, wherein the circulation pump is communicatively connected to the control unit.

[0019] Optionally, the drug reaction assembly further includes a heating device, which is disposed in the circulation pipeline and is used to directly heat the liquid flowing through the circulation pipeline. The heating device is communicatively connected to the control unit.

[0020] Optionally, the ingredient supply component includes:

[0021] A chemical supply unit, connected to the drug solution tank and the dispensing tank, is used to supply chemicals to the drug solution tank and the dispensing tank respectively;

[0022] A water supply unit is connected to the medicine tank and the solution preparation tank, and is used to supply water to the medicine tank and the solution preparation tank respectively.

[0023] Optionally, the chemical supply unit includes:

[0024] A first chemical pipeline, comprising at least two first sub-chemical pipelines, each of which is connected to the liquid tank and is used to supply different chemicals to the liquid tank;

[0025] The second chemical pipeline includes at least two second sub-chemical pipelines, each of which is connected to the mixing tank for supplying different chemicals to the mixing tank.

[0026] The water supply unit includes:

[0027] A first water supply pipe is connected to the medicine tank and is used to supply water to the medicine tank;

[0028] The second water supply pipe is connected to the liquid mixing tank and is used to supply water to the liquid mixing tank.

[0029] Optionally, the second water supply pipeline includes a second hot water pipeline and a second cold water pipeline, both of which are connected to the liquid distribution tank.

[0030] Optionally, the liquid preparation tank is equipped with at least one of a magnetostrictive level gauge, a temperature sensor, and a leakage detection device.

[0031] The magnetostrictive level gauge is communicatively connected to the control unit and is used to monitor the liquid level in the liquid dispensing tank.

[0032] The temperature sensor is communicatively connected to the control unit and is used to detect the temperature of the liquid in the liquid mixing tank;

[0033] The leakage detection device is communicatively connected to the control unit and is used to detect leaks in the liquid preparation tank. The leakage detection device includes:

[0034] A tray for holding the dispensing tank;

[0035] A liquid level sensor is installed in the tray and is communicatively connected to the control unit. The liquid level sensor is used to detect the liquid level in the tray, thereby detecting leakage in the liquid dispensing tank.

[0036] Optionally, the drug reaction assembly includes at least two drug tanks and at least two dispensing tanks, and each dispensing tank can be connected to one or more drug tanks.

[0037] Compared with the prior art, the beneficial effects of this application are at least as follows:

[0038] In the wet processing apparatus of this application embodiment, a chemical reaction assembly, a dispensing assembly, and a control unit are provided, comprising a chemical solution tank, a dispensing tank, and a valve unit. The chemical solution tank and the dispensing tank are communicatively connected. Based on the communication control of the valve unit by the control unit, communication and isolation between the chemical solution tank and the dispensing tank can be achieved. Furthermore, the dispensing tank is connected to the dispensing assembly. When the dispensing tank and the chemical solution tank are isolated, the chemical solution can be independently prepared in the dispensing tank by relying on the communication control of the dispensing assembly by the control unit. When the dispensing tank and the chemical solution tank are connected, the prepared chemical solution in the dispensing tank can be transported to the chemical solution tank for subsequent process reactions. Thus, chemical solution preparation can be performed simultaneously during the wet process reaction in the chemical solution tank, saving the time required for chemical solution preparation during chemical solution changeovers. Through these methods, the time spent changing chemical solutions during the process can be reduced. Furthermore, in the case of a series of sequential wet process reactions, if the replacement time of the reagents in the preceding wet process reaction is shortened and the reagents in the subsequent wet process reaction have not yet expired, then it is not necessary to replace all the reagents in the wet process reaction at the same time as replacing the reagents in one of the wet process reactions. This greatly shortens the downtime for reagent replacement, thereby improving the uptime of the wet processing machine and the overall efficiency of the production line. Attached Figure Description

[0039] To more clearly illustrate the technical solutions in the embodiments of this application, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0040] Figure 1 This is a schematic diagram of a wet processing machine according to an embodiment of this application;

[0041] Figure 2 This is a schematic diagram of another wet processing machine according to an embodiment of this application;

[0042] Figure 3 This is a schematic diagram of a third type of wet processing machine according to an embodiment of this application.

[0043] Explanation of reference numerals in the attached figures:

[0044] 100-Wet process machine; 10-Reaction assembly; 11-Reaction tank; 12-Dispensing tank; 13-Valve unit; 14-Drive pump; 151-Circulation pipeline; 152-Circulation pump; 161-Reaction tank circulation pipeline; 162-Reaction tank circulation pump; 17-Heating device; 18-Reaction tank heating device; 20-Ingredient supply assembly; 21-Chemical supply unit; 2110-First sub-chemical pipeline; 2120-Second sub-chemical pipeline; 22-Water supply unit; 221-First water supply pipeline; 2211-First hot water pipeline; 2212-First cold water pipeline; 222-Second water supply pipeline; 2221-Second hot water pipeline; 2222-Second cold water pipeline. Detailed Implementation

[0045] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of this utility model.

[0046] In this invention, the terms "upper," "lower," "left," "right," "front," "rear," "top," "bottom," "inner," "outer," "vertical," "horizontal," "lateral," and "longitudinal" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. These terms are primarily for the purpose of better describing this application and its embodiments, and are not intended to limit the indicated device, element, or component to having a specific orientation, or to be constructed and operated in a specific orientation.

[0047] Furthermore, in addition to indicating direction or positional relationship, some of the aforementioned terms may also have other meanings. For example, the term "above" may also be used in some cases to indicate a certain dependency or connection relationship. Those skilled in the art can understand the specific meaning of these terms in this utility model according to the specific circumstances.

[0048] Furthermore, the terms "installation," "setup," "equipped with," "connection," and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral structure; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium, or an internal connection between two devices, components, or parts. Those skilled in the art can understand the specific meaning of these terms in this application based on the specific circumstances.

[0049] Furthermore, the terms "first," "second," etc., are primarily used to distinguish different devices, elements, or components (which may be the same or different in specific type and construction), and are not intended to indicate or imply the relative importance or quantity of the indicated devices, elements, or components. Unless otherwise stated, "a plurality of" means two or more.

[0050] To prevent a decrease in product yield due to impurities in the chemical solution during the wet process, the chemical solution typically needs to be replaced periodically. Replacing the chemical solution requires stopping the machine and preparing the solution in the tank. Since this preparation involves injecting a large amount of hot water into the tank, the entire process is time-consuming, resulting in extended downtime and impacting the overall efficiency of the production line.

[0051] To solve the above problems, such as Figure 1 As shown, this application proposes a wet process apparatus 100, including: a liquid reaction assembly 10, a feed supply assembly 20, and a control unit (not shown).

[0052] The chemical reaction assembly 10 includes: a chemical tank 11, which serves as a reaction vessel for a wet process; a dispensing tank 12, which is connected to the chemical tank 11 and is used to prepare the chemical solution for the wet process; and a valve unit 13, which controls the connection between the dispensing tank 12 and the chemical tank 11, so that when the chemical tank 11 needs chemical solution, the chemical solution in the dispensing tank 12 can be delivered to the chemical tank 11.

[0053] The size of the reagent tank 11, which serves as the container for the wet process reaction, is not specifically required, but it should be able to match the size of the silicon wafers and baskets to be processed in the wet process, ensuring sufficient space for the reagent circulation while fully accommodating the silicon wafers or baskets. The dispensing tank 12, which serves as the container for dispensing the reagents required for the reaction in the reagent tank 11, should be sized to at least accommodate the reagents within the reagent tank 11.

[0054] There are no specific requirements for the shape of the medicine tank 11 and the dispensing tank 12; they can be cuboid or approximately cuboid. The top edge and the connection between the bottom and the side walls of the tank can be rounded and smoothly transitioned, and the inner wall can be smooth to reduce the occurrence of medicine residue, particle deposition, or air bubble retention. Since expired medicine needs to be discharged from the medicine tank 11 when changing the medicine, the bottom of the medicine tank 11 can be sloped, and a medicine discharge port is provided at the lowest point.

[0055] Since both the chemical solution tank 11 and the solution mixing tank 12 are in direct contact with the highly corrosive chemicals used in the wet process, the materials used in these tanks must possess strong chemical stability. Specifically, the chemical solution tank 11 and the solution mixing tank 12 can be made of materials such as polypropylene, polyethylene, and quartz, which will not be listed here.

[0056] Optionally, both the medicine tank 11 and the dispensing tank 12 can be configured as a main tank and a secondary tank that are connected internally and externally. The main tank is located inside the secondary tank, with its sidewall slightly lower than the side plate of the secondary tank and equipped with an overflow device. If the liquid level in the main tank is too high, the medicine in the main tank can flow into the secondary tank through the overflow device to buffer changes in pressure and liquid level within the containers and reduce safety risks.

[0057] Specifically, the solution preparation tank 12 and the medicine solution tank 11 can be connected, and their connection is controlled by a valve unit 13 on their respective pathways. When the valve unit 13 is open, the solution preparation tank 12 and the medicine solution tank 11 are connected; when the valve unit 13 is closed, the solution preparation tank 12 and the medicine solution tank 11 are isolated from each other. The valve unit 13 can be a pneumatic diaphragm valve, a pneumatic bellows valve, etc., as long as it can achieve the purpose of controlling the connection between the solution preparation tank 12 and the medicine solution tank 11. Its structure and driving method are not specifically limited here.

[0058] The ingredient supply component 20 is connected to the liquid tank 11 and the dispensing tank 12, and is used to supply liquid ingredients to the liquid tank 11 and the dispensing tank 12 respectively.

[0059] The ingredient supply assembly 20 may include pipes and valves for supplying medicine ingredients to the medicine tank 11 and the dispensing tank 12.

[0060] The control unit is communicatively connected to the liquid tank 11, the valve unit 13 and the feed supply assembly 20, and is used to control the operating status of the wet processing machine 100.

[0061] For example, when changing the medicine solution, the control unit can first control the ingredient supply component 20 to add a specific amount of medicine solution to the preparation tank 12 at a specific time; then, at a specific time, control the valve unit 13 to transport the prepared medicine solution from the preparation tank 12 to the medicine tank 11. Alternatively, the control unit can also control the process in progress within the medicine tank 11 by controlling the medicine tank 11.

[0062] In the wet processing machine 100 provided in this embodiment, the chemical solution tank 11 and the mixing tank 12 are connected. Based on the communication control of the control unit to the valve unit 13, the connection and isolation between the chemical solution tank 11 and the mixing tank 12 can be realized. Furthermore, the mixing tank 12 is connected to the feeding supply component 20. When the mixing tank 12 and the chemical solution tank 11 are isolated from each other, the chemical solution can be independently prepared in the mixing tank 12 by relying on the communication control of the control unit to the feeding supply component 20. When the mixing tank 12 and the chemical solution tank 11 are connected, the prepared chemical solution in the mixing tank 12 can be transported to the chemical solution tank 11 for subsequent process reactions. Thus, it is possible to simultaneously prepare the chemical solution while the wet process reaction is being carried out in the chemical solution tank 11, saving the time required for chemical solution preparation during chemical solution replacement. Through the above methods, the time spent on chemical solution replacement during the process can be reduced. Furthermore, in the case of a series of sequential wet process reactions, if the replacement time of the reagents in the preceding wet process reaction is shortened and the reagents in the subsequent wet process reaction have not yet expired, then it is not necessary to replace all the reagents in the wet process reaction at the same time as replacing the reagents in one of the wet process reactions. This greatly shortens the downtime for reagent replacement, thereby improving the uptime of the wet processing machine 100 and the overall efficiency of the production line.

[0063] When the medicine solution in the preparation tank 12 is prepared and the medicine solution tank 11 needs the medicine solution, the valve unit 13 can be opened by the control unit to connect the medicine solution tank 11 and the preparation tank 12. The medicine solution can be transferred by gravity flow, pumping, or air pressure transmission.

[0064] As one optional implementation method, such as Figure 1 As shown, the height of the solution preparation tank 12 is higher than the height of the medicine solution tank 11.

[0065] At this point, the bottom of the mixing tank 12 can be sloped, and a liquid discharge port is provided at the lowest point to facilitate the discharge of the liquid from the mixing tank 12 to the liquid tank 11. Since the height of the mixing tank 12 is set higher than that of the liquid tank 11, the liquid in the mixing tank 12 can be transported from the mixing tank 12 to the liquid tank 11 under the action of gravity. By setting different heights, the liquid can be transferred from the mixing tank 12 to the liquid tank 11 without energy consumption.

[0066] In another alternative implementation, such as Figure 2As shown, the drug reaction assembly 10 also includes a drive pump 14, which is located in the valve unit 13 and is used to drive the drug solution from the mixing tank 12 to the drug solution tank 11. The drive pump 14 is communicatively connected to the control unit. By installing the drive pump 14 in the valve unit 13, when the mixing tank 12 and the drug solution tank 11 are set at the same height, all the drug solution prepared in the mixing tank 12 can be transported to the drug solution tank 11.

[0067] When preparing the drug solution, firstly, under the control of the control unit, the ingredient supply component 20 adds the drug solution ingredients to the solution tank 12 in a certain time and order. Then, the liquid in the solution tank 11 needs to be thoroughly stirred. Only after the various chemicals in the solution have fully reacted can it be transported to the solution tank 11 as the prepared drug solution for use in the process.

[0068] Optional, such as Figure 3 As described above, in the wet processing machine 100 of this application embodiment, the liquid reaction component further includes a circulation device.

[0069] Specifically, the circulation device includes: a circulation pipeline 151, with both ends of the circulation pipeline 151 connected to different positions within the liquid preparation tank 12; and a circulation pump 152, which is installed in the circulation pipeline 151 and is used to drive the liquid to flow along the circulation pipeline 151 to accelerate the movement of the liquid within the liquid preparation tank 12. The circulation pump 152 is communicatively connected to the control unit.

[0070] There are no specific requirements for the positions of the two ends of the circulation pipeline 151 that connect to the liquid mixing tank 12, the best position is one that can achieve the maximum acceleration of the liquid in the liquid mixing tank 12.

[0071] By placing the circulation pipeline 151 equipped with the circulation pump 152 at different positions within the liquid preparation tank 12, the liquid in the circulation pipeline 151 can be driven to flow along the pipeline, accelerating the circulation of the liquid within the liquid preparation tank 12. This serves to stir the liquid within the liquid preparation tank 12, promoting the full reaction of various chemicals in the liquid solution and ensuring that it meets the standards for use in the process.

[0072] Similarly, such as Figure 3 As shown, in the wet processing machine 100 of this application embodiment, a liquid tank circulation device can also be provided for the liquid tank. Specifically, the liquid tank circulation device may include a liquid tank circulation pipeline 161 and a liquid tank circulation pump 162 provided in the liquid tank circulation pipeline 161.

[0073] Some wet process reactions require the reagent solution to be maintained at a relatively high temperature during the process. However, due to the long preparation time of the reagent solution, it may cool naturally during the preparation process and fail to reach the temperature required by the process. Therefore, the prepared reagent solution needs to be heated to the required temperature before it can be transferred to the reagent solution tank 11 for use in the process.

[0074] Correspondingly, as an optional approach, such as Figure 3 As shown, the drug reaction assembly also includes a heating device 17, which is disposed in the circulation pipeline 151 and is used to directly heat the liquid flowing through the circulation pipeline 151. The heating device 17 is communicatively connected to the control unit.

[0075] Specifically, the heating device 17 can be an immersion resistance heater with a heating wire, or other heating devices that use electromagnetic induction or microwaves. No specific limitations are placed on the specific structure and type of the heating device 17. The control unit is communicatively connected to the heating device 17 and can control the start-up time and heating temperature of the heating device 17 to ensure that the liquid in the dispensing tank 12 meets the temperature requirements of the process.

[0076] Similarly, such as Figure 3 As shown, in the wet processing machine 100 of this application embodiment, a corresponding liquid tank heating device 18 can also be provided for the liquid tank 11.

[0077] Optional, such as Figure 3 As shown, the ingredient supply component 20 includes:

[0078] Chemical supply unit 21 is connected to liquid tank 11 and liquid preparation tank 12, and is used to supply chemicals to liquid tank 11 and liquid preparation tank 12 respectively.

[0079] Water supply unit 22 is connected to medicine tank 11 and liquid preparation tank 12, and is used to supply water to medicine tank 11 and liquid preparation tank 12 respectively.

[0080] The ingredient supply assembly 20 can be equipped with a chemical supply unit 21 and a water supply unit 22 for the raw materials required to prepare the pharmaceutical solution. The chemical supply unit 21 and the water supply unit 22 can be equipped with pipes and valves of different sizes and materials according to the corrosiveness, temperature and dosage requirements of the chemicals and water, so as to add various pharmaceutical ingredients to the pharmaceutical solution tank 11 and the preparation tank 12 respectively. Since the chemicals are highly corrosive and the dosage is relatively small, the chemical supply unit 21 can use high-performance fluoroplastic pipes with a smaller diameter; while the water supply unit 22 can use pipes with a larger diameter, without specific restrictions.

[0081] Optional, such as Figure 3 As shown, the chemical supply unit 21 includes:

[0082] The first chemical pipeline includes at least two first sub-chemical pipelines 2110, each of which is connected to a liquid tank 11 for supplying different chemicals to the liquid tank 11; the second chemical pipeline includes at least two second sub-chemical pipelines 2120, each of which is connected to a dispensing tank 12 for supplying different chemicals to the dispensing tank 12.

[0083] Water supply unit 22 includes:

[0084] The first water supply pipe 221 is connected to the medicine tank 11 and is used to supply water to the medicine tank 11; the second water supply pipe 222 is connected to the liquid preparation tank 12 and is used to supply water to the liquid preparation tank 12.

[0085] The chemical supply unit 21 can be equipped with a first chemical pipeline for adding chemicals to the liquid tank 11 and a second chemical pipeline for adding chemicals to the preparation tank 12, so that the two tanks can be prepared synchronously when necessary, even when isolated from each other. Furthermore, depending on the chemicals being added, sub-pipelines for adding different chemicals can be provided for each chemical pipeline to prevent unnecessary reactions caused by residues of different chemicals passing through the same pipeline.

[0086] Similarly, if necessary, the two tanks can be used simultaneously for drug preparation while remaining isolated from each other. For example... Figure 3 As shown, the water supply pipes can also be set as two independent first water supply pipes 221 and second water supply pipes 222, which respectively supply hot water to the medicine tank 11 and the preparation tank 12.

[0087] Some wet processes require higher temperatures for chemical solution preparation, while lower temperatures are needed for the reaction itself. Therefore, the prepared chemical solution needs to be cooled to a specific temperature before being transferred to the chemical solution tank 11 for use in the process. Relying solely on natural cooling would take a long time. In this case, a certain proportion of cold water can be added at the end of the chemical solution preparation to lower the temperature.

[0088] Optional, such as Figure 3 As shown, the second water supply pipe 222 includes a second hot water pipe 2221 and a second cold water pipe 2222, both of which are connected to the liquid distribution tank 12.

[0089] By setting up a cold water pipeline, when the temperature required for the process reaction is lower than the temperature required for preparing the drug solution, a drug solution of suitable temperature can be quickly prepared and transported to the drug solution tank 11 for use in the process.

[0090] Similarly, a first hot water pipe 2211 and a first cold water pipe 2212 can also be provided for the first water supply pipe 221.

[0091] It should be noted that the hot water flowing in the first hot water pipe 2211 and the second hot water pipe 2221, and the cold water flowing in the first cold water pipe 2212 and the second cold water pipe 2222, can be classified based on relative temperature. For example, the water temperature in the first hot water pipe 2211 and the second hot water pipe 2221 is significantly higher than the temperature of the medicinal solution and the water temperature in the first cold water pipe 2212 and the second cold water pipe 2222. Alternatively, the classification can be based on absolute temperature. For example, the water temperature in the first hot water pipe 2211 and the second hot water pipe 2221 is maintained at 75℃-95℃, while the water temperature in the first cold water pipe 2212 and the second cold water pipe 2222 is maintained at 20℃-25℃, etc.

[0092] In order to better control and protect the process of preparing the medicine solution in the preparation tank 12, multiple indicators and parameters of the preparation tank 12 can be monitored in real time, so that the control unit can take corresponding control measures based on the monitoring results.

[0093] Optionally, the liquid preparation tank 12 is equipped with at least one of a magnetostrictive level gauge, a temperature sensor, and a leakage detection device.

[0094] The magnetostrictive level gauge is communicatively connected to the control unit and is used to monitor the liquid level in the mixing tank 12. The magnetostrictive level gauge can accurately obtain the liquid level information of the mixing tank 12. By obtaining this liquid level information, the control unit can precisely control the ingredient supply component 20 to prepare the medicine solution. For example, during the medicine preparation process, after adding hot water and chemicals, the control unit can control the water supply pipe to add the remaining hot water based on the current liquid level information.

[0095] The temperature sensor is connected to the control unit and is used to detect the temperature of the liquid in the mixing tank 12. The temperature sensor can trigger an alarm in case of overheating, allowing for timely safety measures. Furthermore, during drug preparation, the control unit can control the heating device 17 or the ingredient supply component 20 based on the temperature information obtained from the temperature sensor. For example, it can turn on the heating device 17 to heat the drug solution in the mixing tank 12, or control the ingredient supply component 20 to add an appropriate proportion of cold water to lower the drug solution temperature, thereby meeting the temperature requirements during drug preparation.

[0096] The leakage detection device is communicatively connected to the control unit and is used to detect leaks in the liquid preparation tank 12. Specifically, the leakage detection device includes:

[0097] The tray is used to hold the liquid dispensing tank 12; and the liquid level sensor is set in the tray. The liquid level sensor is connected to the control unit and is used to detect the liquid level in the tray, thereby detecting leakage in the liquid dispensing tank 12.

[0098] The tray's dimensions should ensure that it at least covers the projection of the dispensing tank 12 onto the horizontal plane, so that the tray can catch the leaked liquid in the event of a leak in the dispensing tank 12; there are no specific limitations on the tray's depth. The liquid level sensor in the leak detection device can be a capacitive liquid level sensor, a fiber optic liquid level sensor, etc., and is not specifically limited here. In other embodiments, the sensor can also be other types of sensors capable of detecting the presence of liquid in the tray.

[0099] The leakage detection device determines whether there is a leak in the liquid preparation tank 12 by detecting whether there is liquid in the tray containing the liquid preparation tank 12, so that safety measures can be taken in time to avoid greater damage if a leak occurs.

[0100] Optionally, the drug reaction assembly includes at least two drug tanks 11 and at least two dispensing tanks 12, and each dispensing tank 12 can be connected to one or more drug tanks 11.

[0101] The wet processing apparatus 100 may include more than one chemical solution tank 11, which may independently carry out the same wet process reaction or different wet process reactions. In this case, a corresponding dispensing tank 12 may be set for each chemical solution tank 11, or the same dispensing tank 12 may be set for several chemical solution tanks 11 carrying out the same wet process reaction. When one dispensing tank 12 corresponds to several chemical solution tanks 11, the capacity of the dispensing tank 12 may be set to be greater than the sum of the capacities of the several chemical solution tanks 11, so as to prepare a sufficient amount of chemical solution for the several chemical solution tanks 11 carrying out the same wet process reaction at one time.

[0102] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit it. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this utility model.

Claims

1. A wet bench, characterized by, The wet processing machine includes: Drug reaction assembly, the drug reaction assembly comprising: A chemical solution tank is used as a reaction vessel in wet processes. A solution preparation tank, which can be connected to the drug solution tank, is used to prepare the drug solution for the wet process; A valve unit is provided to control the connection between the dispensing tank and the medicine tank, so that when the medicine tank needs the medicine, the medicine in the dispensing tank can be delivered to the medicine tank. A dispensing supply assembly, connected to the drug solution tank and the dispensing tank, for supplying drug solution ingredients to the drug solution tank and the dispensing tank respectively; and The control unit is communicatively connected to the liquid tank, the valve unit, and the ingredient supply assembly, and is used to control the operating status of the wet processing machine.

2. The wet processing machine according to claim 1, characterized in that, The height of the solution preparation tank is higher than the height of the medicine solution tank.

3. The wet processing machine according to claim 1, characterized in that, The drug reaction assembly also includes a drive pump, which is located in the valve unit and is used to drive the drug solution from the dispensing tank to the drug tank. The drive pump is communicatively connected to the control unit.

4. The wet processing machine according to any one of claims 1-3, characterized in that, The drug reaction assembly also includes a circulation device. The circulation device includes: A circulation pipeline, the two ends of which are respectively connected to different positions within the liquid preparation tank; A circulation pump, disposed in the circulation pipeline, is used to drive the liquid to flow along the circulation pipeline to accelerate the movement of the liquid in the liquid distribution tank, wherein the circulation pump is communicatively connected to the control unit.

5. The wet processing machine according to claim 4, characterized in that, The drug reaction assembly also includes a heating device, which is disposed in the circulation pipeline and is used to directly heat the liquid flowing through the circulation pipeline. The heating device is communicatively connected to the control unit.

6. The wet processing machine according to any one of claims 1-3, characterized in that, The ingredient supply component includes: A chemical supply unit, connected to the drug solution tank and the dispensing tank, is used to supply chemicals to the drug solution tank and the dispensing tank respectively; A water supply unit is connected to the medicine tank and the solution preparation tank, and is used to supply water to the medicine tank and the solution preparation tank respectively.

7. The wet processing machine according to claim 6, characterized in that, The chemical supply unit includes: A first chemical pipeline, comprising at least two first sub-chemical pipelines, each of which is connected to the liquid tank and is used to supply different chemicals to the liquid tank; The second chemical pipeline includes at least two second sub-chemical pipelines, each of which is connected to the mixing tank for supplying different chemicals to the mixing tank. The water supply unit includes: A first water supply pipe is connected to the medicine tank and is used to supply water to the medicine tank; The second water supply pipe is connected to the liquid mixing tank and is used to supply water to the liquid mixing tank.

8. The wet processing machine according to claim 7, characterized in that, The second water supply pipeline includes a second hot water pipeline and a second cold water pipeline, both of which are connected to the liquid distribution tank.

9. The wet processing machine according to any one of claims 1-3, characterized in that, The liquid preparation tank is equipped with at least one of a magnetostrictive level gauge, a temperature sensor, and a leakage detection device. The magnetostrictive level gauge is communicatively connected to the control unit and is used to monitor the liquid level in the liquid dispensing tank. The temperature sensor is communicatively connected to the control unit and is used to detect the temperature of the liquid in the liquid mixing tank; The leakage detection device is communicatively connected to the control unit and is used to detect leaks in the liquid preparation tank. The leakage detection device includes: A tray for holding the dispensing tank; A liquid level sensor is installed in the tray and is communicatively connected to the control unit. The liquid level sensor is used to detect the liquid level in the tray, thereby detecting leakage in the liquid dispensing tank.

10. The wet processing machine according to any one of claims 1 to 3, characterized in that, The drug reaction assembly includes at least two drug tanks and at least two dispensing tanks, and each dispensing tank can be connected to one or more drug tanks.

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