Carrier and cleaning station
Patent Information
- Application Number
- CN202522283118.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-10-28
- Publication Date
- 2026-09-01
- Estimated Expiration
- 2035-10-28
AI Technical Summary
[0005]鉴于以上所述现有技术的缺点，本申请的目的在于提供一种载具及清洗机台，用于解决现有技术中容易在基板背面产生水渍残留，进而导致基板背面产生污染的问题
[0029]本申请的载具及清洗机台，包括：载板和承载区；其中，承载区位于载板上，用于承载被载件，承载区包括于载板的厚度方向上贯穿载板的镂空区域以及位于镂空区域边缘的助排结构；镂空区域的形状与被载件的形状相同，镂空区域的尺寸小于被载件的尺寸，以使被载件的边缘与载板接触，被载件悬于镂空区域上；助排结构与被载件接触，助排结构用于排水。由于被载件悬于镂空区域上方，从而减小了被载件与载板的接触面积，以便更好地清洗被载件，以及减小被载件表面的水渍残留的面积，此外，载板中与被载件的边缘接触的区域设置有助排结构，可以增强被载件与载板的接触面的排水效果，改善了被载件与载板的接触面的水渍残留，避免对被载件造成污染。
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Figure CN224710072U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the semiconductor field, and in particular to a carrier and cleaning machine. Background Technology
[0002] In recent years, products with ultra-large package size have been increasingly occupying the market. As the product size is getting larger and the number of panels is also gradually increasing, the cleaning process of the products is becoming more and more complicated.
[0003] Existing carriers often leave water stains on the back of the substrate during the product cleaning process, leading to contamination of the substrate back side. Therefore, there is an urgent need for a carrier that can improve the problem of water stains and contamination on the back of the substrate.
[0004] It should be noted that the above introduction to the technical background is only for the purpose of providing a clear and complete explanation of the technical solutions of this application and facilitating understanding by those skilled in the art. It should not be assumed that these technical solutions are known to those skilled in the art simply because they have been described in the background section of this application. Utility Model Content
[0005] In view of the shortcomings of the prior art described above, the purpose of this application is to provide a carrier and a cleaning machine to solve the problem that water stains are easily generated on the back of the substrate in the prior art, which leads to contamination on the back of the substrate.
[0006] Firstly, to achieve the above-mentioned and other related objectives, this application provides a carrier, comprising:
[0007] Carrier plate;
[0008] The bearing area, located on the carrier plate, is used to support the loaded component. The bearing area includes a hollow area that penetrates the carrier plate in the thickness direction and an auxiliary arrangement structure located at the edge of the hollow area.
[0009] The hollowed-out area has the same shape as the supported component, and the size of the hollowed-out area is smaller than the size of the supported component, so that the edge of the supported component contacts the carrier plate, and the supported component is suspended on the hollowed-out area; the drainage aid structure contacts the supported component, and the drainage aid structure is used for drainage.
[0010] In one embodiment, the drainage aid structure includes:
[0011] Multiple grooves and multiple protrusions are located at the edge of the hollow area, and the grooves and protrusions are arranged alternately along the side length direction of the hollow area;
[0012] The groove is a shape that is recessed from the hollow area toward the carrier plate, based on the side length of the hollow area, and the protrusion is a shape that protrudes from the carrier plate toward the hollow area, based on the side length of the hollow area.
[0013] In one embodiment, the groove includes an arcuate groove, and the protrusion includes an arcuate protrusion, the arcuate groove and the arcuate protrusion causing the edge of the hollowed-out area to be wavy.
[0014] In one embodiment, the drainage aid structure includes:
[0015] Multiple through holes are located in the area of the carrier plate that contacts the workpiece. The through holes penetrate the carrier plate and are adjacent to each other.
[0016] In one embodiment, the drainage aid structure includes:
[0017] The first through-hole array includes a plurality of through holes, wherein the plurality of through holes in the first through-hole array are arranged at intervals along the side length extension direction of the hollowed-out region;
[0018] The second through-hole array is located on the side of the first through-hole array away from the hollow area, and includes a plurality of through holes, wherein the plurality of through holes in the second through-hole array are arranged at intervals along the side length extension direction of the hollow area;
[0019] The through holes in the first through hole array are interleaved with the through holes in the second through hole array.
[0020] In one embodiment, the vehicle further includes:
[0021] A limiting post is located on the carrier plate surrounding the hollow area, protruding from the surface of the carrier plate, and is used to limit the position of the loaded component.
[0022] In one embodiment, the hollowed-out area has a rectangular shape; the limiting post is located on the carrier plate on one side of the length of each apex corner of the hollowed-out area.
[0023] In one embodiment, the shape of the hollowed-out area includes a rectangle; the carrier further includes:
[0024] The operating area extends through the carrier plate and is located at the midpoint of each side of the hollowed-out area. Based on the side length of the hollowed-out area, the operating area is recessed from the hollowed-out area toward the carrier plate.
[0025] In one embodiment, the vehicle further includes:
[0026] Multiple groove-shaped structures are located on a carrier plate surrounding the bearing area, penetrating the carrier plate in the thickness direction.
[0027] Secondly, this application also provides a cleaning machine, including: the carrier described in any one of the embodiments of this application.
[0028] As described above, the carrier and cleaning machine of this application have the following beneficial effects:
[0029] The carrier and cleaning machine of this application include: a carrier plate and a bearing area; wherein, the bearing area is located on the carrier plate and is used to bear the workpiece, the bearing area includes a hollow area penetrating the carrier plate in the thickness direction and a drainage aid structure located at the edge of the hollow area; the shape of the hollow area is the same as the shape of the workpiece, and the size of the hollow area is smaller than the size of the workpiece, so that the edge of the workpiece contacts the carrier plate and the workpiece is suspended above the hollow area; the drainage aid structure contacts the workpiece and is used for drainage. Since the workpiece is suspended above the hollow area, the contact area between the workpiece and the carrier plate is reduced, so as to better clean the workpiece and reduce the area of water stains remaining on the surface of the workpiece. In addition, the drainage aid structure is provided in the area of the carrier plate that contacts the edge of the workpiece, which can enhance the drainage effect of the contact surface between the workpiece and the carrier plate, improve the water stain residue on the contact surface between the workpiece and the carrier plate, and avoid contamination of the workpiece. Attached Figure Description
[0030] The accompanying drawings, which form part of this specification, are used to provide a further understanding of the embodiments of this application and to illustrate the implementation of this application, together with the textual description, to explain the principles of this application. Obviously, the drawings described below are merely some embodiments of this application.
[0031] Figure 1 This is a schematic diagram of the structure of a vehicle provided in one embodiment;
[0032] Figure 2 This is a schematic diagram of the auxiliary discharge structure in a vehicle provided in one embodiment;
[0033] Figure 3a This is a schematic diagram of the structure of the vehicle provided in another embodiment;
[0034] Figure 3b This is a schematic diagram of the structure of the limiting post provided in one embodiment;
[0035] Figure 4 This is a schematic diagram of the auxiliary discharge structure in a vehicle provided in another embodiment;
[0036] Figure 5 This is a structural schematic diagram of a vehicle provided in another embodiment.
[0037] Component designation explanation
[0038] 1 Carrier board
[0039] 2. Bearing area
[0040] 21. Hollowed-out area
[0041] 23. Assisted drainage structure
[0042] 321 Protrusion
[0043] 233 Groove
[0044] 235 through hole
[0045] 25 Operating Area
[0046] 3. Loaded component
[0047] 4 limit posts
[0048] 5. Groove structure Detailed Implementation
[0049] The following specific examples illustrate the implementation of the present invention. Those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. The present invention can also be implemented or applied through other different specific embodiments, and various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of the present invention.
[0050] It should be emphasized that the term "including / comprises" as used herein refers to the presence of a feature, whole, step, or component, but does not exclude the presence or addition of one or more other features, wholes, steps, or components.
[0051] Features described and / or illustrated for one embodiment may be used in the same or similar manner in one or more other embodiments, combined with features in other embodiments, or substituted for features in other embodiments.
[0052] In the detailed description of embodiments of the present invention, for ease of explanation, the cross-sectional views illustrating the device structure may be partially enlarged and not to scale. Furthermore, the schematic diagrams are merely examples and should not limit the scope of protection of the present invention. In actual fabrication, the three-dimensional spatial dimensions of length, width, and depth should be included.
[0053] It is understood that the terms “first,” “second,” etc., used in this application may be used herein to describe various elements, but these elements are not limited by these terms. These terms are only used to distinguish one element from another.
[0054] Spatial relation terms such as “below,” “under,” “below,” “under,” “above,” “above,” etc., are used herein to describe the relationship between one element or feature shown in the figure and other elements or features. It should be understood that, in addition to the orientation shown in the figure, spatial relation terms also include different orientations of the device in use and operation. For example, if the device in the figure is flipped, the element or feature described as “below,” “under,” or “below” will be oriented “above” the other element or feature. Therefore, the exemplary terms “below” and “under” can include both above and below orientations. Furthermore, the device may also include other orientations (e.g., rotated 90 degrees or other orientations), and the spatial descriptive terms used herein will be interpreted accordingly.
[0055] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.
[0056] When used herein, the singular forms of “a,” “an,” and “the” may also include the plural forms unless the context clearly indicates otherwise. It should also be understood that terms such as “comprising / including” or “having” specify the presence of the stated features, wholes, components, parts, or combinations thereof, but do not preclude the possibility of the presence or addition of one or more other features, wholes, components, parts, or combinations thereof. Meanwhile, the term “and / or” as used in this specification includes any and all combinations of the associated listed items.
[0057] It should be noted that if an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intermediate element. If an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intermediate element present. Where applicable, the terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used in this application are for illustrative purposes only and do not represent the only possible implementation. It should be noted that the illustrations provided in this embodiment are only schematic representations of the basic concept of the invention. Therefore, the illustrations only show components relevant to the invention and are not drawn according to the actual number, shape, and size of components in implementation. In actual implementation, the type, quantity, and proportion of each component can be arbitrarily changed, and the component layout may be more complex.
[0058] Please refer to Figure 1 This application provides a carrier, including: a carrier plate 1 and a bearing area 2; wherein, the bearing area 2 is located on the carrier plate 1 and is used to bear a loaded component 3. The bearing area 2 includes a hollow area 21 penetrating the carrier plate 1 in the thickness direction and a drainage aid structure 23 located at the edge of the hollow area 21; the shape of the hollow area 21 is the same as the shape of the loaded component 3, and the size of the hollow area 21 is smaller than the size of the loaded component 3, so that the edge of the loaded component 3 contacts the carrier plate 1 and the loaded component 3 is suspended on the hollow area 21; the drainage aid structure 23 contacts the loaded component 3 and is used for drainage.
[0059] As an example, the substrate 3 may include a wafer, a chip, a substrate, etc., or a combination of a chip and a substrate. This application does not impose specific limitations on the type of substrate 3.
[0060] As an example, the number of bearer areas 2 may be multiple.
[0061] The drainage aid structure 23 is located in the area of the carrier plate 1 that contacts the edge of the loaded component 3. As an example, the drainage aid structure 23 may include a flow guiding structure, a hydrophobic layer, a suction assembly, and a purging assembly, thereby preventing water stains from remaining in the contact area between the loaded component 3 and the carrier plate 1.
[0062] The cutout area 21 is used to expose the back side of the substrate 3 for cleaning. As an example, the shape of the cutout area 21 can include a circle, rectangle, triangle, and other regular or irregular shapes. For instance, the cutout area 21 and the substrate 3 can both be rectangular, with the size of the cutout area 21 smaller than the size of the substrate 3. Since the cutout area 21 and the substrate 3 have the same shape, the shape of the cutout area 21 is equivalent to a proportionally reduced shape of the substrate 3. Therefore, the area where the substrate 3 contacts the carrier plate 1 is a rectangular ring. Similarly, the cutout area 21 and the substrate 3 can both be circular, with the area where the substrate 3 contacts the carrier plate 1 being a circular ring. This application does not impose specific limitations on the shape of the cutout area 21.
[0063] In the above embodiments, the carrier includes a carrier plate and a bearing area; wherein, the bearing area is located on the carrier plate and is used to bear the loaded component. The bearing area includes a hollow area penetrating the carrier plate in the thickness direction and a drainage aid structure located at the edge of the hollow area; the shape of the hollow area is the same as the shape of the loaded component, and the size of the hollow area is smaller than the size of the loaded component, so that the edge of the loaded component contacts the carrier plate and the loaded component is suspended above the hollow area; the drainage aid structure contacts the loaded component and is used for drainage. Since the loaded component is suspended above the hollow area, the contact area between the loaded component and the carrier plate is reduced, so as to better clean the loaded component and reduce the area of water stains remaining on the surface of the loaded component. In addition, the drainage aid structure is provided in the area of the carrier plate that contacts the edge of the loaded component, which can enhance the drainage effect of the contact surface between the loaded component and the carrier plate, improve the water stain residue on the contact surface between the loaded component and the carrier plate, and avoid contamination of the loaded component.
[0064] In some embodiments, please refer to Figure 2 The auxiliary structure includes: multiple grooves 233 and multiple protrusions 231; the multiple grooves 233 and multiple protrusions 231 are located at the edge of the hollow area 21, and the grooves 233 and protrusions 231 are arranged alternately along the side length direction of the hollow area 21; wherein, the groove 233 is a shape that is recessed from the hollow area 21 toward the carrier plate 1 based on the side length of the hollow area 21, and the protrusion 231 is a shape that protrudes from the carrier plate 1 toward the hollow area 21 based on the side length of the hollow area 21.
[0065] The groove 233 widens the area of the hollow portion 21 in the carrier plate 1, and the protrusion 231 widens the area of the non-hollow portion in the carrier plate 1. As an example, the shapes of the projections of the groove 233 and the protrusion 231 onto the front of the carrier plate 1 can include rectangles, circles, ellipses, triangles, etc. For example, when the shapes of the projections of the groove 233 and the protrusion 231 onto the front of the carrier plate 1 are rectangular, the side length of the hollow area 21 can form a wall-like shape with respect to the projection onto the front of the carrier plate 1.
[0066] As an example, the groove 233 and the protrusion 231 can be tightly connected, or there can be a certain gap between the groove 233 and the protrusion 231. This application does not impose a specific limitation on the distance between the groove 233 and the protrusion 231, and it can be set according to the actual situation.
[0067] Preferably, the groove 233 includes an arc-shaped groove, and the protrusion 231 includes an arc-shaped protrusion. The arc-shaped groove and the arc-shaped protrusion make the edge of the hollow area 21 wavy, so as to enhance the drainage capacity of the drainage aid structure.
[0068] In the above embodiments, by making the auxiliary arrangement structure include multiple grooves 233 and multiple protrusions 231, and the grooves and protrusions are alternately arranged along the side length direction of the hollow area 21, compared to Figure 3a and Figure 3b In the hollow area 21, the edge is a straight edge structure, which increases the flow of water on the contact surface between the loaded component 3 and the carrier plate 1, reduces the possibility of water stains remaining, and does not affect the stability of the loaded component 3 placed on the surface of the carrier plate 1.
[0069] In some embodiments, please refer to Figure 4 The auxiliary structure includes: multiple through holes 235 located in the area of the carrier plate 1 that is in contact with the loaded component, the through holes 235 penetrating the carrier plate 1, and the multiple through holes 235 being adjacent to each other.
[0070] The through-hole 235 is used to drain water from the contact surface between the substrate and the carrier plate. This embodiment does not impose specific restrictions on the arrangement or size of the through-holes 235; they can be set according to actual needs without affecting the strength of the carrier plate 1.
[0071] In some embodiments, please continue to refer to FIG3, the auxiliary arrangement structure includes: a first through-hole array and a second through-hole array; the first through-hole array includes a plurality of through holes 235, which are spaced apart along the side length extension direction of the hollow area 21; the second through-hole array is located on the side of the first through-hole array away from the hollow area 21, and includes a plurality of through holes 235, which are spaced apart along the side length extension direction of the hollow area 21; wherein, the through holes 235 in the first through-hole array and the through holes 235 in the second through-hole array are interleaved.
[0072] As an example, the through holes 235 in the first through hole array and the through holes 235 in the second through hole array are interspersed, that is, there is a gap between the through holes 235 in the first through hole array and a gap between the through holes in the second through hole array. The through holes 235 in the second through hole array and the gaps in the adjacent first through hole array are located on a straight line, which is perpendicular to the side length of the hollow area 21. Similarly, the gaps in the second through hole array and the through holes 235 in the adjacent first through hole array are located on a straight line, which is perpendicular to the side length of the hollow area 21.
[0073] As an example, the number of the first through-hole array and the second through-hole array may be multiple, and the first through-hole array and the second through-hole array are arranged alternately in a direction perpendicular to the side length of the hollow area 21.
[0074] In the above embodiments, the drainage structure includes: a first through-hole array and a second through-hole array; the first through-hole array includes multiple through-holes, which are spaced apart along the side length extension direction of the hollow area; the second through-hole array is located on the side of the first through-hole array away from the hollow area, and includes multiple through-holes, which are spaced apart along the side length extension direction of the hollow area; wherein the through-holes in the first through-hole array and the through-holes in the second through-hole array are interleaved, thereby minimizing the contact area between the loaded component and the carrier plate without affecting the structural strength of the carrier plate, and reducing the possibility of water stain residue.
[0075] In some embodiments, please refer to Figures 2-4 The carrier also includes a limiting post 4, which is located on the carrier plate 1 around the hollow area 21, protruding from the surface of the carrier plate 1, and is used to limit the position of the carried part 3.
[0076] Among them, the limiting post 4 is located on the surface of the carrier plate 1 that is in contact with the loaded part 3.
[0077] As an example, the shape of the hollow area 21 includes a rectangle; the limiting post 4 is located on the carrier plate 1 on one side of the length of each vertex of the hollow area 21.
[0078] As an example, the shape of the hollow area 21 may be circular; the limiting posts 4 are located on the carrier plate 1 around the hollow area 21, and the limiting posts 4 are symmetrically distributed with the center of the hollow area 21 as the center of symmetry.
[0079] In some embodiments, please refer to Figures 2-4 The shape of the hollow area 21 includes a rectangle; the carrier also includes an operation area 25 that penetrates the carrier plate 1. The operation area 1 is located in the middle of each side of the hollow area 21 and is recessed from the hollow area 21 toward the carrier plate 1 based on the side length of the hollow area 21.
[0080] The operating area 25 includes a region that does not overlap with the loaded component 3. The operating area 25 expands the area of the hollowed-out portion in the carrier plate 1, further reducing the contact area between the loaded component 3 and the carrier plate 1, thereby reducing the area of water stain residue. In addition, the operating area 25 can be used to provide operating space for the ejector pin and robotic arm to pick up the loaded component 3 after cleaning.
[0081] In some embodiments, please refer to Figure 5 The carrier also includes: multiple trough-shaped structures 5 located on the carrier plate 4 around the bearing area, penetrating the carrier plate 1 in the thickness direction of the carrier plate 1.
[0082] In the above embodiments, the trough structure 5 can further increase the drainage capacity of the carrier plate 1, while reducing the weight of the carrier plate, which facilitates subsequent processes.
[0083] This application also provides a cleaning machine, including: a carrier; wherein the carrier includes: a carrier plate and a bearing area; the bearing area is located on the carrier plate and is used to bear a loaded part, the bearing area includes a hollow area penetrating the carrier plate in the thickness direction and a drainage aid structure located at the edge of the hollow area; the shape of the hollow area is the same as the shape of the loaded part, and the size of the hollow area is smaller than the size of the loaded part, so that the edge of the loaded part contacts the carrier plate and the loaded part is suspended on the hollow area; the drainage aid structure contacts the loaded part and is used for drainage.
[0084] In some embodiments, the auxiliary structure includes: a plurality of grooves and a plurality of protrusions; the plurality of grooves and the plurality of protrusions are located at the edge of the hollow area, and the grooves and protrusions are arranged alternately along the side length direction of the hollow area; wherein, the groove is a shape that is recessed from the hollow area toward the carrier plate based on the side length of the hollow area, and the protrusion is a shape that protrudes from the carrier plate toward the hollow area based on the side length of the hollow area.
[0085] In some embodiments, the groove includes an arcuate groove, and the protrusion includes an arcuate protrusion, the arcuate groove and the arcuate protrusion making the edge of the hollow area wavy.
[0086] In some embodiments, the auxiliary structure includes: a plurality of through holes located in the region of the carrier plate that contacts the loaded component, the through holes penetrating the carrier plate, and the plurality of through holes being adjacent to each other.
[0087] In some embodiments, the auxiliary arrangement structure includes: a first through-hole array and a second through-hole array; the first through-hole array includes a plurality of through holes, which are spaced apart along the side length extension direction of the hollowed-out area; the second through-hole array is located on the side of the first through-hole array away from the hollowed-out area, and includes a plurality of through holes, which are spaced apart along the side length extension direction of the hollowed-out area; wherein the through holes in the first through-hole array and the through holes in the second through-hole array are interleaved.
[0088] In some embodiments, the carrier further includes: a limiting post located on a carrier plate surrounding the cutout area, protruding from the surface of the carrier plate, for defining the position of the carried item.
[0089] In some embodiments, the shape of the cutout area includes a rectangle; the limiting post is located on the carrier plate on one side of the length of each vertex of the cutout area.
[0090] In some embodiments, the shape of the cutout area includes a rectangle; the carrier further includes an operation area that penetrates the carrier plate, the operation area being located at the midpoint of each side of the cutout area, and recessed from the cutout area toward the carrier plate based on the side length of the cutout area.
[0091] In some embodiments, the carrier further includes a plurality of trough-shaped structures located on a carrier plate surrounding the bearing area and penetrating the carrier plate in the thickness direction of the carrier plate.
[0092] In summary, the carrier and cleaning machine of this application include: a carrier plate and a bearing area; wherein, the bearing area is located on the carrier plate and is used to bear the loaded part, the bearing area includes a hollow area penetrating the carrier plate in the thickness direction and a drainage aid structure located at the edge of the hollow area; the shape of the hollow area is the same as the shape of the loaded part, and the size of the hollow area is smaller than the size of the loaded part, so that the edge of the loaded part contacts the carrier plate and the loaded part is suspended above the hollow area; the drainage aid structure contacts the loaded part and is used for drainage. Since the loaded part is suspended above the hollow area, the contact area between the loaded part and the carrier plate is reduced, so as to better clean the loaded part and reduce the area of water stains remaining on the surface of the loaded part. In addition, the drainage aid structure is provided in the area of the carrier plate that contacts the edge of the loaded part, which can enhance the drainage effect of the contact surface between the loaded part and the carrier plate, improve the water stain residue on the contact surface between the loaded part and the carrier plate, and avoid contamination of the loaded part.
[0093] The above embodiments are merely illustrative of the principles and effects of the present invention and are not intended to limit the invention. Any person skilled in the art can modify or alter the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by those skilled in the art without departing from the spirit and technical concept disclosed in the present invention should still be covered by the claims of the present invention.
Claims
1. A vehicle, characterized in that, The vehicle includes: Carrier plate; The bearing area, located on the carrier plate, is used to support the loaded component. The bearing area includes a hollow area that penetrates the carrier plate in the thickness direction and an auxiliary arrangement structure located at the edge of the hollow area. The hollowed-out area has the same shape as the supported component, and the size of the hollowed-out area is smaller than the size of the supported component, so that the edge of the supported component contacts the carrier plate, and the supported component is suspended on the hollowed-out area; the drainage aid structure contacts the supported component, and the drainage aid structure is used for drainage.
2. The vehicle according to claim 1, characterized in that, The discharge-aiding structure includes: Multiple grooves and multiple protrusions are located at the edge of the hollow area, and the grooves and protrusions are arranged alternately along the side length direction of the hollow area; The groove is a shape that is recessed from the hollow area toward the carrier plate, based on the side length of the hollow area, and the protrusion is a shape that protrudes from the carrier plate toward the hollow area, based on the side length of the hollow area.
3. The vehicle according to claim 2, characterized in that, The groove includes an arc-shaped groove, and the protrusion includes an arc-shaped protrusion. The arc-shaped groove and the arc-shaped protrusion make the edge of the hollow area wavy.
4. The vehicle according to claim 1, characterized in that, The discharge-aiding structure includes: Multiple through holes are located in the area of the carrier plate that contacts the workpiece. The through holes penetrate the carrier plate and are adjacent to each other.
5. The vehicle according to claim 4, characterized in that, The discharge-aiding structure includes: The first through-hole array includes a plurality of through holes, wherein the plurality of through holes in the first through-hole array are arranged at intervals along the side length extension direction of the hollowed-out region; The second through-hole array is located on the side of the first through-hole array away from the hollow area, and includes a plurality of through holes, wherein the plurality of through holes in the second through-hole array are arranged at intervals along the side length extension direction of the hollow area; The through holes in the first through hole array are interleaved with the through holes in the second through hole array.
6. The vehicle according to claim 1, characterized in that, The vehicle also includes: A limiting post is located on the carrier plate surrounding the hollow area, protruding from the surface of the carrier plate, and is used to limit the position of the loaded component.
7. The vehicle according to claim 6, characterized in that, The hollowed-out area has a rectangular shape; the limiting post is located on the carrier plate on one side of the length of each apex corner of the hollowed-out area.
8. The vehicle according to claim 1, characterized in that, The hollowed-out area has a rectangular shape; the carrier also includes: The operating area extends through the carrier plate and is located at the midpoint of each side of the hollowed-out area. Based on the side length of the hollowed-out area, the operating area is recessed from the hollowed-out area toward the carrier plate.
9. The vehicle according to claim 1, characterized in that, The vehicle also includes: Multiple groove-shaped structures are located on a carrier plate surrounding the bearing area, penetrating the carrier plate in the thickness direction.
10. A cleaning machine, characterized in that, include: The vehicle according to any one of claims 1-9.