A clamp for holding a crystal boat

Abstract

This utility model discloses a clamp for holding a crystal boat, relating to the field of semiconductor equipment technology. The clamp includes: a first clamping member, a second clamping member, a locking assembly, and a reset assembly; the first clamping member includes: a first gripping portion, a through-slot portion, and a first clamping portion connected in sequence; the second clamping member includes: a second gripping portion and a second clamping portion connected in sequence; the second clamping portion passes through the through-slot portion to form a clamping space between the second clamping portion and the first clamping portion, the clamping space being used to clamp the crystal boat; the locking assembly includes: a locking shaft; the locking shaft passes through the first sidewall of the through-slot portion, the second gripping portion, and the second sidewall of the through-slot portion in sequence, fixing the first clamping member and the second clamping member, and the second clamping member is rotatable around the locking shaft; a reset assembly is provided between the first gripping portion and the second gripping portion. Compared with traditional crystal boat clamps, this design is simple in structure, low in manufacturing cost, and easy to operate.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment technology, and in particular to a clamp for holding a crystal boat. Background Technology

[0002] The crystal boat in the high-temperature region of the conductor carries many wafers. The slightest carelessness can cause damage to the crystal boat and wafers, resulting in losses. The crystal boat in the high-temperature region cannot be picked up and put down directly by hand, otherwise it will cause contamination of the wafers and the crystal boat. In addition, the traditional crystal boat holder has a relatively complex structure, high manufacturing cost, and is not easy for operators to operate. Utility Model Content

[0003] In view of this, the present invention provides a clamp for holding a crystal boat, which is simple in structure, low in manufacturing cost, and easy to operate compared with traditional crystal boat clamps.

[0004] To achieve the above objectives, this utility model provides the following technical solution:

[0005] A clamp for holding a crystal boat, the clamp comprising: a first clamping member, a second clamping member, a locking assembly, and a reset assembly;

[0006] The first clamping member includes: a first gripping portion, a through groove portion, and a first clamping portion connected in sequence; the second clamping member includes: a second gripping portion and a second clamping portion connected in sequence.

[0007] The second clamping part passes through the through groove to form a clamping space between the second clamping part and the first clamping part, the clamping space being used to clamp the crystal boat;

[0008] The locking assembly includes: a locking shaft; the locking shaft passes sequentially through the first sidewall of the through groove, the second gripping part and the second sidewall of the through groove, fixing the first clamping member and the second clamping member, and the second clamping member can rotate around the locking shaft;

[0009] The reset component is provided between the first gripping part and the second gripping part, and the reset component provides a reset force so that the first gripping part and the second gripping part move in opposite directions.

[0010] In some embodiments, the first clamping part is a first arc-shaped structure, the second clamping part is a second arc-shaped structure, and the clamping space is formed between the concave surface of the first clamping part and the concave surface of the second clamping part.

[0011] In some embodiments, the perimeter of the first clamping portion is smaller than the perimeter of the second clamping portion, and the radius of curvature of the first clamping portion is smaller than the radius of curvature of the second clamping portion.

[0012] In some embodiments, the concave surface of the first clamping part is provided with a first anti-slip texture, and the concave surface of the second clamping part is provided with a second anti-slip texture.

[0013] In some embodiments, the convex surface of the first clamping portion is provided with a first positioning platform, and the top surface of the first positioning platform is used to abut against the surface of the second gripping portion away from the first gripping portion.

[0014] In some embodiments, a second positioning platform is provided on the surface of the second gripping portion away from the first gripping portion, and the top surface of the second positioning platform abuts against the top surface of the first positioning platform.

[0015] In some embodiments, the reset assembly includes a reset spring disposed between the first grip portion and the second grip portion to provide the reset force.

[0016] In some embodiments, the reset assembly further includes: a first spring retainer and a second spring retainer;

[0017] The first spring fixing platform is disposed on the first gripping part, the second spring fixing platform is disposed on the second gripping part, the first end of the reset spring is sleeved and fixed on the outer peripheral surface of the first spring fixing platform, and the second end of the reset spring is sleeved and fixed on the outer peripheral surface of the second spring fixing platform.

[0018] In some embodiments, the through groove includes: a through hole groove and an inclined groove connected in sequence;

[0019] The second clamping part passes through the through hole groove so that the second clamping part and the first clamping part form a clamping space; the portion of the second gripping part near the second clamping part is constructed as a first inclined surface, the first inclined surface is adapted to the second inclined surface of the inclined groove, and the first inclined surface is inclined downward near the second gripping part, and the second inclined surface is inclined downward near the first clamping part.

[0020] In some embodiments, the first and second sidewalls of the through groove are provided with through holes along their thickness direction, one of the through holes is fitted with a nut, and the second gripping part 21 is provided with a transverse through hole; the locking shaft passes through the other through hole, the transverse through hole and the nut in sequence and is threadedly connected; wherein the diameter of the transverse through hole is larger than the diameter of the locking shaft.

[0021] As can be seen from the above technical solution, the clamp for holding a crystal boat provided by this utility model has a simple structure, low manufacturing cost, is easy to operate, and also has a reset function. Attached Figure Description

[0022] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0023] Figure 1 A first-view structural schematic diagram of the clamp provided in an embodiment of the present utility model;

[0024] Figure 2 for Figure 1 A magnified view of the structure at point A in the middle;

[0025] Figure 3 A second-view structural schematic diagram of the clamping device provided in an embodiment of this utility model;

[0026] Figure 4 for Figure 2 A magnified view of the structure at point B in the middle section;

[0027] Figure 5 This is a schematic diagram of the structure of the first clamping component of the clamp;

[0028] Figure 6 This is a schematic diagram of the structure of the second clamping component of the clamp;

[0029] Figure 7 This is a schematic diagram of the return spring of the clamp;

[0030] Figure 8 This is a schematic diagram of the locking shaft of the clamp;

[0031] Figure 9 This is a schematic diagram of the nut of the clamp.

[0032] The meanings of the various reference numerals in the figure are as follows:

[0033] 10 is the first clamping member, 11 is the first gripping part, 12 is the through groove part, 121 is the through hole groove, 122 is the inclined groove, 13 is the first clamping part, and 131 is the first positioning stage;

[0034] 20 is the second clamping member, 21 is the second gripping part, 211 is the second positioning stage, and 22 is the second clamping part;

[0035] 30 is the locking assembly, 31 is the locking shaft, and 32 is the nut;

[0036] 40 is the reset assembly, 41 is the reset spring, 42 is the first spring fixing platform, and 43 is the second spring fixing platform. Detailed Implementation

[0037] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0038] The clamping device for holding a crystal boat provided in this embodiment of the utility model, such as Figure 1 As shown, the clamp may include: a first clamping member 10, a second clamping member 20, a locking assembly 30, and a reset assembly 40.

[0039] like Figure 5 As shown, the first clamping member 10 may include a first gripping part 11, a through groove part 12 and a first clamping part 13 connected in sequence; the second clamping member 20 may include a second gripping part 21 and a second clamping part 22 connected in sequence.

[0040] like Figure 2 As shown, the second clamping part 22 passes through the through groove part 12 so that a clamping space is formed between the second clamping part 22 and the first clamping part 13, and the clamping space is used to clamp the crystal boat.

[0041] like Figure 4 and Figure 5 As shown, the locking assembly 30 may include: a locking shaft 31; the locking shaft 31 passes sequentially through the first side wall of the through groove 12, the second gripping part 21 and the second side wall of the through groove 12, to fix the first clamping member 10 and the second clamping member 20, and the second clamping member 20 can rotate around the locking shaft 31; preferably, the locking shaft 31 may be a screw.

[0042] like Figure 1 and Figure 3 As shown, a reset component 40 is provided between the first gripping part 11 and the second gripping part 21. The reset component 40 provides a reset force so that the first gripping part 11 and the second gripping part 21 move in opposite directions.

[0043] In the above technical solution, after the second clamping part 22 passes through the through groove 12 of the first clamping member 10, the reset component 40 is placed between the first gripping part 11 and the second gripping part 21. Then, the locking shaft 31 passes through the first side wall of the through groove 12 in sequence. The second gripping part 21 and the second side wall of the through groove 12 fix the first clamping member 10 and the second clamping member 20, so that the clamping device becomes an integral structure.

[0044] During use, when clamping the crystal boat is required, the operator holds the first gripping part 11 and the second gripping part 21 with one hand, applying opposing forces to the first gripping part 11 and the second gripping part 21 respectively. This causes the first clamping part 13 and the second clamping part 22 to move closer together, continuously reducing the clamping space to clamp the crystal boat. The clamping device holding the crystal boat is then placed in a designated area for operation. Next, the operator releases the force applied to the first gripping part 11 and the second gripping part 21. Under the action of the reset component 40, the first gripping part 11 and the second gripping part 21 move in opposite directions, causing the first clamping part 13 and the second clamping part 22 to move in opposite directions, restoring the clamping device to a state where no force was applied. Therefore, this clamping device for holding crystal boats has a simple structure, low manufacturing cost, and is easy to operate.

[0045] In order to better hold the crystal boat, such as Figure 3 As shown, the first clamping part 13 has a first arc-shaped structure, and the second clamping part 22 has a second arc-shaped structure. A clamping space is formed between the concave surface of the first clamping part 13 and the concave surface of the second clamping part 22. Compared with planar contact, the clamping space formed by the concave surface can form multi-point contact or surface contact with the crystal boat, which greatly improves the friction and constraint, and prevents the crystal boat from sliding, shifting or falling off during the clamping process.

[0046] In order to be able to hold crystal boats of different shapes, such as Figure 3 As shown, the perimeter of the first clamping part 13 is smaller than the perimeter of the second clamping part 22, and the radius of curvature of the first clamping part 13 is smaller than the radius of curvature of the second clamping part 22.

[0047] To achieve better clamping results during the process of holding the crystal boat, such as Figure 5 and Figure 6 As shown, the concave surface of the first clamping portion 13 is provided with a first anti-slip texture, and the concave surface of the second clamping portion 22 is provided with a second anti-slip texture. The anti-slip texture can be raised particles to enhance friction and improve clamping stability. Furthermore, the second anti-slip texture is positioned close to the end of the second clamping portion 22.

[0048] To prevent the reset force provided by the reset assembly 40 from causing the first gripping part 11 and the second gripping part 21 to move too far apart, a first positioning platform 131 is provided on the convex surface of the first clamping part 13. The top surface of the first positioning platform 131 is used to abut against the surface of the second gripping part 21 away from the first gripping part 11. During use, when the operator releases the force applied to the first gripping part 11 and the second gripping part 21, under the action of the reset assembly 40, the first gripping part 11 and the second gripping part 21 move away from each other. When the first gripping part 11 and the second gripping part 21 move away from each other to a certain distance, the top surface of the first positioning platform 131 abuts against the surface of the second gripping part 21 to prevent over-reset.

[0049] To further avoid an excessively long distance between the first gripping part 11 and the second gripping part 21 moving in opposite directions, such as... Figure 4 As shown, a second positioning platform 211 is provided on the surface of the second gripping part 21 away from the first gripping part 11, and the top surface of the second positioning platform 211 abuts against the top surface of the first positioning platform 131. In use, under the action of the reset assembly 40, the first positioning platform 131 and the second positioning platform 211 abut against each other.

[0050] In order to store and release elastic potential energy, such as Figure 7 As shown, the reset assembly 40 may include a reset spring 41; the reset spring 41 is disposed between the first gripping part 11 and the second gripping part 21 to provide a reset force. In use, when the operator applies force to the first gripping part 11 and the second gripping part 21, the reset spring 41 stores elastic potential energy. When the operator releases the force, the reset spring 41 releases the elastic potential energy, allowing the clamp to return to the open state (i.e., the first clamping part 13 and the second clamping part 22 are relatively open) under the action of the elastic potential energy.

[0051] Based on the above technical solution, further improvements can be made, such as... Figure 5 and Figure 6 As shown, the reset assembly 40 also includes: a first spring fixing stage 42 and a second spring fixing stage 43.

[0052] A first spring fixing platform 42 is disposed on the first gripping part 11, and a second spring fixing platform 43 is disposed on the second gripping part 21. The first end of the return spring 41 is sleeved and fixed to the outer circumferential surface of the first spring fixing platform 42, and the second end of the return spring 41 is sleeved and fixed to the outer circumferential surface of the second spring fixing platform 43. The fixing platforms provide orientation and constraint to the deformation of the return spring 41, ensuring return accuracy. It should be noted that, to ensure the durability of this clamp, it is made of stainless steel.

[0053] To further compress the clamping space and ensure that the clamping device can hold smaller crystal boats, such as... Figure 5 As shown, the through groove 12 may include a through hole groove 121 and an inclined groove 122 connected in sequence.

[0054] The second clamping part 22 passes through the through-hole groove 121, so that the second clamping part 22 and the first clamping part 13 form a clamping space; the portion of the second gripping part 21 near the second clamping part 22 is constructed as a first inclined surface, which is adapted to the second inclined surface of the inclined groove 122, and the first inclined surface slopes downward near the second gripping part 21, while the second inclined surface slopes downward near the first clamping part 13. In this technical solution, due to the setting of the first and second inclined surfaces, the clamping space is further compressed during the clamping process.

[0055] like Figure 5 and Figure 6 As shown, the first and second sidewalls of the through-slot 12 are both provided with through holes along their thickness direction, one of which is fitted with a nut 32, and the second gripping part 21 is provided with a transverse through hole; as Figure 8 and Figure 9 As shown, the locking shaft 31 passes through another through hole, a transverse through hole and a nut 32 in sequence and is threadedly connected; wherein, the diameter of the transverse through hole is larger than the diameter of the locking shaft 31, so that the second clamping part 22 can rotate around the locking shaft 31; wherein, the threaded connection allows the first clamping member 10 and the second clamping member 20 to be detachably installed, facilitating the replacement or maintenance of the various parts of the clamp.

[0056] The various embodiments in this specification are described in a progressive manner, with each embodiment focusing on the differences from other embodiments. The same or similar parts between the various embodiments can be referred to each other.

[0057] The above description of the disclosed embodiments enables those skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A clamp for holding a crystal boat, characterized in that, The clamp includes: a first clamping member (10), a second clamping member (20), a locking assembly (30), and a reset assembly (40); The first clamping member (10) includes a first gripping part (11), a through groove part (12) and a first clamping part (13) connected in sequence; the second clamping member (20) includes a second gripping part (21) and a second clamping part (22) connected in sequence. The second clamping part (22) passes through the through slot (12) to form a clamping space between the second clamping part (22) and the first clamping part (13), the clamping space being used to clamp the crystal boat; The locking assembly (30) includes a locking shaft (31); the locking shaft (31) passes sequentially through the first side wall of the through slot (12), the second gripping part (21) and the second side wall of the through slot (12) to fix the first clamping member (10) and the second clamping member (20), and the second clamping member (20) is rotatable around the locking shaft (31); The reset component (40) is provided between the first grip (11) and the second grip (21), and the reset component (40) provides a reset force so that the first grip (11) and the second grip (21) move in opposite directions.

2. The clamp according to claim 1, characterized in that, The first clamping part (13) is a first arc-shaped structure, and the second clamping part (22) is a second arc-shaped structure. The clamping space is formed between the concave surface of the first clamping part (13) and the concave surface of the second clamping part (22).

3. The clamp according to claim 2, characterized in that, The perimeter of the first clamping part (13) is smaller than the perimeter of the second clamping part (22), and the radius of curvature of the first clamping part (13) is smaller than the radius of curvature of the second clamping part (22).

4. The clamp according to claim 3, characterized in that, The concave surface of the first clamping part (13) is provided with a first anti-slip texture, and the concave surface of the second clamping part (22) is provided with a second anti-slip texture.

5. The clamp according to any one of claims 1-4, characterized in that, The first clamping part (13) has a first positioning platform (131) on its convex surface. The top surface of the first positioning platform (131) is used to abut against the surface of the second gripping part (21) away from the first gripping part (11).

6. The clamp according to claim 5, characterized in that, The second grip (21) has a second positioning platform (211) on its surface away from the first grip (11), and the top surface of the second positioning platform (211) abuts against the top surface of the first positioning platform (131).

7. The clamp according to any one of claims 1-4, characterized in that, The reset assembly (40) includes a reset spring (41); the reset spring (41) is disposed between the first grip (11) and the second grip (21) to provide the reset force.

8. The clamp according to claim 7, characterized in that, The reset assembly (40) further includes: a first spring fixing stage (42) and a second spring fixing stage (43); The first spring fixing platform (42) is disposed on the first gripping part (11), the second spring fixing platform (43) is disposed on the second gripping part (21), the first end of the reset spring (41) is sleeved and fixed on the outer peripheral surface of the first spring fixing platform (42), and the second end of the reset spring (41) is sleeved and fixed on the outer peripheral surface of the second spring fixing platform (43).

9. The clamp according to any one of claims 1-4, characterized in that, The through groove (12) includes: a through hole groove (121) and an inclined groove (122) connected in sequence. The second clamping part (22) passes through the through hole groove (121) so that the second clamping part (22) and the first clamping part (13) form a clamping space; the part of the second gripping part (21) near the second clamping part (22) is constructed as a first inclined surface, the first inclined surface is adapted to the second inclined surface of the inclined groove (122), and the first inclined surface is inclined downward near the second gripping part (21), and the second inclined surface is inclined downward near the first clamping part (13).

10. The clamp according to any one of claims 1-4, characterized in that, The first and second sidewalls of the through groove (12) are provided with through holes along their thickness direction. A nut (32) is fitted inside one of the through holes. The second gripping part (21) is provided with a transverse through hole. The locking shaft (31) passes through the other through hole, the transverse through hole and the nut (32) in sequence and is threadedly connected. The diameter of the transverse through hole is larger than the diameter of the locking shaft (31).

Images