A low-contact square substrate self-positioning finger

Abstract

This invention belongs to the technical field of substrate handling devices, specifically a low-contact self-positioning finger for square substrates, comprising a finger body and finger clamping blocks. Each finger clamping block has a mounting base and a receiving notch. The receiving notch of each finger clamping block has a receiving notch that mates with a corresponding angle of the square substrate. An inner guide surface is formed on the top surface of the receiving notch of each finger clamping block located on the outer side of the receiving notch. This invention enables automatic correction and positioning of the substrate during handling, achieving high positioning accuracy. Furthermore, each finger clamping block forms low contact with the square substrate, avoiding contamination of the substrate's effective process surface. During handling, no external force acts on the surface of the square substrate, preventing deformation or stress concentration, thus better ensuring the quality of subsequent processes. The overall structure of this invention is relatively simple, reliable in use, and easy to maintain.

Description

Technical Field

[0001] This utility model belongs to the technical field of substrate handling devices, specifically a low-contact type square substrate self-positioning finger. Background Technology

[0002] In the semiconductor industry, square substrates are of significant value in specific applications, particularly in non-traditional integrated circuit fields and emerging technologies, such as mask fabrication and wafer-level packaging. During handling, minimizing surface contamination of the square substrates and controlling their deformation and offset are key technical requirements for handling mechanisms.

[0003] Currently, the industry typically uses two methods to achieve the above requirements: suction cup adsorption and edge clamping. When using suction cup adsorption to handle square substrates, the suction cup adheres to the surface of the substrate, causing surface contamination, making it unsuitable for processes requiring high surface cleanliness. Furthermore, if the square substrate shifts slightly at the wafer pick-up station, suction cup adsorption cannot automatically correct this, requiring an additional centering station and lengthening the process flow. On the other hand, when using edge clamping to handle square substrates, the clamping force needs precise control; otherwise, the substrate is prone to deformation and stress concentration, negatively impacting the quality of subsequent processes. Utility Model Content

[0004] To address the aforementioned problems, the purpose of this invention is to provide a low-contact square substrate self-positioning finger.

[0005] The objective of this utility model is achieved through the following technical solution: A low-contact square substrate self-positioning finger includes a finger body and a finger clamping block; The finger body has a device connection end and a substrate receiving end; The finger clamp is provided with four, and the four finger clamps are respectively disposed on the receiving end of the substrate and correspond to the four corners of the corresponding square substrate. Each finger clamp has a mounting base and a receiving notch. Each finger clamp is fixed to the finger body through the mounting base of the finger clamp. Each finger clamp has a receiving notch that matches a corresponding corner of the square substrate. Each of the finger clips has an inner guide surface formed on the top surface of the receiving notch located outside the receiving notch of the finger clip; After a corresponding corner of a square substrate enters the matching receiving notch, the receiving notch of each finger clamp block forms a point contact with the bottom surface of a corresponding corner of the square substrate.

[0006] The device connection end of the finger body is located at one end of the length direction of the finger body, and the substrate receiving end of the finger body is located at the other end of the length direction of the finger body.

[0007] The base plate receiving end of the finger body is arc-shaped, and an opening is formed at the end of the base plate receiving end of the finger body that is away from the device connection end of the finger body.

[0008] The mounting base of each finger clip is fixed to the finger body by screws.

[0009] The inner guide surface of each of the finger grippers is a concave conical surface.

[0010] The inner guide surface of each finger clamp is gradually inclined downward from the mounting base portion close to the finger clamp to the mounting base portion away from the finger clamp.

[0011] Each of the finger clamping blocks is surrounded by a vertical curved surface group and a receiving bottom surface; Each of the vertical curved surface groups includes a vertical inner arc surface and two vertical outer arc surfaces. The vertical inner arc surface of each vertical curved surface group is used to ensure space for accommodating a corresponding corner of a square substrate. One of the vertical outer arc surfaces of each vertical curved surface group is connected to one edge of the vertical inner arc surface of the vertical curved surface group. The other vertical outer arc surface of each vertical curved surface group is connected to the other edge of the vertical inner arc surface of the vertical curved surface group. The two vertical outer arc surfaces of each vertical curved surface group are used to limit the adjacent side surface at the corresponding corner of a square substrate when the square substrate is offset. Each of the receiving bottom surfaces has a conical support surface protruding from its center, and the conical support surface of each finger gripper is directly used to form a point contact with the bottom surface at the corresponding corner of a square substrate.

[0012] When the square substrate is offset, one of the vertical outer arc surfaces of each of the vertical curved surface groups forms a line contact with the adjacent side surface at the corresponding corner of one of the square substrates with a contact height of less than or equal to 1 mm.

[0013] The outer contour of the conical support surface of each finger clamp is larger at the end near the middle of the vertical inner arc surface of the finger clamp than at the end away from the middle of the vertical inner arc surface of the finger clamp. Furthermore, the height of the highest point of the conical support surface of each finger clamp near the middle of the vertical inner arc surface gradually slopes downwards towards the highest point of the conical support surface away from the middle of the vertical inner arc surface of the finger clamp.

[0014] The finger clamps are all made of dust-free non-metallic materials.

[0015] The advantages and positive effects of this utility model are as follows: 1. This utility model can achieve automatic correction and positioning of the substrate during the handling of square substrates with high positioning accuracy. Furthermore, each finger gripper forms low contact with the square substrate, which can avoid contamination of the effective process surface of the substrate.

[0016] 2. During the handling process, the square substrate surface is not subjected to external force, and there will be no deformation or stress concentration, which can better ensure the quality of subsequent processes.

[0017] 3. The overall structure of this utility model is simpler than that of existing suction cup adsorption and edge clamping methods, making it more reliable and easier to maintain. Attached Figure Description

[0018] Figure 1 This is a three-dimensional structural diagram of the present invention; Figure 2 This is a top view of the structure of this utility model; Figure 3 for Figure 2 Enlarged view of point A; Figure 4 This is a schematic diagram of the structure of the finger clamping block of this utility model; Figure 5 This is a reference diagram showing the working state of this utility model.

[0019] In the diagram: 1 represents the finger body, 101 represents the device connection end, and 102 represents the substrate receiving end; 2 is a finger clamping block, 201 is a mounting base, 202 is a receiving notch, 203 is a receiving notch, 2031 is a vertical inner arc surface, 2032 is a vertical outer arc surface, 2033 is a conical support surface, and 204 is an inner guide surface. 3 represents a screw; 4 is a square substrate. Detailed Implementation

[0020] The following is in conjunction with the appendix Figures 1-5 The present invention will be described in further detail.

[0021] A low-contact square substrate self-positioning finger, such as Figures 1-5 As shown, this embodiment includes a finger body 1 and a finger clamping block 2.

[0022] The finger body 1 has a device connection end 101 and a substrate receiving end 102. The device connection end 101 of the finger body 1 is used to connect to an external driving device or a robotic arm, etc. In this embodiment, the device connection end 101 of the finger body 1 is located at one end along the length direction of the finger body 1, and the substrate receiving end 102 of the finger body 1 is located at the other end along the length direction of the finger body 1. The substrate receiving end 102 of the finger body 1 is arc-shaped, and an opening is formed at the end of the substrate receiving end 102 of the finger body 1 away from the device connection end 101, so as to save space and facilitate use with other devices.

[0023] Four finger clamps 2 are provided, each disposed on the substrate receiving end 102 and corresponding to one of the four corners of the corresponding square substrate 4. Each finger clamp 2 has a mounting base portion 201 and a receiving notch portion 202. Each finger clamp 2 is fixed to the finger body 1 through the mounting base portion 201, and each finger clamp 2 has a receiving notch 203 that matches a corresponding corner of the square substrate 4. In this embodiment, the mounting base portion 201 of each finger clamp 2 is fixed to the finger body 1 by screws 3, making assembly and disassembly easy.

[0024] Each finger clamp 2 has an inner guide surface 204 formed on the top surface of the receiving notch 203 outside the receiving notch 203 of the finger clamp 2. After a corresponding corner of the square substrate 4 enters the mating receiving notch 203, the receiving notch 203 of each finger clamp 2 forms point contact with the bottom surface of the corresponding corner of the square substrate 4. Each finger clamp 2 forms low contact with the square substrate 4, and the contact area does not contaminate the effective process surface of the substrate. In this embodiment, the finger clamps 2 are all made of commonly used dust-free non-metallic materials, such as polyethylene, polypropylene, and polytetrafluoroethylene, with smooth surfaces, not prone to static electricity, and effectively preventing dust adhesion.

[0025] Specifically, such as Figure 4 and Figure 5 As shown, in this embodiment, the inner guide surface 204 of each finger clamp 2 is a concave conical surface. The inner guide surface 204 of each finger clamp 2 gradually slopes downward from the mounting base portion 201 near the finger clamp 2 to the mounting base portion 201 away from the finger clamp 2, which can stably guide the corner of the square substrate 4 falling on the inner guide surface 204 to slide down into the receiving notch 203. The specific dimensions of the inner guide surface 204 can be reasonably set according to the dimensions of the square substrate 4.

[0026] Specifically, such as Figure 4 and Figure 5As shown, the receiving notch 203 of each finger clamp 2 is surrounded by a vertical curved surface group and a receiving bottom surface.

[0027] Each vertical curved surface group includes one vertical inner arc surface 2031 and two vertical outer arc surfaces 2032. The vertical inner arc surface 2031 of each vertical curved surface group is used to ensure space for accommodating a corresponding corner of a square substrate 4. One of the vertical outer arc surfaces 2032 of each vertical curved surface group is connected to one edge of the vertical inner arc surface 2031 of the vertical curved surface group, and the other vertical outer arc surface 2032 of each vertical curved surface group is connected to the other edge of the vertical inner arc surface 2031 of the vertical curved surface group. The two vertical outer arc surfaces 2032 of each vertical curved surface group are used to limit the adjacent side surface at a corresponding corner of a square substrate 4 when the square substrate is offset; when the square substrate 4 is accurately aligned and does not offset, it does not contact the vertical outer arc surfaces 2032. In this embodiment, when the square substrate 4 shifts, one of the vertical outer arc surfaces 2032 of each vertical curved surface group forms a line contact with the adjacent side surface at a corresponding corner of the square substrate 4 with a contact height of less than 1 mm, in order to minimize the contact with the square substrate 4. The specific dimensions of the vertical inner arc surface 2031 and the two vertical outer arc surfaces 2032 can be reasonably set according to the dimensions of the square substrate 4. In this embodiment, the movement of the square substrate 4 in the XY direction is limited by the setting of the two vertical outer arc surfaces 2032. Specifically, in this embodiment, the movement of the square substrate 4 in the XY direction is limited to ≤0.1 mm.

[0028] Each receiving base surface has a conical support surface 2033 protruding from its center. The conical support surface 2033 of each finger clamp 2 is directly used to form point contact with the bottom surface at a corresponding corner of the square substrate 4. The outer contour size of the end of the conical support surface 2033 of each finger clamp 2 near the center of the vertical inner arc surface 2031 of the finger clamp 2 is larger than the outer contour size of the end of the conical support surface 2033 away from the center of the vertical inner arc surface 2031 of the finger clamp 2. Furthermore, the height position of the highest point of the conical support surface 2033 near the center of the vertical inner arc surface 2031 of the finger clamp 2 gradually slopes downward from the highest point of the end of the conical support surface 2033 away from the center of the vertical inner arc surface 2031 of the finger clamp 2. The specific dimensions of the conical support surface 2033 can be reasonably set according to the dimensions of the square substrate 4.

[0029] Working principle: The low-contact square substrate self-positioning finger's pick-up operation state proposed in this utility model is as follows: Figure 5 As shown, when picking up the square substrate 4 on the substrate support platform, the fingers are inserted from below the platform and then lifted by an external drive device or robotic arm. The rounded bottom edges of the four corners of the square substrate 4 eventually rest on the conical support surfaces 2033 inside the receiving notches 203 of the four finger grippers 2, with point contact. The two vertical outer arc surfaces 2032 effectively limit the movement of the square substrate 4 in the XY directions. If the square substrate 4 moves or deviates on the substrate support platform, the inner guide surface 204 on the upper side of the finger grippers 2 can effectively guide the four corners of the square substrate 4 into the receiving notches 203 during the lifting process, thereby automatically correcting the positioning.

Claims

1. A low-contact square substrate self-positioning finger, characterized in that: Includes the finger body (1) and the finger clamping block (2); The finger body (1) has a device connection end (101) and a substrate receiving end (102). The finger clamp (2) is provided in four parts. The four finger clamps (2) are respectively disposed on the substrate receiving end (102) and correspond to the four corners of the corresponding square substrate. Each finger clamp (2) has a mounting base (201) and a receiving notch (202). Each finger clamp (2) is fixed to the finger body (1) through the mounting base (201) of the finger clamp (2). The receiving notch (202) of each finger clamp (2) has a receiving notch (203) that matches a corresponding corner of a square substrate. An inner guide surface (204) is formed on the top surface of the receiving notch (202) of each finger clip (2) located outside the receiving notch (203) of the finger clip (2). After a corresponding corner of a square substrate enters the matching receiving notch (203), the receiving notch (203) of each of the finger clips (2) forms a point contact with the bottom surface of a corresponding corner of a square substrate.

2. The low-contact square substrate self-positioning finger according to claim 1, characterized in that: The device connection end (101) of the finger body (1) is located at one end of the length direction of the finger body (1), and the substrate receiving end (102) of the finger body (1) is located at the other end of the length direction of the finger body (1).

3. The low-contact square substrate self-positioning finger according to claim 1, characterized in that: The substrate receiving end (102) of the finger body (1) is arc-shaped, and an opening is formed at one end of the substrate receiving end (102) of the finger body (1) away from the device connection end (101) of the finger body (1).

4. The low-contact square substrate self-positioning finger according to claim 1, characterized in that: The mounting base (201) of each of the finger clips (2) is fixed to the finger body (1) by screws (3).

5. The low-contact square substrate self-positioning finger according to claim 1, characterized in that: The inner guide surface (204) of each of the finger clamps (2) is a concave conical surface.

6. The low-contact square substrate self-positioning finger according to claim 5, characterized in that: The inner guide surface (204) of each finger clamp (2) is gradually inclined downward from the mounting seat (201) near the finger clamp (2) to the mounting seat (201) away from the finger clamp (2).

7. A low-contact square substrate self-positioning finger according to claim 1, characterized in that: Each of the finger clamps (2) has a receiving notch (203) surrounded by a vertical curved surface group and a receiving bottom surface; Each of the vertical curved surface groups includes a vertical inner arc surface (2031) and two vertical outer arc surfaces (2032). The vertical inner arc surface (2031) of each vertical curved surface group is used to ensure space for accommodating a corresponding corner of a square substrate. One of the vertical outer arc surfaces (2032) of each vertical curved surface group is connected to one edge of the vertical inner arc surface (2031) of the vertical curved surface group. The other vertical outer arc surface (2032) of each vertical curved surface group is connected to the other edge of the vertical inner arc surface (2031) of the vertical curved surface group. The two vertical outer arc surfaces (2032) of each vertical curved surface group are used to limit the adjacent side surface at a corresponding corner of a square substrate when the square substrate is offset. Each of the receiving bottom surfaces has a conical support surface (2033) protruding from the center, and the conical support surface (2033) of each finger clamp (2) is directly used to form a point contact with the bottom surface at the corresponding corner of one of the square base plates.

8. A low-contact square substrate self-positioning finger according to claim 7, characterized in that: When the square substrate is offset, one of the vertical outer arc surfaces (2032) of each of the vertical curved surface groups forms a line contact with the adjacent side surface at the corresponding corner of one of the square substrates with a contact height of less than or equal to 1 mm.

9. A low-contact square substrate self-positioning finger according to claim 7, characterized in that: The outer contour of the conical support surface (2033) of each finger clamp (2) near the middle of the vertical inner arc surface (2031) of the finger clamp (2) is larger than the outer contour of the conical support surface (2033) away from the middle of the vertical inner arc surface (2031) of the finger clamp (2). The height position of the highest point of the conical support surface (2033) of each finger clamp (2) near the middle of the vertical inner arc surface (2031) of the finger clamp (2) gradually slopes downward from the highest point of the conical support surface (2033) away from the middle of the vertical inner arc surface (2031) of the finger clamp (2).

10. A low-contact square substrate self-positioning finger according to claim 1, characterized in that: The finger clamps (2) are all made of dust-free non-metallic materials.

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